Entries |
Document | Title | Date |
20080225305 | Device for the Optical Analysis, Including Two-Dimensional, of a Thread or Yarn - A device for the optical analysis, including two-dimensional, of a thread or yarn (F) fed to a textile machine, said device comprising at least one light emitter element ( | 09-18-2008 |
20080252908 | CONTROLLING A FABRICATION TOOL USING SUPPORT VECTOR MACHINE - A fabrication tool can be controlled using a support vector machine. A profile model of the structure is obtained. The profile model is defined by profile parameters that characterize the geometric shape of the structure. A set of values for the profile parameters is obtained. A set of simulated diffraction signals is generated using the set of values for the profile parameters, each simulated diffraction signal characterizing the behavior of light diffracted from the structure. The support vector machine is trained using the set of simulated diffraction signals as inputs to the support vector machine and the set of values for the profile parameters as expected outputs of the support vector machine. After the support vector machine has been trained, a fabrication process is performed using the fabrication tool to fabricate the structure on the wafer. A measured diffraction signal off the structure is obtained. The measured diffraction signal is inputted into the trained support vector machine. Values of profile parameters of the structure are obtained as an output from the trained support vector machine. One or more process parameters or equipment settings of the fabrication tool are adjusted based on the obtained values of the profile parameters. | 10-16-2008 |
20080259357 | OPTICAL METROLOGY OF SINGLE FEATURES - The profile of a single feature formed on a wafer can be determined by obtaining an optical signature of the single feature using a beam of light focused on the single feature. The obtained optical signature can then be compared to a set of simulated optical signatures, where each simulated optical signature corresponds to a hypothetical profile of the single feature and is modeled based on the hypothetical profile. | 10-23-2008 |
20090002722 | STRUCTURE INSPECTION METHOD, PATTERN FORMATION METHOD, PROCESS CONDITION DETERMINATION METHOD AND RESIST PATTERN EVALUATION APPARATUS - Wavelength dispersion of intensity of light reflected from an evaluation object is measured. A complex refractive index of a substance forming the evaluation object and the environment are prepared. Virtual component ratios comprising a mixture ratio of the substances forming the evaluation object and the environment are prepared. Reflectance wavelength dispersions to the virtual component ratios are calculated. Similar reflectance wavelength dispersions having a small difference with the measured wavelength dispersion are extracted from the reflectance wavelength dispersions. Weighted average to the virtual component ratios used for calculating the similar reflectance wavelength dispersions are calculated to obtain a component ratio of the substance forming the evaluation object and the environment so that weighting is larger when the difference is smaller. A structure of the evaluation object is determined from the calculated component ratio. | 01-01-2009 |
20090002723 | Stage apparatus and vision measuring apparatus - A stage apparatus ( | 01-01-2009 |
20090046303 | PARAMETERIZED OPTICAL SYSTEM AND METHOD - A system for segmented parametric optimization of emissions from a light source, including a light source emitting light rays at a plurality of angles and an optic for directing light rays from the light source, the optic including at least one annular segment, the at least one annular segment being configured to optimize a characteristic of the emitted light rays, and a method for using and manufacturing the system. | 02-19-2009 |
20090051937 | Device and method for measuring profiles of electron beam and laser beam - A device for measuring profiles of an electron beam and a laser beam is provided with a profile measuring device | 02-26-2009 |
20090051938 | Multi-beam optical probe and system for dimensional measurement - A multi-beam optical probe according to illustrative embodiments of the present invention generally reduce the limitations, difficulties and disadvantages of the conventional measurement devices and techniques by providing a non-contact multi-beam optical probe apparatus and system for the dimensional measurement of objects. The narrow elongated probe provides at least two orthogonal, divergent or parallel laser beams, the reflection of each beam on the object being simultaneously detectable without moving the probe. | 02-26-2009 |
20090059242 | Three-dimensional measurement method and three-dimensional measurement apparatus - Images of a work piece in which measurement object is restricted to a specific point or domain are taken by a camera which takes the image of the work piece from a front-view direction and a camera which takes the image from obliquely above, and a height of each measurement object region is measured. Each pixel of the front-view image used in measurement processing is virtually disposed in a three-dimensional coordinate system including x- and y-axes constituting a coordinate system of the image and a z-axis indicating the height, and a perspective transform is performed to produce a processing result image expressing measurement result. A measurement value is set as the z-coordinate at the pixel which is a height measurement object, and the z-coordinates of other pixels are set at other pixels. A mark for identifying a position and an auxiliary line indicating the height are set at measurement object points and measurement object region in the image. | 03-05-2009 |
20090066970 | Arrangement and method for improving the measurement accuracy in the nm range for optical systems - A method and a device for improving the measurement accuracy in the nm range for optical systems are disclosed. The object is provided with a plurality of structures oriented in the X and Y-coordinate direction. The light beam coming from at least one light source defines an optical illumination path. | 03-12-2009 |
20090103109 | Optical modules and method of precisely assembling same - Optical modules and a method of precisely assembling the modules are provided. The method includes the step of providing a set of optical components including a plurality of beam shaping components for converting at least one initial shape in cross section of a laser beam to at least one desired shape in cross section and an optical mount for supporting the set of optical components. The method further includes holding and locating the optical mount relative to a reference axis. The method still further includes holding the optical components in position relative to the optical mount during the step of holding and locating wherein the positions of the beam shaping components are initial positions. The method includes directing a laser beam having the at least one initial shape at the set of optical components during the step of holding the optical components. The method further includes adjusting the initial positions of the beam shaping components to obtain final positions of the beam shaping components relative to the optical mount during the step of directing until the laser beam has the at least one desired shape. The method still further includes fixedly securing the optical components to the optical mount wherein the optical mount supports and is fixedly secured to the beam shaping components in their respective final positions after the step of adjusting when the laser beam has the at least one desired shape. | 04-23-2009 |
20090116040 | Method of Deriving an Iso-Dense Bias Using a Hybrid Grating Layer - Embodiments of methods for deriving an iso-dense bias using a hybrid grating profile are generally described herein. Other embodiments may be described and claimed. | 05-07-2009 |
20090153882 | Measuring Dimensional Parameters of Structures - Dimensional parameters of structures on a substrate are measured by providing a substrate with a structured surface. The structured surface includes a number of juxtaposed structural elements. A radiation source is configured to emit a beam of radiation having a wavelength in the infrared range. The substrate is illuminated with the beam of radiation. A signal corresponding to a part of the beam of radiation being transmitted through the substrate is detected. Dimensional parameters of the structural elements are calculated based on the transmitted beam signal. | 06-18-2009 |
20090161123 | METHOD AND SYSTEM FOR MEASURING PATTERNED STRUCTURES - A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure. | 06-25-2009 |
20090168078 | Measuring Instrument for Determining the Actual Condition of Wheel Sets - A measuring instrument has a first section for rolling a wheelset under lateral guidance of the wheelset into a measurement section with an auxiliary rail for supporting the wheelset on the outer edges of its wheels and a third section for rolling out the wheelset into the railway track, with the first and third section of the measuring instrument also designed as track panels and for which the optical beam devices under the measurement section are intended. The first and third section of the measuring instrument are flexibly embedded in the ballast of the superstructure of the railway track, while at least one of the optical beam devices is mounted vibration-free on the formation of the railway track in a pre-determined position in relation to the measurement section of the measuring instrument with no contact to the other parts of the measuring instrument. | 07-02-2009 |
20090185196 | GAP SENSOR ENABLING MOUNTING OF SYRINGE AND DISPENSER HAVING THE SAME - Disclosed herein is a gap sensor enabling the mounting of a syringe. The gap sensor includes an emitting part and a receiving part for measuring a distance to a substrate. A syringe mounting unit is integrally provided between the receiving part and the emitting part, so that the lower end of the syringe is inserted into and secured to the syringe mounting unit. The syringe mounting unit includes a mounting hole which holds the syringe to keep a distance between a laser beam spot formed by the emitting part and the receiving part and an outlet of the syringe constant, when the syringe is inserted into and secured to the syringe mounting unit. The syringe is directly inserted into the gap sensor to be secured thereto, thus enabling the convenient replacement of the syringe, and minimizing an error between the sensor and the outlet of the syringe which may occur during the replacement of the syringe, therefore allowing the syringe to be more precisely mounted. | 07-23-2009 |
20090231597 | FLOATING SHEET MEASUREMENT APPARATUS AND METHOD - A sheet measurement apparatus has a sheet disposed in a melt. The measurement system uses a beam to determine a dimension of the sheet. This dimension may be, for example, height or width. The beam may be, for example, collimated light, a laser, x-rays, or gamma rays. The production of the sheet may be altered based on the measurements. | 09-17-2009 |
20090303495 | Method and device for measuring heights of patterns - A method for measuring the heights of patterns of an object, including: a light emission, the light includes a propagation mode of interest for at least one wavelength of interest, an illumination of the surface of the object by the light, a reflection of the light by the surface of the object, a collection of the reflected light, a division of the wavefront of the reflected light into division components, by at least one pattern of the illuminated surface, a filtering of the collected light, including a modal filtering removing all modes other than the propagation mode of interest, for the wavelengths of interest, and from the filtered light, and for the wavelengths of interest, an extraction of information about phase differences between the division components. | 12-10-2009 |
20100073687 | Method For Precisely Measuring Position Of A Part To Be Inspected At A Part Inspection Station - A method for precisely measuring position of a part to be inspected at a part inspection station is provided. The method includes positioning a part having a part axis relative to a measurement axis at the part inspection station and scanning the positioned part with an array of planes of radiation so that the part occludes each of the planes of radiation over a measurement interval of the part to create a corresponding array of unobstructed planar portions of the planes of radiation. Each of the unobstructed planar portions contains an amount of radiation which is representative of a respective geometric dimension of the part. The method also includes measuring the amount of radiation present in each of the unobstructed planar portions to obtain measurement signals and processing the measurement signals to obtain a geometric measurement between the axes at the measurement interval. The geometric measurement may be a distance between the axes or angle between the axes. If the geometric measurement is outside an acceptable range of geometric values, the method may further include repositioning the part until the geometric measurement between the axes at the measurement interval is within the acceptable range of geometric values. | 03-25-2010 |
20100073688 | PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO LAYERS - A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal. | 03-25-2010 |
20100110450 | METHOD AND SYSTEM FOR INSPECTING BLADE TIP CLEARANCE - A method for inspecting blade tip clearance between at least one rotor blade and a case spaced radially outward from the rotor blade is provided. The method includes inserting a probe into an aperture defined in the case and emitting electromagnetic energy into the case using the probe. The method also includes detecting electromagnetic energy reflected from a blade tip portion of the rotor blade and determining a blade tip clearance defined between the blade tip and the case based on the detected electromagnetic energy. | 05-06-2010 |
20100118316 | AUTO FOCUS ARRAY DETECTOR OPTIMIZED FOR OPERATING OBJECTIVES - Provided are an apparatus and a method of measuring structures on a workpiece using an optical metrology system, the optical metrology system comprising an auto focus subsystem which includes a motion control system and a focus detector. The focus detector includes an array of sensors where each sensor has identification (ID). The focus detector measures the focus beam and converts the measurements into a focus signal for each sensor. The focus signal and associated ID of each sensor are transmitted to a processor that generates a best focus instruction. A motion control system utilizes the best focus instruction to move the workpiece to the best focus location. The auto focusing of the workpiece is performed to meet set operating objectives of the auto focus subsystem. | 05-13-2010 |
20100225931 | Method and Measuring Device for Measuring Translation of Surface - A surface ( | 09-09-2010 |
20100245850 | System For Indirectly Measuring A Geometric Dimension Related To An Opening In An Apertured Exterior Surface of A Part Based On Direct Measurements Of The Part When Fixtured At A Measurement Station - A system for indirectly measuring a geometric dimension related to an opening in an apertured exterior surface of a part such as an ammunition case based on direct measurements of the part when fixtured at a measurement station is provided. The system includes first and second holding devices for holding the part therebetween in a part-retaining position in which the part is firmly held between the devices at its end surfaces. In one embodiment, a portion of each of the holding devices extends into its respective opening in the part-retaining position. The system also includes a head apparatus which has a plurality of radiation sources for successively directing arrays of planes of radiation at the holding devices and at the part, and a plurality of receiver modules for measuring the amount of radiation present in unobstructed planar portions of the planes to obtain holding device and part signals. The system further includes a movable stage subsystem coupled to the head apparatus for translating the head apparatus. The system still further includes a signal processor for processing the holding device and part signals to obtain data and a data processor for processing the data to obtain the direct measurements. The data processor determines the geometric dimensions related to the openings based on the direct measurements. | 09-30-2010 |
20100245851 | METHOD AND APPARATUS FOR HIGH-SPEED UNCONSTRAINED THREE-DIMENSIONAL DIGITALIZATION - A method and a system for optical three-dimensional (3-D) digitalization of physical objects, suitable for moving scenes, unattached to locating devices, utilizing structured light in the form of a plurality of overlapped patterns free of any intensity features, capable of obtaining frames of 3-D coordinates and textural color at video frame rates. | 09-30-2010 |
20100259769 | OPTICAL MEASURING APPARATUS, OPTICAL MEASURING METHOD, AND OPTICAL MEASUREMENT PROCESSING PROGRAM - An optical measuring apparatus includes a light transmission unit, a light reception unit, a measurement value calculation unit, and a correction unit. The light transmission unit forms a beam of light that focuses in a measurement area where a measurement target object is placed and scans the measurement area with the beam of light. The light reception unit receives the beam of light that has passed through the measurement area and outputs a received-light signal on the basis of the received beam of light. The measurement value calculation unit calculates a measurement value that represents the dimension of the measurement target object on the basis of the received-light signal. The correction unit corrects the measurement value on the basis of the amount of change in the strength of the received-light signal per unit of time of scanning the beam of light. | 10-14-2010 |
20100271638 | Transmissive Dimension Measuring Device - There is provided a transmissive dimension measuring device in which a user can intuitively and easily adjust optical axes of a projector and an optical receiver, and in which a suitable action can be immediately taken when contamination is attached to a light projecting surface of the projector and a light receiving surface of the optical receiver. An incident light position display unit provided on the optical receiver expresses a light projecting spot in a pseudo manner by making an LED corresponding to an incident light position turn on, the light projecting spot being incident on the optical receiver arranged with a predetermined interval to the projector which projects light. The incident light position display unit is provided on an upper surface side opposite to a bottom surface that is a surface on which the optical receiver is installed on a base. | 10-28-2010 |
20100315654 | LIDAR Instrument System and Process - An apparatus and systems used to measure the height of a liquid in a well or a tank and in particular to those apparatus and systems which use coherent light or laser for such measurement. The apparatus and systems will also measure respective elevations of multiple overlying immiscible fluid layers. The method entails generating coherent light or laser beams and the timing of its travel to either a liquid surface or floating object and its return to a receiving sensor. The timing of the receipt of the signals is processed to determine the relative height of a fluid surface in a chemical or fuel tank or groundwater well. The apparatus and systems provide multiple improvements over current methods of measuring fluid levels in wells and tanks. Improvements include increased accuracy due to reduction in human error when making measurements and elimination of environmental hazards involving the release and spreading of contaminants in soil and groundwater as can be caused by several current measurement methods. | 12-16-2010 |
20110007328 | DEVICE FOR OPTICAL DISTANCE MEASUREMENT - The invention relates to a device for optical distance measurement, particularly to a handheld device, comprising a transmission unit ( | 01-13-2011 |
20110013200 | REFERENCE SPHERE DETECTING DEVICE, REFERENCE SPHERE POSITION DETECTING DEVICE, AND THREE-DIMENSIONAL-COORDINATE MEASURING DEVICE - A reference sphere detecting device used for a reference sphere position detecting device comprises an optical unit having a laser light source, a collective lens for collecting light from the laser light source and irradiating the light to a reference sphere positioned at or near a front focal position, a first image pickup device for receiving and detecting reflected light from the reference sphere, the first image pickup device being disposed at a rear focal position of the collective lens; driving units for rotationally moving the optical unit about a reference point; and a control unit for controlling the driving units on the basis of the position at which the reflected light is received and rotationally moving the optical unit so that the reflected light reaches a predetermined reference position of the first image pickup device. | 01-20-2011 |
20110019207 | METHOD FOR OPTICAL CHARACTERISATION - A method for the optical characterisation of repeat units repeated in a regular manner so as to form a diffraction structure, each repeat unit including at least one geometric pattern, each of the patterns being produced, at least in part, using a porous material. The method includes determining the geometric parameters of the patterns and performing a scatterometric acquisition of the experimental optical response of the diffraction structure placed in a chamber at a given pressure, the presence of an adsorbable gaseous substance in the chamber causing condensation of the adsorbable gaseous substance in at least one part of open pores of the patterns of the structure. The method also includes determining the theoretical optical response of the diffraction structure from the determined geometric parameters and by adjusting the optical index of the material of the area of each of the patterns, in which the adsorbable gaseous substance has condensed, so as to make the difference between the experimental response and the theoretical response less than or equal to a given threshold. | 01-27-2011 |
20110058183 | MEASURING APPARATUS - Provided is a measuring apparatus for performing a highly accurate measurement of a three-dimensional shape having a rectangular groove shape portion, such as a micromachine, by using a contact tip formed of a fine particle, in which the contact tip is coupled to a holding portion via a flexible support member and a transparent fixed member, and a laser beam is condensed by an objective lens to be focused on a bottom surface of the contact tip so that the contact tip is brought into contact with a surface of an object to be measured by an optical radiation pressure, to thereby allow a highly accurate geometry measurement to be performed by adjusting a direction of vibration of the contact tip even when the object to be measured has a three-dimensional structure having a rectangular groove shape portion. | 03-10-2011 |
20110063628 | APPARATUS AND METHOD FOR MEASURING THE LIQUID LEVEL OF MOLTEN METAL - An apparatus for measuring the liquid level of molten metal comprises an image measuring device ( | 03-17-2011 |
20110069323 | TIRE SHAPE INSPECTION METHOD AND TIRE SHAPE INSPECTION DEVICE - Disclosed is a tire shape inspection method that can reliably and without misidentification perform accurate shape defect inspection in a short period of time by excluding measurement values in a range in which embossed marks are formed from distribution information for surface height measurement values on the sidewall surface of a tire. In the method, a processor automatically detects the positions of the embossed marks based on sample surface shape information obtained from a sample of the tire, and automatically sets coordinate information for a mask range surrounding the area where said marks are present (S | 03-24-2011 |
20110069324 | Modulator, Apparatus for Obtaining Light Field Data Using Modulator, and Apparatus and Method for Processing Light Field Data Using Modulator - A technology of acquiring and processing light field data for images is provided. A light field data acquisition apparatus includes a modulator with an attenuation pattern to spatially modulate a | 03-24-2011 |
20110075159 | METHOD AND APPARATUS OF A PORTABLE IMAGING-BASED MEASUREMENT WITH SELF CALIBRATION - A portable imaging-based measurement device is developed to perform 2D projection based measurements on an object that is difficult or dangerous to access. This device is equipped with self calibration capability and built-in operating procedures to ensure proper imaging based measurement. | 03-31-2011 |
20110102811 | APPARATUS AND METHOD FOR MEASURING CYLINDRICALLY-SHAPED OBJECT AND APPARATUS FOR INSPECTING TIRE APPEARANCE - A measuring apparatus for automatically measuring the height, the dimensions of the inner and outer surfaces, and the shape of a cylindrically-shaped object. The measuring apparatus includes a measuring head vertically moving along a positioning guide supported by a support post integral with a measuring table, a height displacement measuring device, which comprises a laser distance meter provided on the measuring table, and an arithmetic processing unit. The measurement starts as the measuring head is raised by a weight from a measuring start position of the measuring table. The inner and outer surfaces of a tire are measured based on the measurements by an inner surface measuring device provided with three laser distance meters mounted to the measuring head and an outer surface measuring device having a laser distance meter and the displacement change measurement of the measuring head by the height displacement measuring device. Required dimensional values are calculated from the measured values, using the arithmetic processing unit. | 05-05-2011 |
20110128555 | BROAD VIEWING ANGLE DISPLAYS AND USER INTERFACES - Disclosed are methods and systems for displaying images, and for implementing volumetric user interfaces. One exemplary embodiment provides a system comprising: a light source; an image producing unit, which produces an image upon interaction with light approaching the image producing unit from the light source; an eyepiece; and a mirror, directing light from the image to a surface of the eyepiece, wherein the surface has a shape of a solid of revolution formed by revolving a planar curve at least 180° around an axis of revolution. Another exemplary embodiment provides a method for implementing a floating-in-the-air user interface, including displaying a first image in a display space of a first floating-in-the-air display, inserting a real object into the display space of the first floating-in-the-air display, locating a location of the real object within the display space of the first floating-in-the-air display, locating the real object in the display space, and providing the location as input to the floating-in-the-air user interface. | 06-02-2011 |
20110134439 | MEANS AND METHOD FOR MEASURING AN ELEVATOR HOISTWAY - A device and a method for measuring an elevator hoistway, includes at least one or more laser aligners and a measuring element. The measuring element is provided with an essentially long handle for extending the measuring element into the laser beams transmitted by the laser aligners. | 06-09-2011 |
20110141490 | Three-Dimensional Base Setting Method For Image Data - A highly accurate three-dimensional measurement base is specified with simple settings. When a peak occurs in the positive Z-axis direction, a hemisphere or semi-spheroid figure (z≧0) is placed to contain a position (x | 06-16-2011 |
20110199620 | METHOD OF DETERMINING AN OVERLAP DISTANCE OF AN OPTICAL HEAD AND DIGITAL EXPOSURE DEVICE USING THE METHOD - An apparatus and a method for determining an overlap distance of an optical head is disclosed. Positions and light amount distributions of each light spot can be measured, which may be provided from an optical head to a substrate. Gaussian distribution may be applied to the positions and the light amount distributions to calculate a compensation model of each of the light spots. A first accumulated light amount corresponding to each first area of the substrate may be calculated if the optical head is scanning along a first direction of the substrate using the compensation model. A second accumulated light amount corresponding to each second area overlapped with the each first area is calculated if the optical head is scanning along the first direction, which is moved in a second direction by a first distance using the compensation model. An overlap distance may be determined based on a uniformity of summations of the first and second accumulated light amount. | 08-18-2011 |
20110205554 | HIGH RESOLUTION MONITORING OF CD VARIATIONS - An optical metrology method is disclosed for evaluating the uniformity of characteristics within a semiconductor region having repeating features such a memory die. The method includes obtaining measurements with a probe laser beam having a spot size on the order of micron. These measurements are compared to calibration information obtained from calibration measurements. The calibration information is derived by measuring calibration samples with the probe laser beam and at least one other technology having added information content. In the preferred embodiment, the other technology includes at least one of spectroscopic reflectometry or spectroscopic ellipsometry. | 08-25-2011 |
20110205555 | Sports Netting - Disclosed is a method and apparatus for measuring the drop Y of sports netting ( | 08-25-2011 |
20110267626 | SYSTEM AND METHOD FOR INSPECTING THREE-DIMENSIONAL SENSOR - The invention provides a system and method for inspecting a three-dimensional sensor. According to the invention, a light source is controlled to emit a light of a known phase, and the known phase of the emitted light is altered by at least two known phase values. The three-dimensional sensor is driven in sensing the light reflected by the inspecting space to capture an image. In accordance with the captured image and the relative angle and the active brightness of each pixel thereof and the plurality of reference data, at least two quality data relative to the three-dimensional sensor are calculated. | 11-03-2011 |
20120013918 | Optical Receiver Lens and Optical Distance Measuring Device - An optical receiver lens has a three-dimensional lens surface, for receiving the laser radiation of a laser distance measuring device, said laser radiation being reflected at an object, wherein the receiver lens can be described in a three-dimensional coordinate system having three axes x, y, z arranged at right angles with respect to one another and wherein the z-axis coincides with the optical axis of the receiver lens. At least one non-spherical area section of the lens surface can be described by addition of a first area, the flexure of which along the z-axis is a first function (f | 01-19-2012 |
20120019838 | SENSOR APPARATUS INTENDED TO DETECT THE LEVEL OF A LIQUID, GEL OR POWDER SUBSTANCE CONTAINED IN A RECEPTACLE - The sensor apparatus is intended to detect the level of a liquid, gel or powder substance contained in a receptacle and includes an emitter able to emit radiation and a receiver able to receive and convert into an electric signal radiation which is emitted by the emitter and the intensity of which is variable depending on the quantity or level of substance present in the receptacle. The emitter is designed to emit visible radiation and the apparatus also includes a visible optical indicator and an optical element able to couple optically the emitter to the optical indicator so that, when the quantity or level of the substance in the receptacle is lower than a predetermined threshold, a fraction of the radiation generated by the emitter is able to light up the optical indicator. | 01-26-2012 |
20120069355 | METHOD AND SYSTEM FOR INSPECTING BLADE TIP CLEARANCE - A method for use in inspecting a blade tip clearance is provided. The method includes providing a plurality of rotor blades including tips, wherein the plurality of rotor blades are rotatably mounted within a casing such that a blade tip clearance is defined between the rotor blade tips and the casing. The method also includes providing a system for use in inspecting the blade tip clearance by emitting electromagnetic energy toward the tips and detecting electromagnetic energy reflected by the tips. The method further includes positioning the system to facilitate inspection of the blade tip clearance, rotating the plurality of rotor blades within the casing, and simultaneously blending the tips using a blending apparatus and inspecting the blade tip clearance using the system. | 03-22-2012 |
20120081713 | TEST BLOCK FOR USE IN A WELDING PROCESS - A method and test block for controlling weld penetration depth in a work piece are disclosed. The test block simulates a work piece relative to a welding process of the work piece. The test block includes a test welding path. The test welding path replicates a production welding path on a weld surface of the work piece. The test block includes a melt-thru surface that underlies the test welding path. The melt-thru surface is spaced apart from the test welding path by a spacing that decreases along a length of the test welding path. The spacing varies from more than a standard weld penetration depth to less than the standard weld penetration depth. | 04-05-2012 |
20120081714 | Dimensional Detection System Calibration Method - An improved dimensional detection system is portable and can be used to characterize a workpiece. The dimensional detection system employs as few as a single focused light source and as few as a single camera along with a calibration data set to convert the illuminated pixels of an image of a beam on the workpiece into a cloud of real world points in space on an outer surface of the workpiece. The cloud of points can be processed to characterize the workpiece, such as by determining the right hexahedron that would encompass all of the real world points in space and which could be used to determine a dimensional weight of the workpiece. | 04-05-2012 |
20120092680 | Methods and apparatus for real-time digitization of three-dimensional scenes - This concerns in part the invention disclosed by co-pending application, particularly to robust determination of features in projection patterns. Disclosed are novel methods and apparatus for obtaining range frame coordinates in moving scenes, where optical radiation is projected onto a scene in the form of dots and strips, where reflected radiation is picked up by a camera and range coordinates calculated thereof. | 04-19-2012 |
20120113437 | METHOD AND DEVICE FOR MEASURING THE SPATIAL EXTENSION OF AN OBJECT - The device comprises a measuring track ( | 05-10-2012 |
20120182563 | Optical Blade Clearance Probe - The sensor comprises a beam of electromagnetic radiation projecting across a gap between the stationary member and the translating member, a reference detector having a reference FOV and a signal detector having a signal FOV. The sensor is to be mounted on the stationary member. The electromagnetic radiation beam, the reference FOV and the signal FOV intersect in a volume including the gap, and the gap is calculated from the reflected electromagnetic radiation received by the reference and signal detectors. The gap can be determined from a ratio between a rise time in the signal pulse and a rise time in the reference pulse, or a ratio between a fall time in the signal pulse and a fall time in the reference pulse, or a ratio between a delay time in the signal pulse and a delay time in the reference pulse, among other features. | 07-19-2012 |
20120188560 | SYSTEM ASPECTS FOR A PROBE SYSTEM THAT UTILIZES STRUCTURED-LIGHT - A probe system includes an imager and an inspection light source. The probe system is configured to operate in an inspection mode and a measurement mode. During inspection mode, the inspection light source is enabled. During measurement mode, the inspection light source is disabled, and a structured-light pattern is projected. The probe system is further configured to capture at least one measurement mode image. In the at least one measurement mode image, the structured-light pattern is projected onto an object. The probe system is configured to utilize pixel values from the at least one measurement mode image to determine at least one geometric dimension of the object. A probe system configured to detect relative movement between a probe and the object between captures of two or more of a plurality of images is also provided. | 07-26-2012 |
20120200862 | OBJECT DIMENSIONING SYSTEM AND RELATED METHODS - A method and apparatus for dimensioning and, optionally, weighing an object. A platform with a surface is used for supporting an object. A user selects between two different dimensioning devices of the apparatus. The first device employs three distance sensors to determine a distance between each of the distance sensors and a side of an object. The second device includes a movable gate which is passed over and about an object or objects on the platform. Sensor arrays, such as paired, aligned light emitter and receiver arrays, are used in combination with a plurality of sensed gate positions to determine the dimensions of the object(s) as the gate passes around the object(s) based on whether or not light from an emitter on one side of the gate reaches a light receiver on another, opposing side of the gate. | 08-09-2012 |
20120257219 | Distance Measuring Apparatus, Distance Measuring Method, Distance Measurement Program And Computer Readable Recording Medium - A distance measuring apparatus comprises: an edge specifying part | 10-11-2012 |
20120262734 | DOUBLE SEAM MEASUREMENT SYSTEM - A system for measurement of a can seam of a can comprising a an end panel, the end panel comprising the seam, the seam comprising a circumference, a seam top, a seam bottom, a seam chuck wall part and an opposite seam wall essentially opposite the seam chuck wall part, the system comprising: a table comprising a table top; a rocker comprising an inner pin and an outer pin essentially parallel to each other, the rocker configured to allow, when the end panel of the can is facing the table top, slight pressure of the outer pin on the opposite wall forcing the chuck wall part on the inner pin, and/or slight pressure of the inner pin on the chuck wall part forcing the opposite wall on the outer pin, causing rocking movement of the pins, that settles the inner pin flush with the chuck wall part, and/or the outer pin flush with the opposite wall, respectively, such that the inner pin and outer pin are disposed at chuck wall angle; means for rotating the can, allowing the inner pin to settle flush with the chuck wall part, and the outer pin to settle on a peak point on the opposite wall, at measurement points on the circumference of the seam, and measuring means configured to be able to measure a gap between the inner pin and the outer pin at the measurement points. | 10-18-2012 |
20120293812 | METHODS UTILIZING TRIANGULATION IN METROLOGY SYSTEMS FOR IN-SITU SURGICAL APPLICATIONS - A first metrology method includes the steps of projecting a first image and a second image, aligning the first image and the second image to form an aligned image of a known size, and determining a dimension of a target object by comparing the aligned image to the target object. A second metrology method includes the steps of projecting a first image and a second image, aligning the first image and the second image to form an aligned image of a known size by synchronously adjusting a zoom factor for projecting the first image and an angle for projecting the second image, and determining a dimension of a target object by comparing the aligned image to the target object. | 11-22-2012 |
20120300223 | Microscope illumination and calibration apparatus - An apparatus which provides a multiplicity of test colors and neutral tones simultaneously within a microscope's optical system that may be used to align, and/or calibrate the microscope, and the light source and any associated recording devices, automatically or with input from an operator. The test colors and neutral tones may also be used as references against which to judge specimens being viewed in the microscope. | 11-29-2012 |
20120314226 | Smart Crimp Tool System For Electrical Contacts And Terminals Which Are Controlled And Monitored By A Central Database Manager - A crimp tool for crimping contacts onto wire cable ends includes an indentor mechanism having a plurality of moveable indentors for deforming a portion of a contact inserted into the mechanism. One of the indentors has a pressure responsive element for providing a signal indicative of the pressure exerted on the contact by the indentor. A device coupled to the pressure responsive element records pressure data and transfers data to an electronic control unit for determining operation of the mechanism. An automated inspection system uses light projection and a light sensor adapted for detecting light projected through a crimping die to measure dimensions and configurations of the crimping die. The system stores data representative of desired measurements of the crimping die and compares actual measurements to desired measurements. A set of fixtures are used for positioning the crimping die in the inspection system. | 12-13-2012 |
20120327430 | MEASURING METHOD OF 3D IMAGE DEPTH AND A SYSTEM FOR MEASURING 3D IMAGE DEPTH USING BOUNDARY INHERITANCE BASED HIERARCHICAL ORTHOGONAL CODING - A method of decoding hierarchically orthogonal structured light and a 3-D depth measurement system using the same include a step of detecting boundary lines encoded at an identical position between layers and a boundary line inheritance step of converting the detected boundary lines into identical boundary lines. The present invention relates to a method of precisely searching for the boundary line of a pattern of radiated structured light based on the real coordinate system of an image plane, and an object thereof is to search for a boundary line irrespective of the reflection of a surface of an object, clearly classify a true boundary line and a false boundary line in a poor radiance environment, and increase the accuracy of a boundary line placed in another layer through inheritance. | 12-27-2012 |
20130077101 | CRITICAL DIMENSION UNIFORMITY CORRECTION BY SCANNER SIGNATURE CONTROL - A contribution to a wafer level critical dimension distribution from a scanner of a lithography system can be determined based on measured wafer level critical dimension uniformity distribution and a contribution to the wafer level critical dimension distribution from a photo mask. Light transmission ( | 03-28-2013 |
20130201493 | COATING DIMENSION MEASURING APPARATUS - A coating dimension measuring apparatus may include: a camera that is positioned at a prescribed position distanced from a sheet to capture an image of a coating dimension of the sheet; a roller configured to transport the sheet; a scale that is disposed along a lengthwise direction of the roller to perform numerical calibration of the coating dimension; a scale holding unit configured to hold the scale over the roller, the scale holding unit being disposed so as to enable free insertion and removal of the scale. | 08-08-2013 |
20130229670 | METHOD AND APPARATUS FOR DETERMINING THE DIMENSIONS AND EXTERNAL PROPERTIES OF THREE-DIMENSIONAL OBJECTS SUCH AS SAWN TIMBER - The present application relates to a method and apparatus for determining the dimensions and external properties of three-dimensional objects such as sawn timber, in which method objects like timber are moved in a transverse position over a target area in conveying direction, the target area is illuminated, and the target area is scanned upwards by a camera. In accordance with the invention each object like timber is scanned or exposed at least twice in the target area, and the timber is conveyed in the target area over support bars, which are in an angle (α) in relation to the conveying direction. | 09-05-2013 |
20130235391 | ONE-DIMENSIONAL COHERENT FIBER ARRAY FOR INSPECTING COMPONENTS IN A GAS TURBINE ENGINE - Inspecting a turbine includes positioning respective ends of a plurality of optical fibers within a high temperature region of the turbine wherein the respective first ends are aligned as a one-dimensional array. Energy emitted from an image area on a component of the turbine, is received at the ends of the optical fiber. The optical fibers convey the received energy to the other ends of the fibers that are located outside of the turbine. Outside the turbine an image of the respective other ends is captured, wherein the other ends are also aligned in a one-dimensional area. Additionally, for imaging a rotating component, a plurality of one-dimensional images of the other ends can be respectively captured at corresponding rotational positions of the component and used to create a two-dimensional image of the rotating component. | 09-12-2013 |
20130258354 | THREE-DIMENSIONAL SHAPE DETERMINING APPARATUS AND THREE-DIMENSIONAL SHAPE DETERMINING METHOD - Pattern lights A and B of which patterns respectively having bright and dark sections have been in an inverted relation are projected on a subject to calculate luminance distributions L | 10-03-2013 |
20130265590 | Optical Shielding Device for Separating Optical Paths - A sensor unit for detecting reference and measurement radiation for a distance measurement device has a sensor element and an optical shielding device. The sensor element has a first detection region for detecting measurement radiation and a second detection region for detecting reference radiation. The optical shielding device is positioned in relation to the sensor element and fastened, and the optical shielding device optically separates the first and second detection regions from each other. The optical shielding device further comprises a first recess and a second recess which are permeable to optical radiation of a first wavelength range. | 10-10-2013 |
20130308142 | DETERMINING A STRUCTURAL PARAMETER AND CORRECTING AN ASYMMETRY PROPERTY - A method of determining a structural parameter related to process-induced asymmetry, the method including: illuminating a structure, having an asymmetry property and a sub-structure susceptible to process-induced asymmetry, with radiation with a plurality of illumination conditions, at a first location of a substrate, determining a difference between measured asymmetry properties of the structure obtained with each of the plurality of illumination conditions, calculating a differential dependence of a difference between modeled asymmetry properties simulated for illumination by each of the plurality of illumination conditions on a structural parameter representing process-induced asymmetry of the sub-structure, and determining a value of the structural parameter using the determined difference and the calculated differential dependence. | 11-21-2013 |
20130329234 | SPATIAL INFORMATION DETECTION DEVICE - The spatial information detection device emits, to a space including an intended area, signal light defined as light modulated with a modulation signal defined as a square wave signal having high and low level periods appearing alternately, each of the periods having its length randomly selected from integral multiples of a unit time period. The device generates signal electric charges by accumulating electric charges generated in response to light from the space in a collection time period determined by a demodulation signal defined as a signal having the same waveform as that of the modulation signal or that of the inverted modulation signal. The device corrects, using correction information regarding an effect caused by light from an unintended area, the amount of signal electric charges as an amount of intended electric charges produced in response to light from the intended area, thereby generating spatial information. | 12-12-2013 |
20140022563 | Periodic Patterns and Technique to Control Misalignment Between Two Layers - A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal. | 01-23-2014 |
20140049784 | DEVICE FOR OPTICALLY SCANNING AND MEASURING AN ENVIRONMENT - A laser scanner optically scans and measures an environment, the laser scanner having a base resting in the stationary reference system of the laser scanner, a measuring head rotatable about a vertical axis relative to the base, a measuring head rotatable relative to the base about a vertical axis, a motor supported in the measuring head, the motor having a motor shaft and a gear which, when driven by the motor by the motor shaft, turns the measuring head relative to the base, the gear being configured as a planetary gear. | 02-20-2014 |
20140049785 | METHOD OF MEASURING SURFACE STRUCTURE OF DISPLAY DEVICE - A method of measuring a surface structure of a display device is provided. The display device includes first and second substrates, first and second patterned light-shielding layers, and first and second pixel units. The first patterned light-shielding layer disposed on a surface of the first substrate includes first openings. The second patterned light-shielding layer disposed on the surface of the first substrate includes second openings. The first pixel unit includes first and second protrusions. The first protrusion correspondingly covers the first openings and a portion of the first patterned light-shielding layer. The second protrusion is disposed on and directly contacted with the first and second patterned light-shielding layers. The second pixel unit includes a third protrusion correspondingly covering the second openings and a portion of the second patterned light-shielding layer, wherein sizes of the second openings are smaller than sizes of the first openings. | 02-20-2014 |
20140063509 | HIGH-SPEED METHOD AND SYSTEM FOR OPTICALLY MEASURING A GEOMETRIC DIMENSION OF MANUFACTURED PARTS - High-speed method and system for optically measuring a geometric dimension of manufactured parts such as cartridge cases are provided. The parts are consecutively transferred so that the parts travel along a first path which extends to a vision station at which each part has a predetermined position and orientation for optical measuring. An annular, interior side surface of a part which at least partially defines a pocket such as a primer pocket is illuminated when the part is located at the vision station to generate corresponding reflected radiation signals. An optical image of the illuminated interior side surface is formed from the reflected radiation signals at a single image plane. The optical image is detected at the image plane and the detected optical image is processed to determine the geometric dimension which may be primer product diameter. | 03-06-2014 |
20140078519 | Laser Scanner - A method of dynamically adjusting an angular speed of a light beam emitted by a scanner in measuring three-dimensional (3D) coordinates of a surface or of dynamically adjusting an acquisition rate of 3D coordinates of a surface. | 03-20-2014 |
20140153002 | DISPLAY SUBSTRATE AND METHOD OF MEASURING PATTERN DIMENSIONS OF DISPLAY SUBSTRATE - A display panel includes a plurality of pixel areas and at least one inspection area. An incident light is irradiated onto an inspection pattern disposed in the inspection area and a reflection light reflected by the inspection pattern is detected. An optical critical dimension of the inspection pattern is calculated from the reflection light, and a dimension of a pixel pattern disposed in each pixel area is calculated from the optical critical dimension of the inspection pattern. Accordingly, the dimension of the pixel pattern may be indirectly measured from the inspection pattern. | 06-05-2014 |
20140160496 | SIZE INSPECTION DEVICE - A size inspection device includes an inspection frame, a transferring belt, a positioning assembly, a positioning assembly, an inspection assembly, a suction assembly, and a controller. The transferring belt is slidably mounted on the inspection frame. The positioning assembly, the inspection assembly, the suction assembly, and the controller are mounted on the inspection frame. The controller is electrically connected to the inspection assembly and the suction assembly. When the positioning assembly positions the workpiece on the transferring belt below the inspection assembly, the inspection assembly obtains size value of the workpiece and transfers it to the controller, the controller compares the size value to a preset standard range to determine whether or not the workpiece has passed quality inspection, and controls the suction assembly to handle the workpiece which is not of passing quality away from the transferring belt. | 06-12-2014 |
20140198322 | Surface Profile Measurement System - A profile measurement system includes a light source configured to generate light. A beam shaper configured to shape the light generated from the light source. A beam splitter configured to partially transmit and reflect the light shaped by the beam shaper. An object lens configured to receive the light from the beam splitter and irradiate the light to a stage in which a workpiece is mounted. A profile estimating part has a plurality of continuously varying focal points. The profile estimating part includes a focusing lens and a light detector configured to receive the light transmitted through the focusing lens. | 07-17-2014 |
20140204400 | OPTICAL LASER SCANNING MICROMETER - The present invention provides multiple improvements to optical-based laser scanning micrometers and providing a small handheld version laser scanning micrometer based on the these improvements. For added accuracy and reduction in unit size, a double sided coated mirror receiver reflects the beam back into the transmitter light source. For added accuracy, a Ronchi rule is repositioned one or more times to calibrate additional lookup table correction values. To compensate for barometric pressure change and temperature, two additional reference edges are added to be combined with the reference edges in the transmitter to generate to null out pressure and temperature at the passline measurement area. To minimize beam errors and for part locating, a third derivative is detected. Two or more parallel scanning beams are generated to null out cosine errors and to measure, taper and spherical parts. | 07-24-2014 |
20140240720 | LINEWIDTH MEASUREMENT SYSTEM - A method includes passing an interrogating light beam through a Fourier transform lens and onto the surface of a material to form a Fraunhofer diffraction pattern of one or more surface features of the material. An image of the diffraction pattern is processed to determine the dimensions of the feature. | 08-28-2014 |
20140240721 | SPATIALLY SELECTIVE DETECTION USING A DYNAMIC MASK IN AN IMAGE PLANE - A three-dimensional laser scanner instrument for acquiring three-dimensional geometric data of a scene ( | 08-28-2014 |
20140268181 | SPECTROMETRY EMPLOYING EXTINCTION COEFFICIENT MODULATION - A method for decomposing design shapes in a design level into a plurality of target design levels is provided. Design shapes including first-type edges and second-type edges having different directions is provided for a design level. Inner vertices are identified and paired up. Vertices are classified into first-type vertices and second-type vertices. First mask level shapes are generated so as to touch the first-type vertices, and second mask level shapes are generated so as to tough the second-type vertices. Cut mask level shapes are generated to touch each first-type edges that are not over a second-type edge and to touch each second-type edges that are not over a first-type edge. Suitable edges are sized outward to ensure overlap among the various shapes. The design shapes are thus decomposed into first mask level shapes, the second mask level shapes, and the cut mask level shapes. | 09-18-2014 |
20140300907 | METHOD AND APPARATUS FOR SIZING AND FITTING AN INDIVIDUAL FOR APPAREL, ACCESSORIES, OR PROSTHETICS - A system for sizing and fitting an individual for apparel, accessories, or prosthetics includes at least one energy emitter configured to emit energy onto a field-of-view that contains an individual, and at least one energy sensor configured to capture reflected energy from within the field-of-view. A spatial measurement module calculates spatial measurements of a surface portion of the body of the individual when the individual is either stationary or moving about in real-time, based on data from the energy sensor. | 10-09-2014 |
20140313523 | METHODS UTILIZING TRIANGULATION IN METROLOGY SYSTEMS FOR IN-SITU SURGICAL APPLICATIONS - A first metrology method includes the steps of projecting a first image and a second image, aligning the first image and the second image to form an aligned image of a known size, and determining a dimension of a target object by comparing the aligned image to the target object. A second metrology method includes the steps of projecting a first image and a second image, aligning the first image and the second image to form an aligned image of a known size by synchronously adjusting a zoom factor for projecting the first image and an angle for projecting the second image, and determining a dimension of a target object by comparing the aligned image to the target object. | 10-23-2014 |
20140313524 | Method and Device for Three-Dimensional Confocal Measurement - The invention relates to a method and a device ( | 10-23-2014 |
20140340693 | DISMOUNTABLE NUMERICAL CONTROL MACHINE - Dismountable numerical control machine which comprises a first longitudinal bedplate ( | 11-20-2014 |
20140347677 | DISTANCE MEASUREMENT APPARATUS - The present invention relates to a distance measurement apparatus. The distance measurement apparatus according to the present invention has, mounted thereon, a light transmitting portion which emits light, and a light receiving portion including a light receiving element where a spot of the light is collimated. The present invention comprises: a tilting base; and a rotating reflector which reflects the light emitted by the light transmitting portion to an object, and reflects the light reflected or scattered by the object to the light receiving portion. | 11-27-2014 |
20150009510 | APPARATUS AND METHOD FOR DETERMINING A DISTANCE MEASURE ON WOUND-UP MATERIALS - A distance measure between a beginning and an end of a material strip wound onto a body in a tangential direction can be determined by creating a height profile of a surface of the material strip, which covers the beginning and the end of the wound material strip in the tangential direction. If a position value of the beginning of the material strip is determined in the created height profile, the distance measure can be determined using this position value and the height profile covering the end of the material strip. | 01-08-2015 |
20150015897 | DYNAMOELECTRIC MACHINE COMPONENT MONITORING SYSTEM - Various embodiments include systems adapted to detect a target within a machine casing. In some embodiments systems include a target attached to a component within a dynamoelectric machine casing, a conduit spanning from an outer surface of the dynamoelectric machine casing to an inner surface of the dynamoelectric machine casing and an optical detection device external to the outer surface of the dynamoelectric machine casing and configured to detect the target attached to the component through the conduit. | 01-15-2015 |
20150015898 | LASER LINE PROBE HAVING IMPROVED HIGH DYNAMIC RANGE - A method for measuring three-dimensional coordinates of an object surface with a line scanner, the line scanner including a projector and a camera, the projector projecting onto the object surface a first line of light at a first time and a second line of light at a second time, the integrated energy of the second line of light different than the first line of light, the camera capturing the reflections of the first line of light and the second line of light, a processor processing the collected data after discarding portions of the image that are saturated or dominated by electrical noise, and determining three-dimensional coordinates of the object surface based at least in part on the processed data and on a baseline distance. | 01-15-2015 |
20150022827 | ESTABLISHING A WEAR STATE OF A CUTTING NOZZLE - Methods, systems, and devices for establishing a wear state of a cutting nozzle of a laser processing machine. An actual state of the cutting nozzle shape is established by a three-dimensional evaluation performed by a nozzle shape sensor and an associated controller. The established actual state of the cutting nozzle shape is compared to a desired state of the cutting nozzle shape, and the wear state of the cutting nozzle is established based on a result of the comparison. | 01-22-2015 |
20150049345 | THREE-DIMENSIONAL MEASURING APPARATUS, THREE-DIMENSIONAL MEASURING METHOD, AND THREE-DIMENSIONAL MEASURING PROGRAM - A three-dimensional measuring apparatus | 02-19-2015 |
20150049346 | AUTOMATED POSITION LOCATOR FOR A HEIGHT SENSOR IN A DISPENSING SYSTEM - Apparatus and methods of determining a position of a height sensor in a dispensing system. The dispensing system includes a dispenser, height sensor, camera, and a calibration device configured to receive a signal from the height sensor. The calibration device may include an optical sensor that generates an alignment signal in response to receiving light from the height sensor and/or a fiducial that causes the height sensor to generate the alignment signal in response to a detected height change. The alignment signal is used to automatically determine the position at which the height sensor is aligned with the calibration device. The position of the height sensor relative to a camera is determined by aligning the camera with the calibration device and recording its position. The recorded coordinates of the camera are compared to the coordinates of the height sensor when the height sensor is automatically aligned with the calibration device. | 02-19-2015 |
20150055144 | HIGH-RESOLUTION IMAGING AND PROCESSING METHOD AND SYSTEM FOR DETERMINING A GEOMETRIC DIMENSION OF A PART - A high-resolution imaging and processing method and system for determining a geometric dimension of a part is provided. The method includes directing at least one plane of collimated radiation at a surface of a supported part. Each of the planes is occluded by the part to create unobstructed first and second planar portions of the plane of radiation passing by and not blocked by the supported part and to cast a radiation shadow of the supported part. Each of the first and second planar portions has a width and contains an amount of radiation which is representative of a respective geometric dimension of the part to be determined. The method includes increasing the width and decreasing the intensity of the first and second planar portions imaged on first and second predetermined measuring areas, respectively. | 02-26-2015 |
20150055145 | HIGH-RESOLUTION IMAGING AND PROCESSING METHOD AND SYSTEM FOR INCREASING THE RANGE OF A GEOMETRIC DIMENSION OF A PART THAT CAN BE DETERMINED - A high-resolution imaging and processing method and system for increasing the range of a geometric dimension of a part that can be determined are provided. The method includes directing at least one plane of collimated radiation at a surface of the part. Each of the planes is occluded by the part to create unobstructed first and second planar portions of the plane of radiation. Each of the first and second planar portions has a width and contains an amount of radiation which is representative of a respective geometric dimension of the supported part to be determined. The method includes increasing the width and decreasing the intensity of the first and second planar portions imaged on a plurality of predetermined measuring areas to obtain respective elongated planar portions and to produce respective electrical signals. The electrical signals are processed to determine the geometric dimension with enhanced accuracy. | 02-26-2015 |
20150070713 | FABRICATION OF ON-PRODUCT ABERRATION MONITORS WITH NANOMACHINING - A method of fabricating an aberration monitor on a production mask used in photolithographic patterning of a semiconductor substrate is provided. The method may include placing a production mask within a nanomachine repair tool and generating, using the nanomachine repair tool, a phase shifting pattern within a region of the production mask. | 03-12-2015 |
20150146218 | Detecting an Overall Dimension of a Plate-Shaped Workpiece - A method of detecting an overall dimension of a plate-shaped workpiece to be processed on a processing machine by a contactless-acting sensor includes moving the workpiece by a motion device of the processing machine in a predetermined direction until the sensor detects a first workpiece edge by a first change of state, detecting a first position of the workpiece where the first change of state happens by an evaluation device connected to the sensor, moving the workpiece by the motion device in a direction toward a second workpiece edge until the sensor detects the second workpiece edge by a second change of state, detecting a second position of the workpiece where the second change of state happens by the evaluation device, and determining an overall dimension of the workpiece by a determination of a distance between the first position and the second position of the workpiece. | 05-28-2015 |
20150316783 | Apodization for Pupil Imaging Scatterometry - The disclosure is directed to various apodization schemes for pupil imaging scatterometry. In some embodiments, the system includes an apodizer disposed within a pupil plane of the illumination path. In some embodiments, the system further includes an illumination scanner configured to scan a surface of the sample with at least a portion of apodized illumination. In some embodiments, the system includes an apodized pupil configured to provide a quadrupole illumination function. In some embodiments, the system further includes an apodized collection field stop. The various embodiments described herein may be combined to achieve certain advantages. | 11-05-2015 |
20150377606 | PROJECTION SYSTEM - The present invention relates to a metrology system ( | 12-31-2015 |
20160003609 | Signal Response Metrology Based On Measurements Of Proxy Structures - Methods and systems for estimating values of parameters of interest of actual device structures based on optical measurements of nearby metrology targets are presented herein. High throughput, inline metrology techniques are employed to measure metrology targets located near actual device structures. Measurement data collected from the metrology targets is provided to a trained signal response metrology (SRM) model. The trained SRM model estimates the value of one or more parameters of interest of the actual device structure based on the measurements of the metrology target. The SRM model is trained to establish a functional relationship between actual device parameters measured by a reference metrology system and corresponding optical measurements of at least one nearby metrology target. In a further aspect, the trained SRM is employed to determine corrections of process parameters to bring measured device parameter values within specification. | 01-07-2016 |
20160010973 | METHOD AND APPARATUS FOR USING GESTURES TO CONTROL A LASER TRACKER | 01-14-2016 |
20160025644 | METHOD AND SYSTEM FOR OPTICALLY INSPECTING A MANUFACTURED PART AT A SINGLE INSPECTION STATION HAVING A MEASUREMENT AXIS - A method and system for optically inspecting a manufactured part at a single inspection station having a measurement axis are provided. The system comprises a fixture assembly which includes a rotatable first fixturing component to support a part in a generally vertical orientation and a rotatable second fixturing component mating with and removably connected to the first fixturing component to transmit torque from the first fixturing component to the second fixturing component. The second fixturing component includes a device for holding the part in a generally horizontal orientation and to permit rotation of the horizontally held part about the measurement axis between first and second predetermined angular positions about the axis. The system also comprises an actuator assembly, a backside illumination assembly, a frontside illumination device, a lens and detector assembly and at least one processor to process electrical signals generated by the lens and detector assembly. | 01-28-2016 |
20160040980 | OUTER DIMENSION MEASURING APPARATUS AND OUTER DIMENSION MEASURING METHOD - An outer dimension measuring apparatus includes a light source; an optical system focusing the light emitted from the light source onto an optical axis; a reflector reflecting the focused light; a detector detecting an intensity of the reflected light; and a calculator calculating an outer dimension of a measured object using a first focus position, a second focus position, and a position of the reflector on the optical axis, the first focus position lying on the optical axis where a peak in reflected light intensity is detected by the detector for light reflected by a first surface, and the second focus position lying on the optical axis where a peak in reflected light intensity is detected by the detector for light that has been reflected by the reflector and emitted at a second surface. | 02-11-2016 |
20160061580 | FLEXIBLE REFERENCE SYSTEM - A method of optical data acquisition includes shaping a flexible reference system to be at least partially within a limited line of sight volume with respect to a workpiece. | 03-03-2016 |
20160084644 | SYSTEM AND METHOD OF MEASURING GEOMETRIC CHARACTERISTICS OF OBJECT - A system includes a light emitting unit, a front mirror, a rear mirror, an imaging unit and a processor. The light emitting unit is configured to emit a collimated light beam. The front mirror is configured to reflect part of the collimated light beam to produce and project a front focused ring of structured light to an object to obtain a front reflected ring of light, and configured to allow part of the collimated light beam to pass by. The rear mirror is positioned downstream of a light transmitting path of the front mirror. The rear mirror is configured to reflect at least part of the collimated light beam passing by the front mirror to produce and project a rear focused ring of the structured light to the object to obtain a rear reflected ring of light. | 03-24-2016 |
20160377414 | OPTICAL PATTERN PROJECTOR - An optical pattern projector used for projecting a structured-light pattern onto an object for dimensioning is presented. The optical pattern projector utilizes a laser array, a lenslet array, a lens, and a diffractive optical element to create a repeated pattern of projected dots. The pattern repetition is based on the grid pattern of laser array. Each laser's collimated beam, when projected through the lens, impinges on the diffractive optical element from a slightly different direction. The diffractive optical element creates a sub-patterns that continue propagating along these different directions and combine on a target to produce a repeating optical pattern. | 12-29-2016 |