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Shape or contour of light control surface altered

Subclass of:

359 - Optical: systems and elements

359237000 - OPTICAL MODULATOR

359238000 - Light wave temporal modulation (e.g., frequency, amplitude, etc.)

359290000 - By changing physical characteristics (e.g., shape, size or contours) of an optical element

Patent class list (only not empty are listed)

Deeper subclasses:

Class / Patent application numberDescriptionNumber of patent applications / Date published
359292000 Light control surface forms image on projected light beam 38
359295000 Having multiple electrodes 23
359294000 Using photoconductive layer 1
20080239458Transmissive, Optically Addressed, Photosensitive Spatial Light Modulators and Color Display Systems Incorporating Same - An optically addressed, photoconductive spatial light modulator (SLM) operates in a transmissive mode and is capable of modulating a wide spectrum of visible light. There is no pixel structure or native pixel resolution in the SLM. The SLM has no photodiodes and does not rectify. A light projection system (10-02-2008
Entries
DocumentTitleDate
20130044362OPTICAL DEVICE - An optical device comprises a transparent substrate having: an array of micromirrors on one surface of the substrate; and a corresponding array of microimage elements, the micromirrors presenting convex surfaces to the microimage elements whereby each convex surface causes ambient light to pass through the microimage element array from a virtual focus, the arrangement of the microimage elements and micromirrors being such that they cooperate to generate a lenticular type or a moiré magnification effect.02-21-2013
20130044363Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component - A micromechanical component having a displaceable part connected to a residual substrate by at least one spring, and including first and second subunits, between which an insulating intermediate layer and at least one semiconductor boundary layer is formed; an inner region of the first subunit, which inner region is aligned with the second subunit, being patterned out of a substrate using at least one cavity etched in a first etching direction; an outer region of the first subunit of the displaceable part, which outer region faces away from the second subunit, being patterned out of the substrate using at least one hollowed-out section etched in a second etching direction; the second subunit being patterned out of a semiconductor layer deposited onto the insulating intermediate layer and/or on the at least one semiconductor boundary layer using at least one continuous separating trench. Also described is a related manufacturing method.02-21-2013
20090195858Changing an electrode function - The present invention provides a spatial light modulator constituted by a plurality of pixel elements, wherein each of the pixel elements further comprises a deflectable mirror and an electrode for controlling the deflectable mirror, and the electrode receives signals to control the deflectable mirror depending on a direction of an incident light transmitted to the spatial light modulator.08-06-2009
20090195857Apparatus for electronically controlled holograms - A complex micromirror or LCD array device that performs complex optical or electro-optical transforms is described. Both real and imaginary parts of a light beam are modulated in amplitude to give a spatially and temporally modulated beam.08-06-2009
20090195856METHODS OF REDUCING CD LOSS IN A MICROELECTROMECHANICAL DEVICE - Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.08-06-2009
20110194169INTERFEROMETRIC MODULATOR IN TRANSMISSION MODE - A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.08-11-2011
20090122387OPTICAL MICROSTRUCTURES FOR LIGHT EXTRACTION AND CONTROL - The application of optical microstructures improve the quality of light available to the viewer of an optical display system, or any display which works on the concept of moving one surface into direct contact or close proximity of a light guide to extract light through frustrated total internal reflection. Certain ones of the microstructures can act to assist in overcoming stiction between the surface and the light guide.05-14-2009
20090122386Surface plasmon polariton modulation - An apparatus includes a substrate having a metallic surface, a structure, and a dielectric object facing the metallic top surface. The structure is configured to optically produce surface plasmon polaritons that propagate on the metallic surface. The dielectric object is controllable to adjust values of the dielectric constant at an array of different positions along and near to the metallic surface.05-14-2009
20090122385Direct Retinal Display - A direct retinal display (05-14-2009
20100157410DISPLAY SUBSTRATE, METHOD OF MANUFACTURING THE SAME AND ELECTROWETTING DISPLAY PANEL HAVING THE DISPLAY SUBSTRATE - A display substrate includes a base substrate, a reflection-polarization member, a first electrode, an insulation layer and a pixel wall. The reflection-polarization member is disposed on the base substrate to reflect and polarize incident light. The first electrode is disposed in a unit pixel area of the reflection-polarization member. The insulation layer is disposed on the first electrode. The pixel wall is disposed on the insulation layer and defines the unit pixel area. Therefore, the entire area of a unit pixel may be used as a reflective area or a transmissive area, and thus an aperture ratio may be improved in a reflection mode or a transmission mode.06-24-2010
20100073757OPTICAL ARRANGEMENT AND METHOD FOR CONTROLLING AND INFLUENCING A LIGHT RAY - An optical arrangement and a related method for operating this optical arrangement are suggested, particularly in microscopes, for use as at least one of a main beam splitter and a beam combiner. One or more light beams can be coupled into the arrangement and at least one of the light beams that were coupled in can be coupled out again after having passed through the optical arrangement. In the path of the coupled in light beams at least one controllable microstructured element is provided, allowing to switch beam paths within the optical arrangement. This allows controlling or influencing the one or more light beams that are coupled out.03-25-2010
20130033739ELECTROVARIABLE NANOPLASMONICS AND SELF-ASSEMBLING SMART MIRRORS - Systems and methods provide control of nanoparticle coverage of an interface between a first medium and a second medium through variation of an electric potential across such interface; the first medium and the second medium are immiscible media, and transparent or substantially transparent to visible light. The first medium can be a first electrolytic solution and the second medium can be a second electrolytic solution; thus, the interface can become an interface of two immiscible electrolytic solutions (ITIES). The nanoparticle coverage of the interface, e.g., the ITIES, can be regulated to vary between approximately zero and a full or nearly a full monolayer. The nanoparticle coverage of the interface can dictate at least one optical property of the interface, rendering the interface transparent or substantially transparent, or a mirror, or providing Faraday rotation of the optical polarization of light incident normal to the interface and propagating through the interface.02-07-2013
20100046061Mems package having inclined surface - An image projection system comprises a micro-electromechanical system (MEMS) package wherein the MEMS package further includes: a first substrate and a second substrate joined together at a joinder surface applied with a ponder material thereon to provide an internal space to contain and package a MEMS device therein, wherein at least one of the first and second substrate is configured to have a an inclined surface near the joinder surface.02-25-2010
20080297880Display Capable Electrowetting Light Valve - The invention relates to light transmissive, transflective, or reflective flat panel display devices and, more specifically, to light emissive flat panel displays constructed from high performance electrowetting light valve (ELV) devices (12-04-2008
20120262775Micro-Mirror System And Associated Control Method - A micro-mirror system having a micro-mirror actuator, a sensor for detecting the position of the micro-mirror actuator, a light module having at least one light source and an associated control system via which a light intensity of the light source is controllable, and an evaluation and control unit which is designed to control the micro-mirror actuator as a function of an output signal of the sensor. The system provides that the evaluation and control unit includes a compensation routine in which an offset voltage of the output signal of the sensor is settable as a function of the light intensity of the light source to be expected at the point in time that the micro-mirror actuator is activated.10-18-2012
20130070328OPTICAL PROCESSING DEVICE - A method and apparatus is provided for processing an optical beam. The method includes spatially dispersing an optical beam received from an optical port into a plurality of wavelength components. The wavelength components are focused and at least one of the components is selectively directed to one of the optical ports by reflecting the focused wavelength component at least twice from a DMD before being directed to a selected one of the optical ports. A resolution of the focused wavelength component is optimized when it is reflected from the DMD a first or second time at the expense of the other time when it is reflected.03-21-2013
20090323170GROOVE ON COVER PLATE OR SUBSTRATE - An improved substrate or cover plate design with a groove for effective singulation of individual display apparatus. In one embodiment, the display apparatus comprises a prefabricated groove on an inside face of a substrate or cover plate to facilitate separation of a MEMS device from a plurality of MEMS devices formed a substrate. In some embodiments, the prefabricated grooves make breaking at pseudo scribe lines simple by thinning and weakening the substrate or cover plate at a scribe zone and act as an improved guide for breaking. Scribe cut relief preserves components, structural integrity, and produces a clean break without inducing excessive or unwanted stresses into the MEMS core and ensures no damage at the panel ledge for subsequent interconnect assembly.12-31-2009
20090303571Spatial Light Modulator with Structured Mirror Surfaces - The invention relates to methods to improve SLMs, in particular to reflecting micromechanical SLMs, for applications with simple system architecture, high precision, high power handling capability, high throughput, and/or high optical processing capability. Applications include optical data processing, image projection, lithography, image enhancement, holography, optical metrology, coherence and wavefront control, and adaptive optics. A particular aspect of the invention is the achromatization of diffractive SLMs so they can be used with multiple wavelengths sequentially, simultaneously or as a result of spectral broadening in very short pulses.12-10-2009
20130135707SYSTEMS AND METHODS FOR RELATIVE POSITIONING - Systems and methods for generating a position reference grid and relative positioning of an object are presented. Radiation is emitted towards a digital micro-mirror device including a plurality of micro-mirrors. Additionally, one or more of a plurality of micro-mirrors are modulated such that at least a portion of the radiation reflected from the plurality of micro-mirrors is projected on to a designated location in a designated pattern representative of a position reference grid. The radiation reflected from the plurality of micro-mirrors is detected. Further, the detected radiation is interpreted as location coordinates in the position reference grid. Additionally, the location coordinates are communicated to the object moving in relation to the digital micro-mirror device for positioning the object at a designated position in the position reference grid.05-30-2013
20130063804DIGITAL BINARY MEMS WAVEFRONT CONTROL - Embodiments of the invention are directed to a new type of phase screen, i.e., an opto-electronic device that can convert a distorted incoming optical wavefront into a plane wave or, conversely, transform a plane wave into a prescribed varying output wavefront. The basic concept involves novel binary all-digital MEMS interferometer configurations that can be used to create controlled and arbitrary optical wavefront using only 0,1 amplitude changes followed by differential propagation distances to convert these amplitude variations into controllable and/or continuous phase variations. Clustered pixel notions, such as Floyd-Steinberg, Stucki or other algorithms useful in digital half-tone printing, are simultaneously employed to create controllable grey-level variations as well as continuous phase variations. Desired grey-levels can be obtained wherein each pixel is formed by, e.g., a 3×3 or 5×5 cluster of mirrors. Both the filling-in of the outputs of the binary mirror (0,1) and the grey-levels are accomplished simply by spatial averaging over a short propagation distance.03-14-2013
20090251760MICRO MIRRORS HAVING IMPROVED HINGES - A micro mirror device includes a hinge supported upon a substrate. The hinge has a length and a width substantially parallel to an upper surface of the substrate, and has a thickness substantially perpendicular to the upper surface of the substrate. The thickness is larger than the width. A mirror plate is tiltable around the hinge. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position.10-08-2009
20090231674System and Method for Hinge Memory Mitigation - System and method for reducing failures due to hinge memory in a microdisplay display system. A preferred embodiment includes setting the state of each micromirror in a digital micromirror device based on an image being displayed, recording a usage history for the micromirrors, and providing a sequence of states to each micromirror when the display system is in an inactive mode. The sequence of states provided to a micromirror is based on the micromirror's usage history. The operation of the micromirrors while a display system containing the digital micromirror device is not in active use can help to reverse or eliminate hinge memory, thereby extending the lifetime of the digital micromirror device.09-17-2009
20090231673MULTILAYERED DEFORMABLE ELEMENT WITH REDUCED MEMORY PROPERTIES IN A MEMS DEVICE - A deformable element for use in microelectromechanical systems comprises a core layer and a protective layer. The protective layer is capable of deterring combinations of undesired chemical components in operational environments with the core layer of the deformable element.09-17-2009
20090231672ELECTRICALLY CONDUCTIVE PROTECTION LAYER AND A MICROELECTROMECHANICAL DEVICE USING THE SAME - A deformable hinge for use in microelectromechanical devices comprises a protection layer that is electrically conductive. The protection layer is on top of another hinge layer; and is more resistive than the hinge layer to the etchant used in during patterning and/or release processes during fabrication of the microelectromechanical device. As a result, the hinge layer can be protected from being damaged during the fabrication process.09-17-2009
20090231671METHOD AND SYSTEM FOR OPTICAL MEMS WITH FLEXIBLE LANDING STRUCTURES - An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion.09-17-2009
20100033799PACKAGING AND TESTING OF MULTIPLE MEMS DEVICES ON A WAFER - A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.02-11-2010
20120236390LIGHT TURNING FEATURE PATTERNS FOR LIGHTGUIDES - This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light and for determining spacing between light turning features in the light guide. In one aspect, a light intensity profile along a first axis is determined and the pitch of light turning features along that first axis is varied based upon this profile, while the pitch along a second crossing axis (for example, an orthogonal axis) and the sizes of the light turning features remain unchanged. In some implementations, an apparatus includes a light guide having an array of light turning features configured to turn light from at least one light emitter. The light turning features can be non-uniformly spaced apart along a first axis such that pitches vary non-monotonically and, along a second axis that crosses the first axis, the light turning features are spaced apart with substantially the same progression.09-20-2012
20100172014Programmable Light Source - A programmable spectrum light source is disclosed. In one embodiment, the programmable light source comprises a light source, a spectrum separation system that splits the light into its constituent spectral components, a light modulator that modulates the spectral components according to a required spectral envelope and a light recombination system that recombines the shaped spectral components to produce light with a required spectrum.07-08-2010
20100202039MEMS DEVICES HAVING SUPPORT STRUCTURES WITH SUBSTANTIALLY VERTICAL SIDEWALLS AND METHODS FOR FABRICATING THE SAME - Embodiments of MEMS devices include support structures having substantially vertical sidewalls. Certain support structures are formed through deposition of self-planarizing materials or via a plating process. Other support structures are formed via a spacer etch. Other MEMS devices include support structures at least partially underlying a movable layer, where the portions of the support structures underlying the movable layer include a convex sidewall. In further embodiments, a portion of the support structure extends through an aperture in the movable layer and over at least a portion of the movable layer.08-12-2010
20100202038MEMS DEVICE AND INTERCONNECTS FOR SAME - A microelectromechanical systems device having an electrical interconnect connected to at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a movable layer of the device. A thin film, particularly formed of molybdenum, is provided underneath the electrical interconnect. The movable layer preferably comprises aluminum.08-12-2010
20120099178ELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE - An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.04-26-2012
20120099177SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE - A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.04-26-2012
20120099176MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS - A micromirror and micromirror array may have a first stationary structure, and a mirror structure connected to a first pivoting structure that pivots the mirror structure relative to the first stationary structure about a first axis of rotation. A first comb drive pivots the mirror structure about the first axis of rotation. The first comb drive has a first portion attached to the stationary structure and a second portion attached to the mirror structure, the first portion being electrically isolated from the second portion. The micromirror or micromirror array may be mounted to a Through Silicon Via (TSV) wafer having electrical connections that extend between a first side and a second side of the TSV wafer such that the first and second portions of each comb drive are electrically connected to the electrical connections.04-26-2012
20110286075ADAPTIVE MIRROR AND METHOD FOR THE PRODUCTION THEREOF - The invention relates to an adaptive mirror based on a ceramic substrate having a corresponding reflector and piezoelectric actuators, a cooling device being integrated in the substrate. The invention likewise relates to a method for the production of such mirrors. The mirrors according to the invention are used for the modulation or deformation of a laser wavefront of high power.11-24-2011
20110286074Device for Inserting Information into the Finder Beam Path of a Motion Picture Camera - A device for inserting information into the finder beam path of a motion picture camera comprising an imaging optics and a DMD chip are arranged with a multiplicity of micromirrors that are arranged in the form of a grid and can be swiveled under electronic control. One portion of the micromirrors reflects the finder beam path toward the imaging optics, and the other portion of the micromirrors is swiveled at least temporarily out of the finder beam path, and respectively reflects toward the imaging optics a section of an information surface arranged laterally offset from the finder beam path.11-24-2011
20110299150LIGHT CONTROL MATERIAL FOR DISPLAYING COLOR, INFORMATION, AND IMAGES - A light control material for displaying a color image. The light control material includes a material body including a plurality of microstructures. The microstructures are designed to produce an additive color perception of one or more colors and designed to reveal an image when the intensity of light reflected from a selected number of the microstructures is modulated. The selected microstructures can be modulated by one or more of modifying, obliterating, obscuring or covering up the selected microstructures. In one embodiment, the microstructures, prior to modulation of the selected number of microstructures, produce a uniform white additive color perception.12-08-2011
20110292490METHOD AND APPARATUS FOR PROVIDING HIGH-FILL-FACTOR MICROMIRROR/MICROMIRROR ARRAYS WITH SURFACE MOUNTING CAPABILITY - Embodiments of the subject invention relate to micromirror devices and methods of fabricating a micromirror/micromirror array. According to an embodiment, micromirrors can be fabricated from a semiconductor substrate where after forming actuators and bonding pads on a front side of the semiconductor substrate, the device is flipped over to have a portion of the back side of the substrate removed and formed to become the mirror plate surface. The subject micromirrors can allow further miniaturization of endoscopes and other optical applications without sacrificing the optical aperture through their surface mounting capabilities.12-01-2011
20110134505ELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE - An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.06-09-2011
20090002804ELECTROMECHANICAL DEVICE TREATMENT WITH WATER VAPOR - Methods, devices, and systems provide MEMS devices exhibiting at least one of reduced stiction, reduced hydrophilicity, or reduced variability of certain electrical characteristics using MEMS devices treated with water vapor. The treatment is believed to form one or more passivated surfaces on the interior and/or exterior of the MEMS devices. Relatively gentle temperature and pressure conditions ensure modification of surface chemistry without excessive water absorption after removal of sacrificial material to release the MEMS devices.01-01-2009
20100232007Linear adaptive optics system in low power beam path and method - A system and method for providing a wavefront corrected high-energy beam of electromagnetic energy. In the illustrative embodiment, the system includes a source of a first beam of electromagnetic energy; an amplifier for amplifying said beam to provide a second beam; a sensor for sensing aberration in said second beam and providing an error signal in response thereto; a processor for processing said error signal and providing a correction signal in response thereto; and a spatial light modulator responsive to said correction signal for adjusting said beam to facilitate a correction of said aberration thereof. In more specific embodiments, the source is a laser and the sensor is a laser wavefront sensor. A mirror is disposed between said modulator and said sensor for sampling said beam. The mirror has an optical thin-film dielectric coating on at least one optical surface thereof. The coating is effective to sample said beam and transmit a low power sample thereof to said means for sensing aberration. The processor is an adaptive optics processor. The spatial light modulator may be a micro electro-mechanical system deformable mirror or an optical phased array. In the illustrative embodiment, the source is a master oscillator and the amplifier is a power amplifier beamline. An outcoupler is disposed between the oscillator and the amplifier.09-16-2010
20090296194OPTICAL FILMS FOR DIRECTING LIGHT TOWARDS ACTIVE AREAS OF DISPLAYS - In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that redirect light from an inactive area of the display to an active area of the display. Light incident on the external film that would normally continue towards an inactive area of the display is either reflected, refracted, or scattered towards an active area of the display comprising moveable and static reflective surfaces that form an optical cavity.12-03-2009
20100110527THERMAL CONDUCTION BY ENCAPSULATION - A packaged electronic device includes a substrate with an upper surface interrupted by a well formed in the substrate. The well has a substrate bottom surface and a substrate sidewall. An electronic device is located in the well over the substrate bottom surface and has a device top surface and a device sidewall. A trench is bounded by the substrate bottom surface, the substrate sidewall and the device sidewall. An encapsulant at least partially fills the trench and contacts the substrate sidewall and the device sidewall. The encapsulant has a first elevation on the substrate sidewall with respect to the substrate bottom surface and a second elevation on the substrate device sidewall with respect to the substrate bottom surface that is at least about 35% greater than the first elevation.05-06-2010
20090086306MEMS DISPLAY DEVICES AND METHODS OF FABRICATING THE SAME - MEMS devices include materials which are used in LCD or OLED fabrication to facilitate fabrication on the same manufacturing systems. Where possible, the same or similar materials are used for multiple layers in the MEMS device, and use of transparent conductors for partially transparent electrodes can be avoided to minimize the number of materials needed and minimize fabrication costs. Certain layers comprise alloys selected to achieve desired properties. Intermediate treatment of deposited layers during the manufacturing process can be used to provide layers having desired properties.04-02-2009
20090080060SEPARABLE MODULATOR - A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.03-26-2009
20090147345Pattern generator - The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.06-11-2009
20090147346METHOD AND SYSTEM TO AUTOMATICALLY CORRECT PROJECTED IMAGE DEFECTS - An apparatus is provided that includes a light source, an array of light-reflecting devices, and a processor for positioning the light-reflecting devices so as to display an image on the display screen. Each of the light-reflecting devices selectively reflects the light from the light source onto a corresponding pixel of a display screen. The processor positions a first of the light-reflecting devices such that light from the light source is reflected by the first light-reflecting device onto a first pixel of the display screen, which is different than the pixel of the display screen that corresponds to the first light-reflecting device. A similar apparatus is also provided in which the processor instead positions the first light-reflecting device such that light from the light source is reflected by the first light-reflecting device onto a first area of the display screen, which is located between the pixels of the display screen that correspond to the first light-reflecting device and an adjacent second light-reflecting device.06-11-2009
20100128337STICTION MITIGATION WITH INTEGRATED MECH MICRO-CANTILEVERS THROUGH VERTICAL STRESS GRADIENT CONTROL - The present disclosure relates to the mitigation of stiction in MEMS devices. In some embodiments, a MEMS device may be provided with one or more restoration features that provide an assisting mechanical force for mitigating stiction. The restoration feature may be implemented as one or more deflectable elements, where the deflectable elements may have various configurations or shapes, such as a chevron, cross, and the like. For example, the restoration feature can be a cantilever that deflects when at least one component comes into contact or proximity with another component. Multiple restoration features also may be employed and placed strategically within the MEMS device to maximize their effectiveness in mitigating stiction.05-27-2010
20080266645DEVICE AND METHOD TO REALIZE A LIGHT PROCESSOR - A device for light processing includes a first housing having a reflective bottom surface and walls defining a first cavity. A first fluid or gel has a meniscus disposed within the first cavity. A control means is coupled with the first fluid or gel for adjusting the curvature of the meniscus. The bottom surface is configured to reflect an incident light beam through the first fluid or gel and toward the meniscus.10-30-2008
20100123946Display Element Comprising a Reflector - The invention relates to a display element for the display of a plurality of a colors and a method for their display.05-20-2010
20100118381Light Modulation Device - A modulation device based on electrowetting cells (EW cells), phase or amplitude or both simultaneously as a complex value of incident light is modulated in each EW cell. An EW cell includes at least one chamber with at least two fluids which are separated by an interface, external and internal electrodes which form electrode pairs activatable by control means, where at least one electrode pair controls the level of the interfaces in the chamber. The internal, mutually functionally independent electrodes inside the chamber are disposed parallel to each other such that the chamber is divided into two communicating sections with two controllable interfaces, where at least one section is transparent and forms the optical path. When at least one electrode pair is activated, the interfaces are mutually displaced such that the path length of the pencils of rays is changed compared with an initial value.05-13-2010
20110149374TWO-TERMINAL VARIABLE CAPACITANCE MEMS DEVICE - A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.06-23-2011
20100079848SPECKLE REDUCTION IN DISPLAY SYSTEMS THAT EMPLOY COHERENT LIGHT SOURCES - Speckle effect in display system is reduced by utilizing the instability of phase-coherent light and the transmission of the instable phase-coherent light through a multi-mode optical fiber with a suitable length.04-01-2010
20090190202MEMS MICROMIRROR DEVICES WITH ANTI-REFLECTIVE STRUCTURES - Diffractive patterns are disposed on a MEMS substrate in the gaps between the MEMS micromirrors to reduce backreflection of light leaking through the gaps and reflected by the MEMS substrate. The diffractive patterns are silicon surface-relief diffraction gratings or silicon oxide gratings on silicon substrate. Sub-wavelength gratings are used to suppress higher orders of diffraction; 50% duty cycle surface relief gratings on a substrate having index of refraction close to 3 are used to suppress both reflected and transmitted zero orders of diffraction simultaneously. The gratings have lines running parallel or at a slight angle to the gaps, to prevent the diffracted light from re-entering the gaps.07-30-2009
20090201567OPTICAL FILTER DEVICE AND METHOD OF REDUCING VIGNETTING - An optical filter device (08-13-2009
20090273824ELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE - An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.11-05-2009
20090262413System and Method for Operating Light Processing Electronic Devices - A system and method for operating an electronic device used in light processing. A method comprises altering a spatial relationship between a spatial light modulator (SLM) and a light incident on the SLM, shifting light modulator states of a first portion of light modulators to a second portion of light modulators, and placing a third portion of light modulators in the SLM into a performance degradation-reducing mode. The amount of shifting performed is proportional to the amount of change in the spatial relationship. The method allows for a change in light modulators used to modulate the light, thereby preventing the overuse of some of the light modulators, which may help to prevent degradation of the light modulators. The performance degradation reducing mode may help to further reduce or even reverse the performance degradation of the light modulators.10-22-2009
20090284824TRANSFLECTIVE ELECTROWETTING DISPLAY DEVICE - A transflective display device has a viewing side (11-19-2009
20090296193Front Light Devices and Methods of Fabrication Thereof - A illumination device comprises a light guide having a first end for receiving light and configured to support propagation of light along the length of the light guide. A turning microstructure is disposed on a first side of the light guide configured to turn light incident on the first side and to direct the light out a second opposite side of the light guide, wherein the turning microstructure comprises a plurality of indentations. A cover is physically coupled to the light guide and disposed over the turning microstructure. An interlayer is between the cover and the light guide, wherein the interlayer physically couples the cover to the light guide. A plurality of open regions is between the interlayer and the plurality of indentations. Various embodiments include methods of coupling the cover to the light guide while preserving open regions between the cover and plurality of indentations.12-03-2009
20080212161Actuating Device Having a Flexible Diaphragm Controlled By Electrowetting - An actuation device with plural positions and including a support, at least one flexible membrane attached to the support forming at least one closed containment with the support with volume filled with at least one first liquid in a form of one or plural drops, and at least a second liquid, the first liquid and the second liquid being immiscible, and an electrical device to modulate the profile of the membrane by controlling the shape of at least one of the drops.09-04-2008
20110199669SYSTEMS AND METHODS USING INTERFEROMETRIC OPTICAL MODULATORS AND DIFFUSERS - Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the inteferometric modulator. The thicker diffuser may provide increased diffusion and durability.08-18-2011
20110199668METHOD AND DEVICE FOR PROVIDING ELECTRONIC CIRCUITRY ON A BACKPLATE - A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.08-18-2011
20100103498DIGITAL MICROMIRROR DEVICE HAVING WAVELENGTH-DEPENDENT MODULATION STRUCTURE AND METHOD OF MANUFACTURING THE SAME - A digital micromirror device (DMD), a method of manufacturing the DMD and an optical processor incorporating a DMD. In one embodiment, the DMD includes: (1) a first group of micromirrors having a first modulation structure based on a first wavelength of light and a second group of micromirrors having a second modulation structure based on a second wavelength of light, the second wavelength differing from the first wavelength.04-29-2010
20100103499BIAXIAL MIRROR COLOR SELECTING MICRO MIRROR IMAGER - A controllable reflecting device having an array of bi-axial mirrors that are capable of pivoting in at least four directions is described. Each micro-mirror of the micro-mirror array is supported through a torsion pivot by a yoke attached by a second coplanar orthogonal torsion pivot to the mirror array support. The mirror and yoke are electrically conductive to a common node on the mirror array support shared by all the mirror/yoke assemblies. Under each mirror/yoke assembly the mirror array support has four plate areas electrically isolated from each other and the mirror/yoke assembly. In response to electrical signals from driver switches integrated in the mirror array support, these plate areas, driven in pairs, selectively provide an electric field with respect to the common node. This electric field attracts the mirror and yoke to facilitate movement of the mirror/yoke assembly to a desired reflecting state.04-29-2010
20100302616ILLUMINATION DEVICES AND METHODS OF FABRICATION THEREOF - Illumination devices and methods of making same are disclosed. In one embodiment, a display device includes a light modulating array and a light guide configured to receive light into at least one edge of the light guide. The light guide can be characterized by a first refractive index. The display device can also include a light turning layer disposed such that the light guide is at least partially between the turning layer and the array. The turning layer can comprise an inorganic material characterized by a second refractive index that is substantially the same as the first refractive index.12-02-2010
20080239456MICRO OSCILLATING DEVICE AND MICRO OSCILLATING DEVICE ARRAY - A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.10-02-2008
20080239457Optical Modulation - An optical modulator comprising a spacing-controllable etalon having at least one sprung micro-mirror suspended above a substrate. At least one electrically insulating stop is provided between the micro-mirror and the substrate to avoid short-circuit when the micro-mirror is drawn towards the substrate by an applied voltage. An optical detector detects the time of arrival of a first laser pulse. A control circuit predicts from this an arrival time of the next incident laser pulse and, responsive to a control signal, either retains the micro-mirror in its pulled-down state held against the insulating stops or releases the micro-mirror at a time predicted to maximise or minimise the light transmitted through the modulator. After a time interval calculated to permit a predetermined number of mechanical oscillations, the micro-mirror is pulled back down onto the stops.10-02-2008
20080239455MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING CONDUCTING LAYERS SEPARATED BY STOPS - A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device has an electrically nonconductive surface within the aperture or on a portion of the boundary of the aperture. A support structure separates the reflective element from the electrode. The reflective element can be moved between a first position and a second position. The stop member is spaced from the electrically nonconductive surface when the reflective element is in the first position. A portion of the stop member is in contact with the electrically nonconductive surface when the reflective element is in the second position. The reflective element and the electrode are electrically isolated from each other when the reflective element is in the second position.10-02-2008
20120170102Spatial Light Modulators and Fabrication Techniques - We describe a phase modulating spatial light modulator (SLM). The SLM comprises a substrate bearing multiple SLM pixels, each of the SLM pixels comprising a MEMS (micro electromechanical system) optical phase modulating structure. The MEMS optical phase modulating structure comprises: a pixel electrode; a spring support structure around a perimeter of the pixel electrode; and a mirror spring supported by the spring support structure. The mirror spring comprises a mirror support and a plurality of mirror spring arms each extending between the mirror support and the spring support structure, and a mirror mounted on the mirror support. Each mirror spring arm has a spiral or serpentine shape. A voltage applied to the pixel electrode flexes the mirror spring and causes the mirror to translate perpendicularly to the substrate substantially without tilting.07-05-2012
20100128339INTERFEROMETRIC OPTICAL DISPLAY SYSTEM WITH BROADBAND CHARACTERISTICS - Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.05-27-2010
20110267679LIGHT MODULATING DEVICE AND LASER PROCESSING DEVICE - A light modulating device (11-03-2011
20080212162Method for aligning die to substrate - A method for aligning a micro-mirror device die having a plurality of micro-mirror devices formed on a semiconductor substrate and fixing the micro-mirror device die on the semiconductor substrate can be provided. The method comprises a first alignment step of aligning a first guide portion of the micro-mirror device die and a second guide portion of the package substrate and a fixing step of fixing the micro-mirror device die on the package substrate in a position aligned by the first alignment step using the first and second guide portions.09-04-2008
20090128886ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - An illumination optical apparatus guides exposure light emitted from an exposure light source, to an illumination target object. The illumination optical apparatus has a plurality of spatial light modulation members arranged in an array form, and each spatial light modulation member is so configured that a plurality of reflecting optical elements each including a movable reflecting surface are arranged in an array form. At least one of the spatial light modulation members is arranged in an optical path of the light emitted from the light source.05-21-2009
20090161197AGILE BEAM STEERING MIRROR FOR ACTIVE RASTER SCAN ERROR CORRECTION - Scan line position error resulting in banding, bow, skew, etc. is corrected by way of an agile beam steering mirror assembly in a ROS printing system and the like. The agile beam steering mirror system comprises a piezoelectric bending actuator fixedly mounted to a substrate at a proximate end thereof. A mirror structure is mounted at a free distal end of the bending actuator. Voltage applied to the bending actuator causes rotation of the mirror to thereby correct for positional errors of the scan line. Correction waveforms may be stored in control memory associated with the agile beam steering mirror assembly. A capacitive sensing circuit using a sensing electrode located beneath the free end of the bending actuator may be used in a feedback arrangement to determine and control mirror position.06-25-2009
20120069422MICRO-ELECTROMECHANICAL DEVICE - As for the method that modulates optical path length by the position of reflection plane of light, the movement of the position-movable plate in micrometer-size electromechanical device can be restricted by the stopping plates placed above and below the edge of the position-movable plate, the distance between the stopping plates may be set depending on the desired amount in modulating the optical path length. The voltage differential in the device is operable to create electrostatic attraction, to perform transition movement of the position-movable plate between the stopping plates, the light reflector connected to the position-movable plate takes at least two states in positioning, enabling to modulate the optical path length of reflected light by the light reflector with high reproducibility and high accuracy.03-22-2012
20130120827OPTICAL ELEMENT ARRAY, METHOD OF FORMING OPTICAL ELEMENT ARRAY, DISPLAY DEVICE AND ELECTRONIC APPARATUS - An optical element array includes a first substrate and a second substrate facing each other, a plurality of first walls which is provided upright on an inner surface facing the second substrate of the first substrate, a first electrode and a second electrode which are respectively provided on facing wall surfaces of the adjacent first walls, a third electrode which is provided on an inner surface facing the first substrate of the second substrate, a second wall which partially covers the inner surface of the first substrate and the first walls to partially or entirely surround at least a part of a space which is interposed between the first substrate and the second substrate; and a polar liquid and a nonpolar liquid which are sealed in the space surrounded by the first substrate, the second substrate and the second wall and have different refractive indices.05-16-2013
20080316579System and Method for Increasing Image Quality in a Display System - System and method for maximizing image quality by eliminating vias on a reflective surface. A preferred embodiment comprises depositing a first portion of a mirror surface over a support surface, applying a protective coating on the mirror surface, and then inverting the via. The preferred embodiment also comprises removing a portion of the inverted via and then depositing a second portion of the mirror surface. The remaining portion of the inverted via fills the via and provides a level surface for the depositing of the second portion of the mirror surface, reducing the amount of light scattered by the via.12-25-2008
20080316578ELECTROPHORETIC DISPLAY DEVICE AND ELECTRONIC APPARATUS - An electrophoretic display device, includes: an electrophoretic capacitor provided with an electrophoretic layer containing at least one kind of electrophoretic particle; and a ferroelectric capacitor provided with a ferroelectric layer containing a ferroelectric material. In the electrophoretic display device, the electrophoretic particle is allowed to move to conduct a display and thus a polarity of the ferroelectric layer is inverted by a current supply to the electrophoretic capacitor and the ferroelectric capacitor that are electrically connected with each other, and the display can be retained due to a remanent polarization of the ferroelectric layer even after the current supply is stopped. In the device, a formula (A) and a formula (B) are satisfied when a voltage to be applied to the ferroelectric capacitor is V12-25-2008
20120140312METHOD AND SYSTEM FOR PACKAGING A DEVICE - A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.06-07-2012
20110141547BACKLIGHT UTILIZING DESICCANT LIGHT TURNING ARRAY - An interferometric display comprises a backlight with light extraction features formed from a desiccant material within the display. A light source is positioned at one or more edges or corners of the back glass, and the desiccant based features patterned in or on the back glass remove unwanted moisture and create uniform light extraction from the back glass.06-16-2011
20090097100OPTICAL FILMS FOR CONTROLLING ANGULAR CHARACTERISTICS OF DISPLAYS - In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that reduce the field-of-view of the display. These structures may comprise, for example, baffles or non-imaging optical elements such as compound parabolic collectors. The baffles may comprise a plurality of vertically aligned surfaces arranged, e.g., in a grid. In certain preferred embodiments these baffles are opaque or reflective. These vertical surfaces, therefore, can substantially block light from exiting the interferometric display device in a substantially non-perpendicular direction. These vertical surfaces may, however, permit light directed in a substantially vertical direction to exit the display. The non-imaging optical elements, e.g., compound parabolic collectors, redirect light from large incident angles into more normal angles towards the display. As a result, the light reflected by the display to the user is also at a more normal angle.04-16-2009
20090190203PROGRAMMABLE LIGHT BEAM SHAPE ALTERING DEVICE USING PROGRAMMABLE MICROMIRRORS - A digital micromirror device (“DMD”) is used to alter the shape of light that is projected onto a stage. The DMD selectively reflects some light, thereby shaping the light that is projected onto the stage. The control for the alteration is controlled by an image. That image can be processed, thereby carrying out image processing effects on the shape of the light that is displayed. One preferred application follows the shape of the performer and illuminates the performer using a shape that adaptively follows the performer's image. This results in a shadowless follow spot.07-30-2009
20090213451METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL - Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.08-27-2009
20090219605OPTICAL INTERFERENCE DISPLAY PANEL AND MANUFACTURING METHOD THEREOF - A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.09-03-2009
20090168146 STABILIZER FOR MEMS DEVICES HAVING DEFORMABLE ELEMENTS - A stabilizer mechanism is coupled to a deformable element of a microelectromechanical device for reducing unwanted deformation of the deformable element by increasing the stiffness of the deformable element in selected other directions than the direction along which desired deformation is performed.07-02-2009
20090251761MICROELECTROMECHANICAL SYSTEMS DISPLAY ELEMENT WITH PHOTOVOLTAIC STRUCTURE - A microelectromechanical systems (MEMS) display element may include a photovoltaic structure configured to generate electric energy from incident light. In one embodiment, the display element includes a first layer that is at least partially transmissive of light, a second layer that is at least partially reflective of light, and a photovoltaic element that is formed on the first layer or the second layer or formed between the first layer and the second layer. The second layer is spaced from the first layer and is selectably movable between a first position in which the display element has a first reflectivity and a second position in which the display element has a second reflectivity. The first reflectivity is greater than the second reflectivity. The photovoltaic element is at least partially absorptive of light and is configured to convert a portion of the absorbed light into electric energy, at least when the second layer is in the second position.10-08-2009
20120194897BACKSIDE PATTERNING TO FORM SUPPORT POSTS IN AN ELECTROMECHANICAL DEVICE - This disclosure provides systems, methods and apparatus for backside patterning of structures in electromechanical devices. In one aspect, backside patterning of supports in an electromechanical device allows the size of the supports to be reduced, increasing the active region of the electromechanical device. In electromechanical devices having black masks, the black masks may include a partially transmissive aperture aligned with the supports which enable backside patterning of the support through the black mask. The black mask may include an interferometric black mask in which an upper reflective layer has been patterned to form an aperture extending therethrough.08-02-2012
20100149622DIGITAL MICRO-MIRROR DEVICE - A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.06-17-2010
20100014148MICROELECTROMECHANICAL DEVICE WITH SPACING LAYER - An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and the electrode and provides a filtering cavity to improve color saturation.01-21-2010
20090279163MICROMACHINE STRUCTURE - A micro-mechanical structure according to the present invention includes: a base 11-12-2009
20100149627SUPPORT STRUCTURE FOR MEMS DEVICE AND METHODS THEREFOR - A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.06-17-2010
20100149625Method of Fabricating an Integrated Device - A method of fabricating an integrated device including a MicroElectroMechanical system (MEMS) and an associated microcircuit is provided. In one embodiment, the method comprises: forming a high temperature capable contact through a dielectric layer to an underlying element of a microcircuit formed adjacent to a MicroElectroMechanical System (MEMS) structure on a substrate; and depositing a layer of conducting material over the dielectric layer, and patterning the layer of conducting material to form a local interconnect (LI) for the microcircuit overlying and electrically coupled to the contact and a bottom electrode for the adjacent MEMS structure. Other embodiments are also provided.06-17-2010
20100002286Method to provide a display panel - A method to provide a display panel according to the present invention comprises the step of providing at least one pixel element for producing or controlling light wherein the pixel element has a light emitting or reflecting surface and is mounted on a support. The method furthermore comprises covering the light emitting or reflecting surfaces of the at least one light emitting or reflecting element and at least a part of the support with substantially transparent material, thereby providing the optical surface of the display panel, which optical surface comprises at least one pixel element zone and at least one support zone. Furthermore, the method comprises modifying the roughness of the substantially transparent material of the optical surface along the support zone of the optical surface and/or along the pixel element zone of the optical surface, for rendering the substantially transparent material of the optical surface along the support zone of the optical surface being more rough than along the pixel element zone of the optical surface01-07-2010
20100002285TORSIONAL MEMS DEVICE - A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.01-07-2010
20100188730OPTICAL ELEMENT - An optical element includes a container including first and second end face walls, a side face wall, and an accommodating chamber inside the walls; first and second liquids enclosed in the chamber; a first electrode provided on a surface of the first end face wall; a second electrode provided on a surface of the second end face wall; an insulating film provided on a surface of the second electrode; and a unit configured to apply a voltage. The shape of an interface between the liquids is changed by a voltage application, and a light transmission path, the center of which is a virtual axis passing through the end face walls in the thickness direction of the container, is formed in a portion of the second liquid. An opening having a diameter the same as or larger than the maximum diameter of the transmission path is provided in the first electrode.07-29-2010
20080316577MEMS DEVICE WITH AN ANGULAR VERTICAL COMB ACTUATOR - A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.12-25-2008
20100225992Oversized micro-mechanical light modulator with redundant elements, device and method - The present invention relates to a reconfigurable micro-mechanical light modulator including a two-dimensional array of modulating elements with redundant rows of modulating elements. In particular, it relates to extending the life of the modulator by shifting the set of elements used, without physically replacing the micro-mechanical light modulator. The modulating elements are adapted to modulate light impinging on the micro-mechanical light modulator. The array of modulating elements comprises a first and a second set of modulating elements. The second set is a redundant set of modulating elements that can be selected to substitute for the first set of modulating elements in modulating light impinging on the micro-mechanical light modulator, without physically replacing the micro-mechanical light modulator. Devices and methods are described.09-09-2010
20100245979MEMS CAVITY-COATING LAYERS AND METHODS - Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.09-30-2010
20100245976DIGITAL BINARY MEMS WAVEFRONT CONTROL - Embodiments of the invention are directed to a new type of phase screen, i.e., an opto-electronic device that can convert a distorted incoming optical wavefront into a plane wave or, conversely, transform a plane wave into a prescribed varying output wavefront. The basic concept involves novel binary all-digital MEMS interferometer configurations that can be used to create controlled and arbitrary optical wavefront using only 0,1 amplitude changes followed by differential propagation distances to convert these amplitude variations into controllable and/or continuous phase variations. Clustered pixel notions, such as Floyd-Steinberg, Stucki or other algorithms useful in digital half-tone printing, are simultaneously employed to create controllable grey-level variations as well as continuous phase variations. Desired grey-levels can be obtained wherein each pixel is formed by, e.g., a 3×3 or 5×5 cluster of mirrors. Both the filling-in of the outputs of the binary mirror (0,1) and the grey-levels are accomplished simply by spatial averaging over a short propagation distance.09-30-2010
20080231937Spatial Light Modulator Using an Integrated Circuit Actuator and Method of Making and Using Same - A spatial light modulator (SLM) includes an integrated circuit actuator that can be fabricated using photolithography or other similar techniques. The actuator includes actuator elements, which can be made from piezoelectric materials. An electrode array is coupled to opposite walls of each of the actuator elements is an electrode array. Each array of electrodes can have one or more electrode sections. The array of reflective devices forms the SLM.09-25-2008
20100046062Mirror device and MEMS device comprising layered electrode - The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.02-25-2010
20090073539PERIODIC DIMPLE ARRAY - A microelectromechanical (MEMS) device includes a substrate, an actuation electrode over the substrate, a reflective layer over the actuation electrode, and a support layer between the actuation electrode and the reflective layer. The reflective layer includes at least one aperture through the reflective layer. The support layer includes a recess between the actuation electrode and the at least one aperture. Upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary. The reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion.03-19-2009
20090073540SEMI-TRANSPARENT/TRANSFLECTIVE LIGHTED INTERFEROMETRIC DEVICES - In certain embodiments, a device is provided that utilizes both interferometrically reflected light and transmitted light. Light incident on the device is interferometrically reflected from a plurality of layers of the device to emit light in a first direction, the interferometrically reflected light having a first color. Light from a light source is transmitted through the plurality of layers of the device to emit from the device in the first direction, the transmitted light having a second color.03-19-2009
20100296151MICROSYSTEM AND METHOD FOR THE PRODUCTION OF A MICROSYSTEM - The invention relates to a microsystem having at least one micromirror (11-25-2010
20100302618Micromirror Array Assembly with In-Array Pillars - The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.12-02-2010
20090128887Spatial light modulator and mirror array device - The present invention provides a spatial light modulator, comprising: a pixel array comprising a plurality of pixel units. Each of the pixel units further comprises memory cell. A plurality of bit lines and a plurality of word lines for electrically communicating with the pixel units. A plurality of plate lines, wherein the plate line is connected to at least some of the memory cells connected to one of the word lines of the pixel array.05-21-2009
20100328755APPARATUSES WITH ENHANCED LOW RANGE BIT DEPTH - A light modulator device includes a first electrical conduit, a second electrical conduit electrically isolated from the first conduit, a first display element, and a second display element. The first display element is in an actuated state when a voltage difference between the first conduit and the second conduit has a magnitude greater than a first actuation voltage and is in a released state when the voltage difference has a magnitude less than a first release voltage. The second display element is in an actuated state when the voltage difference has a magnitude greater than a second actuation voltage and is in a released state when the voltage difference has a magnitude less than a second release voltage. Either the actuation voltages are substantially equal and the release voltages are different, or the actuation voltages are different and the release voltages are substantially equal.12-30-2010
20090067033MICROMACHINE STRUCTURE SYSTEM AND METHOD FOR MANUFACTURING SAME - A micro-mechanical structure system according to the present invention includes: a movable structure 03-12-2009
20110026096METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION - Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.02-03-2011
20110043890LIGHT CONTROLLER - To provide a light controller allowing for an enhanced positional precision in assembly of a spatial light modulator and a random phase mask, and to provide a light controller adapted to prevent positional deviations between a spatial light modulator and a random phase mask against impacts or vibrations, allowing for an enhanced operational integrity, a light controller includes a substrate, a light modulation unit disposed on the substrate and configured for modulation of light, and a random phase mask stacked on the light modulation unit on an optical axis of the light modulation unit.02-24-2011
20100079849DEVICE AND METHOD FOR MODIFYING ACTUATION VOLTAGE THRESHOLDS OF A DEFORMABLE MEMBRANE IN AN INTERFEROMETRIC MODULATOR - By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an interferometric modulator selectively creates constructive and/or destructive interference between light waves reflecting off the two surfaces. The spacing can be varied by applying a voltage to create electrostatic attraction between the two surfaces, which causes one or both surfaces to deform and move closer together. In the absence of such attraction, the surfaces are in a relaxed position, where they are farther apart from one another. A actuation voltage is needed to create sufficient electrostatic attraction to cause a surface to deform. The actuation voltage can be modified by implanting ions in a dielectric layer attached to one or both surfaces. Upon the application of a voltage, the ions create a baseline level of repulsion or attraction between the two surfaces, which thus require more or less voltage, respectively, to cause a surface to deform. The degree of ion implantation can be chosen to set the actuation voltage as desired, or the surfaces can be made to deform at a given voltage by appropriately selecting the degree of ion implantation.04-01-2010
20090323169Scanned, one-dimensional, phased-array display system - A scanned, one-dimensional, phased-array display system combines imaging optics on one axis with Fourier transform optics on another. The display offers the energy efficiency and fault tolerance of phase modulator-based displays, and the compactness, flexibility and speed of optical MEMS. Also described is a mechanism to introduce amplitude variations on the Fourier axis if needed to compensate for image artifacts.12-31-2009
20100053726Spatial light modulator having capacitor - The present invention provides an image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising a first conductive layer to wire and function as a bit line; a second conductive layer to wire and function as a word line; and a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.03-04-2010
20110075246METHOD AND APPARATUS FOR PROVIDING A LIGHT ABSORBING MASK IN AN INTERFEROMETRIC MODULATOR DISPLAY - A microelectromechanical system (MEMS) device is provided. In one embodiment, the MEMS device includes a transparent substrate, and a plurality of interferometric modulators. The plurality of interferometric modulators includes an optical stack coupled to the transparent substrate, in which the optical stack includes a first light absorbing area. The plurality of interferometric modulators further includes a reflective layer over the optical stack, and one or more posts to support the reflective layer. Each of the one or more posts includes a second light absorbing area integrated in the post.03-31-2011
20100134870METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE - A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.06-03-2010
20110075245Full Color Range Interferometric Modulation - A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.03-31-2011
20120200909STACKED-GRATING LIGHT MODULATOR - A “Stacked-Grating Light Modulator” (“SGLM”) comprises two diffraction grating elements, a reflection grating and a transmission grating, in close parallel proximity. An incident beam transmits through the transmission grating and is reflected by the reflection grating back through the transmission grating. The relative lateral position of the two gratings is varied to modulate the beam's zero-order reflectance.08-09-2012
20110043891METHOD FOR MODULATING LIGHT - Light is modulated using an array of modulation elements formed on a semiconductor substrate, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.02-24-2011
20100302617MEMS MICROMIRROR AND MICROMIRROR ARRAY - A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.12-02-2010
20100067094Mirror device comprising layered electrode - The present invention provides an image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate: wherein: each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.03-18-2010
20090168145DISPLAY DEVICE - The present invention relates to a display device including a substrate having a display area, a first electrode disposed on the substrate to receive a first voltage, a second electrode disposed on the substrate to receive a second voltage having an opposite polarity to that of the first voltage, an insulating layer disposed on the first electrode and the second electrode, and an isolated member disposed on the insulating layer and electrically isolated, wherein an induction charge is generated in the isolated member by application of the first voltage and the second voltage, and wherein light transmittance is controlled according to the application of the first and second voltages.07-02-2009
20080291525DISPLAY PIXEL USING ELECTROACTIVE POLYMER AND DISPLAY APPARATUS EMPLOYING THE SAME - Provided are a display pixel using an electroactive polymer and a display apparatus employing the display pixel. The display pixel includes: an electroactive polymer layer, of which shape and/or size is displaced when a voltage is applied thereto; a diffraction grating, of which a pitch and a diffraction angle change according to a displacement of the electroactive polymer layer; and a liquid crystal layer disposed on the diffraction grating and controlling gradation according to a voltage applied thereto.11-27-2008
20110051225Electromechanical display and backlight - Electromechanical light modulators and backlight providing efficient, low cost and high performance displays.03-03-2011
20100284055DISPLAY WITH INTEGRATED PHOTOVOLTAIC DEVICE - A display with a photovoltaic (PV) cells integrated as the front side and/or back side of the display is disclosed. Ambient light may reach a PV cell situated behind a display through fully or partially transmissive features within the display. Display-generated light may also reach a PV cell behind a display. A transmissive PV material situated in front of a display may collect both ambient light as well as display-generated light.11-11-2010
20100110528SPECIAL OPTICAL MODULATION ARRAY DEVICE AND A METHOD OF FABRICATING THE SAME - A spatial optical modulation array device includes regularly packed micro optical-electrical-mechanical pixels in a planner configuration on a semiconductor substrate, each pixel electrically actuated independently and thus operated optically in the binary modes, reflection and diffraction to incident illumination. Subject to the electrostatic contraction or compulsion driven by a pixel circuitry, the top metal reflector is placed accurately at the minimum or maximum spacing from the static bottom metal reflector in an odd or even integral multiple of a quarter wavelength within visual light spectrum, so that diffraction or reflection in destructive or constructive interference is achieved respectively and thus incident illumination modulated independently in closely binary modes at each micro optical-electrical-mechanical pixel.05-06-2010
20100214644INTERFERENCE LIGHT MODULATOR AND DISPLAY APPARATUS EMPLOYING THE SAME - The present invention relates to an interference optical modulator and a display apparatus having the same. The display apparatus includes a metal thin film and a dielectric multiple thin film spaced apart from the metal thin film. The display apparatus may realize colors by changing an interval between the metal thin film and the dielectric multiple thin film, and may realize a black color by applying a voltage to each respective sub-pixel.08-26-2010
20100214643MEMS DEVICE WITH INTEGRATED VIA AND SPACER - A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.08-26-2010
20100214645SEPARABLE MODULATOR - A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.08-26-2010
20080218842Method of Repairing Micromirrors in Spatial Light Modulators - Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.09-11-2008
20100202037System for On-Chip Actuation - In accordance with particular embodiments, a system for displaying modulated light includes a spatial light modulator comprising a plurality of micromirrors having a pixel pitch less than 17 micrometers. The system also includes an intermediate voltage generator operable to generate a negative voltage and a positive voltage. The system further includes at least two level shifters coupled to the intermediate voltage generator. The system additionally includes a reset driver coupled to the at least two level shifters and to at least a subset of the plurality of micromirrors. The reset driver is operable to drive the subset of the micromirrors. The spatial light modulator, the intermediate voltage generator, the at least two level shifters, and the reset driver are all incorporated on a common substrate.08-12-2010
20100165443SYSTEMS AND METHODS USING INTERFEROMETRIC OPTICAL MODULATORS AND DIFFUSERS - Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the inteferometric modulator. The thicker diffuser may provide increased diffusion and durability.07-01-2010
20110149375INTEGRATED TOUCH FOR IMOD DISPLAYS USING BACK GLASS - An interferometric modulator (“IMOD”) display utilizes ambient light and incorporates touch sensing without reducing the amount of ambient light that reaches the MEMS modulators, and without introducing any optical distortion or loss of performance. Electrodes for touch sensing are located at a back glass of the inteferometric display, and are used in conjunction with electrodes whose primary function is to activate the pixels of the MEMS display, in order to sense a touch. The touch deflects the IMOD layers and is sensed through the various display layers at the rear of the display.06-23-2011
20110188110MICROELECTROMECHANICAL DEVICE WITH RESTORING ELECTRODE - Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using chemical (e.g., water) or a plasma based etch process to remove the sacrificial layer.08-04-2011
20090244687OPTICAL SCANNING AND IMAGING APPLICATIONS USING DEFORMABLE MIRRORS - A deformable mirror changes configuration in response to a change of the configuration of a shape memory material. In some examples, the deformable mirror is formed of the shape memory material. In other examples, the deformable mirror changes configuration under the control of actuators comprising shape memory materials.10-01-2009
20120307342MANUFACTURING OPTICAL MEMS WITH THIN-FILM ANTI-REFLECTIVE LAYERS - In accordance with the teachings of one embodiment of this disclosure, a method for manufacturing a semiconductor device includes forming a support structure outwardly from a substrate. The support structure has a first thickness and a first outer sidewall surface that is not parallel with the substrate. The first outer sidewall surface has a first minimum refractive index. A first anti-reflective layer is formed outwardly from the support structure and outwardly from the substrate. A second anti-reflective layer is formed outwardly from the first anti-reflective layer. The first and second anti-reflective layers each includes respective compounds of at least two elements selected from the group consisting of: silicon; nitrogen; and oxygen.12-06-2012
20100149626Prism for High Contrast Projection - Prism elements having TIR surfaces placed in close proximity to the active area of a SLM device 06-17-2010
20110075247MEMS DISPLAY - A displaying apparatus that includes a plurality of electromechanical system elements arranged in rows. The electromechanical system elements of each of the rows are further arranged in subrows. The subrows of each row are electrically connected. Certain of the electromechanical system elements have a hysteresis stability window that is nested with another hysteresis stability window of certain others of the electromechanical system elements. A method of manufacturing a displaying apparatus that includes forming a plurality of electromechanical system elements arranged in rows. The electromechanical system elements of each of the rows are further arranged in subrows. The subrows of each row are electrically connected. Certain of the electromechanical system elements have a hysteresis stability window that is nested with another hysteresis stability window of certain others of the electromechanical system elements.03-31-2011
20100039696METHOD AND APPARATUS TO REDUCE OR ELIMINATE STICTION AND IMAGE RETENTION IN INTERFEROMETRIC MODULATOR DEVICES - Method and apparatus to reduce or eliminate stiction and image retention in interferometric display devices are disclosed. In some embodiments, a display element comprises a plurality of interferometric modulator devices configured in a matrix, each interferometric modulator device having a movable reflective layer and a plurality of supporting posts, the plurality of posts defining a post spacing distance in at least one direction that is greater for one or more interferometric modulator devices disposed adjacent to an edge of the display element than one or more interferometric modulator devices disposed nonadjacent to an edge of the display element.02-18-2010
20120002267Individually Addressable Nano-Scale Mechanical Actuators - An addressable nano-scale mechanical actuator is formed at the intersection of two nanowires. The actuator has an active region disposed between the two nanowires, which form the electrodes of the actuator. The active region contains an electrolytically decomposable material. When an activation voltage is applied to the electrodes, the material releases a gas that forms a bubble at one electrode, causing a bulging of a top surface of the actuator. The bulging may be used, via mechanical coupling, to provide mechanical actuation on a nanometer scale. The nanowires may be arranged in a two-dimensional array to provide an array of individually addressable actuators.01-05-2012
20110063713ANTI-STICTION ELECTRODE - Anti-stiction systems may include one or more anti-stiction electrodes driven to provide an electrical force that counteracts a stiction force acting upon a moveable portion of an interferometric modulator. The anti-stiction electrode(s) may be disposed on a back glass or on another such substrate. The anti-stiction electrode(s) may be configured to apply an electrical force to substantially all of the interferometric modulators in a display device at once and/or may be configured to apply an electrical force only to a selected area. In some embodiments, the sum of an anti-stiction electrical force and a mechanical restoring force of a moveable part of an interferometric modulator is sufficient to counteract a stiction force.03-17-2011
20090067034MEMS STRUCTURE AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER - An optical modulator can be provided that includes a substrate; an insulation layer positioned on the substrate; a ribbon layer such that its center portion is spaced apart from the insulation layer; a piezoelectric actuator positioned on either end of the ribbon layer that provides the driving force which moves the center portion of the ribbon layer vertically; and a temperature compensation layer, which is made of a thermally contracting material having a negative coefficient of expansion, and which is formed on at least one position of an upper portion of the piezoelectric actuator, a lower portion of the piezoelectric actuator, and a lower surface of the ribbon layer corresponding to a position of the piezoelectric actuator. In the optical modulator, the problem of thermal deformation due to rises in temperature can be resolved, whereby the accuracy and reliability of operation of the component can be increased.03-12-2009
20120250137MEMS WAVELENGTH CONVERTING LIGHTING DEVICE AND ASSOCIATED METHODS - A lighting device is described for receiving source light within a predetermined source wavelength range, converting the source light into a converted light, and reflecting the converted light to a desired output direction. The lighting device may use a micro electromechanical system (MEMS) device to receive and redirect the source light to the desired output direction. A conversion coating may be applied to the operative surface of the MEMS device to convert the source light into a converted light.10-04-2012
20100245980SYSTEM AND METHOD FOR A MEMS DEVICE - Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.09-30-2010
20100245977POST-RELEASE ADJUSTMENT OF INTERFEROMETRIC MODULATOR REFLECTIVITY - In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interferometric modulator, where the reflectivity modifying layer shifts or trims the shape of the interferometric modulator's wavelength reflectivity spectrum relative to the absence of the reflectivity modifying layer.09-30-2010
20100245978COLOUR CHANGE MATERIAL AND METHOD OF MANUFACTURE THEREOF - Metal nanovoids are grown on a stretchable plastic film. The fabrication proceeds by assembling the template of a single layer of close packed silica spheres on a conducting substrate. A conducting layer is then electrochemically grown on top to form a master. An elastomeric precursor is then coated on the master (e.g. by spinning) and is cured before removal. The resulting plastic film is then coated with a thin (e.g. 20 nm) layer of noble metal (e.g. Au, Ag or Cu), to produce a flexible film. Applications for such tuneable structural colour would be coating of injection moulded artefacts, such as mobile phone covers, car bodies to form an iridescent skin, wall and fascia decorations, loudspeaker coatings, architectural tent coverings, and clothing.09-30-2010
20120127559HOLOGRAPHIC VISUALIZATION SYSTEM COMPRISING A HIGH DATA REFRESH RATE DND DRIVER ARRAY - A DND chip is disclosed. In one aspect, the chip includes a 2D DND array of DND elements logically arranged in rows and columns, and a DND driver architecture for actuating the DND elements. The DND driver has a set of first drive lines along the rows and a set of second drive lines along the columns, a set of first line drivers for each biasing one line from the set of first drive lines and a set of second line drivers for each biasing a line from the set of second drive lines. A plurality of second line drivers are spatially grouped together to serve a block of DND elements, and that plurality of second line drivers are spatially covered substantially completely by at least some DND elements of the block of DND elements. A holographic visualization system including the DND chip is provided.05-24-2012
20120127558DIFFRACTIVE OPTICAL NANO-ELECTRO-MECHANICAL DEVICE WITH REDUCED DRIVING VOLTAGE - A DND device is disclosed. In one aspect, the device includes a nano-mirror (05-24-2012
20120127557APPARATUS AND METHOD FOR IRRADIATING A MEDIUM - An apparatus includes an irradiating unit, a spatial light modulator configured to modulate a wavefront of an electromagnetic wave, a device configured to receive a signal from a position of the medium by irradiating the electromagnetic wave, and a controller configured to control the spatial light modulator based on the received signal so that the irradiated electromagnetic wave with the modulated wavefront focuses on the position in the medium.05-24-2012
20100208329 SLM Device and Method - The present invention describes a micro-mechanical light modulator including a two-dimensional array of modulating elements, in which small modulating elements are organized into larger modulating areas. Using smaller elements organized into larger areas increases the resonant frequency of the modulators and the modulation speed. In some implementations, multiple modulating elements are driven by shared signals, allowing the number of elements driven and the resulting area to increase without increasing the data traffic. In some implementations, an anamorphic optical path is used that leaves individual modulating elements of the micro-mechanical light modulator that are operated as a single area unresolved at an image plane of the workpiece being patterned. Devices and methods are described.08-19-2010
20120170103Spatial Light Modulators and Fabrication Techniques - We describe a method of fabricating an optical MEMS spatial light modulator (SLM). The method comprises providing an optical MEMS SLM wafer bearing multiple optical MEMS SLM devices and spin coating a glass wafer with an organic adhesive, in some preferred embodiments benzocyclobutene. The adhesive is patterned, preferably by uv lithography, to define multiple ring-shaped bond lines each sized to fit around one of the SLM devices, and the glass wafer is then bonded to the MEMS SLM wafer, preferably at a temperature of between 100° C. and 450° C., such that each of the ring-shaped bond lines encompasses a respective SLM device. A portion of the glass wafer adjacent an SLM device is then removed to reveal electrical connectors to the device and the devices are tested before dicing and packaging, to enable selective packaging of working devices.07-05-2012
20120212795INTERFEROMETRIC MODULATOR IN TRANSMISSION MODE - A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.08-23-2012
20120212796SYSTEM AND METHOD OF REDUCING COLOR SHIFT IN A DISPLAY - A system and method of reducing color shift in a display includes an interferometric modulator display configured to reflect light from at least one light source and through at least one converging optical element in an optical path from the light source to a viewer via the display. In one embodiment, the converging optical element comprises a diffractive optical element.08-23-2012
20090059346Interferometric Optical Modulator With Broadband Reflection Characteristics - An optical device suitable for forming a pixel in a video display. The optical device includes a first layer having a first refractive index; a second layer over the first layer, the second layer having a second refractive index less than the first refractive index; and a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index; and a fourth layer that is at least partially optically absorptive, wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.03-05-2009
20100060973Imaging Device for Influencing Incident Light - Disclosed is an imaging device for influencing incident light, comprising an optical element in the form of a mirror and an actuator for deforming the optical element. The optical element has a surface facing the incident light. The actuator laterally grips the optical surface of the optical element in order to deform the optical element.03-11-2010
20090310209Tunable optical Active Elements - The invention is directed to different optical active elements (12-17-2009
20090015903Complex Microdevices and Apparatus and Methods for Fabricating Such Devices - Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB®).01-15-2009
20120327503ILLUMINATION CONTROL - An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.12-27-2012
20120327502TUNABLE METAMATERIALS AND RELATED DEVICES - A tunable metamaterial comprising a membrane on which is arranged a two-dimensional array of elements to form a metamaterial, wherein the array is subdivided into blocks of multiple elements, each block being separated from adjacent blocks by a gap to allow each block to be moveable relative to its adjacent blocks. The lattice of the metamaterial and hence its properties are tuned by inducing adjacent blocks to move away from each other or towards each other either in-plane or out-of-plane in a controllable manner in response to an electrical, thermal or optical control signal.12-27-2012
20120092750LIGHTING DEVICE FOR A DIRECT VIEWING DISPLAY - The present invention relates to a lighting device having a planer optical fiber and at least one light source device for illuminating a controllable spatial light modulator, wherein the optical fiber comprises a light-conducting core and a cover coating, and the light modulator comprises a pixel matrix, the light source device is disposed on the side of the optical fiber, and the light emitted by at least one light source of the light source device propagates laminarly in the optical fiber. The lighting unit according to the invention is characterized in that the planar optical fiber comprises a deflecting coating having a selective polarization function for laminarly decoupling and deflecting the evanescent wave field of the light propagating in the optical fiber, wherein the thickness of the cover coating reduces in the direction of light propagation.04-19-2012
20100149624METHOD AND DEVICE FOR COMPENSATING FOR COLOR SHIFT AS A FUNCTION OF ANGLE OF VIEW - In one embodiment of the invention, a display is provided and includes a plurality of interferometric display elements. The display further includes at least one diffuser. Optical properties of the diffuser are selected to reduce color shift of the display when viewed from at least one angle.06-17-2010
20100149623METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY - A method of fabricating a micro-mirror assembly. The method comprises the steps of: (a) forming a pair of electrodes spaced apart on a surface of a substrate; (b) depositing a layer of sacrificial material over the electrodes and the substrate; (c) defining a stem opening in the sacrificial material so as to form a scaffold; (d) depositing a layer of resiliently flexible material over the scaffold; (e) depositing a metal layer over the flexible layer; (f) etching through the metal layer and the flexible layer to define an individual micro-mirror; and (g) removing the sacrificial material to provide the micro-mirror assembly. The method produces a micro-mirror assembly with minimal number of MEMS fabrication steps.06-17-2010
20100128338PLANARITY OF PIXEL MIRRORS - A method of forming an electronic device includes providing a patterned lower metal layer over a substrate and a first sacrificial layer there between. A second sacrificial layer is formed over the metal layer, and a portion thereof is removed. A third sacrificial layer is formed over the second sacrificial layer, and an upper metal layer is formed over the third sacrificial layer. A portion of the upper metal layer is removed, and the first, second and third sacrificial layers are removed.05-27-2010
20130021662DISPLAYS HAVING SELF-ALIGNED APERTURES AND METHODS OF MAKING THE SAME - A display for imaging includes an aperture layer and a set of light modulators. The aperture layer includes a light absorbing layer disposed over a light reflecting layer, each layer having a set of apertures defined therein. The light absorbing layer includes light absorbing material suspended in a photosensitive resin. The set of light modulators are for modulating light passing through the apertures defined in the aperture layer.01-24-2013
20130170012MICROMIRRORS FOR COLOR ELECTRONIC PAPER AND DESIGN STRUCTURES FOR SAME - Direct view color displays and design structures of direct view color displays. The direct view displays include micromirrors having un-tilted and tilted states and multiple color filters or color reflectors.07-04-2013
20130176611CIRCUITS FOR CONTROLLING DISPLAY APPARATUS - A display apparatus includes an array of light modulators. Each light modulator has a first actuator configured to drive the light modulator into a first state and a second actuator configured to drive the light modulator into a second state. The display apparatus also includes a control matrix including, for each light modulator in the array, a single actuation voltage interconnect. The actuation voltage interconnect is configured to apply a first drive voltage to the first actuator of the light modulator and apply a second drive voltage to the second actuator of the light modulator. In addition, the actuation voltage interconnect is configured to control application of a data voltage to a latch circuit to control the application of the first and second drive voltages to the first and second actuators.07-11-2013
20080218843MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING A POROUS SURFACE - A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode having a first surface; and a movable reflective electrode with a second surface facing the first surface. The movable reflective electrode is movable between a relaxed and actuated (collapsed) position. An aluminum layer is provided on either the first or second surface. The aluminum layer is then anodized to provide an aluminum oxide layer which has a porous surface. The porous surface, in the actuated position, decreases contact area between the electrodes, thus reducing stiction.09-11-2008
20130100520Low voltage drive for MEMS ribbon array light modulators - A series bias voltage increases the sensitivity of a MEMS ribbon to control signal voltages. This effect is obtained because of the nonlinear dependence of ribbon deflection on applied voltage. The resulting low-voltage operation of MEMS ribbons makes them more compatible with high speed electronics.04-25-2013
20130128338METHOD OF FORMING A FABRY-PEROT TUNABLE FILTER - A method of forming a tunable Fabry-Perot filter includes forming a first reflective layer on a surface of a substrate, forming a sacrificial layer over the first reflective layer, forming a second reflective layer over the sacrificial layer, defining vias through the sacrificial layer, forming a support body over the sacrificial layer which extends into the vias and removing the sacrificial layer to define a gap intermediate the first and second reflective layers.05-23-2013
20090027760Transflective electro-wetting display device - An exemplary transflective electro-wetting display (EWD) device includes an upper substrate, a lower substrate opposite to the upper substrate, a first polar liquid disposed between the upper and lower substrates, a second, colored, non-polar liquid disposed between the upper and lower substrates, and a reflective pattern disposed at the lower substrate. The second liquid is immiscible with the first liquid. An area of the reflective pattern covered by the second liquid varies according to an area of the lower substrate covered by the second liquid.01-29-2009
20080198442CONTRAST WITH FAST RESPONSE LIGHT SOURCE - Embodiments of the present invention generally relate to spatial light modulator devices, and more particularly to a display system and method of using one or more fast response light source, such as solid state light sources, and one or more spatial light modulator devices to improve the contrast ratio of the display system.08-21-2008
20120275011MEMS MICROMIRROR AND MICROMIRROR ARRAY - A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.11-01-2012
20120281270DEVICES AND METHODS FOR ACHIEVING NON-CONTACTING WHITE STATE IN INTERFEROMETRIC MODULATORS - This disclosure provides systems, methods and apparatus for providing white light color output from an electromechanical systems (EMS) device with reduced likelihood of stiction. In one aspect, interferometric modulators are configured to provide a white color output while having a non-zero modulator gap dimension. Such a feature can reduce problems associated with zero modulator gap dimensions such as stiction. Various methodologies can be used to yield such a non-zero modulator gap and a white color output. In some implementations, for example, an optical element that introduced wavelength dependent phase shift is used. In some implementations this wavelength dependent phase shifting optical element includes a stack of color filters, a hologram, a diffraction grating, or layers of material having specific thicknesses and wavelength dependent indices of refraction.11-08-2012
20130155488System Producing True Colors Using a Digital Micromirror Device Projector and Method for Controlling Same - The present invention is directed to a method of utilizing a digital micromirror device (DMD) to spectrally matching a standard or device-independent color. DMD can be fitted on an integrated chip and can provide more than one thousand (1,000) color primary channels for low metameric color matching producing a spectrally matched batch color. This represents a two orders of magnitude improvement in color matching.06-20-2013
20120019894Interferometric modulation devices having triangular subpixels - At least some subpixels in an interferometric modulator display are formed in a triangular shape. Such triangular subpixels may be formed and/or addressed in a variety of manners. At least some individual triangular subpixels may be separately addressable. However, a plurality of triangular subpixels may be addressable as a group, e.g., as a group of 2, 3, 4 or more. A single pixel may include varying numbers of triangular subpixels. For example, a single pixel may include 3, 6, 9, 12, 15, 18, 21 or some other number of triangular subpixels. Alternatively, a single pixel may include 4, 8, 12, 16, 20, or some other number of triangular subpixels. A single pixel may include triangular subpixels that are configured to be separately addressable and/or triangular subpixels are configured to be addressable as a group.01-26-2012
20120019893WSS With Pixel Gap Compensation - An optical device compensates for decreased transmission of light caused by gaps between mirrors of a MEMS array. The optical device employs MEMS mirrors having non-reflecting regions on them disposed such that reflecting regions of the MEMS mirrors have substantially the same optical throughput, or an additional optical element having increased transmission at those spatial positions where light impinging on the gaps passes through. Alternatively, the optical device may employ a filter having spectral transmission characteristic with increased transmission at those wavelengths of dispersed light that impinge on the gaps.01-26-2012
20130194654BIAXIAL MEMS MIRROR WITH HIDDEN HINGE AND STAGGERED ELECTRODES - A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) including a coarsely aligned orthogonal vertical comb drive and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a reflective body/mirror layer, a ground/hinge layer and a hot electrode/substrate layer. To increase the amount of surface area available for the hot and ground electrodes, the dimensions of the ground/hinge layer are extended longitudinally or laterally across the air gap between reflective layers to beneath the adjacent reflective layer. Ideally, diffraction patterns are formed on the surface of the ground/hinge layer to prevent stray light from reflecting back into the system.08-01-2013
20120087000PROGRAMMABLE LIGHT SOURCE - A programmable spectrum light source is disclosed. In one embodiment, the programmable light source comprises a light source, a spectrum separation system that splits the light into its constituent spectral components, a light modulator that modulates the spectral components according to a required spectral envelope and a light recombination system that recombines the shaped spectral components to produce light with a required spectrum.04-12-2012
20120086999Microwindow device - The present invention provides a transmissive Spatial Light Modulator with fast response speed and higher brightness using micro-windows having switching transistors on said window so that the fill factor of light transferring area can be maximized. Conventional systems have transistors out of windows which substantially reduce the area to pass incoming light, because transistors are usually opaque and block light transmission. Transmissive Spatial Light Modulator requires simpler and smaller optics than reflective Spatial Light Modulator.04-12-2012

Patent applications in class Shape or contour of light control surface altered

Patent applications in all subclasses Shape or contour of light control surface altered