Class / Patent application number | Description | Number of patent applications / Date published |
324710300 | Beam of atomic particles | 6 |
20080265866 | METHOD AND SYSTEM FOR ION BEAM PROFILING - One embodiment of the invention relates to an apparatus for profiling an ion beam. The apparatus includes a current measuring device having a measurement region, wherein a cross-sectional area of the ion beam enters the measurement region. The apparatus also includes a controller configured to periodically take beam current measurements of the ion beam and to determine a two dimensional profile of the ion beam by relating the beam current measurements to sub-regions within the current measuring device. Other apparatus and methods are also disclosed. | 10-30-2008 |
20090140717 | STRUCTURES AND METHODS FOR MEASURING BEAM ANGLE IN AN ION IMPLANTER - The present invention involves an ion beam angular measurement apparatus for providing feedback for a predetermined set ion beam angle comprising an arrangement of composite pillars formed on an insulating material and wherein the composite pillars selectively allow ion beams to penetrate a first layer of a pillar, wherein resistivity measurements are taken for each of the composite pillars before and after test ion beam implantation and wherein the resistivity measurements yield information relating to an angle of the ion beam during test. | 06-04-2009 |
20090295365 | Method for the Precise Measurement of Dependency on Amplitude and Phase of Plurality of High Frequency Signals and Device for Carrying Out Said Method - The present invention refers to a method for the precise measurement of dependency on amplitude and phase of a plurality of high frequency signals, preferably in the synchrotron accelerator of elementary particles. The essence of the solution according to the invention lies in that with a single measuring device and without any aliasing it is achieved a resolution of 0.2 micron and repeatability of measurements of 1 micron down to the lower frequency limit of a few MHz. A method according to the invention includes alternately directing, with a radio frequency (RF) switch, each analogue input signal to each of a plurality of RF processing units; amplifying each analogue input signal in each RF processing unit in order to adjust signals to the measuring range of a plurality of analog-digital (A/D) converters; directing each amplified analogue input signal to each of a plurality of A/D converters; converting the analogue signals to digital signals; directing the digital signals to a digital corrector; correcting the digital signals by means of correcting signals from the inverse models of evaluated systematic errors; collecting corrected digital signals in a digital switch and directing the ordered recombined number of digital signals to each of a plurality of digital receivers; and filtering the recombined number of digital signals in a plurality of low-pass filters. | 12-03-2009 |
20100085033 | ION CURRENT MEASUREMENT DEVICE - The invention provides an ion current measurement device for a tool having an ion source. The ion current measurement device comprises an ion collecting cup and a replaceable liner. The ion collecting cup is disposed in the tool and the ion collecting cup possesses a cup opening facing the ion source. The replaceable liner is disposed in the ion collecting cup and the replaceable liner entirely covers a continuous inner sidewall of the ion collecting cup. | 04-08-2010 |
20100141236 | Integrated Optical Element and Faraday Cup - An integrated optical element and Faraday cup that can measure charged particle beam currents, manipulate light and analyze charged particle beam energy distribution. One boundary of the cup is formed by a lens or other suitable optical element which can be used for manipulating light along the axis of the Faraday cup. The surface of the optical element interior to the cup is coated with a transparent conductor in order to establish the simultaneous functions of taking charged particle beam current measurements, taking energy distribution measurements and manipulating light for such applications as focusing or imaging. A suppressor/blanker/retarder electrode is designed to eliminate spurious current signals that can result from production of secondary electrons by the charged particle beam impinging on the electrode surface. | 06-10-2010 |
20130057250 | APPARATUS AND METHOD FOR MEASURING ION BEAM CURRENT - Techniques for measuring ion beam current, especially for measuring low energy ion beam current, are disclosed. The technique may be realized as an ion beam current measurement apparatus having at least a planar Faraday cup and a voltage assembly. The planar Faraday cup is located close to an inner surface of a chamber wall, and intersects an ion beam path. The voltage assembly is located outside a chamber having the chamber wall. Therefore, by properly adjusting the electric voltage applied on the planar Faraday cup by the voltage assembly, some undesired charged particles may be adequately suppressed. Further, the planar Faraday cup may surround an opening of an additional Faraday cup being any conventional Faraday cup. Therefore, the whole ion beam may be received and measured well by the larger cross-section area of the planar Faraday cup on the ion beam path. | 03-07-2013 |