| Entries |
| Document | Title | Date |
|---|
| 20100026138 | ELECTROSTATIC MICROMOTOR WITH STATOR AND ROTOR IN CONTACT, IN PARTICULAR FOR PROBE-STORAGE SYSTEMS - In an electrostatic micromotor, a mobile substrate faces a fixed substrate and is suspended over the fixed substrate at a given distance of separation in an operative resting condition; an actuation unit is configured so as to give rise to a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement during an operative condition of actuation. The actuation unit is also configured so as to bring the mobile substrate and the fixed substrate substantially into contact and to keep them in contact during the operative condition of actuation. The electrostatic micromotor is provided with an electronic unit for reducing friction, configured so as to reduce a friction generated by the contact between the rotor substrate and the stator substrate during the relative movement. | 02-04-2010 |
| 20130026880 | Power Generation Apparatus - A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current. | 01-31-2013 |
| 20090195120 | Capillary Force Actuator Device and Related Method of Applications - An actuator capable of generates force by leveraging the changes in capillary pressure and surface tension that result from the application of an electrical potential. The device, which will be referred to as a Capillary Force Actuator (CFA), and related methods, employs a conducting liquid bridge between two (or more) surfaces, at least one of which contains dielectric-covered electrodes, and operates according to the principles of electro wetting on dielectric. | 08-06-2009 |
| 20100066203 | Dielectric actuator - A dielectric actuator | 03-18-2010 |
| 20100164322 | Electrostatic motor - Provided is an electrostatic motor, in which a disc-shaped stator (S) and a disc-shaped rotor (R) are opposed to each other in a vacuum container ( | 07-01-2010 |
| 20110193447 | Stable Electro-Mechanical Actuators - An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position. | 08-11-2011 |
| 20130026879 | ELECTROSTATIC ACTUATOR - An electrostatic actuator | 01-31-2013 |
| 20100045137 | ACTUATOR AND METHOD FOR MANUFACTURING THE SAME - An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4. | 02-25-2010 |
| 20130076202 | MICRO-ELECTROMECHANICAL GENERATOR AND ELECTRIC APPARATUS USING SAME - Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented. | 03-28-2013 |
| 20100109472 | ELECTROSTATIC ACTING DEVICE - An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section ( | 05-06-2010 |
| 20100026136 | MICROMECHANICAL RESONATING DEVICES AND RELATED METHODS - Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. | 02-04-2010 |
| 20130088117 | APPARATUS FOR USE AS A MOTOR OR GENERATOR - Apparatus ( | 04-11-2013 |
| 20130088118 | Pre-charged CMUTs for zero-external-bias operation - Capacitive micromachined ultrasonic transducers (CMUTs) having a pre-charged floating electrode are provided. Such CMUTs can operate without an applied DC electrical bias. Charge can be provided to the floating electrode after or during fabrication in various ways, such as injection by an applied voltage, and injection by ion implantation. | 04-11-2013 |
| 20090140602 | METHOD AND SYSTEM FOR MITIGATING AN UNINTENDED-MECHANICAL STRAIN - The present invention provides a method for mitigating an unintended-mechanical strain in a device ( | 06-04-2009 |
| 20120181896 | MECHANICAL META-MATERIALS - The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material. | 07-19-2012 |
| 20130049529 | ELECTROSTATIC GENERATOR/MOTOR CONFIGURATIONS - Electrostatic generators/motors designs are provided that generally may include a first cylindrical stator centered about a longitudinal axis; a second cylindrical stator centered about the axis, a first cylindrical rotor centered about the axis and located between the first cylindrical stator and the second cylindrical stator. The first cylindrical stator., the second cylindrical stator and the first cylindrical rotor may be concentrically aligned. A magnetic field having field lines about parallel with the longitudinal axis is provided. | 02-28-2013 |
| 20130049530 | DIELECTRIC ELASTOMER COMPOSITES AND ACTUATORS USING THE SAME - The present invention relates to an actuator which is one of the energy conversion devices, and is characterized by improving the ability to convert electrical energy into mechanical energy by way of using a dielectric elastomer composite comprising a filler with an efficient dispersibility. In case of using a conventional resilient dielectric layer, there was a problem in that the operating voltage is high, while advantageously exhibiting a fast response and a high strain. The present invention can provide dielectric elastomer composite actuators that show excellent electromechanical conversion properties, by adding a dispersing agent such as a pyrene derivative or a polymeric compound having an amine end group when preparing the composite wherein carbon-based conductive fillers such as carbon blacks, single-walled carbon nanotubes (SWCNTs), double-walled carbon nanotubes (DWCNTs), multi-walled carbon nanotubes (MWCNTs) and graphenes, or high dielectric fillers such as copper phthalo-cyanine (CuPc), MOFs (metal organic frameworks) and barium titanate (BaTiO | 02-28-2013 |
| 20130069480 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE ELECTROMECHANICAL TRANSDUCER - An electromechanical transducer with less characteristic variation and a method of manufacturing the electromechanical transducer is provided. The electromechanical transducer has a plurality of cells constituted of a first electrode, a vibration film provided with a second electrode provided so as to face the first electrode through a gap, and a supporting portion supporting the vibration film. A structure configured to reduce an uneven flatness between the vibration film and the supporting portion is provided at an outer peripheral portion of a gap while a portion of the supporting portion is interposed between the structure and the gap. | 03-21-2013 |
| 20090108705 | Bio-electromechanical device - Bio-electromechanical device capable to convert electrochemical potential energy stored in a both animal or plant cellular system to mechanical energy. This bio-electromechanical device has sizes varying in the order of microns, with maximum electric voltages near 100 mV, currents in the order of nA and associated power in the order of 10 | 04-30-2009 |
| 20090302707 | MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) RESONATOR AND MANUFACTURING METHOD THEREOF - A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface. | 12-10-2009 |
| 20130057110 | POWER GENERATION DEVICE - Provided is a power generation device having a dielectric body and an electret, where power is generated by varying the distance between the dielectric body and the electret. A first electrode is connected to the electret on a side not facing the dielectric body. The first electrode is connected to a grounding terminal via a load. A second electrode may be connected to the dielectric body on a side not facing the electret. The second electrode may be directly connected to the grounding terminal. | 03-07-2013 |
| 20120223615 | THROUGH HOLE FORMING METHOD, NOZZLE PLATE AND MEMS DEVICE - A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film. | 09-06-2012 |
| 20120223614 | ELECTROSTATIC ACTUATOR OF A MOBILE STRUCTURE WITH IMPROVED RELAXATION OF TRAPPED CHARGES - The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions. | 09-06-2012 |
| 20120223613 | ELECTRICAL BYPASS STRUCTURE FOR MEMS DEVICE - An apparatus including a bypass structure for complementary metal-oxide-semiconductor (CMOS) and/or microelectromechanical system (MEMS) devices, and method for fabricating such apparatus, is disclosed. An exemplary apparatus includes a first substrate; a second substrate that includes a MEMS device; an insulator disposed between the first substrate and the second substrate; and an electrical bypass structure disposed in the insulator layer that contacts a portion of the first substrate, wherein the electrical bypass structure is electrically isolated from the MEMS device in the second substrate and any device included in the first substrate. | 09-06-2012 |
| 20130062993 | ACTUATOR AND METHOD FOR MANUFACTURING THE SAME - Provided are an actuator that is small, superior in terms of high-speed response, and capable of large displacement, and a manufacturing method that can easily manufacture the actuator. The actuator is configured by a laminated body including multiple electrodes, multiple cation-exchange resin films, and multiple anion-exchange resin films. The cation-exchange resin films and the anion-exchange resin films are stacked alternately, and each of the cation-exchange resin films and the anion-exchange resin films is sandwiched between two of the electrodes. A voltage is applied such that the electrodes between adjacent ones of the cation-exchange resin films and anion-exchange resin films have the same polarity. | 03-14-2013 |
| 20090243428 | NANOPOROUS MATERIALS FOR USE IN THE CONVERSION OF MECHANICAL ENERGY AND/OR THERMAL ENERGY INTO ELECTRICAL ENERGY - The present invention generally relates to a method for using nanoporous materials to convert mechanical motion and/or heat into electrical energy. In one embodiment, the present invention relates to the conversion of mechanical energy to electrical energy by immersing a high surface area nanoporous electrode in an electrolyte such that the ion structure at the surface of the electrode is interrupted in response to a change in the flow rate of the electrolyte, causing increased electrostatic energy to be generated at the liquid/solid interface. The invention further relates to a device suitable for conducting this method. | 10-01-2009 |
| 20130099626 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATION APPARATUS, AND ELECTRIC DEVICE AND COMMUNICATION DEVICE WITH VIBRATION POWER GENERATION APPARATUS MOUNTED THEREON - A power generator comprises a first substrate | 04-25-2013 |
| 20130119822 | MEMS DEVICE AND MANUFACTURING METHOD THEREOF - A Micro-Electro-Mechanical System (MEMS) device and its manufacturing method are provided. Said device comprises a MEMS component and said component comprises a main body ( | 05-16-2013 |
| 20130119821 | ACTUATOR - An actuator includes a pair of electrodes facing each other, an intermediate layer containing an ionic liquid and arranged between the pair of electrodes, the electrodes and the intermediate layer being deformed when a potential difference larger than a potential window of the ionic liquid is applied between the electrodes, and insulating layers that suppress direct contact between ions of the ionic liquid and the electrodes, the insulating layers being arranged between the intermediate layer and the electrodes. | 05-16-2013 |
| 20120313480 | MEMS DEVICES MADE WITH ISOTOPIC MATERIALS - A MEMS or NEMS device with at least one component made of a non-naturally occurring isotope material. The refined isotopic material provides advantages to device operation such as reduced mechanical loss, increased breakdown voltage, improved tunability and other advantages. | 12-13-2012 |
| 20090115285 | LIQUID-GAP ELECTROSTATIC HYDRAULIC MICRO ACTUATORS - A liquid-gap electrostatic hydraulic micro actuator is provided that produces higher displacement (in and out of plane) and larger force than typical electrostatic actuators by utilizing a non-conducting liquid as its dielectric material. This new class of actuators utilizes the liquid dielectric for hydraulic amplification and force transfer. The liquid electrostatic actuator consists of two chambers each forming a parallel-plate capacitor, filled with a non-conducting incompressible liquid. One chamber is compressed by pulling down a flexible membrane using electrostatic actuation, thus forcing the liquid under it to transfer into the other chamber. Such movement causes the other chamber's membrane to expand out of plane. | 05-07-2009 |
| 20110127877 | SILICON MEMS RESONATORS - The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device comprises a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed. | 06-02-2011 |
| 20100295416 | MICRORESONATOR - A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening. | 11-25-2010 |
| 20090115284 | INCHWORM ACTUATOR BASED ON SHAPE MEMORY ALLOY COMPOSITE DIAPHRAGM - Linear actuators (also known as inchworm actuators) including a magnetically actuatable member with a plurality of wings or blades made from a shape memory alloy (SMA) are described. The linear actuators include a bar and an actuator assembly, configured to achieve a linear displacement of the actuator assembly relative to the bar. The actuator assembly includes a housing, a magnetic trigger including an electromagnet and a permanent magnet, and the magnetically actuatable SMA member. Significantly, the wings/blades of the magnetically actuatable SMA member are coupled to the housing. Activation of the magnetic trigger causes the magnetically actuatable SMA member to move toward the magnetic trigger. The motion of the magnetically actuatable SMA can be converted to a linear displacement. The magnetically actuatable SMA can be implemented using a SMA exhibiting both ferromagnetic and SMA properties, or by a ferromagnetic mass coupled with a SMA (i.e., a ferromagnetic SMA composite). | 05-07-2009 |
| 20100007238 | METHOD AND STRUCTURE FOR AN OUT-OF-PLANE COMPLIANT MICRO ACTUATOR - This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems. | 01-14-2010 |
| 20110156529 | Surface mounted crystal resonator - An object of the invention is to provide a surface mounted resonator that improves impact resistance by the shape of a mounting terminal provided on an outside bottom face of a stacked resonator. A surface mounted crystal resonator is provided with a plurality of mounting terminals electrically connected to a hermetically sealed crystal piece at both ends of an outside bottom face having a rectangular shape long in the lengthwise direction, the mounting terminals having the same external dimensions with a total dimension of the mounting terminals in a lengthwise direction of the outside bottom face being 70% or more [but less than 100%] of a dimension in the lengthwise direction of the outside bottom face. Respective facing sides of the mounting terminals facing each other in a central area of the outside bottom face are formed curved in a convex shape such that a curvature thereof decreases gradually. | 06-30-2011 |
| 20100001616 | High Precision Silicon-on-Insulator MEMS Parallel Kinematic Stages - MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably connect the actuator to a movable end stage provide independent motion from each of the actuators that minimizes unwanted off-axis displacement, particularly for three-dimensional movement of a cantilever. Also provided are methods for using and making MEMS stages. In an aspect, a process provides a unitary MEMS stage made from a silicon-on-insulator wafer that avoids any post-fabrication assembly steps. Further provided are various devices that incorporate any of the stages disclosed herein, such as devices requiring accurate positioning systems in applications including scanning probe microscopy, E-jet printing, near-field optic sensing, cell probing and material characterization. | 01-07-2010 |
| 20090189480 | Ultrasonic Transducer And Manufacturing Method - This invention provides a technique whereby, even if a step is produced by splitting a lower electrode into component elements, resistance increase of an upper electrode, damage to a membrane and decrease of dielectric strength between an upper electrode and the lower electrode, are reduced. In an ultrasonic transducer comprising plural lower electrodes, an insulation film covering the lower electrodes, plural hollow parts formed to overlap the lower electrodes on the insulation film, an insulation film filling the gaps among the hollow parts, an insulation film covering the hollow parts and insulation film, plural upper electrodes formed to overlap the hollow parts on the insulation film and plural interconnections joining them, the surfaces of the hollow parts and insulation film are flattened to the same height. | 07-30-2009 |
| 20090115283 | High-deformation composite microresonator - An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus, less than the first Young's modulus, the second part being at least partially located facing the detection electrode. | 05-07-2009 |
| 20110266915 | POWER GENERATING APPARATUS - A power generating apparatus ( | 11-03-2011 |
| 20090284101 | Device for Converting Mechanical Energy Into Electrical Energy, and Method for Operating Said Device - A device for converting mechanical energy into electrical energy has first electrode formed of a first material having a first work function for a charge carrier, and a second electrode formed of a second material having a second work function for a charge carrier, the second work function being different from the first work function. The first electrode and the second electrode are interconnected by a first load circuit in an electroconductive manner. The second electrode is arranged at a variable distance from the first electrode. | 11-19-2009 |
| 20110198966 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER - A capacitive electromechanical transducer has at least one cell. The cell includes a first electrode, a movable vibrating portion including a second electrode disposed opposite the first electrode with a space therebetween, and a supporting portion that supports the vibrating portion. In order to regulate the strength of a border portion between the vibrating portion and the supporting portion, a strength regulating portion is provided. | 08-18-2011 |
| 20100283354 | CAPACITIVE ELECTRO-MECHANICAL TRANSDUCER, AND FABRICATION METHOD OF THE SAME - A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion. | 11-11-2010 |
| 20090267445 | MICRO ROCKING DEVICE AND METHOD FOR MANUFACTURING THE SAME - A micro rocking device includes a frame, a rocking portion, a torsion connecting portion, and a second comb-like electrode, the rocking portion including a first comb-like electrode. The torsion connecting portion connects the frame and the rocking portion. The torsion connecting portion defines the axis of rotational displacement of the rocking portion. The second comb-like electrode attracts the first comb-like electrode and rotationally displaces the rocking portion. The first comb-like electrode has a plurality of first parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction. The second comb-like electrode has a plurality of second parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction. | 10-29-2009 |
| 20110204745 | ACOUSTIC SENSOR - An acoustic sensing element has a substrate that includes a back chamber, a vibration electrode plate that is provided in a surface of the substrate while being opposite an upper surface opening of the back chamber, and a fixed electrode plate that is provided opposite the vibration electrode plate, an acoustic hole being made in the fixed electrode plate. The acoustic sensing element outputs an electric signal based on an electrostatic capacitance change generated between the vibration electrode plate and the fixed electrode plate by a displacement of the vibration electrode plate. A lower surface of the back chamber is closed into a pouched shape by the substrate. | 08-25-2011 |
| 20110198967 | Switching Array Having Circuitry to Adjust a Temporal Distribution of a Gating Signal Applied to the Array - A Micro-electro-mechanical systems (MEMS) switching array includes circuitry, which may be coupled to a gate line of the array to adjust a temporal distribution of a gating signal applied to a plurality of MEMS switches that make up the switching array. The temporal distribution may be shaped to reduce a voltage surge that can develop in the switches during switching of electrical current. This voltage surge reduction is conducive to improving the durability of the array. | 08-18-2011 |
| 20090167107 | MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING EMBEDDED SPRINGS - A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base having a lower portion and an upper portion; a top plate disposed above the upper portion of the base forming a gap therebetween; and a spring-like structure disposed between the top plate and the lower portion of the base. The spring-like structure has a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and a top plate. In an alternate embodiment, the spring-like has a vertical bendable connector connecting the top plate and the lower portion of the base. The spring-like structure transports the top plate vertically in a piston like manner to perform the function of the transducer. Fabrication methods to make the same are also disclosed. | 07-02-2009 |
| 20080278028 | Methods and apparatus for harvesting biomechanical energy - Methods and apparatus are disclosed for harvesting energy from motion of one or more joints. Energy harvesters comprise: a generator for converting mechanical energy into corresponding electrical energy; one or more sensors for sensing one or more corresponding characteristics associated with motion of the one or more joints; and control circuitry connected to receive the one or more sensed characteristics and configured to assess, based at least in part on the one or more sensed characteristics, whether motion of the one or more joints is associated with mutualistic conditions or non-mutualistic conditions. If conditions are determined to be mutualistic, energy harvesting is engaged. If conditions are determined to be non-mutualistic, energy harvesting is disengaged. | 11-13-2008 |
| 20080290756 | Micro-Electro-Mechanical Transducer Having an Insulation Extension - A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated by an insulator with an insulation extension is disclosed. The two electrodes define a transducing gap therebetween. The insulator has an insulating support disposed generally between the two electrodes and an insulation extension extending into at least one of two electrodes to increase the effective insulation without having to increase the transducing gap. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate. | 11-27-2008 |
| 20080265709 | Direct acting capacitive transducer - A capacitive transducer having a significantly increased actuation force and improved response time as compared to similar prior art capacitive transducers. In the capacitive transducer of the present invention it is not necessary to balance response time and actuation force or to provide pre-strain to the transducer in a direction of actuation. Additionally, buckling in the capacitive transducer is prevented, or at least substantially reduced, in a simple manner. | 10-30-2008 |
| 20100264777 | LONG RANGE TRAVEL MEMS ACTUATOR - An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies. | 10-21-2010 |
| 20110012476 | Electrostrictive composite and electrostrictive element using the same - An electrostrictive composite includes a flexible polymer matrix and a number of one dimensional conductive materials dispersed in the flexible polymer matrix. The flexible polymer matrix is a sheet. The one dimensional conductive materials cooperatively form an electrically conductive structure in the flexible polymer matrix. The one dimensional conductive materials are oriented substantially along a same preferred direction. | 01-20-2011 |
| 20090160289 | Curved capacitive membrane ultrasound transducer array - CMUT elements are formed on a substrate. Electrical conductors are formed to interconnect between different portions of the substrate. The substrate is then separated into pieces while maintaining the electrical connections across the separation. Since the conductors are flexible, the separated substrate slabs may be positioned on a curved surface while maintaining the electrical interconnection between the slabs. Large curvatures may be provided, such as associated with forming a multidimensional transducer array for use in a catheter. The electrical interconnections between the different slabs and elements may allow for a walking aperture arrangement for three dimensional imaging. | 06-25-2009 |
| 20120068572 | METHOD FOR PRODUCING OF AN ELECTROMECHANICAL TRANSDUCER - The present invention relates to a method for producing an electromechanical, for example piezoelectric, transducer in which a first polymer layer comprising cutouts is applied to a first continuous polymer layer by means of a printing and/or coating method, a cover is applied to the first polymer layer comprising cutouts in such a way that the cutouts of the first polymer layer comprising cutouts are closed off with the formation of cavities, and the cover is connected to the first polymer layer comprising cutouts. The invention also relates to electromechanical transducers produced by the method according to the invention, and the use of said electromechanical transducers. | 03-22-2012 |
| 20110221300 | ELECTROSTATIC ACTUATOR AND DRIVING METHOD THEREOF - A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage. | 09-15-2011 |
| 20110140569 | ELECTROSTATIC COMB ACTUATOR - An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis of rotation of the rotor at a first distance from the axis of rotation. The rotor comb electrode fingers extend towards the axis of rotation for a length that is smaller than the first distance. The stator electrodes are shifted towards the axis of rotation, so that the stator electrode fingers are only partially overlapping with the rotor electrodes fingers. | 06-16-2011 |
| 20110227448 | APPARATUS AND METHOD FOR DRIVING CAPACITIVE ELECTROMECHANICAL TRANSDUCTION APPARATUS - An apparatus is configured to drive a transduction apparatus including a cell with a first electrode and a second electrode disposed so as to oppose each other via a gap. The apparatus includes a timing detection unit and a control unit. The timing detection unit detects a timing of outputting of an electromagnetic wave from an electromagnetic wave source configured to output the electromagnetic wave to irradiate an object to be measured. The control unit drives and controls the transduction apparatus in synchronization with the detected timing such that the capacitive electromechanical transduction apparatus is put in a receiving state only for a period in which an acoustic wave generated in an inside of the object irradiated with the electromagnetic wave is received. | 09-22-2011 |
| 20090001845 | ACTUATOR - An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part. | 01-01-2009 |
| 20090212657 | EQUIVALENT-CAPACITANCE TYPE ACTUATOR DRIVE DEVICE - [Problem]To provide an actuator drive device that eliminates the need for high voltage amplifiers. | 08-27-2009 |
| 20090243426 | ELECTROSTATIC DEVICE FOR DISPLACING AN OBJECT - Electrostatic displacement devices ( | 10-01-2009 |
| 20090243427 | Micro motor - The present invention relates to a micro motor including a hub, a rib structure, an inner ring, an outer ring and at least two micro actuators, in which a top edge of the hub is projected outwardly to form a top lid, a plurality of bumps are provided between the rib structure and the top lid, and protruded limiting parts are disposed between the wall of the inner hole of the rib structure and the outer periphery of the hub so that the rib structure is in point contact with the hub and the top lid. Therefore, when the micro actuators drive the rib structure, the inner ring and the outer ring to rotate, mutual abrasion among those parts can be reduced to prolong the lifespan of the micro motor. | 10-01-2009 |
| 20100259127 | ELECTROMECHANICAL TRANSDUCER - When the initial displacement greatly varies among cells in an element, there is a need to reduce a bias voltage to be applied between electrodes. This decreases the sensitivity. An electromechanical transducer of the present invention includes an element having a plurality of cells. Each of the cells includes a first electrode and a second electrode that are provided with a cavity being disposed therebetween. A groove is provided at a position at a predetermined distance from the cavity of the cell on the outermost periphery of the element. | 10-14-2010 |
| 20090079296 | ELECTROSTATIC ACTUATOR - When a mover during moving is displaced in a direction (X2 direction) perpendicular to a moving direction, between a deformation pattern portion formed in stator-side electrodes of a stator and a deformation pattern portion formed in mover-side electrodes of the mover, a restoring force trying to return the mover toward a direction (X1 direction) opposite to the X2 direction acts on the mover. This makes it possible to prevent the mover from displacement, and consequently to provide an electrostatic actuator improved in the linear movability toward the moving direction. | 03-26-2009 |
| 20090079295 | ELECTROSTATIC GENERATOR - An electrostatic generator includes a substrate, an electrode formed on or in a surface of the substrate, an electret film provided so as to be opposed to the electrode and an insulating film on an electrode side formed on a surface of the electrode on a side opposed to the electret film. | 03-26-2009 |
| 20100225200 | Monolithic integrated CMUTs fabricated by low-temperature wafer bonding - Low temperature wafer bonding (temperature of 450° C. or less) is employed to fabricate CMUTs on a wafer that already includes active electrical devices. The resulting structures are CMUT arrays integrated with active electronics by a low-temperature wafer bonding process. The use of a low-temperature process preserves the electronics during CMUT fabrication. With this approach, it is not necessary to make compromises in the CMUT or electronics designs, as is typical of the sacrificial release fabrication approach. Various disadvantages of sacrificial release, such as low process control, poor design flexibility, low reproducibility, and reduced performance are avoided with the present approach. With this approach, a CMUT array can be provided with per-cell electrodes connected to the substrate integrated circuitry. This enables complete flexibility in electronically assigning the CMUT cells to CMUT array elements. | 09-09-2010 |
| 20100225199 | NANOPOROUS MATERIALS FOR USE IN INTELLIGENT SYSTEMS - The present invention relates to volume and/or shape memory systems for which the volume and/or shape can be adjusted by controlling one or more variables such as applied voltage and temperature. In one embodiment, the volume and/or shape memory systems of the present invention are controlled and/or adjusted by way of a temperature mechanism. In another embodiment, the volume and/or shape memory systems of the present invention are controlled and/or adjusted by way of a voltage mechanism. In still another embodiment, the present invention provides a device that contains, in part, a smart volume and/or shape memory material that exhibits high energy densities, and can provide large displacements over broad temperature and/or voltage ranges. | 09-09-2010 |
| 20100237737 | OPTIMIZED BI-DIRECTIONAL ELECTROSTATIC ACTUATORS - An electrostatic actuator comprising: first and second comb arrays of electrodes arranged on a base, the electrodes of the first and second comb arrays being interleaved; a third comb array of electrodes spring mounted over the first and second comb arrays, the electrodes of the third comb array being aligned with the electrodes of the second comb array; and, means for applying a first voltage to the third comb array and a second voltage to the first and second comb arrays to generate an attractive force acting on the third comb array to move the third comb array toward the second comb array; wherein: the electrodes of the third comb array each have a thickness tj and a width a such that a≧tf, the electrodes of the second comb array each have a width b such that a≦b≦10a; the electrodes of the first and second comb arrays are separated by a distance d such that 0.5Z>| 09-23-2010 | |
| 20100127596 | Micro-Electromechanical Resonators Having Boron-Doped and Boron-Assisted Aluminum-Doped Resonator Bodies Therein - A micro-electromechanical resonator includes a resonator body having a semiconductor region therein doped with boron to a level greater than about 1×10 | 05-27-2010 |
| 20100207485 | PRODUCTION OF PRE-COLLAPSED CAPACITIVE MICRO-MACHINED ULTRASONIC TRANSDUCERS AND APPLICATIONS THEREOF - Methods are provided for production of pre-collapsed capacitive micro-machined ultrasonic transducers (cMUTs). Methods disclosed generally include the steps of obtaining a nearly completed traditional cMUT structure prior to etching and sealing the membrane, defining holes through the membrane of the cMUT structure for each electrode ring fixed relative to the top face of the membrane, applying a bias voltage across the membrane and substrate of the cMUT structure so as to collapse the areas of the membrane proximate to the holes to or toward the substrate, fixing and sealing the collapsed areas of the membrane to the substrate by applying an encasing layer, and discontinuing or reducing the bias voltage. CMUT assemblies are provided, including packaged assemblies, integrated assemblies with an integrated circuit/chip (e.g., a beam-steering chip) and a cMUT/lens assembly. Advantageous cMUT-based applications utilizing the disclosed pre-collapsed cMUTs are also provided, e.g., ultrasound transducer-based applications, catheter-based applications, needle-based applications and flowmeter applications. | 08-19-2010 |
| 20100127595 | ELECTRET AND ELECTROSTATIC INDUCTION CONVERSION DEVICE COMPRISING THE SAME - To provide an electret whose surface potential is improved and an electrostatic induction conversion device comprising the same, an electret is formed by spin-coating a fluorine-containing polymer composition for coating which contains a fluorine-containing polymer having a ring structure in its main chain, a silane coupling agent, an aprotic fluorine-containing solvent, and a fluorine-containing alcohol as a protic fluorine-containing solvent on a copper substrate and baking it. | 05-27-2010 |
| 20100219715 | Method for Producing Electric Power and Device for Carrying Out Said Method - The invention encompasses a method for production of electric power from a system of contacts of nanostructured conductive surfaces with a thin water-containing layer, and a hydroelectric generator for carrying out the method. The basis of the invention is a discovery, confirmed by experiments, that the contacts of the conductive surfaces, having nano-dimensional structural and/or parametrical heterogeneities, with the water-containing layer, having a thickness from several nanometers to a fraction of a millimeter, under certain conditions, described in the present disclosure, generate electromotive force in an external electrical load. The invention utilizes new principles for building power systems, which can find further wide application in various areas of science and technology. | 09-02-2010 |
| 20090072658 | DIELECTRIC COMPOSITE AND A METHOD OF MANUFACTURING A DIELECTRIC COMPOSITE - A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied. | 03-19-2009 |
| 20110031845 | ELECTRET AND ELECTROSTATIC INDUCTION CONVERSION DEVICE - To provide an electret having a high surface voltage, and an electrostatic induction conversion device comprising such an electret. | 02-10-2011 |
| 20110031844 | ELECTROSTATIC GENERATOR/MOTOR CONFIGURATIONS - Electrostatic generators/motors designs are provided that include a stator fixedly connected to a first central support centered about a central axis. The stator elements are attached to the first central support. Similarly, a second stator is connected to a central support centered about the central axis, and the second stator has stator elements attached to the second central support. A rotor is located between the first stator and the second stator and includes an outer support, where the rotor is rotatably centered about the central axis, the rotor having elements in contact with the outer support, each rotor element having an extending rotor portion that extends radially from the outer support toward the axis of rotation. | 02-10-2011 |
| 20100295413 | DEVICE COMPRISING A CAPACITIVE ENERGY CONVERTER THAT IS INTEGRATED ON A SUBSTRATE - The embodiments relate to a device, especially a microsystem, which comprises an energy converter unit having an electrode structure for the capacitive conversion of mechanical energy to electrical energy The electrode structure includes a first electrode and a second electrode the distance of which to the first electrode is variable. The device according to the invention also comprises a load circuit via which the first and second electrode are interconnected in an electroconductive manner. A transmitter is coupled to the second electrodes. The distance between the first and the second electrode can be varied by displacing the transmitter and the displacement of the transmitter can be effected in a countactles manner by interaction of the transmitter with a mobile part. | 11-25-2010 |
| 20100295414 | COUPLED MEMS STRUCTURE FOR MOTION AMPLIFICATION - A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element and has a resonant frequency substantially equal to the secondary MEMS element and has a much larger displacement than the secondary MEMS element. | 11-25-2010 |
| 20100295415 | ENERGY RECOVERING DEVICE WITH A LIQUID ELECTRODE - An energy recovery device including: at least one capacitor with variable capacitance, the capacitor including a fixed electrode, a dielectric layer, and a liquid electrode; and a mechanism to inject an electric charge into the capacitor and to remove the electric charge therefrom, including a charge injection electrode forming a portion of the second face positioned upstream from the fixed electrode in the direction of displacement of the liquid electrode, and a charge removal electrode forming a portion of the second face positioned downstream from the fixed electrode in the direction of displacement of the liquid electrode. | 11-25-2010 |
| 20120242189 | MICRO-MECHANICAL COMPONENT WITH CANTILEVER INTEGRATED ELECTRICAL FUNCTIONAL ELEMENT - A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line. | 09-27-2012 |
| 20110234043 | FLEXIBLE DIELECTRIC VARIABLE CAPACITANCE SYSTEM - A variable capacitance system including a first electrode, a second electrode, and a layer of elastically deformable dielectric material positioned between the first and the second electrode. An electret forms with the first electrode a first capacitor, and the electret forms with the second electrode a second capacitor. Capacitances of the first and second capacitors vary with deformation of the dielectric layer. The first electrode, the second electrode, and the first electret follow deformations of the dielectric layer and a deformation of the dielectric layer causes an inverse variation of capacitances of the first and of the second capacitor. The first electrode includes slots in which the electret is located, wherein the edge of the slots forms with the electret located inside the slots the first capacitor, wherein the electret is made on or in the dielectric layer. | 09-29-2011 |
| 20110234042 | VIBRATION ACTUATOR AND METHOD FOR MANUFACTURING THE SAME - A vibration actuator includes an elastic body on which at least one projection is formed and a vibrating body including an electromechanical conversion device, and drives a driven member that is in contact with a contact portion of the projection by causing an end portion of the projection to perform an ellipsoidal movement in response to a combination of two vibration modes generated in the vibrating body when an alternating driving voltage is applied. The elastic body is formed integrally with the projection and a bonding portion between the projection and the electromechanical conversion device. A space is provided between the contact portion and the electromechanical conversion device to which the projection is bonded. The spring portion is provided between the bonding portion and the contact portion and causes the projection to exhibit a spring characteristic when the contact portion is pressed by the driven member. | 09-29-2011 |
| 20110234041 | OSCILLATORY WAVE MOTOR - An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body. | 09-29-2011 |
| 20110248601 | CASCADED MICROMECHANICAL ACTUATOR STRUCTURE - A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis. | 10-13-2011 |
| 20110121682 | SIGNAL AMPLIFICATION BY HIERARCHAL RESONATING STRUCTURES - An electromechanical resonating structure, including: first level major elements coupled to each other to form a second or higher level hierarchy; and first level sub-micron size minor elements with a characteristic frequency and coupled to each of the first level major elements to form a second level hierarchy in which a signal is effectively amplified by vibrating each of the plurality of major elements in at least one mode determined by the geometry and dimensions of the first level sub-micron minor elements. | 05-26-2011 |
| 20110121681 | ELECTROCHEMICAL-BASED MECHANICAL OSCILLATOR - A mechanical oscillator in accordance with one embodiment of the invention includes first and second electrodes and an electrolyte for conducting ions between the first and second electrodes. A power source, such as a voltage or current source, may be provided to create an alternating current between the first and second electrodes. This alternating current will cause ions to travel back and forth between the first and second electrodes through the electrolyte. The movement of ions will cause the first and second electrodes to physically expand and contract as the electrodes gain and lose mass, thereby creating desired oscillations or vibrations. | 05-26-2011 |
| 20110018387 | ELECTROMECHANICAL TRANSDUCER DEVICE AND METHOD OF MAKING THE SAME - Provided is an electromechanical transducer device including a substrate that is conductive, and a plurality of electromechanical transducer elements disposed on a first surface of the substrate. A groove that electrically isolates the plurality of electromechanical transducer elements from each other is formed in the substrate, the groove extending from a second surface side of the substrate toward the first surface side of the substrate, the second surface being opposite the first surface. The width of the groove on the first surface side of the substrate is smaller than the width of the groove on the second surface side of the substrate. | 01-27-2011 |
| 20110241477 | Hall Effect Power Generator - One or more superconductive cells are connected in series to provide voltage arising from the Hall effect when cooled to superconductor temperatures and immersed in a magnetic field. The magnetic field causes the Hall-effect voltage to develop across the London penetration depth, normal to the surface of each superconductive cell. Conductors connect the back side of one cell with the front side of the adjacent cell. Each superconductive cell is at least the thickness of one London penetration depth. | 10-06-2011 |
| 20110127878 | MICRO MOVABLE DEVICE AND METHOD FOR MANUFACTURING MICRO MOVABLE DEVICE - A micro movable device according to an embodiment of the present invention may include a signal line formed on a support substrate, a ground line formed on the support substrate and arranged side by side with the signal line, a first driving electrode formed above the signal line, a second driving electrode formed above the ground line, a first auxiliary driving electrode arranged side by side with the first driving electrode, a second auxiliary driving electrode arranged side by side with the second driving electrode, and a movable electrode which is formed above the first driving electrode, the second driving electrode, the first auxiliary driving electrode and the second auxiliary driving electrode with a space therebetween, and which is supported on the support substrate. | 06-02-2011 |
| 20110115333 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - An electromechanical transducer, including: a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap; and an outer frame extending along an outer periphery of the plurality of devices, wherein the first electrode of each of the devices each includes a plurality of portions formed by electrically separating a device substrate with grooves, wherein the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves, wherein the first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and wherein the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions. | 05-19-2011 |
| 20110084570 | PROCESS FOR PRODUCING CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE, AND CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE - A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity. | 04-14-2011 |
| 20100164323 | BIASED GAP-CLOSING ACTUATOR - A gap-closing actuator includes a stator having one or more first electrodes, a mover having one or more second electrodes interposed among the first electrodes, and a biasing mechanism for applying a non-capacitive bias to the mover for urging the mover to move in a desired direction with respect to the stator. The non-capacitive bias is different from a capacitive force generated between the first and second electrodes when the gap-closing actuator is in operation. | 07-01-2010 |
| 20110127879 | Chiral gravitational shielding material - A gravitational shielding material that is composed of a chiral dielectric as well as a polar or non-polar dielectric matrixing material. Polarization of the dielectric is through the thickness of the material. | 06-02-2011 |
| 20090096318 | METHOD AND APPARTUS FOR GENERATING ELECTRICITY - An apparatus includes a silica container that contains a plurality of silica particles such that a first subgroup of the plurality of silica particles is located within a first chamber of the silica container and a second subgroup of the plurality of silica particles is located within a second chamber of the silica container. The first chamber receives a negative electrical current and the second chamber receiving a positive electrical current. Further, the apparatus includes a plurality of magnets. Each of the plurality of magnets receives an electrical current. In addition, the plurality of magnets is arranged to surround the silica container so that a magnetic field exerts a force on at least one of the silica particles to remove an electron from the silica particle to cause the silica particle to replace the removed electron by absorbing an electron from the atmosphere. | 04-16-2009 |
| 20090218909 | Micro-oscillation element and method for driving the same - A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal. | 09-03-2009 |
| 20090322181 | ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - A technique for a capacitive micromachined ultrasonic transducer (CMUT) for achieving high transmitted sound pressure and high receiver sensitivity is provided. An opening portion ( | 12-31-2009 |
| 20090218908 | ELECTRIC POWER GENERATION USING LIQUID CRYSTALS - A new way of generating electrical power by changing the dielectric properties of liquid crystals by mechanical means is described. Such a method and device take advantage of the nature of the liquid crystal as the dielectric material in a capacitor. A broad range of materials, including various liquid crystalline materials, as well as additional mechanisms (flexoelectric polarization) to fully exploit the potential of this mechanism may be realized. Applications of this technology may be useful in wearable personal electric generators as well as in noise damping materials/devices, which not only absorb and dissipate sound, but use it to generate electric power. | 09-03-2009 |
| 20120068571 | CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER - A capacitive micromachined ultrasonic transducer (CMUT) is described, including a substrate, a conductive film disposed over the substrate, a conductive membrane suspended over the conductive film with a vacuum space underneath, and at least one anchoring post disposed under a middle of the conductive membrane and supporting the conductive membrane. | 03-22-2012 |
| 20100072855 | ELECTROSTATIC INDUCTION POWER GENERATOR - An electrostatic induction power generator includes first and second substrates arranged to be opposed to each other, a third substrate arranged between the first and second substrates, first and second electrodes provided on both surfaces of the third substrate respectively, a third electrode provided on a surface of the first substrate; and a fourth electrode provided on a surface of the second substrate. | 03-25-2010 |
| 20110248600 | RESONATOR ELEMENT AND RESONATOR - A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy η=Lt/L and a taper width occupancy ξ=2 Wt/W. | 10-13-2011 |
| 20110101821 | ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHOD FOR PRODUCING AN ELECTRODE COMB OR A MICROMECHANICAL COMPONENT - An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°. | 05-05-2011 |
| 20110068654 | FLEXIBLE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAY WITH INCREASED EFFECTIVE CAPACITANCE - A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased. | 03-24-2011 |
| 20100123366 | ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME - An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane. | 05-20-2010 |
| 20120133242 | MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT - A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component. | 05-31-2012 |
| 20110062820 | Power Generation Apparatus - A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current. | 03-17-2011 |
| 20100244623 | Capacitive Micromachined Ultrasonic Transducer with Voltage Feedback - Implementations of a capacitive micromachined ultra-sonic transducer (CMUT) include a feedback component connected in series with the CMUT. The feedback component applies a feedback on a voltage applied on the CMUT for affecting the voltage applied on the CMUT as a capacitance of the CMUT changes during actuation of the CMUT. | 09-30-2010 |
| 20110050033 | Micromachined ultrasonic transducer having compliant post structure - A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass. | 03-03-2011 |
| 20110254405 | ELECTROMECHANICAL TRANSDUCER AND PRODUCTION METHOD THEREFOR - An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap being disposed therebetween. Dummy cells that are not electrically connected to the cells are provided around the outer periphery of the unit of the cells. | 10-20-2011 |
| 20090051242 | Electrostatic induction conversion device - There is provided an electrostatic induction conversion device which is small, has high conversion efficiency between electric energy and kinetic energy, and can prevent degradation of an electret. The electret is formed by injecting an electric charge into the vicinity of the surface of an insulating material, is disposed between two conductors, and is constructed so that it moves relatively to at least one of the conductors opposite to the electret and converts between electric energy and kinetic energy. As the insulating material forming the electret, it is preferable to use a polymer having a fluorine-containing aliphatic cyclic structure. | 02-26-2009 |
| 20110156528 | MICRO ACTUATOR, MICRO ACTUATOR SYSTEM, AND METHOD FOR FABRICATING MICRO ACTUATOR - A micro actuator system includes a micro actuator and a light beam generator. The micro actuator includes a substrate, a cantilever beam, and a carbon nano-tube layer. The cantilever beam has a connection portion connected to the substrate, and the carbon nano-tube layer is disposed on the cantilever beam in a spray deposition technique. When the light beam generator generates a light beam for irradiating the carbon nano-tube layer on the connection portion of the cantilever beam, the carbon nano-tube layer drives the cantilever beam to be deformed towards a first direction. | 06-30-2011 |
| 20120032553 | ACTUATOR - An expansion and contraction actuator has a first long actuator portion and a second long actuator portion that face each other and connection members that connect the long sides of each of the first long actuator portion and the second long actuator portion to each other, in which a part of the first long actuator portion and a part of the second long actuator portion are apart from each other to thereby form a hollow structure, the first long actuator portion and the second long actuator portion each have a pair of long electrodes and a long electrolyte layer having an electrolyte, long internal electrodes thereof are the same cathode or anode electrodes, long external electrodes thereof are counter electrodes thereto, and the actuator expands and contracts in the direction of the screw axis by voltage application. | 02-09-2012 |
| 20110254404 | ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT - An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described. | 10-20-2011 |
| 20110163630 | CAPACITIVE MICROMACHINE ULTRASOUND TRANSDUCER - The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application. Further, it is disclosed a method for manufacturing a transducer according to the patent application, wherein the transducer is manufactured with the help of a CMOS manufacturing process, wherein the transducer can be manufactured as a post-processing feature during a CMOS process. | 07-07-2011 |
| 20100283353 | MEMS RESONATORS - A MEMS piezoresistive resonator ( | 11-11-2010 |
| 20110133597 | ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION - A method of producing an electromechanical device includes forming a layer of density-changing material on a substructure, and forming a support layer on at least a portion of the layer of density-changing material. The density-changing material has a first density during the forming the layer and a second density subsequent to the forming the support layer, the second density being greater than the first density such that the layer of density-changing material shrinks in at least one dimension to provide a gap between the layer of density changing material and at least one of the support layer and the substructure. A combined electronic and electromechanical device has a substrate, an electronic circuit formed on the substrate, and an electromechanical system formed on the substrate to provide a combined electronic and electromechanical device on a common substrate. The electromechanical system comprises a structure that is free to move within a gap defined by the electromechanical system. | 06-09-2011 |
| 20120146451 | APPARATUS AND METHOD FOR DRIVING CAPACITANCE-TYPE ACTUATOR - According to one embodiment, a apparatus for driving a capacitance-type actuator includes a first voltage source, a second voltage source, and a driver. The first voltage source outputs a first voltage to charge the capacitance-type actuator. The second voltage source outputs a second voltage to charge the actuator. The driver switches between first and second charges and first and second discharges. The first charge supplies the first voltage to the actuator. The second charge supplies the sum of the first voltage and the second voltage to the actuator. The first discharge emits a charge accumulated in the actuator and guides the charge to the second voltage source. The second discharge emits the charge accumulated in the actuator without guiding the charge to the second voltage source. | 06-14-2012 |
| 20120146454 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER APPARATUS AND METHOD FOR ADJUSTING ITS SENSITIVITY - A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided. | 06-14-2012 |
| 20120146452 | MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUFACTURING METHOD THEREOF - A manufacturing method of the MEMS device disposes a conductive circuit to maintain various elements of the MEMS equi-potential thereby preventing electrostatic damages to various elements of the MEMS during the manufacturing process. | 06-14-2012 |
| 20110095645 | ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR - In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are in contact with each other, and a remaining region of the vibration membrane other than the contact region is able to vibrate. There is an overlap region of the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region. | 04-28-2011 |
| 20100213789 | ELECTROSTATIC DRIVE MEMS ELEMENT AND METHOD OF PRODUCING THE SAME - An electrostatic drive MEMS (Micro Electro Mechanical Systems) element includes a substrate; a fixed electrode disposed on the substrate; a movable electrode arranged to face the fixed electrode in a vertical direction and be movable toward the fixed electrode through an electrostatic force generated between the fixed electrode and the movable electrode; and an insulation film disposed on one of an upper surface of the fixed electrode and a lower surface of the movable electrode and formed of an insulation member containing a conductive fine particle. | 08-26-2010 |
| 20110260576 | ELECTROMECHANICAL TRANSDUCER AND METHOD FOR FABRICATING THE SAME - An electromechanical transducer includes a first electromagnetic element and a second electromagnetic element, such as electrodes, disposed opposite to each other with a sealed cavity therebetween. The sealed cavity is formed by removing a sacrifice layer and then performing sealing. A sealing portion is formed by superposing a film of a hardened second sealing material that has fluidity at normal temperature on a film of a first sealing material that does not have fluidity at normal temperature. | 10-27-2011 |
| 20100194235 | MICRO MOVABLE ELEMENT AND MICRO MOVABLE ELEMENT ARRAY - A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X | 08-05-2010 |
| 20110215672 | MEMS DEVICE - A MEMS device includes: a semiconductor substrate; a vibrating film formed on the semiconductor substrate with a restraining portion interposed between the vibrating film and the semiconductor substrate, and including a lower electrode, and a fixed film formed on the semiconductor substrate with a support portion interposed between the fixed film and the semiconductor substrate to cover the vibrating film, and including an upper electrode. A gap formed between the vibrating film and the fixed film opposed to each other forms an air gap. The restraining portion provides partial coupling between the semiconductor substrate and the vibrating film, and the vibrating film has a multilayer structure in which the lower electrode and a compressive stress inducing insulating film are laminated. The insulating film is located within the perimeter of the lower electrode. | 09-08-2011 |
| 20110215671 | Moving fluid energy conversion device - Moving fluid energy conversion device ( | 09-08-2011 |
| 20100026137 | SILICON ELECTROSTATIC MICROMOTOR WITH INDENTATIONS, IN PARTICULAR FOR PROBE-STORAGE SYSTEMS - In an electrostatic micromotor, a mobile substrate faces a fixed substrate, and electrostatic-interaction elements are provided to allow a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement. The electrostatic-interaction elements include electrodes arranged on a facing surface of the fixed substrate ( | 02-04-2010 |
| 20100019616 | ELECTROSTATIC OPERATION DEVICE - An electrostatic operation device in which a variation in the amount of electric charges accumulated in an electret film caused by physical impact can be suppressed. The electrostatic operation device (electrostatic induction power generating device ( | 01-28-2010 |
| 20100019617 | CAPACITIVE POSITION SENSING IN AN ELECTROSTATIC MICROMOTOR - An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation. | 01-28-2010 |
| 20100264776 | WIRELESS RESONANT MAGNETIC ACUTATION FOR UNTETHERED MICROROBOTS - The invention concerns a novel magnetic actuator mechanism suitable for use on untethered microrobots. It relies on the interaction of magnetic bodies in an external magnetic field. By an oscillating field, the bodies are driven to oscillatory motion, and the energy stored in the oscillation is harnessed. The untethered wireless microactuator according to the invention comprises a mechanical system with at least two magnetic bodies resiliently connected to one another, wherein the mechanical system is capable of being oscillated, in particular driven to resonance, by an oscillating external magnetic field. The actuation system according to the invention comprises such a microrobot as well as a magnetic field generator with adjustable field direction and oscillation frequency. The actuation method comprises exciting two or more magnetic bodies with an oscillating magnetic field such that they perform mechanical oscillations, and harnessing this energy for propulsion of the device or to fulfill other tasks. | 10-21-2010 |
| 20120146453 | ELECTROCHEMICAL ACTUATOR - The present invention provides systems, devices, and related methods, involving electrochemical actuation. In some cases, application of a voltage or current to a system or device of the invention may generate a volumetric or dimensional change, which may produce mechanical work. For example, at least a portion of the system may be constructed and arranged to be displaced from a first orientation to a second orientation. Systems such as these may be useful in various applications, including pumps (e.g., infusion pumps) and drug delivery devices, for example. | 06-14-2012 |
| 20120169179 | ENERGY CONVERSION DEVICE OF ELECTROSTATIC INDUCTION TYPE - On an upper surface of a fixed substrate, a plurality of strap-shaped base electrodes are arranged in parallel to each other. On each of the base electrodes, an electret is formed. The electret has a width wider than the width of each base electrode, and the electret covers an exposed surface of the base electrode. A movable substrate is disposed in parallel to and facing the surface of the fixed substrate where the electrets and others are formed. The movable substrate is movable relatively to the fixed substrate. On a facing surface of the movable substrate, strip-shaped counter electrodes are each formed so as to face each base electrode. | 07-05-2012 |
| 20120306313 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATING DEVICE, AND ELECTRONIC DEVICE AND COMMUNICATION DEVICE HAVING VIBRATION POWER GENERATING DEVICE MOUNTED THEREON - An object of the present invention is to provide a vibration power generator in which the wiring from the movably held substrate can be omitted or simplified. A vibration power generator includes a first substrate, a first electrode which is disposed on a lower surface of the first substrate and includes a film retaining electric charges, a second substrate which is disposed away from the first substrate and opposed to the lower surface of the first substrate, a second electrode disposed on an upper surface of the second substrate so as to be opposed to the first electrode, third electrode which is disposed on the upper surface of the first substrate and includes a film retaining the electric charges, a third substrate which is disposed away from the first substrate and opposed to the upper surface of the first substrate, and a fourth electrode which is disposed on a lower surface of the third substrate so as to be opposed to the third electrodes, wherein the film retaining the electric charges of the first electrodes retains electric charges has a polarity different from a polarity of the film retaining the electric charges of the third electrode, the vibration power generator further includes a restoring force generation member for giving a restoring force, in which the first substrate is held at a predetermined position when an external force is not exerted to the first substrate, and the first substrate is restored to the predetermined position when the external force is exerted to the first substrate and thus the first substrate moves with respect to the second substrate. | 12-06-2012 |
| 20120206012 | ELECTROMECHANICAL DEVICES AND METHODS FOR FABRICATION OF THE SAME - A fabricated electromechanical device is disclosed herein. An exemplary device includes, a substrate, at least one layer of a high-transconductance material separated from the substrate by a dielectric medium, a first electrode in electrical contact with the at least one layer of a high-transconductance material and separated from the substrate by at least one first supporting member, a second electrode in electrical contact with the layer of a high-transconductance material and separated from the substrate by at least one second supporting member, where the first electrode is electrically separate from the second electrode, and a third electrode separated from the at least one layer of high-transconductance material by a dielectric medium and separated from each of the first electrode and the second electrode by a dielectric medium. | 08-16-2012 |
| 20120038242 | ULTRASONIC PROBE AND ULTRASONIC IMAGING APPARATUS - Artifacts due to lateral wave that occurs in a substrate of a Capacitive Micro-machined Ultrasonic Transducer is reduced. The substrate thickness of the ultrasonic transducer is set in an optimum range to efficiently radiate the energy of lateral wave in the sensitive band | 02-16-2012 |
| 20110316383 | ULTRASONIC TRANSDUCER, METHOD OF PRODUCING SAME, AND ULTRASONIC PROBE USING SAME - Disclosed is an art for a capacitive micromachined ultrasonic transducer (CMUT), which suppresses deformation in a cavity, non-uniformity in the thickness of an insulating film enclosing the cavity, and deterioration in the flatness of the surface profile of a membrane, even when the bottom electrode of the ultrasonic transducer is electrically connected from the bottom of the bottom electrode. The ultrasonic transducer is provided with: a bottom electrode ( | 12-29-2011 |
| 20120043851 | ELECTROSTATIC INDUCTION GENERATION DEVICE AND ELECTROSTATIC INDUCTION GENERATION APPARATUS - An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode. | 02-23-2012 |
| 20120043852 | FLOORING SYSTEMS AND METHODS OF MAKING AND USING SAME - The various embodiments of the present invention are directed to floating floor systems and to methods of making and using the floor systems. The floating floor systems generally include a floating flooring unit ( | 02-23-2012 |
| 20110316384 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATION DEVICE, AND ELECTRONIC DEVICE AND COMMUNICATION DEVICE HAVING VIBERATION POWER GENERATION DEVICE INSTALLED - The present invention provides a vibration power generator that does not require a complicated structure and process and improves mechanical reliability, and copes with frequency reduction, a vibration power generating device, and an electronic device and a communication device that have the vibration power generating device mounted thereon. | 12-29-2011 |
| 20110156530 | POLYMER ACTUATOR - This invention provides a polymer actuator having a structure such that voltage can be efficiently applied to two or more actuator electrodes without directly providing an electrical contact point to an expanding and contracting portion. | 06-30-2011 |
| 20100001615 | Reduction of Air Damping in MEMS Device - A micro-electromechanical device has a substrate ( | 01-07-2010 |
| 20120206011 | NOISE AND VIBRATION MITIGATION SYSTEM FOR NUCLEAR REACTORS EMPLOYING AN ACOUSTIC SIDE BRANCH RESONATOR - A method of designing/making an acoustic side branch resonator structured to be coupled to a standpipe of, for example, a nuclear power plant, wherein the acoustic side branch resonator includes a plurality of wire mesh elements for damping purposes. The method includes determining a resonant frequency of the standpipe, determining an active length of the acoustic side branch resonator using the resonant frequency, and determining a particular number of the wire mesh elements to be used in the acoustic side branch resonator and a pitch of each of the wire mesh elements using momentum and continuity equations of a compressible fluid. | 08-16-2012 |
| 20100244622 | MAGNETOSTRICTIVE ACTUATOR - A magnetostrictive actuator comprises an assembly of at least two GMM rods ( | 09-30-2010 |
| 20090174281 | ELECTRET POWER GENERATOR - An electret power generator having two output electrodes on a stator and a rotor positioned above the output electrodes with charged electret material between the electrodes and the rotor. Power is generated when the rotor moves laterally above the electrodes. The electret material is preferably parylene HT . | 07-09-2009 |
| 20120013218 | MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING AN OPTIMIZED NON-FLAT SURFACE - A micro-electro-mechanical transducer (such as a cMUT) having a non-flat surface is disclosed. The non-flat surface may include a variable curve or slope in an area where a spring layer contacts a support, thus making a variable spring model as the spring layer vibrates. The non-flat surface may be that of a non-flat electrode optimized to compensate the dynamic deformation of the other electrode during operation and thus enhance the uniformity of the dynamic electrode gap during operation. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate. | 01-19-2012 |
| 20120112602 | ULTRASONIC TRANSDUCER CELL AND ULTRASONIC TRANSDUCER CHANNEL AND ULTRASONIC TRANSDUCER INCLUDING THE ULTRASONIC TRANSDUCER CHANNEL - An ultrasonic transducer cell, an ultrasonic transducer channel, and an ultrasonic transducer including the ultrasonic transducer channel are provided. The ultrasonic transducer cell includes a substrate, at least three columns arranged on the substrate at regular intervals, and a thin film arranged on the at least three columns. | 05-10-2012 |
| 20120153771 | MICROELECTROMECHANICAL TRANSDUCER AND CORRESPONDING ASSEMBLY PROCESS - A MEMS transducer has a micromechanical sensing structure and a package. The package is provided with a substrate, carrying first electrical-connection elements, and with a lid, coupled to the substrate to define an internal cavity, in which the micromechanical sensing structure is housed. The lid is formed by: a cap layer having a first surface and a second surface, set opposite to one another, the first surface defining an external face of the package and the second surface facing the substrate inside the package; and a wall structure, set between the cap layer and the substrate, and having a coupling face coupled to the substrate. At least a first electrical component is coupled to the second surface of the cap layer, inside the package, and the coupling face of the wall structure carries second electrical-connection elements, electrically connected to the first electrical component and to the first electrical-connection elements. | 06-21-2012 |
| 20120119613 | MEMS ACTUATOR DEVICE - A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die. | 05-17-2012 |
| 20120119612 | MOTION CONTROLLED ACTUATOR - A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame. | 05-17-2012 |
| 20120119614 | LINEARLY DEPLOYED ACTUATORS - A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame. | 05-17-2012 |
| 20120119611 | ELECTRICAL ROUTING - An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material. | 05-17-2012 |
| 20110109195 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATING DEVICE AND COMMUNICATION DEVICE HAVING VIBRATION POWER GENERATING DEVICE MOUNTED THEREON - Generating efficiency of a vibration power generating device, which generates power by vibration in the biaxial direction, is improved. The vibration power generating device is provided with: a first substrate ( | 05-12-2011 |
| 20110109194 | TWO-DIMENSIONAL MICROMECHANICAL ACTUATOR WITH MULTIPLE-PLANE COMB ELECTRODES - A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators. The in-plane comb-drive actuator may be controlled to generate two-dimensional oscillation of the movable element about the two axes defined by the torsional hinges. The second semiconductor layer may further comprise comb electrodes which interdigitate vertically with outer comb electrodes of support element to form vertical comb-drive actuators. Combing the in-plane and the vertical comb-drive actuators, the movable element is controllable to perform two-dimensional raster scan motion. | 05-12-2011 |
| 20120161573 | SURFACE ALLOY PROCESS FOR MEMS AND NEMS - A method of manufacturing microstructures, such as MEMS or NEMS devices, including forming a protective layer on a surface of a moveable component of the microstructure. For example, a silicide layer may be formed on one or more surfaces of a poly-silicon mass that is moveable with respect to a substrate of the microstructure. The process may be self-aligning. | 06-28-2012 |
| 20120248931 | Micromechanical Component and Manufacturing Method for a Micromechanical Component - A micromechanical component is described having a substrate which has at least one stator electrode fixedly mounted with respect to the substrate, a movable mass having at least one actuator electrode fixedly mounted with respect to the movable mass, and at least one spring via which the movable mass is displaceable. The movable mass is structured from the substrate with the aid of at least one separating trench, at least one outer stator electrode spans at least one section of the at least one separating trench and/or of the movable mass, the at least one actuator electrode protrudes between the at least one outer stator electrode and the substrate, and at least one inner stator electrode protrudes between the at least one actuator electrode and the substrate. A related manufacturing method is also described for a micromechanical component. | 10-04-2012 |
| 20120126662 | POWER GENERATING DEVICE AND ELECTRONIC DEVICE - A power generating device includes a first substrate having a first electrode and a first positioning electrode being chargeable with a first polarity on a first surface, and a second substrate movable within a predetermined range from a static position in the planar direction of the first substrate and having a second electrode and a second positioning electrode being chargeable with a second polarity opposite to the first polarity on a second surface opposing the first surface. Overlapping the first positioning electrode and the second positioning electrode at least partially in plan view of the first substrate in the static position can cause the second substrate to return to the static position due to electrostatic attraction generated between the first positioning electrode and the second positioning electrode. | 05-24-2012 |
| 20100207484 | ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR - In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate. | 08-19-2010 |
| 20100207486 | VIBRATING ELEMENT AND VIBRATOR - A vibrating element includes: a vibrating body having frequency temperature dependency; and a temperature characteristic correcting part provided on a surface of the vibrating body. The temperature characteristic correcting part has a temperature characteristic of at least one of a Young's modulus and a thermal expansion coefficient and is expressed by a temperature characteristic curve which has at least one of an inflection point and an extremal value. In the vibrating element, a temperature of at least one of the inflection point and the extremal value is within an operating temperature range of the vibrating body. | 08-19-2010 |
| 20120133243 | ACTUATOR AND ACTUATOR MANUFACTURING METHOD - There is provided an actuator including a displacement unit made of a mixture of a silicone-containing elastomer and an ionic liquid; and multiple electrodes provided to apply an electric field to a part or whole of the displacement unit. Here, the displacement unit is deformed by applying a voltage between the multiple electrodes. | 05-31-2012 |
| 20120161574 | ACTUATOR - The present invention provides an actuator which uses a cationically conductive polymer electrolyte and shows a large deformation response. The actuator has a pair of opposing electrodes and an intermediate layer arranged between the pair of the electrodes, which actuator being curved and displaced when voltage is applied to the electrodes, wherein the intermediate layer has at least: the cationically conductive polymer electrolyte having an ether bond site and an anion site in its molecule; and a weakly acidic material which interacts with the ether bond site. | 06-28-2012 |
| 20120256519 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less. | 10-11-2012 |
| 20120235537 | ELECTROSTATIC ACTUATOR - According to one embodiment, an electrostatic actuator includes a substrate, an electrode unit, a film body unit, and an urging unit. The electrode unit is provided on the substrate. The film body unit is provided to oppose the electrode unit and is conductive. The urging unit is configured to support the film body unit and includes a connection unit connected to the substrate and an elastic unit provided between the connection unit and the film body unit. A contacting state and a separated state are possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit. The elastic unit has a branch portion between one end of the elastic unit connected to the connection unit and multiple one other ends of the elastic unit connected to the film body unit. | 09-20-2012 |
| 20120235538 | Capillary Force Actuator Device and Related Method of Applications - An actuator capable of generates force by leveraging the changes in capillary pressure and surface tension that result from the application of an electrical potential. The device, which will be referred to as a Capillary Force Actuator (CFA), and related methods, employs a conducting liquid bridge between two (or more) surfaces, at least one of which contains dielectric-covered electrodes, and operates according to the principles of electrowetting on dielectric. | 09-20-2012 |
| 20100052469 | ELECTROSTATIC ACTING DEVICE - An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section ( | 03-04-2010 |
| 20120175998 | ELECTROCHEMICAL ACTUATORS - Devices and methods for providing electrochemical actuation are described herein. In one embodiment, an actuator device includes an electrochemical cell including a negative electrode and a positive electrode At least a portion of the negative electrode is formed with a material formulated to at least one of intercalate, de-intercalate, alloy with, oxidize, reduce, or plate with a first portion of the positive electrode to an extent different than with a second portion of the positive electrode such that a differential strain is imparted between the first portion and the second portion of the positive electrode and such that at least a portion of the electrochemical cell is displaced. The electrochemical cell includes a portion that is pre-bent along an axis of the electrochemical cell to define a fold axis and the displacement of the at least a portion of the electrochemical cell is maximized along the fold axis. | 07-12-2012 |
| 20100301699 | Multi-layer micro-energy harvester and method of making the same - The embodiments of the present invention are directed to multi-layer electrostatic energy harvester structures for extracting and converting more ambient vibration energy into electrical energy and/or extracting ambient vibration energy at a plurality of different vibration frequencies or frequency ranges. In some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of bonded variable capacitor layers. In some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of variable capacitor layers and at least one moving mass layer that are bonded together. Still in some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of separate variable capacitor layers. One preferred multi-layer microfabrication method is provided to make multi-layer electrostatic energy harvester structures disclosed in the present invention, comprising: forming a plurality of separate layers that compose a multi-layer electrostatic energy harvester structure wherein each of the plurality of separate layers comprises at least one material and wherein at least one of the plurality of separate layers comprises a sacrificial material; bonding at least the plurality of separate layers together; and removing at least a portion of the sacrificial material. | 12-02-2010 |
| 20120256517 | Method for Microfabrication of a Capacitive Micromachined Ultrasonic Transducer Comprising a Diamond Membrane and a Transducer Thereof - This invention relates generally to capacitive micromachined ultrasonic transducers (CMUTs), particularly to those comprising diamond or diamond like carbon membranes and a method of microfabrication of such CMUTs, wherein the membrane of diamond or diamond like carbon is attached to the substrate by plasma-activated direct bonding of an interlayer of high temperature oxide (HTO). | 10-11-2012 |
| 20120256518 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation. | 10-11-2012 |
| 20120256520 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode. | 10-11-2012 |
| 20090021106 | FUEL-POWERED ACTUATORS AND METHODS OF USING SAME - Fuel-powered actuators are described wherein actuation is a consequence of electrochemical processes, chemical processes, or combinations thereof. These fuel-powered actuators include artificial muscles and actuators in which actuation is non-mechanical. The actuators range from large actuators to microscopic and nanoscale devices. | 01-22-2009 |
| 20120262026 | MEMS DEVICE WITH CENTRAL ANCHOR FOR STRESS ISOLATION - A MEMS device ( | 10-18-2012 |
| 20100181866 | REDUCED VOLTAGE MEMS ELECTROSTATIC ACTUATION METHODS - Cantilever beam electrostatic actuators are disclosed. A cantilever beam electrostatic actuator in accordance with the present invention comprises an actuator beam having a first width at a support anchor point and a second width at a distal end of the actuator, wherein the first width is narrower than the second width. Another actuator in accordance with the present invention comprises an actuator region, having a first width, a beam, having a second width, coupled between an edge of the actuator region and a pivot point, the beam being approximately centered on the actuator region, wherein the second width is narrower than the first width, and at least one auxiliary actuator flap, coupled to the actuator region, the at least one auxiliary actuator flap coupled to the actuator region along the edge of the actuator region, the at least one auxiliary actuator flap being farther away from a centerline of the actuator than the beam. | 07-22-2010 |
| 20120228991 | Tape muscle - A Tape Muscle is described where multiple tape loops are independently driven by synchronized grasp and pull actions from a tandem of Clamp, Clamp & Drive modules. Each tape loop is elastically bent, with its open ends threaded through individual passageways in both modules. Tape loops are nested inside each other with all tape open ends on the same side. Each loop moves its open ends in equal, opposite directions, while the loop position remains fixed. Tape movements do not interfere with each other. The open ends of each loop attach to a shared appendage, which is pulled back and forth using tensile forces. Drive and hold forces use small angle flexure bending mechanical advantage and high force density electrostatic induction methods. Tape speed results from high frequency clock speed and novel hand-off methods. Governing equations, design details and performance estimates are provided. | 09-13-2012 |
| 20100327693 | MINIATURE MECHANICAL RESONATOR DEVICE - Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element. | 12-30-2010 |
| 20080296998 | ELECTROSTATIC ACTUATOR, LIQUID DROPLET DISCHARGING HEAD, METHODS FOR MANUFACTURING THEM, AND LIQUID DROPLET DISCHARGING APPARATUS - [Problems] To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. | 12-04-2008 |
| 20100253180 | Actuator - When an actuator is driven, a stationary element continuously generates a pressing force for spreading in a radial direction such that the stationary element is relatively retracted into movable elements positioned at both ends of the stationary element. As a result, a distance between the movable elements adjacent to each other is reduced, and a contracting operation is performed. When the actuator is not driven, only a relatively low frictional force is generated between the moving elements and the stationary element. Hence, the movable elements and the stationary element can change relative position by small external force. | 10-07-2010 |
| 20100253179 | Micro-image acquisition and transmission system - A micro-image acquisition and transmission system is provided. In a preferred embodiment, the system is comprised of an image acquisition chip comprising an electronic imager, control electronics and a micro powered rotary stage comprising a transceiver array that acts as a hub to optically link a group of distributed image acquisition chips. A preferred embodiment is further comprised of a transceiver array chip comprising one or more micro-powered rotary stages having a transceiver array assembly disposed thereon. The micro-powered rotary stage is supported by a micro-brush bearing. | 10-07-2010 |
| 20120319528 | MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes. | 12-20-2012 |
| 20120326556 | Ultrasonic Transducer and Manufacturing Method - An ultrasonic transducer includes a first electrode, a first insulation film covering the first electrode, a hollow part overlapping the first electrode on the first insulation film, a second insulation film covering the hollow part, a second electrode overlapping the hollow part on the second insulation film, and an interconnection joined to the second electrode. An edge of the first electrode is formed so as to moderate a step of the first electrode. | 12-27-2012 |
| 20120274177 | ELECTROSTATIC MOTOR - An electrostatic motor has a disc-shaped stator and a disc-shaped rotor are opposed to each other in a vacuum container. In the stator, first and second electrodes, which are attached to electrode supports, and which are electrically insulated from each other by an insulator, are arranged alternately in the circumferential direction. The first electrodes and the second electrodes on the side of the stator are arranged at a spacing of two or more rows at a predetermined distance from the center of a rotating shaft. The first electrodes and the second electrodes are arranged at a predetermined distance from the center of the rotating shaft and at an intermediate position between the rows of the first and second electrodes on the side of the stator. | 11-01-2012 |
| 20120274176 | MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) - The micro-electro-mechanical system is provided with at least two separate anchoring elements (F | 11-01-2012 |
| 20100231087 | Micro oscillating element - A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section. | 09-16-2010 |
| 20120086307 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER - The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. | 04-12-2012 |
| 20120086306 | MICROMECHANICAL RESONATING DEVICES AND RELATED METHODS - Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. | 04-12-2012 |
| 20120086305 | ACOUSTIC GALVANIC ISOLATION DEVICE - An electroacoustic transducer including a first electrode formed on a substrate capable of transmitting ultrasounds, a membrane formed above the first electrode and separated therefrom by a cavity, a second electrode formed on the membrane, a first insulating layer on the second electrode, and a third electrode formed on the first insulating layer. | 04-12-2012 |
| 20120319527 | MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam. | 12-20-2012 |
| 20120280592 | Multiple Degree of Freedom Actuator and Method - Systems and methods for creating a multiple degree of freedom (DOF) actuated device having a single transducer source, wherein each DOF is individually actuated by a particular amplified response frequency and wherein simultaneous multiple DOF actuation is possible through superimposing multiple frequencies. Further included are several embodiments rectifying DOF(s) into a continuous output motion. | 11-08-2012 |
| 20120280591 | MEMS DEVICE WITH IMPACTING STRUCTURE FOR ENHANCED RESISTANCE TO STICTION - A microelectromechanical systems (MEMS) device ( | 11-08-2012 |
| 20110309717 | TWO-DIMENSIONAL COMB-DRIVE ACTUATOR AND MANUFACTURING METHOD THEREOF - A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof. | 12-22-2011 |
| 20110309716 | FERROELECTRET TWO-LAYER AND MULTILAYER COMPOSITE AND METHOD FOR PRODUCTION THEREOF - The invention relates to a method for producing double or multilayer ferroelectret with defined cavities by: structuring at least one first surface of a first polymer film ( | 12-22-2011 |
| 20080246366 | ELECTRIC GENERATOR - Methods, compositions, and apparatus for generating electricity are provided. Electricity is generated through the mechanisms nuclear magnetic spin and remnant polarization electric generation. The apparatus may include a material with high nuclear magnetic spin or high remnant polarization coupled with a poled ferroelectric material. The apparatus may also include a pair of electrical contacts disposed on opposite sides of the poled ferroelectric material and the high nuclear magnetic spin or high remnant polarization material. Further, a magnetic field may be applied to the high nuclear magnetic spin material. | 10-09-2008 |
| 20120139389 | MICROELECTRONIC DEVICES FOR HARVESTING KINETIC ENERGY AND ASSOCIATED SYSTEMS AND METHODS - Microelectronic devices for harvesting kinetic energy and associated systems and methods. Particular embodiments include an energy harvesting device for generating electrical energy for use by microelectronic devices, where the energy harvesting device converts to electrical energy the kinetic energy among or within the microelectronic devices and their packaging, and provides this electrical energy to power the microelectronic devices. | 06-07-2012 |
| 20130009514 | CARBON NANOFIBER ACTUATOR - An electroconductive film for an actuator is formed from a gel composition including carbon nanofibers, an ionic liquid, and a polymer. The carbon nanofibers are produced with an aromatic mesophase pitch by melt spinning. | 01-10-2013 |
| 20130015743 | MEMS Structure And Method Of Forming Same - A microelectromechanical system (MEMS) device that reduces or eliminates stiction includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. A protrusion extends from the substrate and is configured to contact the movable element when the moving element moves in the at least one degree of freedom. The protrusion comprises a surface having a low surface energy relative a silicon oxide surface. The protrusion may be coupled to a voltage potential node to avoid or counteract electrostatic forces. | 01-17-2013 |
| 20130020904 | FOUR-WIRE ELECTROSTATIC ACTUATOR AND STATOR - A four-wire electrostatic actuator including: a stator having a substrate with two surfaces and at least four main-movement linear electrodes separately provided on one surface of the substrate and arranged in parallel at regular intervals; and a movable element disposed on the stator. The first and third main-movement linear electrodes of the four main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The second and fourth main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The two signals inputted to the adjacent two electrodes are shifted from each other by a quarter of a period with identical strength. The stator further includes a plurality of one-side auxiliary-movement linear electrodes on one side of the four main-movement linear electrodes, the auxiliary-movement linear electrodes being extended perpendicularly to the four main-movement linear electrodes. | 01-24-2013 |
| 20130020903 | ELECTROCHEMICAL METHODS, DEVICES, AND STRUCTURES - The present invention provides devices and structures and methods of use thereof in electrochemical actuation. This invention provides electrochemical actuators, which are based, inter-alia, on an electric field-driven intercalation or alloying of high-modulus inorganic compounds, which can produce large and reversible volume changes, providing high actuation energy density, high actuation authority and large free strain. | 01-24-2013 |
