Entries |
Document | Title | Date |
20080204734 | METHOD AND SYSTEM FOR MONITORING PHOTOLITHOGRAPHY PROCESSING BASED ON A BATCH CHANGE IN LIGHT SENSITIVE MATERIAL - A method for monitoring photolithography processing includes monitoring application of a light sensitive material to the surface of each of a plurality of substrates and detecting that a supply of the light sensitive material applied to the substrates has changed from a first batch of light sensitive material to a second batch light sensitive material. A change in photolithography process results caused by the change from the first batch to the second batch of light sensitive material is determined. Also included is initiating corrective action based on the change in photolithography process results. | 08-28-2008 |
20080259325 | VISION INSPECTION SYSTEM DEVICE AND METHOD - A course material that is applied to a substrate during fabrication of a composite item is inspected by a system that includes a vision assembly. The vision assembly includes an area light, a line generator, a sensor, and an image processor. The area light illuminates an area of the course material. The line generator generates a line of illumination across the area. The sensor captures an image of the area. The image processor analyzes the image. The image processor is configured to identify debris on the course material in response to the area light being activated and the image processor is configured to identify placement aberrations in response to the line generator being activated. | 10-23-2008 |
20080273195 | SYSTEM, METHOD AND APPARATUS FOR IN-SITU SUBSTRATE INSPECTION - A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle β relative to the first surface of the substrate. A method for inspecting a substrate is also included. | 11-06-2008 |
20080304053 | Apparatus and method for coating and inspecting objects - An apparatus and method for inspecting objects for an inspection criteria thereon includes a conveyor to receive a plurality of objects, a removal assembly located along the conveyor for removing the objects, and an inspection system located along the conveyor prior to the removal assembly for inspecting the objects against a predetermined inspection criteria to determine to reject or pass the inspected objects and to actuate the removal assembly to remove the inspected objects from the conveyor that are passed and to leave the inspected objects that are rejected on the conveyor to subsequently exit the conveyor. | 12-11-2008 |
20090009753 | INSPECTION METHOD AND INSPECTION DEVICE - An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects. | 01-08-2009 |
20090015824 | Optical Multiwavelength Window Contamination Monitor for Optical Control Sensors and Systems - A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side includes a radiation source to emit a radiation signal, a diffusing reflector to diffusively spread the radiation signal emitted by the radiation source over the first side of the transmissive window, a radiation detector to detect, at the second side of the transmissive window, the diffusively spread radiation signal transmitted by the transmissive window, and to generate a detected radiation signal based on the detected diffusively spread radiation signal, and a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least the detected radiation signal. | 01-15-2009 |
20090066940 | SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS - A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio. | 03-12-2009 |
20090066941 | METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT THEREOF - A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy. | 03-12-2009 |
20090091750 | Method For Inspecting Pattern Defect And Device For Realizing The Same - When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects. | 04-09-2009 |
20090213364 | SURFACE INSPECTION METHOD AND INSPECTION DEVICE USING THE SAME - If an illuminance of a measurement spot is limited in order to prevent heat damage on an article to be inspected, since detection sensitivity and a detection speed are in a relation of trade-off, it is difficult to improve one of them without sacrificing the other or to improve both of them. Also, there is a problem that the detection sensitivity is lowered on an outer circumference portion than on an inner circumference portion of the article to be inspected. | 08-27-2009 |
20090251690 | OPTICAL APPARATUS FOR DEFECT INSPECTION - An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension. | 10-08-2009 |
20090262339 | Inspection apparatus and inspection method - A defect inspection apparatus enable to efficiently perform a temperature control without involving an enlarged size can be achieved. | 10-22-2009 |
20090279079 | METHOD AND APPARATUS FOR INSPECTING DEFECTS - To provide a defect inspection apparatus for inspecting defects of a specimen without lowering resolution of a lens, without depending on a polarization characteristic of a defect scattered light, and with high detection sensitivity that is realized by the following. A detection optical path is branched by at least one of spectral splitting and polarization splitting, a spatial filter in the form of a two-dimensional array is disposed after the branch, and only diffracted light is shielded by the spatial filter in the form of a two-dimensional array. | 11-12-2009 |
20090279080 | DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION OF A WAFER - A method, a device and the application for the inspection of defects on the edge region of a wafer ( | 11-12-2009 |
20090284737 | SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS - A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio. | 11-19-2009 |
20090323051 | OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS - An optical inspection apparatus irradiates a light beam onto the outer surface of an object to be inspected, in the form of an illumination spot having an illumination intensity which is higher in the outer peripheral part of the object to be inspected than in the inner peripheral part thereof while uniformly maintains a temperature rise caused by the irradiation of the light beam, over the outer surface of the object to be inspected, in order to prevent the effective entire signal value of a scattered light signal from lowering, without lowering the linear speed of a movable stage for the object to be inspected in the outer peripheral part of the object to be inspected, thereby it is possible to prevent lowering of the detectability for a foreign matter or a defect, for preventing lowering of inspection throughput. | 12-31-2009 |
20100020314 | EQUIPMENT AND METHOD FOR DETECTING FOREIGN MATTERS - A foreign matter detector and a foreign matter detecting method are provided, with which foreign matter detection performance can be improved. The foreign matter detector comprises: a means for irradiating first inspection light and second inspection light to an inspection area such that their incident planes are perpendicular to each other; a measuring means for measuring the spectrum of reflected light, the reflected light being a reflection of the inspection light at the inspection area; and a means for determining, by analyzing the spectrum of the reflected light, whether any foreign matter is intermingled or not. | 01-28-2010 |
20100020315 | METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT THEREOF - A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy. | 01-28-2010 |
20100053602 | HARD DISK INSPECTION APPARATUS - A hard disk inspection apparatus comprises a disk holding device which holds a hard disk; a light source which generates a light that illuminates an inspection region portion of a hard disk that is held by the disk holding device; a light guide which has a branched shape and guides a light from the light source to a plurality of light projecting parts; and an image pickup device which takes an image by receiving reflected light from the inspection region portion; wherein an illumination light is shone onto the inspection region from plural courses by shining the illumination light that is guided by the light guide onto the inspection region front the plurality of light projecting parts. | 03-04-2010 |
20100060887 | METHOD FOR DETECTING MEMBRANE MODULE FLAW WITH THE APPLICATION OF FLUORESCENT PARTICLES - Provided is a method for detecting a membrane module flaw, including: preparing fluorescent particles having a size of 0.5 to 1.5 μm using silica; injecting the fluorescent particles in a concentration of greater than 0 mg/mL and less than 0.1 mg/mL or equal into a membrane module used in a sewage and wastewater treatment process; operating a pump to apply a pressure such that the fluorescent particles injected into the membrane module leak to the outside of the membrane module, in case that the membrane module has a flaw; acquiring a digital image of the membrane module; and discriminating a colored portion from a non-colored portion in the digital image. | 03-11-2010 |
20100128261 | DEVICE FOR DETECTING AND CLASSIFYING RESIDUAL OXIDE IN METAL SHEET PRODUCTION LINES - Specially designed for the fully automated detection of residual oxide stains (residual scale) and classification thereof in metal sheet production lines, with no to stop the line, the invention consists of a framework or box ( | 05-27-2010 |
20100188656 | Surface Inspection Method and Surface Inspection Apparatus - Light from a light source becomes two illumination beams by a beam splitter. The beams are irradiated onto a semiconductor wafer from two mutually substantially orthogonal azimuthal angles having substantially equal elevation angles to form illumination spots. When the sum of scattered, diffracted, and reflected lights due to the illumination beams is detected, influence of the anisotropy which a contaminant particle and a defect existing in the wafer itself or thereon have with respect to an illumination direction, can be eliminated. | 07-29-2010 |
20100225904 | Defect Inspection Tool For Sample Surface And Defect Detection Method Therefor - A defect inspection tool includes an illumination optical system for irradiating light to a surface of an object, and a detection optical system for detecting light scattered from the surface of the object which is irradiated. The detection optical system include an analyzer, a photoelectric converting device for receiving the scattering light passed through the analyzer, a member for saving a database prepared through an actual measurement or a calculation in correspondence with a condition of the illumination optical system, that of the detection optical system, a kind of an object to be inspected, and a rotation angle of the analyzer, and a member for adjusting an angle of the analyzer by selecting an angle of the analyzer from a database saved in the member for saving on a basis of an inspection recipe after receiving the inspection recipe to the defect inspection tool. | 09-09-2010 |
20100259750 | Appearance Inspection Apparatus - An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section. | 10-14-2010 |
20100271625 | Surface Inspection Method and Surface Inspection Apparatus - A surface inspection method and a surface inspection apparatus in which a plurality of photodetectors are arranged in a plurality of directions so that light scattered, diffracted or reflected on a surface of an object to be inspected or in the vicinity of the surface is detected and a plurality of signals obtained by this are subjected to weighted addition processing or weighted averaging processing by linear combination. | 10-28-2010 |
20100271626 | INSPECTION METHOD AND INSPECTION DEVICE - An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects. | 10-28-2010 |
20100290040 | SENSOR ELEMENT FOR A SORTING DEVICE AND METHOD FOR SORTING PRODUCTS - The invention relates to a sorting device and a method for sorting products ( | 11-18-2010 |
20100296083 | Detection and identification of solid matter - Detection and identification of minute quantities of condensed or solid state materials with significantly improved performance over the present state-of-the-art, comprises illuminating a small target particle with an appropriate laser radiation at a wavelength that is strongly absorbed by the target. The resulting temperature rise is observed by monitoring the increased blackbody radiation from the sample. An unambiguous determination of the target compound or the target material composition can be achieved through the use of a tunable laser that generates an absorption fingerprint of the target. | 11-25-2010 |
20110051130 | FOREIGN SUBSTANCE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE - A foreign substance inspection apparatus includes a light projecting unit, a detector which detects the intensity of scattered light of light projected onto the surface of an object to be detected by the light projecting unit, in association with the two-dimensional coordinate position on the surface, and a processing unit. The relationship between the intensity of the scattered light detected by the detector and the particle size of the foreign substance differs depending on the two-dimensional coordinate position on the surface. The processing unit determines, a conversion curve to convert the intensity of the scattered light detected by the detector into the particle size of the foreign substance, in accordance with the two-dimensional coordinate position of the foreign substance detected by the detector, and converts the intensity of the scattered light detected by the detector into the particle size of the foreign substance using the determined conversion curve. | 03-03-2011 |
20110051131 | INSPECTION DEVICE AND INSPECTION METHOD - An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value. | 03-03-2011 |
20110075135 | SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS - A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio. | 03-31-2011 |
20110075136 | FOREIGN MATTER INSPECTION APPARATUS AND FOREIGN MATTER INSPECTION METHOD - A foreign-matter inspection apparatus is implemented which allows the stable detection sensitivity to be maintained. A laser beam emitted from a laser apparatus is applied to a beam irradiation sample via an irradiation unit and a mirror. Then, the laser beam is captured into a beam-capturing camera via an image-forming lens and a beam-direction switching mirror. Based on the captured beam image, an image computational processing unit judges inclination of the laser beam, then adjusting the irradiation unit thereby to correct the inclination of the laser beam. Also, the beam is captured into the beam-capturing camera in specified number-of-times while focus of the laser beam is being changed by an arbitrary amount by the irradiation unit. Based on the captured beam, the focus of the laser beam is corrected by adjusting the irradiation unit. | 03-31-2011 |
20110085161 | Method and device for detecting soiling - A device for detecting soiling, having a light source, which emits a light beam, and an opaque layer having a first boundary surface and a second boundary surface, whereby the light beam emitted by the light source first impinges on the first boundary surface, and part of a light beam fraction, which is scattered at the second boundary surface, impinges on a receiver and forms a measuring signal, and hereby the first boundary surface is set up to scatter part of the incident light beam, and the part impinging on the receiver of the light beam, scattered at the first boundary surface, forms a reference signal, and the device is set up further to determine a measure for the soiling of the second boundary surface from the comparison of the reference signal and measuring signal. | 04-14-2011 |
20110090491 | IMAGE SENSOR INSPECTION DEVICE - An inspection device for visually inspecting an image sensor of a digital recording device, such as a digital camera. The inspection device includes a tubular housing and a lens mounted therein. The housing is configured to engage a lens interface of a camera body. A lighting assembly is provided that is configured to illuminate the image sensor when the inspection device is coupled to a digital camera body so that the image sensor may be visually inspected for contamination. | 04-21-2011 |
20110109901 | FOREIGN MATTER INSPECTION APPARATUS - Selection with alignment marks of an optimal template, its identification and similarity judgment are conducted by a calculation function of a correlation value provided to a foreign matter inspection apparatus. In other words, the foreign matter inspection apparatus includes unit for registering feature points of alignment marks formed on a surface of an inspected object, unit for collecting image data of the alignment marks formed on the surface of the inspected object and a data processor for extracting a feature point from the image data and calculating a correlation value of both feature points, and registers the image data of the alignment mark on the basis of a threshold value of the correlation value. | 05-12-2011 |
20110255082 | OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS - In the conventional contaminant particle/defect inspection method, if the illuminance of the illumination beam is held at not more than a predetermined upper limit value not to give thermal damage to the sample, the detection sensitivity and the inspection speed being in the tradeoff relation with each other, it is very difficult to improve one of the detection sensitivity and the inspection speed without sacrificing the other or improve both at the same time. The invention provides an improved optical inspection method and an improved optical inspection apparatus, in which a pulse laser is used as a light source, and a laser beam flux is split into a plurality of laser beam fluxes which are given different time delay to form a plurality of illumination spots. The scattered light signal from each illumination spot is isolated and detected by using a light emission start timing signal for each illumination spot. | 10-20-2011 |
20110267605 | FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPARATUS - In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image. | 11-03-2011 |
20120092656 | Defect Inspection Method and Defect Inspection Apparatus - Provided is a method for inspecting a defect on a surface of a sample, the method including the steps of comparing a haze signal distribution with a predetermined light intensity distribution to calculate pixel shift amounts of detection signals; and adding up shift corrected detection signals to detect a defect. | 04-19-2012 |
20120140212 | INSPECTION APPARATUS AND INSPECTION METHOD - A defect inspection apparatus emits light to a test object, detects reflected of scattered light from the test object and detects a defect in the test object The apparatus comprises a temperature-controlled part accommodating section that accommodates parts having a need for controlling a temperature, which is out of a plurality of parts in the defect inspection apparatus. A first temperature measuring instrument measures a temperature in the temperature-controlled part accommodating section; and a temperature control unit controls a temperature of the interior of the temperature-controlled part accommodating section at a prescribed temperature according to the temperature measured by the first temperature measuring instrument. Accordingly, a defect inspection apparatus can efficiently perform temperature control without involving an enlarged size can be achieved. | 06-07-2012 |
20120274931 | DEFECT DETECTION METHOD AND DEFECT DETECTION DEVICE AND DEFECT OBSERVATION DEVICE PROVIDED WITH SAME - The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope ( | 11-01-2012 |
20130021602 | Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal - A mode-locked laser system operable at low temperature can include an annealed, frequency-conversion crystal and a housing to maintain an annealed condition of the crystal during standard operation at the low temperature. In one embodiment, the crystal can have an increased length. First beam shaping optics can be configured to focus a beam from a light source to an elliptical cross section at a beam waist located in or proximate to the crystal. A harmonic separation block can divide an output from the crystal into beams of different frequencies separated in space. In one embodiment, the mode-locked laser system can further include second beam shaping optics configured to convert an elliptical cross section of the desired frequency beam into a beam with a desired aspect ratio, such as a circular cross section. | 01-24-2013 |
20130194568 | SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS - A surface inspection method for inspecting a surface H of an inspection subject having a specular surface H, including: a step in which the surface H of the inspection subject is irradiated with light L from an oblique direction; a step in which measurement is conducted of the intensity of diffracted light D that is diffracted by adhering foreign matter K among light that is regularly reflected by the surface H of the inspection subject; a step in which measurement is conducted of the intensity of scattered light S that is irregularly reflected by the adhering foreign matter K; and a step in which an adhering condition of foreign matter K on the surface H of the inspection subject is determined based on measurement results for the intensity of the diffracted light D that is regularly reflected, and the intensity of the scattered light S that is irregularly reflected. | 08-01-2013 |
20140049774 | DEW CONDENSATION DETECTION METHOD AND DEVICE - A dew condensation detection device includes: a light emitting unit for emitting a light flux that travels along a dew condensation detection surface of a member having the dew condensation detection surface; a changing unit for changing a diameter of the light flux; and an optical detector for receiving the light flux that has passed along the dew condensation detection surface. | 02-20-2014 |
20140160470 | INSPECTION APPARATUS - Light that is scattered by a defect on a wafer is very weak, and a PMT and an MPPC are used as detection methods for measuring the weak light with high speed and sensitivity. The methods have a function of photoelectronically converting the weak light and multiplying an electron, but have a problem in that a signal light is lost and an S/N ratio is reduced because the quantum efficiency of the photoelectron conversion is as low as 50% or less. Direct light is amplified prior to the photoelectron conversion. The optical amplification is an amplification method in which the signal light and light of pump light are introduced into a rare-earth doped fiber, a stimulated emission is caused, and the signal light is amplified. In the present invention, the optical amplification is used. The amplification factor is changed according to various conditions. | 06-12-2014 |
20140268117 | SYSTEM AND METHOD TO DETERMINE DEPTH FOR OPTICAL WAFER INSPECTION - A computer-based method for inspecting a wafer, including: storing, in a memory element for at least one computer, computer readable instructions; detecting a first light beam rotating in a first spiral about a first central axis; and executing, using a processor for the at least one computer, the computer readable instructions to generate, using the detected first light beam, an image including at least one shape, determine an orientation of the at least one shape or a size of the at least one shape, and calculate a depth of a defect in the wafer according to the orientation or the size. | 09-18-2014 |
20140354982 | APPARATUSES AND METHODS FOR MAGNETIC FEATURES OF ARTICLES - Provided herein are apparatuses and methods related thereto, wherein at least one apparatus includes: a photon emitting means configured to emit photons, wherein the photons are scattered from magnetic features of an article; a photon detector array configured to receive scattered photons; and a processing means configured to differentiate the magnetic features from the scattered photons. | 12-04-2014 |
20150022805 | Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal - An optical system for detecting contaminants and defects on a test surface includes an improved laser system for generating a laser beam and optics directing the laser beam along a path onto the test surface, and producing an illuminated spot thereon. A detector and ellipsoidal mirrored surface are also provided with an axis of symmetry about a line perpendicular to the test surface. In one embodiment, an optical system for detecting anomalies of a sample includes the improved laser system for generating first and second beams, first optics for directing the first beam of radiation onto a first spot on the sample, second optics for directing the second beam onto a second spot on the sample, with the first and second paths at different angles of incidence to the sample surface. In another embodiment, a surface inspection apparatus includes an illumination system configured to focus beams at non-normal incidence angles. | 01-22-2015 |
20150146199 | DEVICE AND METHOD FOR DETERMINING THE PRESENCE OF DAMAGE OR DIRT IN A DOPPLER LASER ANEMOMETRY PROBE PORTHOLE - A device for determining the presence of damage or dirt on a Doppler laser anemometry probe ( | 05-28-2015 |
20150349500 | POLARIZED RESIN FILM AND PROCESS FOR PRODUCING SAME - An object of the present invention is to provide a polarized vinylidene fluoride/tetrafluoroethylene copolymer resin film that can significantly reduce, when used as an optical film, the deterioration of the quality of video or still images formed by display elements. | 12-03-2015 |
20160054235 | SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD - Provided are a surface inspection apparatus and a surface inspection method. More particularly, disclosed are a surface inspection apparatus and a surface inspection method to allow for inspection of a foreign material on non-uniformly colored diffusive surfaces containing a metal or polymer material or the like. | 02-25-2016 |
20160063791 | Apparatus and Method for Checking Value Documents, in Particular Bank Notes, and Value-Document Processing System - An apparatus and method for checking value documents, in particular bank notes, and a value-document processing system having at least one sensor for capturing an electromagnetic radiation. Transmitted by a value document and generating corresponding first sensor signals and for capturing an electromagnetic radiation remitted by the value document and generating corresponding second sensor signals, and an evaluation device for checking whether the value document has a foreign object. In particular adhesive tape, taking into account the first and second sensor signals which correspond to the electromagnetic radiation respectively transmitted or remitted in the region of the edge of the value document. The apparatus and method prevent a deformation in the region of the edge of a value document from being identified as a foreign object. | 03-03-2016 |
20160069814 | ARTICLE EDGE INSPECTION - Provided herein is an apparatus, including a photon emitter and a photon detector array. The photon emitter is configured to emit photons onto an entire surface edge of an article. The photon detector array is configured to receive scattered photons from the entire surface edge of the article, and includes a number of photon detectors. The scattered photons are photons emitted from the photon emitter that are scattered from features of the surface edge of the article. | 03-10-2016 |
20160069815 | APPARATUSES AND METHODS FOR MAGNETIC FEATURES OF ARTICLES - Provided herein is an apparatus including a photon emitter configured to emit photons onto a surface of an article. In addition, the apparatus includes a photon detector array configured to receive photons scattered from surface features and magnetic features of the article. The photon detector array is configured to provide information for mapping the magnetic features. | 03-10-2016 |
20160146741 | MULTISPECTRAL IMAGING SYSTEM AND METHOD FOR DETECTING FOREIGN OBJECT DEBRIS - A multispectral imaging system and method and a system for composite layup are provided in order to detect foreign object debris during the fabrication of a composite structure. In the context of a method, a surface of a composite material is illuminated with near infrared light. The method also detects the near infrared light following interaction of the near infrared light with the composite material. Following detection, the method analyzes a spectrum of the near infrared light to detect foreign object debris upon the composite material. The method analyzes the spectrum of near infrared light by distinguishing between different types of foreign object debris as a result of comparing the spectrum of near infrared light to predefined spectral signatures of a plurality of different types of foreign object debris. The method may also determine the size and location of the foreign object debris. | 05-26-2016 |
20220136978 | ILLUMINATING SYSTEM, ILLUMINATING DEVICE, AND ILLUMINATION CONTROL METHOD - An illuminating system includes an illuminating device that emits inspection light with which an inspection target is illuminated, an information acquiring device that acquires information regarding the inspection target, and a control device that controls the inspection light on the basis of the information regarding the inspection target. | 05-05-2022 |