Class / Patent application number | Description | Number of patent applications / Date published |
372059000 | Gas maintenance (e.g., purification, replenishment, etc.) | 11 |
20080205472 | Laser gas injection system - A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the model and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern. The method and apparatus may comprise performing gas management for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas comprising: utilizing periodic and frequent partial gas refills comprising an inject comprising a mixture of halogen gas and bulk gas in generally the same ration as the premix ratio provided to the laser in a full gas refill, and in an amount less than two percent of the total gas pressure prior to the injection. | 08-28-2008 |
20110274133 | SYSTEMS AND METHODS FOR IMPROVED RING LASER GYROSCOPE DEVICES THROUGH MIX RATIO OPTIMIZATION - Systems and methods for improved ring laser gyroscope devices through mix ratio optimization are provided. In one embodiment, a ring laser gyroscope device comprises: a laser block assembly having a cavity therein that defines a ring shaped laser beam path around the laser block assembly, the cavity containing a fill gas mixture comprising Helium and Neon, wherein the laser block assembly is characterized as having a Neon depletion life limiter; and a readout assembly optically coupled to the laser block assembly. The readout assembly outputs a laser intensity monitor (LIM) voltage that represents optical energy within the cavity. The fill gas mixture has a Helium to Neon ratio richer in Neon than a ratio that would produce a peak LIM voltage from the readout assembly. | 11-10-2011 |
20120087388 | Catalyst Module for High Repetition Rate CO2 Lasers - An array of discrete catalyst elements is contained in a heated module external to the main laser vessel with an auxiliary gas flow loop connecting them so as to provide independent control of catalyst temperature and gas flow rate to achieve high CO+1/2O | 04-12-2012 |
20120275481 | System and Method for Controlling Gas Concentration in a Two-Chamber Gas Discharge Laser System - Methods and systems for controlling the gas concentrations in the chambers of a two chamber gas discharge laser such as an excimer laser are disclosed. A first set of inject opportunities is selected for the laser chamber of the master oscillator, and a second set of inject opportunities is selected for the laser chamber of the power amplifier. At each selected inject opportunity for the master oscillator, its laser chamber receives an inject containing a fixed amount of a non-halogen containing gas, and a calculated amount of a halogen containing gas. At the selected inject opportunities for the power amplifier, its laser chamber receives a fixed amount of the halogen containing gas, and may also receive a fixed amount of the non-halogen containing gas. | 11-01-2012 |
20130034118 | GAS PURIFIER FOR AN EXCIMER LASER - An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration. | 02-07-2013 |
20130083818 | System and Method for High Accuracy Gas Inject in a Two Chamber Gas Discharge Laser System - Systems and methods for automatically performing a high accuracy gas inject in a laser chamber of a two chamber gas discharge laser such as an excimer laser are disclosed. A mathematical model relates the amount of halogen gas in the laser chamber after an inject to the amount of halogen gas present prior to the inject, the amount of halogen gas injected, and the consumption rate of halogen gas in the chamber. A fixed amount of halogen gas is added to the chamber in an initial number of injects to allow transients to settle out, after which the amount of halogen gas to be injected is that calculated to result in a desired amount of halogen gas after the inject according to the model. Measurements are taken after injects to update the actual amount of halogen gas present and the consumption rate of the halogen gas. | 04-04-2013 |
20130089118 | ECHELLE DIFFRACTION GRATING AND ITS MANUFACTURING METHOD, EXCIMER LASER AND ITS MANUFACTURING METHOD - A manufacturing method for an excimer laser that includes a reflective Echelle diffraction grating includes obtaining information of a wavelength of a light source, a blazed order, a repetitive pitch of the grating, a material of the grating, and a predefined orientation ratio B/A that is a ratio between that a diffraction efficiency A of the blazed order and a diffraction efficiency Bb of an order lower by one order than the blazed order, and determining an initial value of a blaze angle based upon these pieces of information. | 04-11-2013 |
20140064316 | SYSTEMS AND METHODS FOR LASING FROM A MOLECULAR GAS - Systems and methods for lasing molecular gases, and systems and methods of detecting molecular species are provided. The systems and methods can include the use of an excitation laser tuned to a wavelength associated with oxygen or nitrogen. The lasing can occur in both the forward and reverse directions relative to the excitation laser beam. Reverse lasing can provide a laser beam that propagates back toward the excitation laser source, and can provide a method for remote sampling of molecular species contained in the air. For example, systems and methods of detecting a molecular species of interest can be achieved by using the properties of the backward or forward propagating air laser to indicate a change in a pulse from the source of laser pulses caused by a modulation laser tuned to interact with the molecular species of interest. | 03-06-2014 |
20150055672 | DISCHARGE-PUMPED GAS LASER DEVICE - A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber. | 02-26-2015 |
20150063397 | Gas Laser Resonator - The present invention aims to prevent, in a gas laser resonator, the deterioration in quality of discharge by reduction of the change of the pressure in a discharge chamber and the inflow of impurity gases, such as air, into the discharge chamber. | 03-05-2015 |
20160013606 | GAS LASER OSCILLATOR CAPABLE OF CONTROLLING GAS PRESSURE AND GAS CONSUMPTION AMOUNT | 01-14-2016 |