Class / Patent application number | Description | Number of patent applications / Date published |
359845000 | Fluid cooled mirror | 8 |
20090128935 | Mirror device accommodated by liquid-cooled package - The present invention discloses a mirror device that comprises 1) a mirror element for modulating incident light emitted from a light source and for controlling the reflecting direction of incident light, and 2) a coolant flow channel for containing and flowing a liquid coolant through the flow channel to carry away heat generated in the mirror device. | 05-21-2009 |
20090147386 | Temperature-regulating devices for reflective optical elements - Thermal-transfer devices (e.g., cooling devices) are disclosed for optical elements. An exemplary device includes a thermally conductive substrate having a surface. At least one mounting element extends from the surface to a reverse face of the optical element. The mounting element positions the optical element relative to the substrate with a gap between the surface and the reverse face. At least one gas-introduction port is situated relative to the gap. Also included is a gaseous thermal-conduction pathway across the gap between the optical element and the substrate. The thermal-conduction pathway includes flowing gas introduced (e.g., as a thin layer) into the gap by the gas-introduction port. | 06-11-2009 |
20100172042 | COMPENSATION FOR TRANSIENT HEATING OF LASER MIRRORS - A mirror assembly for a carbon dioxide (CO | 07-08-2010 |
20110051267 | REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM - A reflective optical element ( | 03-03-2011 |
20130063833 | SHAPE STABILIZED MIRROR MODULE AND METHOD TO STABILIZE A REFLECTIVE ELEMENT - A mirror module is provided with comprising a reflective element, a supporting base element attached to the reflective element, and a heat exchange element for transferring heat to and/or from the mirror module. The mirror module, more in particular the reflective element, is stabilized against possible deformation due to a thermal load. The stabilized mirror module comprises heat pumps, for example Peltier elements, for transferring heat between the heat exchange element on one hand and the reflective element and the base element on the other hand, more in particular for cooling the reflective element. A method is provided to stabilize a mirror module wherein a heat flow is measured to stabilise the shape of a reflective element. | 03-14-2013 |
20150092287 | CURVATURE VARIABLE MIRROR, CURVATURE VARIABLE UNIT, AND MANUFACTURING METHOD OF CURVATURE VARIABLE MIRROR - A curvature variable mirror includes a mirror base material that is configured such that the curvature is variable and that reflects laser light on the mirror reflective surface side, wherein the mirror base material is formed by using spring-material copper alloy, and the spring-material copper alloy is constituted by using any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni (nickel), Sn (tin), Si (silicone), Mg (magnesium), Zn (zinc), Mn (manganese), Pb (lead), Fe (iron), and Al (aluminum) to copper. | 04-02-2015 |
20150103426 | METHOD AND COOLING SYSTEM FOR COOLING AN OPTICAL ELEMENT FOR EUV APPLICATIONS - A method for cooling an optical element for EUV applications is disclosed. Heat is transferred from the optical element to a heat sink, and, via a first feed line, a first cooling medium is introduced into a cooling channel in the heat sink, in such a way that the first cooling medium effects laminar flow through the cooling channel and in the process absorbs heat from the heat sink. After flowing through the cooling channel, the first cooling medium is discharged into a discharge line leading away from the optical element. A second cooling medium is introduced into the discharge line via a second feed line, and the first cooling medium and the second cooling medium, downstream of the second feed line at a location that is further away from the optical element than the cooling channel, are subjected to a force field introduced into the discharge line externally. | 04-16-2015 |
20160054487 | MULTILAYER MIRROR ASSEMBLY - The present invention pertains to a process for the manufacture of a multilayer mirror assembly, to the multilayer mirror assembly thereby provided and to uses of said multilayer mirror assembly in various applications. | 02-25-2016 |