Entries |
Document | Title | Date |
20080239494 | Tunable Light Filter - A tunable light filter has a transparent plate, a first mirror surface coupled to the transparent plate, and a base spaced from the transparent plate and defining a flexible base region. The flexible base region has at least one cell and a membrane coupled over the at least one cell. The flexible base region also has a second mirror surface coupled to the membrane. The tunable light filter also has an actuator which can move the second mirror surface relative to the first mirror surface. Methods of manufacturing a tunable light filter are also discussed. | 10-02-2008 |
20090073563 | OPTICAL LATTICE MICROSCOPY - A method for creating a periodic interference pattern of coherent waves in two or three dimensions, D, includes generating at least D+2 waves, where each wave has substantially the same wavelength, λ, and travels substantially in a unique direction, k | 03-19-2009 |
20090086323 | COLOR FILTER AND IMAGE SENSOR - In one aspect of the present invention, a color filter capable of controlling wavelengths of light to be transmitted therethrough may include a pair of interferometric films which are substantially parallel to each other and which transmit the light; and a drive member which drives at least one film of the pair of the interferometric films to change a distance of a gap between the interferometric films. | 04-02-2009 |
20090303601 | MULTI-CAVITY OPTICAL FILTERS WITH INVERSE PARABOLIC GROUP DELAY RESPONSES - There is provided a multi-cavity optical filter providing a substantially parabolic group delay response with a negative second derivative over a wide bandwidth. The optical filter is made by cascading a plurality of reflective elements wherein a highly reflective element is not positioned at the end of the cascade but is rather inserted between elements of lower reflectivity. The resulting filter has a substantially parabolic group delay response with a negative second derivative when light is injected in one direction of light injection. | 12-10-2009 |
20100046076 | TUNABLE SPECTRAL FILTRATION DEVICE - A tunable spectral filtration device is disclosed that includes one or more pairs of interference filters in series, wherein each element of each pair is independently selected from one or more options, independently positioned to intersect a path of converging or diverging light, and independently tilted with respect to the light path. Each filter may be either of a bandpass type, a shortpass type, a longpass type, a notch type, or multiple combinations thereof. Each filter in the series may be independently selected and tilted to tune the net spectral output of the series. The elements in a pair of filters may be tilted in opposite directions so as to cancel angle-of incidence dependent broadening of the spectral output of the individual filters for noncollimated light, as well as cancel translational shift of the transmitted light rays. The elements in a pair of filters may be tilted through orthogonal tilt axes so as to cancel polarization dependent broadening of the spectral output of the individual filters for light whose polarization state is a superposition of nonzero parallel and perpendicular components relative to the tilt axes. | 02-25-2010 |
20100091372 | Fabry-Perot Type Tunable Filter and Fabrication Method Thereof - To provide a miniaturized Fabry-Perot type tunable filter that can be applied to e.g. a light of wide wavelength range from infrared rays to ultraviolet rays and actuated at a low voltage. | 04-15-2010 |
20100103522 | VARIABLE SPECTRAL ELEMENT - Desired spectral characteristics are obtained by bringing reflection films sufficiently close together while avoiding optical contact between the reflection films. Provided is a variable spectral element ( | 04-29-2010 |
20100134891 | OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - The disclosure concerns an optical system of a microlithographic projection exposure apparatus. To permit comparatively flexible and fast influencing of intensity distribution and/or the polarization state, an optical system includes at least one layer system that is at least one-side bounded by a lens or a mirror. The layer system is an interference layer system of several layers and has at least one liquid or gaseous layer portion with a maximum thickness of one micrometer (μm), and a manipulator for manipulation of the thickness profile of the layer portion. | 06-03-2010 |
20100195209 | Method and Apparatus for Optical Bandpass and Notch Filtering, and Varying the Filter Center Wavelength - A method and apparatus involve an optical element having a passband with a center wavelength, and filtering radiation having first and second portions that arrive along a path of travel extending to the optical element. The first portion includes radiation inside the passband, and the second portion includes radiation above and below the passband. The optical element transmits one of the first and second portions of the radiation therethrough, and reflects the other of the first and second portions of the radiation therefrom. The optical element is supported for a range of movement relative to the path of travel. As the optical element moves through the range of movement, the center wavelength changes. | 08-05-2010 |
20100208347 | MICRO MOVABLE DEVICE AND INTERFEROMETER - A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points. | 08-19-2010 |
20100208348 | TUNABLE SPECTRAL FILTRATION DEVICE - A tunable spectral filtration device comprises at least one optical filter for intersecting a first path of converging or diverging light comprising an axis at a first angle of incidence and at least one device positioned to enable a second path of the converging or diverging light to pass through the at least one optical filter at a second angle of incidence. The optical filter comprises at least one coating and is tiltable over a plurality of angles with respect to the axis. The first angle of incidence is opposite in sign to the second angle of incidence, such that the positioning of the at least one optical filter and the at least one device substantially cancels angle-of-incidence dependent spectral broadening and/or polarization dependent spectral broadening of the converging or diverging light. | 08-19-2010 |
20100246009 | Optical coating - Optical coating materials comprise a transparent matrix material having dispersed nanoparticles comprising between 1 and 20 volume percent of the optical coating material. The coating materials are used to form optical coatings on substrates, such as glass/ceramic, polymer or metal, to alter the color or other optical properties. The nanoparticles are semiconductive material or elemental metals or elemental metal alloys that exhibit surface plasmon resonance. | 09-30-2010 |
20110032619 | TUNABLE CHROMATIC DISPERSION COMPENSATION DEVICE AND METHOD - A tunable chromatic dispersion compensation device used to compensate chromatic dispersion of wavelength of at least one predetermined wavelength band of light signal is provided. The tunable chromatic dispersion compensation device comprises a chromatic dispersion compensator, and a controller. The chromatic dispersion compensator comprises at least a first chromatic dispersion compensation unit and a second chromatic dispersion compensation unit connected with the first chromatic dispersion compensation unit in series. The first chromatic dispersion compensation unit has a free spectral range, the second chromatic dispersion compensation unit has a free spectral range same as to that of the first chromatic dispersion compensation unit. Each chromatic dispersion compensation unit comprises an interference cavity. The controller comprises an inputting unit being configured for inputting a predetermined chromatic dispersion compensation information. The controller is configured for selectively adjusting refractive index of the interference cavity of a corresponding chromatic dispersion compensation unit so as to control chromatic dispersion. A tunable chromatic dispersion compensation is also provided. | 02-10-2011 |
20110058256 | Method and Apparatus for Optical Filtering with Two Passbands - An apparatus includes an optical filter having first and second passbands that are different, the optical filter including selectively operable first passband adjusting structure that varies a characteristic of the first passband without influencing the second passband. According to a different aspect, a method includes filtering radiation with an optical filter having first and second passbands that are different, and selectively varying a characteristic of the first passband without influencing the second passband. | 03-10-2011 |
20110090567 | TUNABLE MICHELSON AND MACH-ZEHNDER INTERFEROMETERS MODIFIED WITH GIRES-TOURNOIS INTERFEROMETERS - Optical filters tunable for both center wavelength and bandwidth, having applications such as in astronomy, remote sensing, laser spectroscopy, and other laser-based sensing applications, using Michelson interferometers or Mach-Zehnder interferometers modified with Gires-Tournois interferometers (“GTIs”) are disclosed. A GTI nominally has unity magnitude reflectance as a function of wavelength and has a phase response based on its resonator characteristics. Replacing the end mirrors of a Michelson interferometer or the fold mirrors of a Mach-Zehnder interferometer with GTIs results in both high visibility throughput as well as the ability to tune the phase response characteristics to change the width of the bandpass/notch filters. A range of bandpass/bandreject optical filter modes, including a Fabry-Perot (“FP”) mode, a wideband, low-ripple FP mode, a narrowband notch/bandpass mode, and a wideband notch/bandpass mode, are all tunable and wavelength addressable. | 04-21-2011 |
20110222157 | OPTICAL FILTER, OPTICAL FILTER MODULE, ANALYTICAL INSTRUMENT, AND OPTICAL APPARATUS - An optical filter includes: a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film; a first electrode provided to the first substrate in a peripheral area of the first reflecting film; a second electrode provided to the first substrate in a peripheral area of the first electrode; a third electrode provided to the second substrate and opposed to the first electrode; and a fourth electrode provided to the second substrate and opposed to the second electrode. | 09-15-2011 |
20110228396 | OPTICAL FILTER AND ANALYTICAL INSTRUMENT - An optical filter includes: a lower substrate; a lower mirror provided to the lower substrate; a lower electrode provided to the lower substrate; an upper substrate disposed so as to be opposed to the lower electrode; an upper mirror provided to the upper substrate, and opposed to the lower mirror; and an upper electrode provided to the upper substrate, and opposed to the lower electrode, wherein the upper substrate has a groove surrounding the upper mirror in a plan view, the groove includes a first side surface section, a second side surface section, a bottom surface section, a first end section located between the first side surface section and the bottom surface section, and a second end section located between the second side surface section and the bottom surface section, in a cross-sectional view, and the first end section and the second end section each have a curved surface. | 09-22-2011 |
20110228397 | LIGHT FILTER AND ANALYTICAL INSTRUMENT AND OPTICAL EQUIPMENT USING THE SAME - A light filter has a first reflecting film and a second reflecting film opposed to each other, a first electrode, a second electrode, a third electrode, a fourth electrode, and a potential difference control unit, the first electrode and the third electrode are opposed at a first distance, the second electrode and the fourth electrode are opposed at a second distance different from the first distance, the potential difference control unit brings the first electrode and the third electrode into contact by producing a potential difference between the first electrode and the third electrode and brings the second electrode and the fourth electrode into contact by producing a potential difference between the second electrode and the fourth electrode, and thereby, a gap between the first reflecting film and the second reflecting film may be controlled with high accuracy. | 09-22-2011 |
20110261460 | OPTICAL FILTER, OPTICAL FILTER MODULE, AND ANALYZER - An etalon includes a first substrate and a second substrate. The first substrate has a first protrusion that does not face the second substrate, and a first electrode pad is formed on the first protrusion, whereby connection reliability can be improved. | 10-27-2011 |
20110286100 | HIGH-PRECISION MONOLITHIC OPTICAL ASSEMBLIES AND METHODS FOR FABRICATION AND ALIGNMENT THEREOF - High-precision monolithic optical assemblies are formed using low-cost standard optical components, such as wedge plates and/or wedge second surface mirrors. By rolling and/or shifting the components relative to each other with matched optical surfaces in contact, a precise alignment solution is found for a particular optical assembly. The resulting arrangement of components can be bonded or held together so as to form a high-precision monolithic optical assembly, which can be inserted into an optical system, according to the assembly's function. The functionality of the monolithic optical assembly can be independent of the optical system in which it is used. | 11-24-2011 |
20120026588 | TUNABLE SPECTRAL FILTRATION DEVICE - A tunable spectral filtration device is disclosed that includes one or more pairs of interference filters in series, wherein each element of each pair is independently selected from one or more options, independently positioned to intersect a path of converging or diverging light, and independently tilted with respect to the light path. Each filter may be either of a bandpass type, a shortpass type, a longpass type, a notch type, or multiple combinations thereof. Each filter in the series may be independently selected and tilted to tune the net spectral output of the series. The elements in a pair of filters may be tilted in opposite directions so as to cancel angle-of incidence dependent broadening of the spectral output of the individual filters for noncollimated light, as well as cancel translational shift of the transmitted light rays. The elements in a pair of filters may be tilted through orthogonal tilt axes so as to cancel polarization dependent broadening of the spectral output of the individual filters for light whose polarization state is a superposition of nonzero parallel and perpendicular components relative to the tilt axes. | 02-02-2012 |
20120105963 | OPTICAL FILTER ARRANGEMENT AND A METHOD FOR ADJUSTMENT THEREOF - The present invention relates to an optical filter arrangement that have a cut wavelength for light passing there through. The optical filter arrangement comprises a stack of a first optical layer and a second optical layer. Further, the optical filter arrangement comprises an electro active polymer material arranged between the first and second layers such that the cut wavelength is adjusted upon application of an electrical voltage to the electro active polymer material. | 05-03-2012 |
20120105964 | LIGHT FILTER AND OPTICAL DEVICE - A light filter comprising a first substrate, a second substrate, a first optical film, a second optical film, a second bonding film, and a first bonding film, wherein the first optical film is formed to be a multilayer film in which a first optical substrate film, a first optical intermediate film, and a first optical surface film are stacked, the second optical film is formed to be a multilayer film in which a second optical substrate film, a second optical intermediate film, and a second optical surface film are stacked, a part of the first bonding film is one of the first optical substrate film and the first optical intermediate film, and a part of the second bonding film is one of the second optical substrate film and the second optical intermediate film. | 05-03-2012 |
20120120495 | OPTICAL FILTER AND METHOD FOR MANUFACTURING OPTICAL FILTER - An optical filter comprising a first substrate, a second substrate having a support portion which supports the first substrate, a first optical film provided on the first substrate, a second optical film provided on the second substrate and arranged to face the first optical film, a first protective film covering at least the first optical film, a second protective film covering at least the second optical film, a first bonding film, a portion of the first bonding film overlapping a surface of the first protective film in a plan view but does not overlapping the first optical film and a second bonding film, a portion of the second bonding film overlapping a surface of the second protective film in the plan view but does not overlapping the second optical film. | 05-17-2012 |
20120154915 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes an electrostatic actuator that includes a fixed electrode and a movable electrode. The fixed electrode includes a plurality of fixed partial electrodes, the movable electrode includes a plurality of movable partial electrodes, and each partial actuator is configured by the fixed partial electrode and the movable partial electrode that face each other. The partial actuators have an equal area, have centers of gravity thereof arranged at equal angular intervals on a virtual circle having a center point of the movable portion as its center, and are electrically connected in series between partial electrodes for voltage application. | 06-21-2012 |
20120182619 | TUNABLE FREQUENCY SELECTOR - The invention relates to laser technology and can be used for creating tunable lasers in the near IR region for swept source optical coherence tomography. | 07-19-2012 |
20120188646 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror. | 07-26-2012 |
20120200926 | OPTICAL FILTER, OPTICAL FILTER MODULE, ANALYSIS DEVICE, AND OPTICAL DEVICE - An optical filter includes a first substrate, a second substrate, a first reflective film that is disposed on the first substrate, a second reflective film that is disposed on the second substrate, first and second fixed electrodes that are disposed on the first substrate at positions located at the periphery of the first reflective film in plan view, and first and second variable electrodes that are disposed on the second substrate and face the first and second fixed electrodes. Slit portions of the second variable electrode are formed such that the first and second variable electrodes have a center symmetrical structure with the reflective film as its center. | 08-09-2012 |
20120206813 | TUNABLE SPECTRAL FILTER COMPRISING FABRY-PEROT INTERFEROMETER - Tunable spectral filter includes a Fabry-Pérot interferometer (FPI), at least three actuators, at least three respective spring elements, and at least three respective sensors. The FPI includes two optical elements each having a partially reflective surface, with an optical cavity defining an optical gap between the two surfaces. The actuators, spring elements and sensors are disposed along the periphery of the optical elements. Multi-wavelength incident light enters the first optical element toward the optical cavity. Each actuator applies a selective force to move the optical element surfaces relative to each other, as the respective spring element applies an opposing force, thereby establishing an optical gap width, while maintaining the optical element surfaces substantially in parallel. Each sensor continuously detects the optical gap width and the planar parallelism, and provides a feedback signal to the actuators to apply selective forces to adjust the optical gap width or planar parallelism, if necessary. | 08-16-2012 |
20120212822 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC DEVICE - An etalon (tunable interference filter) includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflection film disposed on the fixed substrate, a movable reflection film disposed on the movable substrate and facing the fixed reflection film via a gap, a fixed electrode disposed on the fixed substrate, and a movable electrode disposed on the movable substrate and facing the fixed electrode. A movable insulating film is stacked on a surface of the movable electrode on the side of the fixed electrode, the movable electrode has a compressive stress, and the movable insulating film has a tensile stress. | 08-23-2012 |
20120212823 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND PHOTOMETRIC ANALYZER - An etalon as a tunable interference filter includes a first substrate, a second substrate, a fixed mirror, a movable mirror, and an electrostatic actuator. The respective mirrors are formed by stacking one layer of a TiO | 08-23-2012 |
20120257280 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface. | 10-11-2012 |
20120262789 | SHAPE MEMORY POLYMER-BASED TUNABLE PHOTONIC DEVICE - A photonic device is provided having a two or three-dimensionally periodic structure of interconnected members with alterable spacing between the members. The structure is composed of a shape memory polymer configured to be thermo-mechanically tunable to display a plurality of optical properties under a series of temperature changes and stress. A method of producing a photonic device based on a shape memory polymer is provided. A mold, having a two or three-dimensionally periodic structure of interconnected components with a characteristic spacing between the components, is infiltrated with a shape memory polymer precursor to form a composite structure. The composite structure is solidified. The mold is removed from the composite structure to form a photonic device as an inverse replica of the mold. | 10-18-2012 |
20120281286 | OPTOMECHANICAL NON-RECIPROCAL DEVICE - There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force. | 11-08-2012 |
20120300303 | OPTICAL FILTER DEVICE - A tunable etalon, driver circuit, a light receiving device, an I-V convertor circuit connected to the light receiving device, an amplifier circuit having a gain switching function, an AD convertor, a microprocessor, and a voltage setting memory having a gain table as data of gain of the amplifier circuit are provided, and preliminary measurement of a light reception voltage is performed based on a current detected by the light receiving device, and the gain of the amplifier circuit is adjusted to adjust the light reception voltage obtained by the preliminary measurement to a dynamic range of the AD convertor with reference to the gain table of the gain of the amplifier circuit with respect to the light reception voltage obtained by the preliminary measurement stored in the voltage setting memory. | 11-29-2012 |
20130021669 | Spectrally Tunable Optical Filter - There is herein described an optical filter. The optical filter includes a substrate and a plurality of at least four optical thin film layers. The optical thin film layers are disposed on top of the substrate. Each of the optical thin film layers has an effective refractive index different from effective refractive indices of the immediate upper and lower optical thin film layers. At least one of the optical thin film layers is a thickness tunable nano-feature layer. The nano-feature layer contains a plurality of flexible nano-features. At least one of the optical thin film layers is a dense layer. | 01-24-2013 |
20130044377 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYZER - A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion. | 02-21-2013 |
20130077171 | TUNABLE INTERFERENCE FILTER WITH SHAPING PRISMS - A conventional interference tunable filter is combined with a pair of shaping prisms to enlarge the circular input beam in the direction orthogonal to the direction of beam propagation and to the axis of rotation of the tunable filter. The degree of expansion is tailored to minimize the walk-off losses produced by successive reflections in the cavity of the tunable filter. By appropriately sizing the enlargement, the substantially elliptical beam produced by the shaping prisms encompasses sufficient reflected beams after passing through the tunable filter to produce substantially the same filter output that in a conventional filter would require a materially larger input beam. The input beam is preferably first converted to two parallel beams of the same polarization state. Both beams are then expanded by the prisms and processed by the tunable filter. | 03-28-2013 |
20130083398 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is k | 04-04-2013 |
20130083399 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A wavelength variable interference filter includes a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflection film provided on the movable substrate and opposed to the fixed reflective film via an inter-reflective film gap, a fixed electrode provided on the fixed substrate, a movable electrode provided on the movable substrate and opposed to the fixed electrode via an inter-electrode gap, a fixed charging preventing electrode provided along the outer circumferential edge of the fixed electrode and in non-contact with the fixed electrode and grounded, and a movable charging preventing electrode provided along the outer circumferential edge of the movable electrode and in non-contact with the movable electrode and grounded. | 04-04-2013 |
20130083400 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING THE WAVELENGTH VARIABLE INTERFERENCE FILTER - A wavelength variable interference filter includes a fixed substrate including a fixed reflective film, a movable substrate including a movable reflective film, and a bonding section configured to bond the fixed substrate and the movable substrate. The movable substrate includes a movable section, a holding section, and a substrate outer circumferential section. The holding section includes a flat section having a uniform thickness dimension and a curved surface section provided on the outer circumferential side of the flat section, a thickness dimension of the curved surface section increasing toward the substrate outer circumferential section. The bonding section is provided in an outer circumferential region extending along substrate outer circumferential edges on surfaces opposed to each other of the fixed substrate and the movable substrate. The inner circumferential edge of the bonding section is provided further on the inner side than the outer circumferential edge of the curved surface section. | 04-04-2013 |
20130094087 | TUNABLE FILTER USING A WAVE PLATE - Tunable filters are provided that have transmittances that are independent of the polarization state of an incident beam. The tunable filters include an interference bandpass filter positioned to transmit an input beam of light to produce transmitted light. A wave plate is positioned to rotate the polarization of the transmitted light and a reflector is positioned to reflect the rotated light so that it propagates through the wave plate a second time and then passes through the interference filter a second time to produce second transmitted light. | 04-18-2013 |
20130208359 | OPTICAL FILTER DEVICE AND MANUFACTURING METHOD FOR THE OPTICAL FILTER DEVICE - An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided. | 08-15-2013 |
20130229713 | Force-Insensitive Fabry-Perot Etalon - A Fabry-Perot etalon is provided with first and second partially reflecting mirrors ( | 09-05-2013 |
20130271839 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate including a stationary reflecting film and a stationary electrode, and a movable substrate including a movable reflecting film and a movable electrode, the stationary electrode and the movable electrode are disposed outside an optical interference region where the stationary reflecting film and the movable reflecting film overlap each other in a filter plan view, an inner peripheral edge of the stationary electrode is located nearer to the optical interference region than an outer peripheral edge of the movable electrode, and an outer peripheral edge of the stationary electrode is located further from the optical interference region than an outer peripheral edge of the movable electrode. | 10-17-2013 |
20130279005 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate provided with a stationary reflecting film, a movable substrate provided with a movable reflecting film, a first electrostatic actuator, and a second electrostatic actuator which can be driven independently of the first electrostatic actuator, two first partial actuators constituting the first electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point, and two second partial actuators constituting the second electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point. | 10-24-2013 |
20130314794 | Tunable Filter with Levered Membrane and Longer Scan Length - A Fabry-Perot tunable filter comprises a membrane device. The membrane device includes a support structure having an optical port. Also, the membrane device has an optical membrane structure separated from the support structure over the optical port. The optical membrane structure includes a center body portion and an outer body potion. Tethers extend radially from the center body portion to the outer body portion of the optical membrane structure. The center body portion has an area that is about equal or smaller than the area of the optical port. | 11-28-2013 |
20130321921 | Linear Optical Filter System and Method - An optical system and method for illuminating an object under investigation with filtered light is disclosed. In one embodiment, the system comprises a linear filter array having a plurality of elongate variable bandpass filters. The variable bandpass filters each have a cam follower and are translatable along a longitudinal axis, whereby translation brings a selected filter in line with a beam of light. The cam follower of selected filter engages a cam adjacent to the array. This causes tilting of the filter to a desired angle thereby allowing precise selection of the bandpass frequency of the selected filter. Preferably, the filter can be tilted by an angle of up to 60°. Each elongate filter is preferably substantially rectangular and has a long dimension that is at least about twice the short dimension. | 12-05-2013 |
20140022643 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING VARIABLE WAVELENGTH INTERFERENCE FILTER - A variable wavelength interference filter includes a stationary substrate and a movable substrate opposed to each other, the stationary substrate includes a stationary reflecting film, a first drive electrode, and a first capacitance detecting electrode, and the movable substrate includes a movable reflecting film arranged to have an inter-reflecting film gap with the stationary substrate, a second drive electrode arranged to have an inter-drive electrode gap with the first drive electrode, and a second capacitance detecting electrode arranged to have an inter-capacitance detecting electrode gap with the first capacitance detecting electrode. The capacitance detecting electrodes detect the capacitance between the electrodes. The gap amount of the inter-reflecting film gap is changed by the drive electrodes. The gap amounts of the inter-reflecting film gap, the inter-drive electrode gap, and the inter-capacitance detecting electrode gap are different from each other. | 01-23-2014 |
20140078588 | OPTICAL FILTER AND OPTICAL MODULE PROVIDED WITH SAME - An optical filter includes first and second substrates, first and second mirrors and first and second electrodes. The second substrate includes first, second and third surfaces. The second surface surrounds the first surface in a plan view, and the third surface surrounds the second surface in a plan view. A second height of the second surface is lower than a first height of the first surface, and a third height of the third surface is higher than the first height of the first surface. The first, second and third surfaces face a single flat surface of the first substrate. The first mirror is disposed on the first surface. The second mirror is disposed on the first substrate and faces the first mirror. The first electrode is disposed on the first substrate. The second electrode is disposed on the second surface of the second substrate and faces the first electrode. | 03-20-2014 |
20140092478 | WAVELENGTH TUNABLE INTERFERENCE FILTER, METHOD OF MANUFACTURING WAVELENGTH TUNABLE INTERFERENCE FILTER, OPTICAL APPARATUS, AND OPTICAL COMPONENT - A wavelength tunable interference filter, an optical apparatus, and an optical component include a first substrate, which includes a first optical film and a first driving electrode, and a second substrate, which includes a support portion that supports the first substrate, a second optical film, and a second driving electrode. The second substrate includes an external connection electrode extending to an outer side of the support portion, and includes an electrode forming surface on which the external connection electrode is disposed. A plurality of protruding portions protruding from the electrode forming surface are formed so as to be arrayed in a direction crossing the extending direction of the external connection electrode. | 04-03-2014 |
20140092479 | WAVELENGTH TUNABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A wavelength tunable interference filter, an optical filter device, an optical module, and an electronic apparatus include a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate and facing the fixed reflective film with an inter-reflective film gap interposed therebetween, and an electrostatic actuator that changes the size of the inter-reflective film gap. The movable substrate is curved in a convex shape in a direction away from the fixed substrate in an initial state. The reflective film has reflectance characteristics in which the first reflectance at a predetermined first wavelength in a measurement wavelength range is lower than the second reflectance at a second wavelength longer than the first wavelength. | 04-03-2014 |
20140139924 | OPTICAL MODULE AND PRODUCTION METHOD FOR SAME - An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module. | 05-22-2014 |
20140153098 | OPTICAL FILTER AND OPTICAL MODULE HAVING OPTICAL FILTER - An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions. | 06-05-2014 |
20140177058 | OPTICAL FILTER DEVICE AND ELECTRONIC APPARATUS - An interference filter is fixed with respect to a base substrate by a fixing member which is disposed on one portion which is on the outer side of a filter region. Accordingly, since the periphery end of the interference filter, other than a portion (end portion) in which the fixing member is disposed, becomes a floated state (free end), it is possible to suppress the warping of the interference filter even when there is the difference in coefficients of thermal expansion with the base substrate. Further, spacer portions which are lower than the height of the fixing member are formed outside the filter region and on the portion separated from the fixing member. At the time of the impact, since the spacer portions come in contact with the base substrate to function as stoppers, it is possible to suppress occurrence of peeling-off or cracks on the fixing member. | 06-26-2014 |
20140198388 | FABRY-PEROT DEVICE WITH A MOVABLE MIRROR - A Fabry-Perot tunable filter (FPTF) includes a top mirror having a first surface for receiving light and a second surface opposite the first surface. A movable mirror having a front side is secured to the second surface of the top mirror and includes back side. The movable mirror includes an inner bend resistant portion, wherein the front side includes a flexible front side portion outside the inner bend resistant portion recessed relative to the inner bend resistant portion, and a front side outer bend resistant portion thicker than the flexible front side portion. The back side includes a flexible back side portion outside the inner bend resistant portion and a back side outer bend resistant portion thicker than the flexible back side portion. An actuator mechanically coupled to the back side of the movable mirror moves the inner bend resistant portion relative to the second surface of the top mirror. | 07-17-2014 |
20140211315 | OPTICAL MODULE, AND ELECTRONIC APPARATUS - An optical module includes a stationary substrate, a movable substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate and opposed to the stationary reflecting film, a first control electrode disposed outside the stationary reflecting film in a filter plan view, a second control electrode disposed outside the movable reflecting film in the filter plan view, and opposed to the first control electrode, and a tilt control section adapted to make a first control current flow through the first control electrode, and make a second control current, which has an opposite direction to the first control current in the filter plan view, flow through the second control electrode. | 07-31-2014 |
20140218802 | OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - An optical filter device has a light interference filter and a casing. The light interference filter has a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflection film provided on the fixed substrate, and a movable reflection film provided on the movable substrate. The casing has a base substrate and a lid that forms an internal space with the base substrate. The movable substrate has a holding portion provided on a surface opposite to the fixed substrate, outside a light interference region, as viewed in a plan view. The base substrate has a light transmission hole corresponding to a light transmission region. An outer peripheral edge of the light transmission hole faces the holding portion. The surface opposite to the fixed substrate of the movable substrate is joined to the base substrate. | 08-07-2014 |
20140240835 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A wavelength variable interference filter includes a first drive electrode electrically connected to a first reflective film and a second drive electrode electrically connected to a second reflective film. The thickness of the first drive electrode is greater than the thickness of the first reflective film, and the thickness of the second drive electrode is greater than the thickness of the second reflective film. The first drive electrode has a first step portion having a thickness smaller than the thickness of the first reflective film in an end portion connected to the first reflective film, and the second drive electrode has a second step portion having a thickness smaller than the thickness of the second reflective film in an end portion connected to the second reflective film. | 08-28-2014 |
20140240836 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - The thickness of a first drive electrode is greater than the sum of the thickness of a first reflective film and the thickness of a first conductive film, the first drive electrode extends from the surface of a fixed substrate to the surface of the outer edge portion of the first conductive film and is in contact with the first conductive film, the thickness of a second drive electrode is greater than the sum of the thickness of a second reflective film and the thickness of a second conductive film, and the second drive electrode extends from the surface of a movable substrate to the surface of the outer edge portion of the second conductive film and is in contact with the second conductive film. | 08-28-2014 |
20140240837 | VARIABLE-WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable-wavelength interference filter includes a pair of substrates, a pair of reflection films provided on these substrates, a first electrode, a second electrode, a first conduction electrode provided on the first substrate and provided from the first electrode up to an outer peripheral edge side of the first substrate over the first electrode, a second conduction electrode provided on the second substrate and electrically connected to the first conduction electrode. The first substrate has a first conduction electrode surface facing a contact surface where the first conduction electrode and the second conduction electrode contact each other. The second substrate has a second conduction electrode surface facing the contact surface. A minimum distance from the first conduction electrode surface to the second conduction electrode surface is different from a minimum distance from the first bonding surface to the second bonding surface. | 08-28-2014 |
20140268342 | OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - An optical filter device includes a housing including a light passage hole making light incident on the inner side, an aperture on the outer side of the housing and limiting the light made incident on the incident light passage hole, and an interference filter on the inner side of the housing and including a fixed reflection film and a movable reflection film. In a plan view of the fixed reflection film and the movable reflection film, an opening of the aperture, the light passage hole, and the fixed reflection film and the movable reflection film overlap one another. When the diameter of the fixed reflection film close to the light passage hole is Φm, the bore of the light passage hole is Φp, and the opening diameter of the aperture is Φa, Φa<Φm<Φp. | 09-18-2014 |
20140268343 | LIGHT FILTER AND ANALYTICAL INSTRUMENT AND OPTICAL EQUIPMENT USING THE SAME - A light filter has a first reflecting film and a second reflecting film opposed to each other, a first electrode, a second electrode, a third electrode, a fourth electrode, and a potential difference control unit, the first electrode and the third electrode are opposed at a first distance, the second electrode and the fourth electrode are opposed at a second distance different from the first distance, the potential difference control unit brings the first electrode and the third electrode into contact by producing a potential difference between the first electrode and the third electrode and brings the second electrode and the fourth electrode into contact by producing a potential difference between the second electrode and the fourth electrode, and thereby, a gap between the first reflecting film and the second reflecting film may be controlled with high accuracy. | 09-18-2014 |
20140285895 | OPTICAL FILTER DEVICE, OPTICAL MODULE AND ELECTRONIC APPARATUS - An optical filter device includes a wavelength variable interference filter provided with a movable substrate on which respective electrode pads are provided; a base substrate on which the wavelength variable interference filter is mounted, facing the movable substrate; and a fixing member that is disposed between the movable substrate and the base substrate and fixes the movable substrate and the base substrate. The fixing member is disposed at a position that overlaps the respective electrode pads, in a filter plan view. | 09-25-2014 |
20140293427 | OPTICAL DEVICE WITH VARIABLE WAVELENGTH INTERFERENCE FILTER - An optical device includes a telecentric optical system, a variable wavelength interference filter, and a detection section, the variable wavelength interference filter includes a first reflecting film, a second reflecting film provided to a movable section, and an electrostatic actuator adapted to displace the movable section, an effective measurement area capable of transmitting a light with a wavelength, which is within a predetermined allowable range centered on a measurement center wavelength when an amount of the displacement of the movable section takes a maximum displacement value, is set in the first reflecting film and the second reflecting film, and the telecentric optical system guides the incident light to the variable wavelength interference filter so that a principal ray of the incident light is parallel thereto and perpendicular to the first reflecting film, and at the same time, collects the incident light in the effective measurement area. | 10-02-2014 |
20150062708 | OPTICAL DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, OPTICAL HOUSING, AND METHOD OF MANUFACTURING OPTICAL HOUSING - An optical filter device includes a wavelength tunable interference filter, a lid having a second opening, a base that forms a receiving space together with the lid, a second glass member that covers the second opening and is bonded to the lid through low melting point glass, and a metal layer provided on the lid. The metal layer is provided outside a line that is separated from the outer peripheral edge of the second glass member by a predetermined distance toward a side away from the second opening and is disposed along the outer peripheral edge of the second glass member in plan view when the lid is viewed from a normal direction with respect to the opening surface of the second opening. | 03-05-2015 |
20150070767 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYZER - A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion. | 03-12-2015 |
20150085366 | OPTICAL FILTER AND OPTICAL MODULE PROVIDED WITH SAME - An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode. | 03-26-2015 |
20150092272 | INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film. | 04-02-2015 |
20150092273 | INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary reflecting film formed of a plurality of layers, an outermost layer of which is a stationary conductive layer, and a movable reflecting film, the stationary reflecting film includes a first region opposed to the movable reflecting film and a second region continuing from an outer circumferential edge of the first region to an outside of the first region, and a part of the stationary conductive layer in the second region is a terminal section to which wiring connection can be performed. | 04-02-2015 |
20150092274 | OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC DEVICE, AND MEMS DEVICE - An optical filter device includes a wavelength variable interference filter, a housing that stores the wavelength variable interference filter, and a bonding member that fixes a movable substrate to the housing. The housing includes a fixing portion that comes into contact with the bonding member, the fixing portion includes a pedestal fixing surface (first surface) facing a portion of a surface of the movable substrate, a sidewall fixing surface (second surface), continuous with a portion of a periphery of the pedestal fixing surface, which faces a lateral side of the movable substrate, and an intersection surface (third surface) continuous from a remaining portion in a periphery of the pedestal fixing surface in a direction away from the movable substrate, and the bonding member is provided between the substrate surface and the pedestal fixing surface, and between the lateral side and the sidewall fixing surface. | 04-02-2015 |
20150092275 | ACTUATOR DRIVE SYSTEM, OPTICAL MODULE, AND ELECTRONIC APPARATUS - An actuator drive system includes electrostatic actuators and a voltage controller that applies drive voltages to the electrostatic actuators, and the voltage controller includes a digital control device that splits an 8-bit drive variable corresponding to an overall displacement amount provided by the electrostatic actuators into 4-bit individual drive variables, a first DAC that produces a first drive voltage signal based on a first individual drive variable, and a second DAC that produces a second drive voltage signal based on a second individual drive variable. | 04-02-2015 |
20150124324 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND LIGHT ANALYZER - A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate. | 05-07-2015 |
20150138640 | OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - An optical filter device includes a variable wavelength interference filter having a pair of reflecting films opposed to each other, and an electrostatic actuator adapted to change a gap dimension between the pair of reflecting films, and at least one bandpass filter disposed on an optical axis of the pair of reflecting films, and the bandpass filter includes a plurality of transmission wavelength bands in which light is transmitted. | 05-21-2015 |
20150346479 | MEMS DRIVING DEVICE, ELECTRONIC APPARATUS, AND MEMS DRIVING METHOD - A spectroscopic measurement apparatus includes a fixed substrate, a movable substrate, and a wavelength variable interference filter which includes an electrostatic actuator for changing the gap dimension between the substrates, a vibration disturbance detection unit which detects vibration added to the wavelength variable interference filter, and a bias driving unit which applies a feed-forward voltage based on a detected value of the vibration disturbance detection unit to the electrostatic actuator. | 12-03-2015 |
20160003993 | OPTICAL FILTER, OPTICAL FILTER MODULE, SPECTROMETRIC MEASUREMENT APPARATUS, AND OPTICAL APPARATUS - An optical filter includes: a first variable wavelength bandpass filter that can extract light of a first wavelength band (400 to 460 nm), the first wavelength band having a first spectral band having a central wavelength equal to a first wavelength in the first wavelength band and a second spectral band having a central wavelength equal to a second wavelength in the first wavelength band; and a second variable wavelength bandpass filter that can extract light of a second wavelength band (480 to 540 nm) adjacent to the first wavelength band, the second wavelength band having a third spectral band having a central wavelength equal to a third wavelength in the second wavelength band and a fourth spectral band having a central wavelength equal to a fourth wavelength in the second wavelength band. | 01-07-2016 |
20160085065 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other. | 03-24-2016 |
20160195384 | INTERFERENCE OBJECTIVE LENS AND LIGHT INTERFERENCE MEASURING DEVICE | 07-07-2016 |