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ELECTROMECHANICAL RESONATOR

Subclass of:

331 - Oscillators

Patent class list (only not empty are listed)

Deeper subclasses:

Class / Patent application numberDescriptionNumber of patent applications / Date published
331158000 Crystal 126
331156000 Vibrating reed or string type (e.g., tuning fork) 41
331155000 With optical, piezoelectric or acoustic coupling means 25
331157000 Magnetostrictive 4
20100134196SPIN-VALVE OR TUNNEL-JUNCTION RADIO-FREQUENCY OSCILLATOR - This radio-frequency oscillator includes a magnetoresistive device in which an electric current is able to flow. The magnetoresistive device includes a first magnetic layer, known as a “trapped layer”, whereof the magnetization is of fixed direction. The magnetoresistive device further includes a second magnetic layer known as a “free layer” and a non-magnetic layer, known as an “intermediate layer”, interposed between the first and second layer, known as the intermediate layer. The oscillator further includes means capable of causing an electron current to flow in said layers constituting the aforementioned stack and in a direction perpendicular to the plane which contains said layers. One of the three layers constituting the magnetoresistive device includes at least one constriction zone of the electric current passing through it.06-03-2010
20110109397RADIOFREQUENCY OSCILLATOR - This radiofrequency oscillator has a free layer (05-12-2011
20120075031SPIN-VALVE OR TUNNEL-JUNCTION RADIO-FREQUENCY OSCILLATOR, PROCESS FOR ADJUSTING THE FREQUENCY OF SUCH AN OSCILLATOR AND NETWORK CONSISTING OF A PLURALITY OF SUCH OSCILLATORS - A radio-frequency oscillator incorporates a magnetoresistive device within which an electron current is able to flow. The device includes a stack including: a magnetic trapped layer, the magnetization of which is of substantially fixed direction; a magnetic free layer; and a non-magnetic intermediate layer-interposed between the free layer and the trapped layer. The oscillator also includes a mechanism capable of making an electron current flow in the layers constituting the stack and in a direction perpendicular to the plane which contains the layers. At least the free layer is devoid of any material at its center. The electron current density flowing through the stack is capable of generating a magnetization in the free layer in a micromagnetic configuration in the shape of a skewed vortex flowing in the free layer around the center of the free layer.03-29-2012
20130093529OSCILLATOR ELEMENT AND METHOD FOR PRODUCING THE OSCILLATOR ELEMENT - An oscillator element according to one embodiment of the present invention includes a magnetoresistive element having a magnetization free layer, magnetization fixed layer, and a tunnel barrier layer. Provided on the magnetization free layer are a protection layer and an electrode having a point contact section where the electrode is partially in electrical contact with the protection layers. An interlayer insulating film is provided between the electrode and the protection layer. The area of the interface between the magnetization free layer and the tunnel barrier layer is larger than the surface area of the point contact section. Moreover, a portion of the protection layer in contact with the interlayer insulating film has a smaller thickness in a surface normal direction than the portion of the protection layer in contact with the electrode.04-18-2013
Entries
DocumentTitleDate
20090302960Oscillating, deflectable micromechanical element and method for use thereof - The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.12-10-2009
20110018648Resonator Electrode Shields - One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.01-27-2011
20120235760OSCILLATION CIRCUIT - An oscillation circuit includes a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other, an amplifier circuit (an inverting amplifier circuit) having an input terminal and an output terminal, and a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the MEMS vibrator and the output terminal to each other to thereby connect the one of the MEMS vibrators and the amplifier circuit (the inverting amplifier circuit) to each other.09-20-2012
20110279188RESONATOR USING CARBON NANO SUBSTANCE AND METHOD OF MANUFACTURING RESONATOR - A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the resonant structure comprising a carbon nano-substance layer and a silicon carbide layer.11-17-2011
20110279187HBAR RESONATOR WITH HIGH TEMPERATURE STABILITY - The invention relates to a resonator of the harmonic bulk acoustic resonator IIBAR type, comprising a piezoelectric transducer (11-17-2011
20120032747MEMS OSCILLATOR - A piezoresistive MEMS oscillator comprises a resonator body, first and second drive electrodes located adjacent the resonator body for providing an actuation signal; and at least a first sense electrode connected to a respective anchor point. The voltages at the electrodes are controlled and/or processed such that the feedthrough AC current from one drive electrode to the sense electrode is at least partially offset by the feedthrough AC current from the other drive electrode to the sense electrode.02-09-2012
20110285470SURFACE ACOUSTIC WAVE OSCILLATOR - In a SAW oscillator, each of a first SAW element and a second SAW element includes interdigital electrodes and a reflector formed on a piezoelectric material. A first oscillating circuit part forms an oscillating loop including the first SAW element. A second oscillating circuit part forms an oscillating loop including the second SAW element. The first and second oscillating circuit parts have an identical admittance property. The first and second SAW elements are configured that an electrode pitch is identical and an admittance property indicating a relation between a frequency and an admittance value is different therebetween. Further, a first intersection point between the admittance property of the first SAW element and the admittance property of the first oscillating circuit part and a second intersection point between the admittance property of the second SAW element and the admittance property of the second oscillating circuit part are at different frequencies.11-24-2011
20110298553ACTIVE MULTI-GATE MICRO-ELECTRO-MECHANICAL DEVICE WITH BUILT-IN TRANSISTOR - The present invention exploits the combination of the amplification, provided by the integration of a FET (or any other three terminal active device), with the signal modulation, provided by the MEM resonator, to build a MEM resonator with built-in transistor (hereafter called active MEM resonator). In these devices, a mechanical displacement is converted into a current modulation and depending on the active MEM resonator geometry, number of gates and bias conditions it is possible to selectively amplify an applied signal. This invention integrates proposes to integrate transistor and micro-electro-mechanical resonator operation in a device with a single body and multiple surrounding gates for improved performance, control and functionality. Moreover, under certain conditions, an active resonator can serve as DC-AC converter and provide at the output an AC signal corresponding to its mechanical resonance frequency.12-08-2011
20110291767OSCILLATOR CIRCUIT - An oscillator circuit comprises a piezoelectric vibrator, an amplifier device including inverters provided in a plurality of stages, and an inverter control device. The inverters provided in the plurality of stages includes a performance-variable inverter configured which is operational in both of an initial phase of oscillation startup and a post-startup phase where the oscillation is stabilized and capable of a variable performance depending on whether the initial phase of oscillation startup or the post-startup phase where the oscillation is stabilized, and an ON/OFF inverter which is operational in the initial phase of oscillation startup and disconnected in the post-startup phase where the oscillation is stabilized. The inverter control device have the performance-variable inverter and the ON/OFF inverter both operational and lowers the performance of the performance-variable inverter in the initial phase of oscillation startup, and the inverter control device disconnects the ON/OFF inverter and increases the performance of the performance-variable inverter in the post-startup phase where the oscillation is stabilized.12-01-2011
20100214034High Frequency Nanotube Oscillator - A tunable nanostructure such as a nanotube is used to make an electromechanical oscillator. The mechanically oscillating nanotube can be provided with inertial clamps in the form of metal beads. The metal beads serve to clamp the nanotube so that the fundamental resonance frequency is in the microwave range, i.e., greater than at least 1 GHz, and up to 4 GHz and beyond. An electric current can be run through the nanotube to cause the metal beads to move along the nanotube and changing the length of the intervening nanotube segments. The oscillator can operate at ambient temperature and in air without significant loss of resonance quality. The nanotube is can be fabricated in a semiconductor style process and the device can be provided with source, drain, and gate electrodes, which may be connected to appropriate circuitry for driving and measuring the oscillation. Novel driving and measuring circuits are also disclosed.08-26-2010
20080266008ELECTROMECHANICAL RESONATOR AND MANUFACTURING METHOD THEREOF - An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.10-30-2008
20100264997MICROMECHANICAL COMPONENT AND METHOD FOR OSCILLATION EXCITATION OF AN OSCILLATION ELEMENT OF A MICROMECHANICAL COMPONENT - A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about a first axis and oscillatory about a second axis that is positioned perpendicular to the first axis, and in which the micromechanical component having an oscillation element that is connected to the frame by an inner suspension element, and is tiltable about the second axis, the outer suspension element being provided to be dimensioned in such a way that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.10-21-2010
20090278619FREQUENCY AND/OR PHASE COMPENSATED MICROELECTROMECHANICAL OSCILLATOR - There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a compensated microelectromechanical oscillator, having a microelectromechanical resonator that generates an output signal and frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the microelectromechanical resonator and, in response to a set of values, to generate an output signal having second frequency. In one embodiment, the values may be determined using the frequency of the output signal of the microelectromechanical resonator, which depends on the operating temperature of the microelectromechanical resonator and/or manufacturing variations of the microelectromechanical resonator. In one embodiment, the frequency adjustment circuitry may include frequency multiplier circuitry, for example, PLLs, DLLs, digital/frequency synthesizers and/or FLLs, as well as any combinations and permutations thereof. The frequency adjustment circuitry, in addition or in lieu thereof, may include frequency divider circuitry, for example, DLLs, digital/frequency synthesizers (for example, DDS) and/or FLLs, as well as any combinations and permutations thereof.11-12-2009
20110204984SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE OSCILLATOR, AND SURFACE ACOUSTIC WAVE MODULE UNIT - It is possible to reduce the size of a surface acoustic wave resonator by enhancing the Q value. In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger by the distance between the center lines of the gaps between one electrode finger and the electrode fingers adjacent to both sides thereof, and the IDT includes a region formed by gradually changing the line occupying ratio from the center to both edges so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the IDT.08-25-2011
20110140792COMPENSATED MICRO/NANO-RESONATOR WITH IMPROVED CAPACITIVE DETECTION AND METHOD FOR PRODUCING SAME - The resonator comprises an oscillating element and first and second excitation electrodes of the oscillating element. An AC signal generator is connected to the first and second excitation electrodes and delivers first and second signals of the same amplitudes and in antiphase on the first and second electrodes. A first DC voltage source is connected to a third electrode. A second DC voltage source is connected to a fourth electrode. An additional electrode is electrically connected to the oscillating element. A signal representative of oscillation of the oscillating element is provided by the additional electrode formed by an anchoring point of the oscillating element and biased by a third DC voltage.06-16-2011
20120105163RESONATOR DEVICE AND METHOD OF OPTIMIZING A Q-FACTOR - A resonator device (05-03-2012
20090273406MECHANICALLY TUNABLE PRINTED RESONATOR - A mechanically tunable printed resonator is provided. The mechanically tunable printed resonator includes a tuning element support maintaining a tuning element a distance above the printed resonator.11-05-2009
20120194282INTERNALLY TRANSDUCED PN-DIODE-BASED ULTRA HIGH FREQUENCY MICROMECHANICAL RESONATOR - A radio frequency microelectromechanical (RF MEMS) device can comprise an actuation p-n junction and a sensing p-n junction formed within a semiconductor substrate. The RF MEMS device can be configured to operate in a mode in which an excitation voltage is applied across the actuation p-n junction varying a non-mobile charge within the actuation p-n junction to modulate an electric field acting upon dopant ions and creating electrostatic forces. The electrostatic forces can create a mechanical motion within the actuation p-n junction. The mechanical motion can modulate a depletion capacitance of the sensing p-n junction, thereby creating a motional current. At least one of the p-n junctions can be located at an optimal location to maximize the efficiency of the RF MEMS device at high resonant frequencies.08-02-2012
20100219897OSCILLATOR BASED ON SERIES OF FOUR NANOWIRES - The oscillator comprises at least a first series of a multiple of four sub-assemblies each of which comprises an excitation terminal and an output terminal. The sub-assemblies are arranged in series in a closed loop. The output terminal of each sub-assembly is connected to the excitation terminal of the following sub-assembly. The output terminal of one of the sub-assemblies constitutes the output terminal of the oscillator. Each sub-assembly comprises excitation means and a nanowire which constitutes the electromechanical resonator and the piezoresistive detection means of movement of the resonator. A first terminal of the nanowire is connected to a first supply voltage. The second terminal of the nanowire constitutes the output terminal of the sub-assembly which is grounded via a corresponding resistive circuit. An input terminal of the excitation means constitutes the excitation terminal of the sub-assembly.09-02-2010
20080272852Low-Voltage Mems Oscillator - An electronic device for generating an electric oscillating signal is described based on a micro-electromechanical system (MEMS). The electronic device typically comprises a substrate (11-06-2008
20100308931METHODS AND APPARATUS FOR TUNING DEVICES HAVING MECHANICAL RESONATORS - Methods and apparatus for tuning devices having mechanical resonators are described. In one implementation, a mechanical resonator and a phase shifter are configured in a feedback loop, so that the phase shifter shifts the phase of the resonator output signal. The amount of phase shift induced by the phase shifter may be variable. In another implementation, an LC tuning subcircuit is coupled to a mechanical resonator. In some implementations, the LC tuning subcircuit has a variable capacitance. One or more of the apparatus described herein may be implemented as part, or all, of a microelectromechanical system (MEMS).12-09-2010
20110018647Oscillators using magnetic domain wall and methods of operating the same - An oscillator generates a signal using precession of a magnetic moment of a magnetic domain wall. The oscillator includes a free layer having the magnetic domain wall and a fixed layer corresponding to the magnetic domain wall. A non-magnetic separation layer is interposed between the free layer and the fixed layer.01-27-2011
20090219104MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR - The invention relates to a MEMS resonator comprising a movable element (09-03-2009
20080211592Drive Circuit for a Voltage Controlled Differential Oscillator - A drive circuit for a voltage controlled differential oscillator using a negative resistance circuit for driving the resonator circuit of the voltage controlled differential oscillator. Opposite sides of the resonator circuit are connected to the negative resistance circuit with respective coupling capacitors so as to provide DC isolation between the resonator circuit and the negative resistance circuit. The negative resistance circuit includes an amplifier having a gain greater than unity so as to compensate for degradation in negative resistance resulting from the coupling capacitors.09-04-2008
20100321125RESONATOR AND A METHOD OF MANUFACTURING THE SAME, AND OSCILLATOR AND ELECTRONIC APPARATUS INCLUDING THE SAME - Disclosed herein is a resonator including, a vibrating portion having a conductor portion, and three or more insulating portions provided so as to electrically separate the conductor portion into a plurality of blocks, wherein when a potential difference is caused across both ends in each of the three or more insulating portions, the vibrating portion carries out a resonance vibration based on a longitudinal vibration in accordance with a frequency of an A.C. signal inputted to each of corresponding ones of the plurality of blocks in the conductor portion.12-23-2010
20120038430OSCILLATORS AND METHODS OF OPERATING THE SAME - Oscillators and methods of operating the same, the oscillators include a pinned layer having a fixed magnetization direction, a first free layer over the pinned layer, and a second free layer over the first free layer. The oscillators are configured to generate a signal using precession of a magnetic moment of at least one of the first and second free layers.02-16-2012
20090184775OSCILLATION DRIVE DEVICE - An oscillation drive device includes an oscillating unit that includes attaching portions on either sides thereof, the attaching portions being arranged on an oscillation axis; a base that includes an oscillating fulcrum that supports the oscillating unit on the oscillation axis and supporting portions that firmly support the oscillating unit; and a pair of strip-shaped leaf springs that is arranged so as to intersect with the oscillation axis and oscillates the oscillating unit on the oscillation axis, each of the strip-shaped leaf springs includes a fixing portion attached to the attaching portions of the oscillating unit; and a flexible beam portion that both ends of which are attached to the supporting portions of the base, and causes the oscillating unit to oscillate on the base by flexure behavior thereof.07-23-2009
20090085683RESONATOR, OSCILLATOR AND COMMUNICATION DEVICE - A resonator containing a plurality of resonator elements, respectively having an electrode and an oscillating component opposed while having a space in between, arranged so as to form a closed system. The oscillating component of the plurality of resonator elements is continuously formed in an integrated manner.04-02-2009
20090167449Wireless Power Transfer using Magneto Mechanical Systems - Wireless power transfer is received using a magneto mechanical system. Movement of the magneto mechanical system is converted to electric power.07-02-2009
20110156830Microelectromechanical system device and method of manufacturing the microelectromechanical system device - Provided is a microelectromechanical system (MEMS) that includes a first structure and second structure. The first structure and second structure may each include a first substrate and a second substrate. The first substrate of each structure may have first and second surfaces that face each other. The first substrate may include a via etching hole pattern penetrating the first surface and the second surface and a first non-via etching hole pattern penetrating the first surface. The second substrate of each structure may have third and fourth surfaces that face each other. The second substrate may include a second non-via etching hole pattern penetrating the third surface in a position corresponding to the via etching hole pattern of the first substrate. In the microelectromechanical system (MEMS) the second surface of the first substrate and the third surface of the second substrate may be bonded together.06-30-2011
20120056685Oscillators And Methods Of Operating The Same - An oscillator and a method of operating the same are provided, the oscillator may include a free layer, a pinned layer on a first surface of the free layer, and a reference layer on a second surface of the free layer. The free layer may have a variable magnetization direction. The pinned layer may have a pinned magnetization direction. The reference layer may have a magnetization direction non-parallel to the magnetization direction of the pinned layer.03-08-2012
20120013412MEMS RESONATOR DEVICES - Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.01-19-2012
20110080224RESONATOR - A resonator having an effective spring constant (k04-07-2011
20120249253MEMS VIBRATOR AND OSCILLATOR - A MEMS vibrator according to the invention includes: a first electrode fixed to a surface of a substrate; and a second electrode having a beam portion including a second face facing a first face of the first electrode, and a supporting portion supporting the beam portion and fixed to the surface of the substrate. The beam portion has a first portion whose length in a normal direction of the first face of the beam portion monotonically decreases toward a tip of the beam portion.10-04-2012
20120133450METHOD OF MULTI-STAGE SUBSTRATE ETCHING AND TERAHERTZ OSCILLATOR MANUFACTURED USING THE SAME METHOD - A method of multi-stage substrate etching and a terahertz oscillator manufactured by using the method are provided. The method comprises the steps of forming a first mask pattern on any one surface of a first substrate, forming a hole by etching the first substrate using the first mask pattern as an etching mask, bonding, to the first substrate, a second substrate having the same thickness as a depth to be etched, forming a second mask pattern on the second substrate bonded, forming a hole by etching the second substrate using the second mask pattern as an etching mask, and removing an oxide layer having the etching selectivity between the first substrate and the second substrate.05-31-2012
20120262242RESONATOR AND METHOD OF CONTROLLING THE SAME - A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.10-18-2012
20120262241MEMS RESONATOR AND METHOD OF CONTROLLING THE SAME - A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.10-18-2012
20120319791System and Method for Improved Start-Up of Self-Oscillating Electro-Mechanical Surgical Devices - An oscillating circuit for determining a resonant frequency of an electro-mechanical oscillating device and for driving the electro-mechanical oscillating device at the determined resonant frequency includes a driving circuit and a start-up, impetus injection circuit. The driving circuit is configured to receive one or more reference signals and further configured to provide a driving signal related to the reference signals to the electro-mechanical oscillating device. The start-up, impetus injection circuit is operably coupled to the electro-mechanical oscillating device and configured to selectively provide a start-up excitation signal to the electro-mechanical oscillation device. The start-up, impetus injection circuit is activated upon start-up of the oscillating circuit to drive the electro-mechanical oscillation device and the driving circuit determines a resonant frequency by measuring a parameter related to the resonant frequency of the electro-mechanical oscillating device.12-20-2012
20120319790MEMS RESONATOR - In order to provide a MEMS resonator having a higher Q factor, by suppressing losses in high-frequency signals due to barriers of thin-film lamination portions, in cases where there exist junction interfaces (barriers), such as pn junctions, in AC-current input/output lines for a vibrator (12-20-2012
20120092083MEMS RESONATOR - A MEMS resonator including: an input port which is applied with an input voltage; an output port which outputs an output current; and N MEMS resonating units (N being an integer greater than or equal to 2), the MEMS resonating unit each including a vibrator and being connected to the input port and output port, in which the N MEMS resonating units are serially connected to the input port.04-19-2012
20120092082ELECTROMECHANICAL RESONATOR WITH RESONANT ANCHOR - An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.04-19-2012
20120133449ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND METHOD FOR PRODUCING ELECTRONIC DEVICE - A movable section located in a hollow portion covered with a wall and a first sealing layer which are on a substrate and the first sealing layer located in an area facing the movable section are provided, the movable section is located between the substrate and the first sealing layer, and at least part of the movable section and the first sealing layer is an electric conductor.05-31-2012
20130009716MEMS RESONATOR - A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.01-10-2013
20110148537MEMS OSCILLATOR AND METHOD OF MANUFACTURING THEREOF - An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.06-23-2011
20100090773SYSTEMS AND METHODS TO OVERCOME DC OFFSETS IN AMPLIFIERS USED TO START RESONANT MICRO-ELECTRO MECHANICAL SYSTEMS - Systems and methods for insuring successful initiation of a resonating micro-electro mechanical systems (MEMS). An example system includes a resonating sensor, a drive device, a charge amplifier, and a voltage gain circuit. At start up, the charge amplifier and voltage gain circuit receives signals from the resonating sensor, compensates this signal for DC offsets, and generates a clock signal for the drive, thus placing the resonating sensor in a steady state operating mode. The circuit includes a plurality of gain switches that are toggled to produce a glitch in the signal associated with the received signal. The glitch overcomes the DC offset. A comparator generates the clock signal for the drive device if a signal associated with the received signal exceeds a reference signal.04-15-2010
20130200957MEMS OSCILLATOR AND MANUFACTURING METHOD THEREOF - A crystal oscillator and manufacturing method thereof are provided. The crystal oscillator includes: a semiconductor substrate; an interlayer dielectric layer located on the surface of the semiconductor substrate, an excitation plate and a positive electrode plug and a negative electrode plug being formed inside the interlayer dielectric layer, and the positive electrode plug and the negative electrode plug being located at the both sides of the excitation plate; a bottom cavity on top of the excitation plate, located between the positive electrode plug and the negative electrode plug; a vibrating crystal located on the surface of the interlayer dielectric layer, across the bottom cavity and connected with the positive electrode plug and the negative plug, wherein the vibrating crystal connects the positive electrode plug and the negative electrode plug at its both sides and besides the other both sides are the free ends and do not contact with the surrounding objects; an isolating layer located on top of the interlayer dielectric layer, a gap between the isolating layer and the vibrating crystal thus forming a top cavity; a covering layer formed on the surface of the isolating layer. The crystal oscillator is manufactured based on Complementary Metal-Oxide-Semiconductor Transistor (CMOS) technology, and can be integrated into the semiconductor chip easily and can meet the requirement for the miniature components.08-08-2013
20130147567OSCILLATOR - A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.06-13-2013
20100308930Integrated Circuit Oscillators Having Microelectromechanical Resonators Therein with Parasitic Impedance Cancellation - An integrated circuit oscillator includes a microelectromechanical (MEM) resonator having input and output terminals. An oscillation sustaining circuit is provided. The oscillation sustaining circuit is electrically coupled between the input and output terminals of the microelectromechanical resonator. The oscillation sustaining circuit includes a sustaining amplifier and a negative impedance circuit electrically coupled to the sustaining amplifier. The negative impedance circuit is configured to increase a tuning range of the oscillator by at least partially cancelling a parasitic shunt capacitance associated with the microelectromechanical resonator.12-09-2010
20120280758Bulk acoustic wave resonator and method of manufacturing thereof - The invention concerns a novel bulk acoustic wave (BAW) resonator design and method of manufacturing thereof The bulk acoustic wave resonator comprises a resonator portion, which is provided with at least one void having the form of a trench which forms a continuous closed path on the resonator portion. By manufacturing the void in the same processing step as the outer dimensions of the resonator portion, the effect of processing variations on the resonant frequency of the resonator can be reduced. By means of the invention, the accuracy of BAW resonators can be increased.11-08-2012
20130194048ELECTROMECHANICAL OSCILLATORS, PARAMETRIC OSCILLATORS, AND TORSIONAL RESONATORS BASED ON PIEZORESISTIVE NANOWIRES - Doubly-clamped nanowire electromechanical resonators that can be used to generate parametric oscillations and feedback self-sustained oscillations. The nanowire electromechanical resonators can be made using conventional NEMS and CMOS fabrication methods. In very thin nanowire structures (sub-micron-meter in width), additive piezoresistance patterning and fabrication can be highly difficult and thus need to be avoided. This invention shows that, in piezoresistive nanowires with homogeneous material composition and symmetric structures, no conventional and additive piezoresistance loops are needed. Using AC and DC drive signals, and bias signals of controlled frequency and amplitude, output signals having a variety of frequencies can be obtained. Various examples of such resonators and their theory of operation are described.08-01-2013
20120062328SELF-POWERED MICROELECTROMECHANICAL OSCILLATOR - Self powered microelectromechanical oscillators are provided for various applications. In one embodiment, the invention relates to a self powered microelectromechanical tagging or sensing system including a microelectromechanical oscillator having a characteristic frequency, the oscillator including a first substrate having a radioactive material configured to emit electrons, and a second substrate, spaced apart from the first substrate by first and second ends supported at spaced locations on the first substrate, where the second substrate includes a flexible material and is configured to collect the electrons emitted from the first substrate, and move toward the first substrate from a default position to an actuated position when a sufficient number of electrons have been collected, where, in the actuated position, a plurality of the collected electrons are transferred from the second substrate to the first substrate, and a circuitry configured to receive, from the oscillator by wireless communication, information indicative of the characteristic frequency of the oscillator.03-15-2012
20120068779Oscillators and methods of manufacturing and operating the same - Oscillators and methods of manufacturing and operating the same are provided, the oscillators include a pinned layer, a free layer and a barrier layer having at least one filament between the pinned layer and the free layer. The pinned layer may have a fixed magnetization direction. The free layer corresponding to the pinned layer. The at least one filament in the barrier layer may be formed by applying a voltage between the pinned layer and the free layer. The oscillators may be operated by inducing precession of a magnetic moment of at least one region of the free layer that corresponds to the at least one filament, and detecting a resistance change of the oscillator due to the precession.03-22-2012

Patent applications in class ELECTROMECHANICAL RESONATOR

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