Class / Patent application number | Description | Number of patent applications / Date published |
392408000 | With filter or diffuser for radiant energy | 10 |
20080219650 | HEATING DEVICE OF THE LIGHT IRRADIATION TYPE - A heating device of the light irradiation type having an article to be heated, a guard ring located on the periphery of that article, multiple lamps located above the article to be heated and the guard ring, and a reflecting mirror located above the lamps, in which a light diffusion part is located in the upper region corresponding to the article to be heated so that the diffused light projects onto the entire surface of the article to be heated. The light diffusion part can be formed, for example, on a reflecting mirror, an optically transparent window part located between the article to be heated and the lamps or a light diffusion area formed on the light-emitting bulbs of the lamps. The size of the region occupied by the light diffusion part is such that diffused light is not projected to the guard ring. | 09-11-2008 |
20100074604 | Apparatus and Method for Improved Control of Heating and Cooling of Substrates - Methods and apparatus for processing substrates and controlling the heating and cooling of substrates are described. A radiation source providing radiation in a first range of wavelengths heats the substrate within a predetermined temperature range, the substrate being absorptive of radiation in a second range of wavelengths within the first range of wavelengths and within the predetermined temperature rang. A filter prevents at least a portion of radiation within the second wavelength range from reaching the substrate. | 03-25-2010 |
20110249960 | Heat Source Door For A Thermal Diffusion Chamber - A frame supporting a containment chamber, the containment chamber is preferably configured to enclose and confine a process chamber. A heat source module is disposed between the containment chamber and the process chamber, while a collar communicates with the process chamber and is secured to the process chamber. Preferably, a heat source door is in fluidic communication with the process chamber, and includes at least a top hat section secured to a main body portion, an over center latch secured to the top hat section and interacting with the collar, the over center latch mitigates an inadvertent opening of the process chamber, and a lamp feed-through is preferably secured to the main body portion and supports a heat source device. | 10-13-2011 |
20110262116 | INFRARED FILTER OF A LIGHT SOURCE FOR HEATING AN OBJECT - Infrared filler of a light source for healing an object The invention relates to an optical interface for transmitting at least some infrared rays emitted from at least one light source so as to heat an object above a threshold temperature, wherein the object stops to transmit and absorbs from an infrared wavelength threshold, the optical interface comprising: a substrate; an interference filter on the substrate having an infrared spectral transmission T exhibiting: a first portion in the near infrared with high T, a second portion in the far infrared with low T, and an intermediary portion between first and second portions, comprising a spectral transition between high T and low T, having T=50% at a wavelength λ | 10-27-2011 |
20120128335 | THERMAL PROCESSOR EMPLOYING RADIANT HEATER - A thermal processor including a rotatable hollow drum including a drum core having an interior surface and an exterior surface, and a radiant heater positioned within an interior of the drum and configured to provide radiant energy to heat the drum, wherein at least one radiant energy absorption characteristic of the interior of the drum varies across its longitudinal width W | 05-24-2012 |
20140270731 | THERMAL MANAGEMENT APPARATUS FOR SOLID STATE LIGHT SOURCE ARRAYS - Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a process chamber comprising a chamber body, a solid state light source array, having a plurality of solid state light sources disposed on a first substrate, to provide pulsed or continuous energy to the process chamber, and a cooling mechanism including a band pass filter to reduce an amount of reflected light from heating the solid state source array. | 09-18-2014 |
20140341551 | DIFFUSER FOR LAMP HEATING ASSEMBLY - Embodiments of the present disclosure generally relate to optically transparent windows and processing chambers including the same. The optically transparent window includes light-diffusing structures formed thereon. The light diffusing structures may include a scalloped or dimpled surface having protruding or indented features, or a frosted surface. The light-diffusing structures facilitate more uniform heating of substrates by reducing thermal hot spots caused by uneven irradiation by lamps. | 11-20-2014 |
20160007411 | TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER HEATING, SUBSTRATE TEMPERATURE CONTROL SYSTEMS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND PROCESSING METHODS - Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects. | 01-07-2016 |
20160007412 | APPARATUS, SYSTEMS, AND METHODS FOR TEMPERATURE CONTROL OF SUBSTRATES USING EMBEDDED FIBER OPTICS AND EPOXY OPTICAL DIFFUSERS - Substrate temperature control apparatus and electronic device manufacturing systems provide pixelated light-based heating to a substrate in a process chamber. A substrate holder in the process chamber may include a baseplate. The baseplate has a top surface that may have a plurality of cavities and a plurality of grooves connected to the cavities. Optical fibers may be received in the grooves such that each cavity has a respective optical fiber terminating therein to transfer light thereto. Some or all of the cavities may have an epoxy optical diffuser disposed therein to diffuse light provided by the optical fiber. A ceramic plate upon which a substrate may be placed may be bonded to the baseplate. A thermal spreader plate may optionally be provided between the baseplate and the ceramic plate. Methods of controlling temperature across a substrate holder in an electronic device manufacturing system are also provided, as are other aspects. | 01-07-2016 |
20160157300 | INFRARED HEATER AND INFRARED PROCESSING DEVICE | 06-02-2016 |