Entries |
Document | Title | Date |
20080246366 | ELECTRIC GENERATOR - Methods, compositions, and apparatus for generating electricity are provided. Electricity is generated through the mechanisms nuclear magnetic spin and remnant polarization electric generation. The apparatus may include a material with high nuclear magnetic spin or high remnant polarization coupled with a poled ferroelectric material. The apparatus may also include a pair of electrical contacts disposed on opposite sides of the poled ferroelectric material and the high nuclear magnetic spin or high remnant polarization material. Further, a magnetic field may be applied to the high nuclear magnetic spin material. | 10-09-2008 |
20080265709 | Direct acting capacitive transducer - A capacitive transducer having a significantly increased actuation force and improved response time as compared to similar prior art capacitive transducers. In the capacitive transducer of the present invention it is not necessary to balance response time and actuation force or to provide pre-strain to the transducer in a direction of actuation. Additionally, buckling in the capacitive transducer is prevented, or at least substantially reduced, in a simple manner. | 10-30-2008 |
20080278028 | Methods and apparatus for harvesting biomechanical energy - Methods and apparatus are disclosed for harvesting energy from motion of one or more joints. Energy harvesters comprise: a generator for converting mechanical energy into corresponding electrical energy; one or more sensors for sensing one or more corresponding characteristics associated with motion of the one or more joints; and control circuitry connected to receive the one or more sensed characteristics and configured to assess, based at least in part on the one or more sensed characteristics, whether motion of the one or more joints is associated with mutualistic conditions or non-mutualistic conditions. If conditions are determined to be mutualistic, energy harvesting is engaged. If conditions are determined to be non-mutualistic, energy harvesting is disengaged. | 11-13-2008 |
20080290756 | Micro-Electro-Mechanical Transducer Having an Insulation Extension - A micro-electro-mechanical transducer (such as a cMUT) having two electrodes separated by an insulator with an insulation extension is disclosed. The two electrodes define a transducing gap therebetween. The insulator has an insulating support disposed generally between the two electrodes and an insulation extension extending into at least one of two electrodes to increase the effective insulation without having to increase the transducing gap. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate. | 11-27-2008 |
20080296998 | ELECTROSTATIC ACTUATOR, LIQUID DROPLET DISCHARGING HEAD, METHODS FOR MANUFACTURING THEM, AND LIQUID DROPLET DISCHARGING APPARATUS - [Problems] To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. | 12-04-2008 |
20090001845 | ACTUATOR - An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part. | 01-01-2009 |
20090021106 | FUEL-POWERED ACTUATORS AND METHODS OF USING SAME - Fuel-powered actuators are described wherein actuation is a consequence of electrochemical processes, chemical processes, or combinations thereof. These fuel-powered actuators include artificial muscles and actuators in which actuation is non-mechanical. The actuators range from large actuators to microscopic and nanoscale devices. | 01-22-2009 |
20090051242 | Electrostatic induction conversion device - There is provided an electrostatic induction conversion device which is small, has high conversion efficiency between electric energy and kinetic energy, and can prevent degradation of an electret. The electret is formed by injecting an electric charge into the vicinity of the surface of an insulating material, is disposed between two conductors, and is constructed so that it moves relatively to at least one of the conductors opposite to the electret and converts between electric energy and kinetic energy. As the insulating material forming the electret, it is preferable to use a polymer having a fluorine-containing aliphatic cyclic structure. | 02-26-2009 |
20090072658 | DIELECTRIC COMPOSITE AND A METHOD OF MANUFACTURING A DIELECTRIC COMPOSITE - A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied. | 03-19-2009 |
20090079295 | ELECTROSTATIC GENERATOR - An electrostatic generator includes a substrate, an electrode formed on or in a surface of the substrate, an electret film provided so as to be opposed to the electrode and an insulating film on an electrode side formed on a surface of the electrode on a side opposed to the electret film. | 03-26-2009 |
20090079296 | ELECTROSTATIC ACTUATOR - When a mover during moving is displaced in a direction (X2 direction) perpendicular to a moving direction, between a deformation pattern portion formed in stator-side electrodes of a stator and a deformation pattern portion formed in mover-side electrodes of the mover, a restoring force trying to return the mover toward a direction (X1 direction) opposite to the X2 direction acts on the mover. This makes it possible to prevent the mover from displacement, and consequently to provide an electrostatic actuator improved in the linear movability toward the moving direction. | 03-26-2009 |
20090096318 | METHOD AND APPARTUS FOR GENERATING ELECTRICITY - An apparatus includes a silica container that contains a plurality of silica particles such that a first subgroup of the plurality of silica particles is located within a first chamber of the silica container and a second subgroup of the plurality of silica particles is located within a second chamber of the silica container. The first chamber receives a negative electrical current and the second chamber receiving a positive electrical current. Further, the apparatus includes a plurality of magnets. Each of the plurality of magnets receives an electrical current. In addition, the plurality of magnets is arranged to surround the silica container so that a magnetic field exerts a force on at least one of the silica particles to remove an electron from the silica particle to cause the silica particle to replace the removed electron by absorbing an electron from the atmosphere. | 04-16-2009 |
20090108705 | Bio-electromechanical device - Bio-electromechanical device capable to convert electrochemical potential energy stored in a both animal or plant cellular system to mechanical energy. This bio-electromechanical device has sizes varying in the order of microns, with maximum electric voltages near 100 mV, currents in the order of nA and associated power in the order of 10 | 04-30-2009 |
20090115283 | High-deformation composite microresonator - An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus, less than the first Young's modulus, the second part being at least partially located facing the detection electrode. | 05-07-2009 |
20090115284 | INCHWORM ACTUATOR BASED ON SHAPE MEMORY ALLOY COMPOSITE DIAPHRAGM - Linear actuators (also known as inchworm actuators) including a magnetically actuatable member with a plurality of wings or blades made from a shape memory alloy (SMA) are described. The linear actuators include a bar and an actuator assembly, configured to achieve a linear displacement of the actuator assembly relative to the bar. The actuator assembly includes a housing, a magnetic trigger including an electromagnet and a permanent magnet, and the magnetically actuatable SMA member. Significantly, the wings/blades of the magnetically actuatable SMA member are coupled to the housing. Activation of the magnetic trigger causes the magnetically actuatable SMA member to move toward the magnetic trigger. The motion of the magnetically actuatable SMA can be converted to a linear displacement. The magnetically actuatable SMA can be implemented using a SMA exhibiting both ferromagnetic and SMA properties, or by a ferromagnetic mass coupled with a SMA (i.e., a ferromagnetic SMA composite). | 05-07-2009 |
20090115285 | LIQUID-GAP ELECTROSTATIC HYDRAULIC MICRO ACTUATORS - A liquid-gap electrostatic hydraulic micro actuator is provided that produces higher displacement (in and out of plane) and larger force than typical electrostatic actuators by utilizing a non-conducting liquid as its dielectric material. This new class of actuators utilizes the liquid dielectric for hydraulic amplification and force transfer. The liquid electrostatic actuator consists of two chambers each forming a parallel-plate capacitor, filled with a non-conducting incompressible liquid. One chamber is compressed by pulling down a flexible membrane using electrostatic actuation, thus forcing the liquid under it to transfer into the other chamber. Such movement causes the other chamber's membrane to expand out of plane. | 05-07-2009 |
20090140602 | METHOD AND SYSTEM FOR MITIGATING AN UNINTENDED-MECHANICAL STRAIN - The present invention provides a method for mitigating an unintended-mechanical strain in a device ( | 06-04-2009 |
20090160289 | Curved capacitive membrane ultrasound transducer array - CMUT elements are formed on a substrate. Electrical conductors are formed to interconnect between different portions of the substrate. The substrate is then separated into pieces while maintaining the electrical connections across the separation. Since the conductors are flexible, the separated substrate slabs may be positioned on a curved surface while maintaining the electrical interconnection between the slabs. Large curvatures may be provided, such as associated with forming a multidimensional transducer array for use in a catheter. The electrical interconnections between the different slabs and elements may allow for a walking aperture arrangement for three dimensional imaging. | 06-25-2009 |
20090167107 | MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING EMBEDDED SPRINGS - A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base having a lower portion and an upper portion; a top plate disposed above the upper portion of the base forming a gap therebetween; and a spring-like structure disposed between the top plate and the lower portion of the base. The spring-like structure has a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and a top plate. In an alternate embodiment, the spring-like has a vertical bendable connector connecting the top plate and the lower portion of the base. The spring-like structure transports the top plate vertically in a piston like manner to perform the function of the transducer. Fabrication methods to make the same are also disclosed. | 07-02-2009 |
20090174281 | ELECTRET POWER GENERATOR - An electret power generator having two output electrodes on a stator and a rotor positioned above the output electrodes with charged electret material between the electrodes and the rotor. Power is generated when the rotor moves laterally above the electrodes. The electret material is preferably parylene HT . | 07-09-2009 |
20090189480 | Ultrasonic Transducer And Manufacturing Method - This invention provides a technique whereby, even if a step is produced by splitting a lower electrode into component elements, resistance increase of an upper electrode, damage to a membrane and decrease of dielectric strength between an upper electrode and the lower electrode, are reduced. In an ultrasonic transducer comprising plural lower electrodes, an insulation film covering the lower electrodes, plural hollow parts formed to overlap the lower electrodes on the insulation film, an insulation film filling the gaps among the hollow parts, an insulation film covering the hollow parts and insulation film, plural upper electrodes formed to overlap the hollow parts on the insulation film and plural interconnections joining them, the surfaces of the hollow parts and insulation film are flattened to the same height. | 07-30-2009 |
20090195120 | Capillary Force Actuator Device and Related Method of Applications - An actuator capable of generates force by leveraging the changes in capillary pressure and surface tension that result from the application of an electrical potential. The device, which will be referred to as a Capillary Force Actuator (CFA), and related methods, employs a conducting liquid bridge between two (or more) surfaces, at least one of which contains dielectric-covered electrodes, and operates according to the principles of electro wetting on dielectric. | 08-06-2009 |
20090212657 | EQUIVALENT-CAPACITANCE TYPE ACTUATOR DRIVE DEVICE - [Problem]To provide an actuator drive device that eliminates the need for high voltage amplifiers. | 08-27-2009 |
20090218908 | ELECTRIC POWER GENERATION USING LIQUID CRYSTALS - A new way of generating electrical power by changing the dielectric properties of liquid crystals by mechanical means is described. Such a method and device take advantage of the nature of the liquid crystal as the dielectric material in a capacitor. A broad range of materials, including various liquid crystalline materials, as well as additional mechanisms (flexoelectric polarization) to fully exploit the potential of this mechanism may be realized. Applications of this technology may be useful in wearable personal electric generators as well as in noise damping materials/devices, which not only absorb and dissipate sound, but use it to generate electric power. | 09-03-2009 |
20090218909 | Micro-oscillation element and method for driving the same - A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal. | 09-03-2009 |
20090243426 | ELECTROSTATIC DEVICE FOR DISPLACING AN OBJECT - Electrostatic displacement devices ( | 10-01-2009 |
20090243427 | Micro motor - The present invention relates to a micro motor including a hub, a rib structure, an inner ring, an outer ring and at least two micro actuators, in which a top edge of the hub is projected outwardly to form a top lid, a plurality of bumps are provided between the rib structure and the top lid, and protruded limiting parts are disposed between the wall of the inner hole of the rib structure and the outer periphery of the hub so that the rib structure is in point contact with the hub and the top lid. Therefore, when the micro actuators drive the rib structure, the inner ring and the outer ring to rotate, mutual abrasion among those parts can be reduced to prolong the lifespan of the micro motor. | 10-01-2009 |
20090243428 | NANOPOROUS MATERIALS FOR USE IN THE CONVERSION OF MECHANICAL ENERGY AND/OR THERMAL ENERGY INTO ELECTRICAL ENERGY - The present invention generally relates to a method for using nanoporous materials to convert mechanical motion and/or heat into electrical energy. In one embodiment, the present invention relates to the conversion of mechanical energy to electrical energy by immersing a high surface area nanoporous electrode in an electrolyte such that the ion structure at the surface of the electrode is interrupted in response to a change in the flow rate of the electrolyte, causing increased electrostatic energy to be generated at the liquid/solid interface. The invention further relates to a device suitable for conducting this method. | 10-01-2009 |
20090267445 | MICRO ROCKING DEVICE AND METHOD FOR MANUFACTURING THE SAME - A micro rocking device includes a frame, a rocking portion, a torsion connecting portion, and a second comb-like electrode, the rocking portion including a first comb-like electrode. The torsion connecting portion connects the frame and the rocking portion. The torsion connecting portion defines the axis of rotational displacement of the rocking portion. The second comb-like electrode attracts the first comb-like electrode and rotationally displaces the rocking portion. The first comb-like electrode has a plurality of first parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction. The second comb-like electrode has a plurality of second parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction. | 10-29-2009 |
20090284101 | Device for Converting Mechanical Energy Into Electrical Energy, and Method for Operating Said Device - A device for converting mechanical energy into electrical energy has first electrode formed of a first material having a first work function for a charge carrier, and a second electrode formed of a second material having a second work function for a charge carrier, the second work function being different from the first work function. The first electrode and the second electrode are interconnected by a first load circuit in an electroconductive manner. The second electrode is arranged at a variable distance from the first electrode. | 11-19-2009 |
20090302707 | MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) RESONATOR AND MANUFACTURING METHOD THEREOF - A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface. | 12-10-2009 |
20090322181 | ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - A technique for a capacitive micromachined ultrasonic transducer (CMUT) for achieving high transmitted sound pressure and high receiver sensitivity is provided. An opening portion ( | 12-31-2009 |
20100001615 | Reduction of Air Damping in MEMS Device - A micro-electromechanical device has a substrate ( | 01-07-2010 |
20100001616 | High Precision Silicon-on-Insulator MEMS Parallel Kinematic Stages - MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably connect the actuator to a movable end stage provide independent motion from each of the actuators that minimizes unwanted off-axis displacement, particularly for three-dimensional movement of a cantilever. Also provided are methods for using and making MEMS stages. In an aspect, a process provides a unitary MEMS stage made from a silicon-on-insulator wafer that avoids any post-fabrication assembly steps. Further provided are various devices that incorporate any of the stages disclosed herein, such as devices requiring accurate positioning systems in applications including scanning probe microscopy, E-jet printing, near-field optic sensing, cell probing and material characterization. | 01-07-2010 |
20100007238 | METHOD AND STRUCTURE FOR AN OUT-OF-PLANE COMPLIANT MICRO ACTUATOR - This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems. | 01-14-2010 |
20100019616 | ELECTROSTATIC OPERATION DEVICE - An electrostatic operation device in which a variation in the amount of electric charges accumulated in an electret film caused by physical impact can be suppressed. The electrostatic operation device (electrostatic induction power generating device ( | 01-28-2010 |
20100019617 | CAPACITIVE POSITION SENSING IN AN ELECTROSTATIC MICROMOTOR - An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation. | 01-28-2010 |
20100026136 | MICROMECHANICAL RESONATING DEVICES AND RELATED METHODS - Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. | 02-04-2010 |
20100026137 | SILICON ELECTROSTATIC MICROMOTOR WITH INDENTATIONS, IN PARTICULAR FOR PROBE-STORAGE SYSTEMS - In an electrostatic micromotor, a mobile substrate faces a fixed substrate, and electrostatic-interaction elements are provided to allow a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement. The electrostatic-interaction elements include electrodes arranged on a facing surface of the fixed substrate ( | 02-04-2010 |
20100026138 | ELECTROSTATIC MICROMOTOR WITH STATOR AND ROTOR IN CONTACT, IN PARTICULAR FOR PROBE-STORAGE SYSTEMS - In an electrostatic micromotor, a mobile substrate faces a fixed substrate and is suspended over the fixed substrate at a given distance of separation in an operative resting condition; an actuation unit is configured so as to give rise to a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement during an operative condition of actuation. The actuation unit is also configured so as to bring the mobile substrate and the fixed substrate substantially into contact and to keep them in contact during the operative condition of actuation. The electrostatic micromotor is provided with an electronic unit for reducing friction, configured so as to reduce a friction generated by the contact between the rotor substrate and the stator substrate during the relative movement. | 02-04-2010 |
20100045137 | ACTUATOR AND METHOD FOR MANUFACTURING THE SAME - An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4. | 02-25-2010 |
20100052469 | ELECTROSTATIC ACTING DEVICE - An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section ( | 03-04-2010 |
20100066203 | Dielectric actuator - A dielectric actuator | 03-18-2010 |
20100072855 | ELECTROSTATIC INDUCTION POWER GENERATOR - An electrostatic induction power generator includes first and second substrates arranged to be opposed to each other, a third substrate arranged between the first and second substrates, first and second electrodes provided on both surfaces of the third substrate respectively, a third electrode provided on a surface of the first substrate; and a fourth electrode provided on a surface of the second substrate. | 03-25-2010 |
20100109472 | ELECTROSTATIC ACTING DEVICE - An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section ( | 05-06-2010 |
20100123366 | ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME - An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane. | 05-20-2010 |
20100127595 | ELECTRET AND ELECTROSTATIC INDUCTION CONVERSION DEVICE COMPRISING THE SAME - To provide an electret whose surface potential is improved and an electrostatic induction conversion device comprising the same, an electret is formed by spin-coating a fluorine-containing polymer composition for coating which contains a fluorine-containing polymer having a ring structure in its main chain, a silane coupling agent, an aprotic fluorine-containing solvent, and a fluorine-containing alcohol as a protic fluorine-containing solvent on a copper substrate and baking it. | 05-27-2010 |
20100127596 | Micro-Electromechanical Resonators Having Boron-Doped and Boron-Assisted Aluminum-Doped Resonator Bodies Therein - A micro-electromechanical resonator includes a resonator body having a semiconductor region therein doped with boron to a level greater than about 1×10 | 05-27-2010 |
20100164322 | Electrostatic motor - Provided is an electrostatic motor, in which a disc-shaped stator (S) and a disc-shaped rotor (R) are opposed to each other in a vacuum container ( | 07-01-2010 |
20100164323 | BIASED GAP-CLOSING ACTUATOR - A gap-closing actuator includes a stator having one or more first electrodes, a mover having one or more second electrodes interposed among the first electrodes, and a biasing mechanism for applying a non-capacitive bias to the mover for urging the mover to move in a desired direction with respect to the stator. The non-capacitive bias is different from a capacitive force generated between the first and second electrodes when the gap-closing actuator is in operation. | 07-01-2010 |
20100181866 | REDUCED VOLTAGE MEMS ELECTROSTATIC ACTUATION METHODS - Cantilever beam electrostatic actuators are disclosed. A cantilever beam electrostatic actuator in accordance with the present invention comprises an actuator beam having a first width at a support anchor point and a second width at a distal end of the actuator, wherein the first width is narrower than the second width. Another actuator in accordance with the present invention comprises an actuator region, having a first width, a beam, having a second width, coupled between an edge of the actuator region and a pivot point, the beam being approximately centered on the actuator region, wherein the second width is narrower than the first width, and at least one auxiliary actuator flap, coupled to the actuator region, the at least one auxiliary actuator flap coupled to the actuator region along the edge of the actuator region, the at least one auxiliary actuator flap being farther away from a centerline of the actuator than the beam. | 07-22-2010 |
20100194235 | MICRO MOVABLE ELEMENT AND MICRO MOVABLE ELEMENT ARRAY - A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X | 08-05-2010 |
20100207484 | ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR - In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate. | 08-19-2010 |
20100207485 | PRODUCTION OF PRE-COLLAPSED CAPACITIVE MICRO-MACHINED ULTRASONIC TRANSDUCERS AND APPLICATIONS THEREOF - Methods are provided for production of pre-collapsed capacitive micro-machined ultrasonic transducers (cMUTs). Methods disclosed generally include the steps of obtaining a nearly completed traditional cMUT structure prior to etching and sealing the membrane, defining holes through the membrane of the cMUT structure for each electrode ring fixed relative to the top face of the membrane, applying a bias voltage across the membrane and substrate of the cMUT structure so as to collapse the areas of the membrane proximate to the holes to or toward the substrate, fixing and sealing the collapsed areas of the membrane to the substrate by applying an encasing layer, and discontinuing or reducing the bias voltage. CMUT assemblies are provided, including packaged assemblies, integrated assemblies with an integrated circuit/chip (e.g., a beam-steering chip) and a cMUT/lens assembly. Advantageous cMUT-based applications utilizing the disclosed pre-collapsed cMUTs are also provided, e.g., ultrasound transducer-based applications, catheter-based applications, needle-based applications and flowmeter applications. | 08-19-2010 |
20100207486 | VIBRATING ELEMENT AND VIBRATOR - A vibrating element includes: a vibrating body having frequency temperature dependency; and a temperature characteristic correcting part provided on a surface of the vibrating body. The temperature characteristic correcting part has a temperature characteristic of at least one of a Young's modulus and a thermal expansion coefficient and is expressed by a temperature characteristic curve which has at least one of an inflection point and an extremal value. In the vibrating element, a temperature of at least one of the inflection point and the extremal value is within an operating temperature range of the vibrating body. | 08-19-2010 |
20100213789 | ELECTROSTATIC DRIVE MEMS ELEMENT AND METHOD OF PRODUCING THE SAME - An electrostatic drive MEMS (Micro Electro Mechanical Systems) element includes a substrate; a fixed electrode disposed on the substrate; a movable electrode arranged to face the fixed electrode in a vertical direction and be movable toward the fixed electrode through an electrostatic force generated between the fixed electrode and the movable electrode; and an insulation film disposed on one of an upper surface of the fixed electrode and a lower surface of the movable electrode and formed of an insulation member containing a conductive fine particle. | 08-26-2010 |
20100219715 | Method for Producing Electric Power and Device for Carrying Out Said Method - The invention encompasses a method for production of electric power from a system of contacts of nanostructured conductive surfaces with a thin water-containing layer, and a hydroelectric generator for carrying out the method. The basis of the invention is a discovery, confirmed by experiments, that the contacts of the conductive surfaces, having nano-dimensional structural and/or parametrical heterogeneities, with the water-containing layer, having a thickness from several nanometers to a fraction of a millimeter, under certain conditions, described in the present disclosure, generate electromotive force in an external electrical load. The invention utilizes new principles for building power systems, which can find further wide application in various areas of science and technology. | 09-02-2010 |
20100225199 | NANOPOROUS MATERIALS FOR USE IN INTELLIGENT SYSTEMS - The present invention relates to volume and/or shape memory systems for which the volume and/or shape can be adjusted by controlling one or more variables such as applied voltage and temperature. In one embodiment, the volume and/or shape memory systems of the present invention are controlled and/or adjusted by way of a temperature mechanism. In another embodiment, the volume and/or shape memory systems of the present invention are controlled and/or adjusted by way of a voltage mechanism. In still another embodiment, the present invention provides a device that contains, in part, a smart volume and/or shape memory material that exhibits high energy densities, and can provide large displacements over broad temperature and/or voltage ranges. | 09-09-2010 |
20100225200 | Monolithic integrated CMUTs fabricated by low-temperature wafer bonding - Low temperature wafer bonding (temperature of 450° C. or less) is employed to fabricate CMUTs on a wafer that already includes active electrical devices. The resulting structures are CMUT arrays integrated with active electronics by a low-temperature wafer bonding process. The use of a low-temperature process preserves the electronics during CMUT fabrication. With this approach, it is not necessary to make compromises in the CMUT or electronics designs, as is typical of the sacrificial release fabrication approach. Various disadvantages of sacrificial release, such as low process control, poor design flexibility, low reproducibility, and reduced performance are avoided with the present approach. With this approach, a CMUT array can be provided with per-cell electrodes connected to the substrate integrated circuitry. This enables complete flexibility in electronically assigning the CMUT cells to CMUT array elements. | 09-09-2010 |
20100231087 | Micro oscillating element - A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section. | 09-16-2010 |
20100237737 | OPTIMIZED BI-DIRECTIONAL ELECTROSTATIC ACTUATORS - An electrostatic actuator comprising: first and second comb arrays of electrodes arranged on a base, the electrodes of the first and second comb arrays being interleaved; a third comb array of electrodes spring mounted over the first and second comb arrays, the electrodes of the third comb array being aligned with the electrodes of the second comb array; and, means for applying a first voltage to the third comb array and a second voltage to the first and second comb arrays to generate an attractive force acting on the third comb array to move the third comb array toward the second comb array; wherein: the electrodes of the third comb array each have a thickness tj and a width a such that a≧tf, the electrodes of the second comb array each have a width b such that a≦b≦10a; the electrodes of the first and second comb arrays are separated by a distance d such that 0.5Z>09-23-2010 | |
20100244622 | MAGNETOSTRICTIVE ACTUATOR - A magnetostrictive actuator comprises an assembly of at least two GMM rods ( | 09-30-2010 |
20100244623 | Capacitive Micromachined Ultrasonic Transducer with Voltage Feedback - Implementations of a capacitive micromachined ultra-sonic transducer (CMUT) include a feedback component connected in series with the CMUT. The feedback component applies a feedback on a voltage applied on the CMUT for affecting the voltage applied on the CMUT as a capacitance of the CMUT changes during actuation of the CMUT. | 09-30-2010 |
20100253179 | Micro-image acquisition and transmission system - A micro-image acquisition and transmission system is provided. In a preferred embodiment, the system is comprised of an image acquisition chip comprising an electronic imager, control electronics and a micro powered rotary stage comprising a transceiver array that acts as a hub to optically link a group of distributed image acquisition chips. A preferred embodiment is further comprised of a transceiver array chip comprising one or more micro-powered rotary stages having a transceiver array assembly disposed thereon. The micro-powered rotary stage is supported by a micro-brush bearing. | 10-07-2010 |
20100253180 | Actuator - When an actuator is driven, a stationary element continuously generates a pressing force for spreading in a radial direction such that the stationary element is relatively retracted into movable elements positioned at both ends of the stationary element. As a result, a distance between the movable elements adjacent to each other is reduced, and a contracting operation is performed. When the actuator is not driven, only a relatively low frictional force is generated between the moving elements and the stationary element. Hence, the movable elements and the stationary element can change relative position by small external force. | 10-07-2010 |
20100259127 | ELECTROMECHANICAL TRANSDUCER - When the initial displacement greatly varies among cells in an element, there is a need to reduce a bias voltage to be applied between electrodes. This decreases the sensitivity. An electromechanical transducer of the present invention includes an element having a plurality of cells. Each of the cells includes a first electrode and a second electrode that are provided with a cavity being disposed therebetween. A groove is provided at a position at a predetermined distance from the cavity of the cell on the outermost periphery of the element. | 10-14-2010 |
20100264776 | WIRELESS RESONANT MAGNETIC ACUTATION FOR UNTETHERED MICROROBOTS - The invention concerns a novel magnetic actuator mechanism suitable for use on untethered microrobots. It relies on the interaction of magnetic bodies in an external magnetic field. By an oscillating field, the bodies are driven to oscillatory motion, and the energy stored in the oscillation is harnessed. The untethered wireless microactuator according to the invention comprises a mechanical system with at least two magnetic bodies resiliently connected to one another, wherein the mechanical system is capable of being oscillated, in particular driven to resonance, by an oscillating external magnetic field. The actuation system according to the invention comprises such a microrobot as well as a magnetic field generator with adjustable field direction and oscillation frequency. The actuation method comprises exciting two or more magnetic bodies with an oscillating magnetic field such that they perform mechanical oscillations, and harnessing this energy for propulsion of the device or to fulfill other tasks. | 10-21-2010 |
20100264777 | LONG RANGE TRAVEL MEMS ACTUATOR - An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies. | 10-21-2010 |
20100283353 | MEMS RESONATORS - A MEMS piezoresistive resonator ( | 11-11-2010 |
20100283354 | CAPACITIVE ELECTRO-MECHANICAL TRANSDUCER, AND FABRICATION METHOD OF THE SAME - A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion. | 11-11-2010 |
20100295413 | DEVICE COMPRISING A CAPACITIVE ENERGY CONVERTER THAT IS INTEGRATED ON A SUBSTRATE - The embodiments relate to a device, especially a microsystem, which comprises an energy converter unit having an electrode structure for the capacitive conversion of mechanical energy to electrical energy The electrode structure includes a first electrode and a second electrode the distance of which to the first electrode is variable. The device according to the invention also comprises a load circuit via which the first and second electrode are interconnected in an electroconductive manner. A transmitter is coupled to the second electrodes. The distance between the first and the second electrode can be varied by displacing the transmitter and the displacement of the transmitter can be effected in a countactles manner by interaction of the transmitter with a mobile part. | 11-25-2010 |
20100295414 | COUPLED MEMS STRUCTURE FOR MOTION AMPLIFICATION - A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element and has a resonant frequency substantially equal to the secondary MEMS element and has a much larger displacement than the secondary MEMS element. | 11-25-2010 |
20100295415 | ENERGY RECOVERING DEVICE WITH A LIQUID ELECTRODE - An energy recovery device including: at least one capacitor with variable capacitance, the capacitor including a fixed electrode, a dielectric layer, and a liquid electrode; and a mechanism to inject an electric charge into the capacitor and to remove the electric charge therefrom, including a charge injection electrode forming a portion of the second face positioned upstream from the fixed electrode in the direction of displacement of the liquid electrode, and a charge removal electrode forming a portion of the second face positioned downstream from the fixed electrode in the direction of displacement of the liquid electrode. | 11-25-2010 |
20100295416 | MICRORESONATOR - A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening. | 11-25-2010 |
20100301699 | Multi-layer micro-energy harvester and method of making the same - The embodiments of the present invention are directed to multi-layer electrostatic energy harvester structures for extracting and converting more ambient vibration energy into electrical energy and/or extracting ambient vibration energy at a plurality of different vibration frequencies or frequency ranges. In some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of bonded variable capacitor layers. In some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of variable capacitor layers and at least one moving mass layer that are bonded together. Still in some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of separate variable capacitor layers. One preferred multi-layer microfabrication method is provided to make multi-layer electrostatic energy harvester structures disclosed in the present invention, comprising: forming a plurality of separate layers that compose a multi-layer electrostatic energy harvester structure wherein each of the plurality of separate layers comprises at least one material and wherein at least one of the plurality of separate layers comprises a sacrificial material; bonding at least the plurality of separate layers together; and removing at least a portion of the sacrificial material. | 12-02-2010 |
20100327693 | MINIATURE MECHANICAL RESONATOR DEVICE - Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element. | 12-30-2010 |
20110012476 | Electrostrictive composite and electrostrictive element using the same - An electrostrictive composite includes a flexible polymer matrix and a number of one dimensional conductive materials dispersed in the flexible polymer matrix. The flexible polymer matrix is a sheet. The one dimensional conductive materials cooperatively form an electrically conductive structure in the flexible polymer matrix. The one dimensional conductive materials are oriented substantially along a same preferred direction. | 01-20-2011 |
20110018387 | ELECTROMECHANICAL TRANSDUCER DEVICE AND METHOD OF MAKING THE SAME - Provided is an electromechanical transducer device including a substrate that is conductive, and a plurality of electromechanical transducer elements disposed on a first surface of the substrate. A groove that electrically isolates the plurality of electromechanical transducer elements from each other is formed in the substrate, the groove extending from a second surface side of the substrate toward the first surface side of the substrate, the second surface being opposite the first surface. The width of the groove on the first surface side of the substrate is smaller than the width of the groove on the second surface side of the substrate. | 01-27-2011 |
20110031844 | ELECTROSTATIC GENERATOR/MOTOR CONFIGURATIONS - Electrostatic generators/motors designs are provided that include a stator fixedly connected to a first central support centered about a central axis. The stator elements are attached to the first central support. Similarly, a second stator is connected to a central support centered about the central axis, and the second stator has stator elements attached to the second central support. A rotor is located between the first stator and the second stator and includes an outer support, where the rotor is rotatably centered about the central axis, the rotor having elements in contact with the outer support, each rotor element having an extending rotor portion that extends radially from the outer support toward the axis of rotation. | 02-10-2011 |
20110031845 | ELECTRET AND ELECTROSTATIC INDUCTION CONVERSION DEVICE - To provide an electret having a high surface voltage, and an electrostatic induction conversion device comprising such an electret. | 02-10-2011 |
20110050033 | Micromachined ultrasonic transducer having compliant post structure - A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass. | 03-03-2011 |
20110062820 | Power Generation Apparatus - A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current. | 03-17-2011 |
20110068654 | FLEXIBLE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAY WITH INCREASED EFFECTIVE CAPACITANCE - A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased. | 03-24-2011 |
20110084570 | PROCESS FOR PRODUCING CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE, AND CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE - A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity. | 04-14-2011 |
20110095645 | ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR - In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are in contact with each other, and a remaining region of the vibration membrane other than the contact region is able to vibrate. There is an overlap region of the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region. | 04-28-2011 |
20110101821 | ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHOD FOR PRODUCING AN ELECTRODE COMB OR A MICROMECHANICAL COMPONENT - An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°. | 05-05-2011 |
20110109194 | TWO-DIMENSIONAL MICROMECHANICAL ACTUATOR WITH MULTIPLE-PLANE COMB ELECTRODES - A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators. The in-plane comb-drive actuator may be controlled to generate two-dimensional oscillation of the movable element about the two axes defined by the torsional hinges. The second semiconductor layer may further comprise comb electrodes which interdigitate vertically with outer comb electrodes of support element to form vertical comb-drive actuators. Combing the in-plane and the vertical comb-drive actuators, the movable element is controllable to perform two-dimensional raster scan motion. | 05-12-2011 |
20110109195 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATING DEVICE AND COMMUNICATION DEVICE HAVING VIBRATION POWER GENERATING DEVICE MOUNTED THEREON - Generating efficiency of a vibration power generating device, which generates power by vibration in the biaxial direction, is improved. The vibration power generating device is provided with: a first substrate ( | 05-12-2011 |
20110115333 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - An electromechanical transducer, including: a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap; and an outer frame extending along an outer periphery of the plurality of devices, wherein the first electrode of each of the devices each includes a plurality of portions formed by electrically separating a device substrate with grooves, wherein the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves, wherein the first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and wherein the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions. | 05-19-2011 |
20110121681 | ELECTROCHEMICAL-BASED MECHANICAL OSCILLATOR - A mechanical oscillator in accordance with one embodiment of the invention includes first and second electrodes and an electrolyte for conducting ions between the first and second electrodes. A power source, such as a voltage or current source, may be provided to create an alternating current between the first and second electrodes. This alternating current will cause ions to travel back and forth between the first and second electrodes through the electrolyte. The movement of ions will cause the first and second electrodes to physically expand and contract as the electrodes gain and lose mass, thereby creating desired oscillations or vibrations. | 05-26-2011 |
20110121682 | SIGNAL AMPLIFICATION BY HIERARCHAL RESONATING STRUCTURES - An electromechanical resonating structure, including: first level major elements coupled to each other to form a second or higher level hierarchy; and first level sub-micron size minor elements with a characteristic frequency and coupled to each of the first level major elements to form a second level hierarchy in which a signal is effectively amplified by vibrating each of the plurality of major elements in at least one mode determined by the geometry and dimensions of the first level sub-micron minor elements. | 05-26-2011 |
20110127877 | SILICON MEMS RESONATORS - The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device comprises a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed. | 06-02-2011 |
20110127878 | MICRO MOVABLE DEVICE AND METHOD FOR MANUFACTURING MICRO MOVABLE DEVICE - A micro movable device according to an embodiment of the present invention may include a signal line formed on a support substrate, a ground line formed on the support substrate and arranged side by side with the signal line, a first driving electrode formed above the signal line, a second driving electrode formed above the ground line, a first auxiliary driving electrode arranged side by side with the first driving electrode, a second auxiliary driving electrode arranged side by side with the second driving electrode, and a movable electrode which is formed above the first driving electrode, the second driving electrode, the first auxiliary driving electrode and the second auxiliary driving electrode with a space therebetween, and which is supported on the support substrate. | 06-02-2011 |
20110127879 | Chiral gravitational shielding material - A gravitational shielding material that is composed of a chiral dielectric as well as a polar or non-polar dielectric matrixing material. Polarization of the dielectric is through the thickness of the material. | 06-02-2011 |
20110133597 | ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION - A method of producing an electromechanical device includes forming a layer of density-changing material on a substructure, and forming a support layer on at least a portion of the layer of density-changing material. The density-changing material has a first density during the forming the layer and a second density subsequent to the forming the support layer, the second density being greater than the first density such that the layer of density-changing material shrinks in at least one dimension to provide a gap between the layer of density changing material and at least one of the support layer and the substructure. A combined electronic and electromechanical device has a substrate, an electronic circuit formed on the substrate, and an electromechanical system formed on the substrate to provide a combined electronic and electromechanical device on a common substrate. The electromechanical system comprises a structure that is free to move within a gap defined by the electromechanical system. | 06-09-2011 |
20110140569 | ELECTROSTATIC COMB ACTUATOR - An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis of rotation of the rotor at a first distance from the axis of rotation. The rotor comb electrode fingers extend towards the axis of rotation for a length that is smaller than the first distance. The stator electrodes are shifted towards the axis of rotation, so that the stator electrode fingers are only partially overlapping with the rotor electrodes fingers. | 06-16-2011 |
20110156528 | MICRO ACTUATOR, MICRO ACTUATOR SYSTEM, AND METHOD FOR FABRICATING MICRO ACTUATOR - A micro actuator system includes a micro actuator and a light beam generator. The micro actuator includes a substrate, a cantilever beam, and a carbon nano-tube layer. The cantilever beam has a connection portion connected to the substrate, and the carbon nano-tube layer is disposed on the cantilever beam in a spray deposition technique. When the light beam generator generates a light beam for irradiating the carbon nano-tube layer on the connection portion of the cantilever beam, the carbon nano-tube layer drives the cantilever beam to be deformed towards a first direction. | 06-30-2011 |
20110156529 | Surface mounted crystal resonator - An object of the invention is to provide a surface mounted resonator that improves impact resistance by the shape of a mounting terminal provided on an outside bottom face of a stacked resonator. A surface mounted crystal resonator is provided with a plurality of mounting terminals electrically connected to a hermetically sealed crystal piece at both ends of an outside bottom face having a rectangular shape long in the lengthwise direction, the mounting terminals having the same external dimensions with a total dimension of the mounting terminals in a lengthwise direction of the outside bottom face being 70% or more [but less than 100%] of a dimension in the lengthwise direction of the outside bottom face. Respective facing sides of the mounting terminals facing each other in a central area of the outside bottom face are formed curved in a convex shape such that a curvature thereof decreases gradually. | 06-30-2011 |
20110156530 | POLYMER ACTUATOR - This invention provides a polymer actuator having a structure such that voltage can be efficiently applied to two or more actuator electrodes without directly providing an electrical contact point to an expanding and contracting portion. | 06-30-2011 |
20110163630 | CAPACITIVE MICROMACHINE ULTRASOUND TRANSDUCER - The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application. Further, it is disclosed a method for manufacturing a transducer according to the patent application, wherein the transducer is manufactured with the help of a CMOS manufacturing process, wherein the transducer can be manufactured as a post-processing feature during a CMOS process. | 07-07-2011 |
20110193447 | Stable Electro-Mechanical Actuators - An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position. | 08-11-2011 |
20110198966 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER - A capacitive electromechanical transducer has at least one cell. The cell includes a first electrode, a movable vibrating portion including a second electrode disposed opposite the first electrode with a space therebetween, and a supporting portion that supports the vibrating portion. In order to regulate the strength of a border portion between the vibrating portion and the supporting portion, a strength regulating portion is provided. | 08-18-2011 |
20110198967 | Switching Array Having Circuitry to Adjust a Temporal Distribution of a Gating Signal Applied to the Array - A Micro-electro-mechanical systems (MEMS) switching array includes circuitry, which may be coupled to a gate line of the array to adjust a temporal distribution of a gating signal applied to a plurality of MEMS switches that make up the switching array. The temporal distribution may be shaped to reduce a voltage surge that can develop in the switches during switching of electrical current. This voltage surge reduction is conducive to improving the durability of the array. | 08-18-2011 |
20110204745 | ACOUSTIC SENSOR - An acoustic sensing element has a substrate that includes a back chamber, a vibration electrode plate that is provided in a surface of the substrate while being opposite an upper surface opening of the back chamber, and a fixed electrode plate that is provided opposite the vibration electrode plate, an acoustic hole being made in the fixed electrode plate. The acoustic sensing element outputs an electric signal based on an electrostatic capacitance change generated between the vibration electrode plate and the fixed electrode plate by a displacement of the vibration electrode plate. A lower surface of the back chamber is closed into a pouched shape by the substrate. | 08-25-2011 |
20110215671 | Moving fluid energy conversion device - Moving fluid energy conversion device ( | 09-08-2011 |
20110215672 | MEMS DEVICE - A MEMS device includes: a semiconductor substrate; a vibrating film formed on the semiconductor substrate with a restraining portion interposed between the vibrating film and the semiconductor substrate, and including a lower electrode, and a fixed film formed on the semiconductor substrate with a support portion interposed between the fixed film and the semiconductor substrate to cover the vibrating film, and including an upper electrode. A gap formed between the vibrating film and the fixed film opposed to each other forms an air gap. The restraining portion provides partial coupling between the semiconductor substrate and the vibrating film, and the vibrating film has a multilayer structure in which the lower electrode and a compressive stress inducing insulating film are laminated. The insulating film is located within the perimeter of the lower electrode. | 09-08-2011 |
20110221300 | ELECTROSTATIC ACTUATOR AND DRIVING METHOD THEREOF - A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage. | 09-15-2011 |
20110227448 | APPARATUS AND METHOD FOR DRIVING CAPACITIVE ELECTROMECHANICAL TRANSDUCTION APPARATUS - An apparatus is configured to drive a transduction apparatus including a cell with a first electrode and a second electrode disposed so as to oppose each other via a gap. The apparatus includes a timing detection unit and a control unit. The timing detection unit detects a timing of outputting of an electromagnetic wave from an electromagnetic wave source configured to output the electromagnetic wave to irradiate an object to be measured. The control unit drives and controls the transduction apparatus in synchronization with the detected timing such that the capacitive electromechanical transduction apparatus is put in a receiving state only for a period in which an acoustic wave generated in an inside of the object irradiated with the electromagnetic wave is received. | 09-22-2011 |
20110234041 | OSCILLATORY WAVE MOTOR - An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body. | 09-29-2011 |
20110234042 | VIBRATION ACTUATOR AND METHOD FOR MANUFACTURING THE SAME - A vibration actuator includes an elastic body on which at least one projection is formed and a vibrating body including an electromechanical conversion device, and drives a driven member that is in contact with a contact portion of the projection by causing an end portion of the projection to perform an ellipsoidal movement in response to a combination of two vibration modes generated in the vibrating body when an alternating driving voltage is applied. The elastic body is formed integrally with the projection and a bonding portion between the projection and the electromechanical conversion device. A space is provided between the contact portion and the electromechanical conversion device to which the projection is bonded. The spring portion is provided between the bonding portion and the contact portion and causes the projection to exhibit a spring characteristic when the contact portion is pressed by the driven member. | 09-29-2011 |
20110234043 | FLEXIBLE DIELECTRIC VARIABLE CAPACITANCE SYSTEM - A variable capacitance system including a first electrode, a second electrode, and a layer of elastically deformable dielectric material positioned between the first and the second electrode. An electret forms with the first electrode a first capacitor, and the electret forms with the second electrode a second capacitor. Capacitances of the first and second capacitors vary with deformation of the dielectric layer. The first electrode, the second electrode, and the first electret follow deformations of the dielectric layer and a deformation of the dielectric layer causes an inverse variation of capacitances of the first and of the second capacitor. The first electrode includes slots in which the electret is located, wherein the edge of the slots forms with the electret located inside the slots the first capacitor, wherein the electret is made on or in the dielectric layer. | 09-29-2011 |
20110241477 | Hall Effect Power Generator - One or more superconductive cells are connected in series to provide voltage arising from the Hall effect when cooled to superconductor temperatures and immersed in a magnetic field. The magnetic field causes the Hall-effect voltage to develop across the London penetration depth, normal to the surface of each superconductive cell. Conductors connect the back side of one cell with the front side of the adjacent cell. Each superconductive cell is at least the thickness of one London penetration depth. | 10-06-2011 |
20110248600 | RESONATOR ELEMENT AND RESONATOR - A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy η=Lt/L and a taper width occupancy ξ=2 Wt/W. | 10-13-2011 |
20110248601 | CASCADED MICROMECHANICAL ACTUATOR STRUCTURE - A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis. | 10-13-2011 |
20110254404 | ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT - An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described. | 10-20-2011 |
20110254405 | ELECTROMECHANICAL TRANSDUCER AND PRODUCTION METHOD THEREFOR - An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap being disposed therebetween. Dummy cells that are not electrically connected to the cells are provided around the outer periphery of the unit of the cells. | 10-20-2011 |
20110260576 | ELECTROMECHANICAL TRANSDUCER AND METHOD FOR FABRICATING THE SAME - An electromechanical transducer includes a first electromagnetic element and a second electromagnetic element, such as electrodes, disposed opposite to each other with a sealed cavity therebetween. The sealed cavity is formed by removing a sacrifice layer and then performing sealing. A sealing portion is formed by superposing a film of a hardened second sealing material that has fluidity at normal temperature on a film of a first sealing material that does not have fluidity at normal temperature. | 10-27-2011 |
20110266915 | POWER GENERATING APPARATUS - A power generating apparatus ( | 11-03-2011 |
20110309716 | FERROELECTRET TWO-LAYER AND MULTILAYER COMPOSITE AND METHOD FOR PRODUCTION THEREOF - The invention relates to a method for producing double or multilayer ferroelectret with defined cavities by: structuring at least one first surface of a first polymer film ( | 12-22-2011 |
20110309717 | TWO-DIMENSIONAL COMB-DRIVE ACTUATOR AND MANUFACTURING METHOD THEREOF - A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof. | 12-22-2011 |
20110316383 | ULTRASONIC TRANSDUCER, METHOD OF PRODUCING SAME, AND ULTRASONIC PROBE USING SAME - Disclosed is an art for a capacitive micromachined ultrasonic transducer (CMUT), which suppresses deformation in a cavity, non-uniformity in the thickness of an insulating film enclosing the cavity, and deterioration in the flatness of the surface profile of a membrane, even when the bottom electrode of the ultrasonic transducer is electrically connected from the bottom of the bottom electrode. The ultrasonic transducer is provided with: a bottom electrode ( | 12-29-2011 |
20110316384 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATION DEVICE, AND ELECTRONIC DEVICE AND COMMUNICATION DEVICE HAVING VIBERATION POWER GENERATION DEVICE INSTALLED - The present invention provides a vibration power generator that does not require a complicated structure and process and improves mechanical reliability, and copes with frequency reduction, a vibration power generating device, and an electronic device and a communication device that have the vibration power generating device mounted thereon. | 12-29-2011 |
20120013218 | MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING AN OPTIMIZED NON-FLAT SURFACE - A micro-electro-mechanical transducer (such as a cMUT) having a non-flat surface is disclosed. The non-flat surface may include a variable curve or slope in an area where a spring layer contacts a support, thus making a variable spring model as the spring layer vibrates. The non-flat surface may be that of a non-flat electrode optimized to compensate the dynamic deformation of the other electrode during operation and thus enhance the uniformity of the dynamic electrode gap during operation. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate. | 01-19-2012 |
20120032553 | ACTUATOR - An expansion and contraction actuator has a first long actuator portion and a second long actuator portion that face each other and connection members that connect the long sides of each of the first long actuator portion and the second long actuator portion to each other, in which a part of the first long actuator portion and a part of the second long actuator portion are apart from each other to thereby form a hollow structure, the first long actuator portion and the second long actuator portion each have a pair of long electrodes and a long electrolyte layer having an electrolyte, long internal electrodes thereof are the same cathode or anode electrodes, long external electrodes thereof are counter electrodes thereto, and the actuator expands and contracts in the direction of the screw axis by voltage application. | 02-09-2012 |
20120038242 | ULTRASONIC PROBE AND ULTRASONIC IMAGING APPARATUS - Artifacts due to lateral wave that occurs in a substrate of a Capacitive Micro-machined Ultrasonic Transducer is reduced. The substrate thickness of the ultrasonic transducer is set in an optimum range to efficiently radiate the energy of lateral wave in the sensitive band | 02-16-2012 |
20120043851 | ELECTROSTATIC INDUCTION GENERATION DEVICE AND ELECTROSTATIC INDUCTION GENERATION APPARATUS - An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode. | 02-23-2012 |
20120043852 | FLOORING SYSTEMS AND METHODS OF MAKING AND USING SAME - The various embodiments of the present invention are directed to floating floor systems and to methods of making and using the floor systems. The floating floor systems generally include a floating flooring unit ( | 02-23-2012 |
20120068571 | CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER - A capacitive micromachined ultrasonic transducer (CMUT) is described, including a substrate, a conductive film disposed over the substrate, a conductive membrane suspended over the conductive film with a vacuum space underneath, and at least one anchoring post disposed under a middle of the conductive membrane and supporting the conductive membrane. | 03-22-2012 |
20120068572 | METHOD FOR PRODUCING OF AN ELECTROMECHANICAL TRANSDUCER - The present invention relates to a method for producing an electromechanical, for example piezoelectric, transducer in which a first polymer layer comprising cutouts is applied to a first continuous polymer layer by means of a printing and/or coating method, a cover is applied to the first polymer layer comprising cutouts in such a way that the cutouts of the first polymer layer comprising cutouts are closed off with the formation of cavities, and the cover is connected to the first polymer layer comprising cutouts. The invention also relates to electromechanical transducers produced by the method according to the invention, and the use of said electromechanical transducers. | 03-22-2012 |
20120086305 | ACOUSTIC GALVANIC ISOLATION DEVICE - An electroacoustic transducer including a first electrode formed on a substrate capable of transmitting ultrasounds, a membrane formed above the first electrode and separated therefrom by a cavity, a second electrode formed on the membrane, a first insulating layer on the second electrode, and a third electrode formed on the first insulating layer. | 04-12-2012 |
20120086306 | MICROMECHANICAL RESONATING DEVICES AND RELATED METHODS - Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. | 04-12-2012 |
20120086307 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER - The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. | 04-12-2012 |
20120112602 | ULTRASONIC TRANSDUCER CELL AND ULTRASONIC TRANSDUCER CHANNEL AND ULTRASONIC TRANSDUCER INCLUDING THE ULTRASONIC TRANSDUCER CHANNEL - An ultrasonic transducer cell, an ultrasonic transducer channel, and an ultrasonic transducer including the ultrasonic transducer channel are provided. The ultrasonic transducer cell includes a substrate, at least three columns arranged on the substrate at regular intervals, and a thin film arranged on the at least three columns. | 05-10-2012 |
20120119611 | ELECTRICAL ROUTING - An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material. | 05-17-2012 |
20120119612 | MOTION CONTROLLED ACTUATOR - A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame. | 05-17-2012 |
20120119613 | MEMS ACTUATOR DEVICE - A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die. | 05-17-2012 |
20120119614 | LINEARLY DEPLOYED ACTUATORS - A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame. | 05-17-2012 |
20120126662 | POWER GENERATING DEVICE AND ELECTRONIC DEVICE - A power generating device includes a first substrate having a first electrode and a first positioning electrode being chargeable with a first polarity on a first surface, and a second substrate movable within a predetermined range from a static position in the planar direction of the first substrate and having a second electrode and a second positioning electrode being chargeable with a second polarity opposite to the first polarity on a second surface opposing the first surface. Overlapping the first positioning electrode and the second positioning electrode at least partially in plan view of the first substrate in the static position can cause the second substrate to return to the static position due to electrostatic attraction generated between the first positioning electrode and the second positioning electrode. | 05-24-2012 |
20120133242 | MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT - A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component. | 05-31-2012 |
20120133243 | ACTUATOR AND ACTUATOR MANUFACTURING METHOD - There is provided an actuator including a displacement unit made of a mixture of a silicone-containing elastomer and an ionic liquid; and multiple electrodes provided to apply an electric field to a part or whole of the displacement unit. Here, the displacement unit is deformed by applying a voltage between the multiple electrodes. | 05-31-2012 |
20120139389 | MICROELECTRONIC DEVICES FOR HARVESTING KINETIC ENERGY AND ASSOCIATED SYSTEMS AND METHODS - Microelectronic devices for harvesting kinetic energy and associated systems and methods. Particular embodiments include an energy harvesting device for generating electrical energy for use by microelectronic devices, where the energy harvesting device converts to electrical energy the kinetic energy among or within the microelectronic devices and their packaging, and provides this electrical energy to power the microelectronic devices. | 06-07-2012 |
20120146451 | APPARATUS AND METHOD FOR DRIVING CAPACITANCE-TYPE ACTUATOR - According to one embodiment, a apparatus for driving a capacitance-type actuator includes a first voltage source, a second voltage source, and a driver. The first voltage source outputs a first voltage to charge the capacitance-type actuator. The second voltage source outputs a second voltage to charge the actuator. The driver switches between first and second charges and first and second discharges. The first charge supplies the first voltage to the actuator. The second charge supplies the sum of the first voltage and the second voltage to the actuator. The first discharge emits a charge accumulated in the actuator and guides the charge to the second voltage source. The second discharge emits the charge accumulated in the actuator without guiding the charge to the second voltage source. | 06-14-2012 |
20120146452 | MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUFACTURING METHOD THEREOF - A manufacturing method of the MEMS device disposes a conductive circuit to maintain various elements of the MEMS equi-potential thereby preventing electrostatic damages to various elements of the MEMS during the manufacturing process. | 06-14-2012 |
20120146453 | ELECTROCHEMICAL ACTUATOR - The present invention provides systems, devices, and related methods, involving electrochemical actuation. In some cases, application of a voltage or current to a system or device of the invention may generate a volumetric or dimensional change, which may produce mechanical work. For example, at least a portion of the system may be constructed and arranged to be displaced from a first orientation to a second orientation. Systems such as these may be useful in various applications, including pumps (e.g., infusion pumps) and drug delivery devices, for example. | 06-14-2012 |
20120146454 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER APPARATUS AND METHOD FOR ADJUSTING ITS SENSITIVITY - A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided. | 06-14-2012 |
20120153771 | MICROELECTROMECHANICAL TRANSDUCER AND CORRESPONDING ASSEMBLY PROCESS - A MEMS transducer has a micromechanical sensing structure and a package. The package is provided with a substrate, carrying first electrical-connection elements, and with a lid, coupled to the substrate to define an internal cavity, in which the micromechanical sensing structure is housed. The lid is formed by: a cap layer having a first surface and a second surface, set opposite to one another, the first surface defining an external face of the package and the second surface facing the substrate inside the package; and a wall structure, set between the cap layer and the substrate, and having a coupling face coupled to the substrate. At least a first electrical component is coupled to the second surface of the cap layer, inside the package, and the coupling face of the wall structure carries second electrical-connection elements, electrically connected to the first electrical component and to the first electrical-connection elements. | 06-21-2012 |
20120161573 | SURFACE ALLOY PROCESS FOR MEMS AND NEMS - A method of manufacturing microstructures, such as MEMS or NEMS devices, including forming a protective layer on a surface of a moveable component of the microstructure. For example, a silicide layer may be formed on one or more surfaces of a poly-silicon mass that is moveable with respect to a substrate of the microstructure. The process may be self-aligning. | 06-28-2012 |
20120161574 | ACTUATOR - The present invention provides an actuator which uses a cationically conductive polymer electrolyte and shows a large deformation response. The actuator has a pair of opposing electrodes and an intermediate layer arranged between the pair of the electrodes, which actuator being curved and displaced when voltage is applied to the electrodes, wherein the intermediate layer has at least: the cationically conductive polymer electrolyte having an ether bond site and an anion site in its molecule; and a weakly acidic material which interacts with the ether bond site. | 06-28-2012 |
20120169179 | ENERGY CONVERSION DEVICE OF ELECTROSTATIC INDUCTION TYPE - On an upper surface of a fixed substrate, a plurality of strap-shaped base electrodes are arranged in parallel to each other. On each of the base electrodes, an electret is formed. The electret has a width wider than the width of each base electrode, and the electret covers an exposed surface of the base electrode. A movable substrate is disposed in parallel to and facing the surface of the fixed substrate where the electrets and others are formed. The movable substrate is movable relatively to the fixed substrate. On a facing surface of the movable substrate, strip-shaped counter electrodes are each formed so as to face each base electrode. | 07-05-2012 |
20120175998 | ELECTROCHEMICAL ACTUATORS - Devices and methods for providing electrochemical actuation are described herein. In one embodiment, an actuator device includes an electrochemical cell including a negative electrode and a positive electrode At least a portion of the negative electrode is formed with a material formulated to at least one of intercalate, de-intercalate, alloy with, oxidize, reduce, or plate with a first portion of the positive electrode to an extent different than with a second portion of the positive electrode such that a differential strain is imparted between the first portion and the second portion of the positive electrode and such that at least a portion of the electrochemical cell is displaced. The electrochemical cell includes a portion that is pre-bent along an axis of the electrochemical cell to define a fold axis and the displacement of the at least a portion of the electrochemical cell is maximized along the fold axis. | 07-12-2012 |
20120181896 | MECHANICAL META-MATERIALS - The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material. | 07-19-2012 |
20120206011 | NOISE AND VIBRATION MITIGATION SYSTEM FOR NUCLEAR REACTORS EMPLOYING AN ACOUSTIC SIDE BRANCH RESONATOR - A method of designing/making an acoustic side branch resonator structured to be coupled to a standpipe of, for example, a nuclear power plant, wherein the acoustic side branch resonator includes a plurality of wire mesh elements for damping purposes. The method includes determining a resonant frequency of the standpipe, determining an active length of the acoustic side branch resonator using the resonant frequency, and determining a particular number of the wire mesh elements to be used in the acoustic side branch resonator and a pitch of each of the wire mesh elements using momentum and continuity equations of a compressible fluid. | 08-16-2012 |
20120206012 | ELECTROMECHANICAL DEVICES AND METHODS FOR FABRICATION OF THE SAME - A fabricated electromechanical device is disclosed herein. An exemplary device includes, a substrate, at least one layer of a high-transconductance material separated from the substrate by a dielectric medium, a first electrode in electrical contact with the at least one layer of a high-transconductance material and separated from the substrate by at least one first supporting member, a second electrode in electrical contact with the layer of a high-transconductance material and separated from the substrate by at least one second supporting member, where the first electrode is electrically separate from the second electrode, and a third electrode separated from the at least one layer of high-transconductance material by a dielectric medium and separated from each of the first electrode and the second electrode by a dielectric medium. | 08-16-2012 |
20120223613 | ELECTRICAL BYPASS STRUCTURE FOR MEMS DEVICE - An apparatus including a bypass structure for complementary metal-oxide-semiconductor (CMOS) and/or microelectromechanical system (MEMS) devices, and method for fabricating such apparatus, is disclosed. An exemplary apparatus includes a first substrate; a second substrate that includes a MEMS device; an insulator disposed between the first substrate and the second substrate; and an electrical bypass structure disposed in the insulator layer that contacts a portion of the first substrate, wherein the electrical bypass structure is electrically isolated from the MEMS device in the second substrate and any device included in the first substrate. | 09-06-2012 |
20120223614 | ELECTROSTATIC ACTUATOR OF A MOBILE STRUCTURE WITH IMPROVED RELAXATION OF TRAPPED CHARGES - The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions. | 09-06-2012 |
20120223615 | THROUGH HOLE FORMING METHOD, NOZZLE PLATE AND MEMS DEVICE - A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film. | 09-06-2012 |
20120228991 | Tape muscle - A Tape Muscle is described where multiple tape loops are independently driven by synchronized grasp and pull actions from a tandem of Clamp, Clamp & Drive modules. Each tape loop is elastically bent, with its open ends threaded through individual passageways in both modules. Tape loops are nested inside each other with all tape open ends on the same side. Each loop moves its open ends in equal, opposite directions, while the loop position remains fixed. Tape movements do not interfere with each other. The open ends of each loop attach to a shared appendage, which is pulled back and forth using tensile forces. Drive and hold forces use small angle flexure bending mechanical advantage and high force density electrostatic induction methods. Tape speed results from high frequency clock speed and novel hand-off methods. Governing equations, design details and performance estimates are provided. | 09-13-2012 |
20120235537 | ELECTROSTATIC ACTUATOR - According to one embodiment, an electrostatic actuator includes a substrate, an electrode unit, a film body unit, and an urging unit. The electrode unit is provided on the substrate. The film body unit is provided to oppose the electrode unit and is conductive. The urging unit is configured to support the film body unit and includes a connection unit connected to the substrate and an elastic unit provided between the connection unit and the film body unit. A contacting state and a separated state are possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit. The elastic unit has a branch portion between one end of the elastic unit connected to the connection unit and multiple one other ends of the elastic unit connected to the film body unit. | 09-20-2012 |
20120235538 | Capillary Force Actuator Device and Related Method of Applications - An actuator capable of generates force by leveraging the changes in capillary pressure and surface tension that result from the application of an electrical potential. The device, which will be referred to as a Capillary Force Actuator (CFA), and related methods, employs a conducting liquid bridge between two (or more) surfaces, at least one of which contains dielectric-covered electrodes, and operates according to the principles of electrowetting on dielectric. | 09-20-2012 |
20120242189 | MICRO-MECHANICAL COMPONENT WITH CANTILEVER INTEGRATED ELECTRICAL FUNCTIONAL ELEMENT - A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line. | 09-27-2012 |
20120248931 | Micromechanical Component and Manufacturing Method for a Micromechanical Component - A micromechanical component is described having a substrate which has at least one stator electrode fixedly mounted with respect to the substrate, a movable mass having at least one actuator electrode fixedly mounted with respect to the movable mass, and at least one spring via which the movable mass is displaceable. The movable mass is structured from the substrate with the aid of at least one separating trench, at least one outer stator electrode spans at least one section of the at least one separating trench and/or of the movable mass, the at least one actuator electrode protrudes between the at least one outer stator electrode and the substrate, and at least one inner stator electrode protrudes between the at least one actuator electrode and the substrate. A related manufacturing method is also described for a micromechanical component. | 10-04-2012 |
20120256517 | Method for Microfabrication of a Capacitive Micromachined Ultrasonic Transducer Comprising a Diamond Membrane and a Transducer Thereof - This invention relates generally to capacitive micromachined ultrasonic transducers (CMUTs), particularly to those comprising diamond or diamond like carbon membranes and a method of microfabrication of such CMUTs, wherein the membrane of diamond or diamond like carbon is attached to the substrate by plasma-activated direct bonding of an interlayer of high temperature oxide (HTO). | 10-11-2012 |
20120256518 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation. | 10-11-2012 |
20120256519 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less. | 10-11-2012 |
20120256520 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode. | 10-11-2012 |
20120262026 | MEMS DEVICE WITH CENTRAL ANCHOR FOR STRESS ISOLATION - A MEMS device ( | 10-18-2012 |
20120274176 | MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) - The micro-electro-mechanical system is provided with at least two separate anchoring elements (F | 11-01-2012 |
20120274177 | ELECTROSTATIC MOTOR - An electrostatic motor has a disc-shaped stator and a disc-shaped rotor are opposed to each other in a vacuum container. In the stator, first and second electrodes, which are attached to electrode supports, and which are electrically insulated from each other by an insulator, are arranged alternately in the circumferential direction. The first electrodes and the second electrodes on the side of the stator are arranged at a spacing of two or more rows at a predetermined distance from the center of a rotating shaft. The first electrodes and the second electrodes are arranged at a predetermined distance from the center of the rotating shaft and at an intermediate position between the rows of the first and second electrodes on the side of the stator. | 11-01-2012 |
20120280591 | MEMS DEVICE WITH IMPACTING STRUCTURE FOR ENHANCED RESISTANCE TO STICTION - A microelectromechanical systems (MEMS) device ( | 11-08-2012 |
20120280592 | Multiple Degree of Freedom Actuator and Method - Systems and methods for creating a multiple degree of freedom (DOF) actuated device having a single transducer source, wherein each DOF is individually actuated by a particular amplified response frequency and wherein simultaneous multiple DOF actuation is possible through superimposing multiple frequencies. Further included are several embodiments rectifying DOF(s) into a continuous output motion. | 11-08-2012 |
20120306313 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATING DEVICE, AND ELECTRONIC DEVICE AND COMMUNICATION DEVICE HAVING VIBRATION POWER GENERATING DEVICE MOUNTED THEREON - An object of the present invention is to provide a vibration power generator in which the wiring from the movably held substrate can be omitted or simplified. A vibration power generator includes a first substrate, a first electrode which is disposed on a lower surface of the first substrate and includes a film retaining electric charges, a second substrate which is disposed away from the first substrate and opposed to the lower surface of the first substrate, a second electrode disposed on an upper surface of the second substrate so as to be opposed to the first electrode, third electrode which is disposed on the upper surface of the first substrate and includes a film retaining the electric charges, a third substrate which is disposed away from the first substrate and opposed to the upper surface of the first substrate, and a fourth electrode which is disposed on a lower surface of the third substrate so as to be opposed to the third electrodes, wherein the film retaining the electric charges of the first electrodes retains electric charges has a polarity different from a polarity of the film retaining the electric charges of the third electrode, the vibration power generator further includes a restoring force generation member for giving a restoring force, in which the first substrate is held at a predetermined position when an external force is not exerted to the first substrate, and the first substrate is restored to the predetermined position when the external force is exerted to the first substrate and thus the first substrate moves with respect to the second substrate. | 12-06-2012 |
20120313480 | MEMS DEVICES MADE WITH ISOTOPIC MATERIALS - A MEMS or NEMS device with at least one component made of a non-naturally occurring isotope material. The refined isotopic material provides advantages to device operation such as reduced mechanical loss, increased breakdown voltage, improved tunability and other advantages. | 12-13-2012 |
20120319527 | MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam. | 12-20-2012 |
20120319528 | MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes. | 12-20-2012 |
20120326556 | Ultrasonic Transducer and Manufacturing Method - An ultrasonic transducer includes a first electrode, a first insulation film covering the first electrode, a hollow part overlapping the first electrode on the first insulation film, a second insulation film covering the hollow part, a second electrode overlapping the hollow part on the second insulation film, and an interconnection joined to the second electrode. An edge of the first electrode is formed so as to moderate a step of the first electrode. | 12-27-2012 |
20130002090 | ION CONDUCTING ACTUATOR - Provided is an ion conducting actuator that easily allows reduction in size and integration thereof, compared to existing one, and gives a large generating force. The columnar ion conducting actuator includes a tubular member serving as a first electrode, an ion-supplying material disposed inside the tubular member, and linear second electrodes disposed inside the tubular member. The ion-supplying material lies between the inner wall of the tubular member and the second electrodes and includes a polymer gel containing positive ions and negative ions. The tubular member contains a plurality of the second electrodes. Either the positive ions or the negative ions contained in the polymer gel move toward the plurality of second electrodes side and the other ions move toward the inner wall side of the tubular member by applying a voltage between the tubular member and the plurality of the second electrodes to elongate the ion conducting actuator. | 01-03-2013 |
20130009514 | CARBON NANOFIBER ACTUATOR - An electroconductive film for an actuator is formed from a gel composition including carbon nanofibers, an ionic liquid, and a polymer. The carbon nanofibers are produced with an aromatic mesophase pitch by melt spinning. | 01-10-2013 |
20130015743 | MEMS Structure And Method Of Forming Same - A microelectromechanical system (MEMS) device that reduces or eliminates stiction includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. A protrusion extends from the substrate and is configured to contact the movable element when the moving element moves in the at least one degree of freedom. The protrusion comprises a surface having a low surface energy relative a silicon oxide surface. The protrusion may be coupled to a voltage potential node to avoid or counteract electrostatic forces. | 01-17-2013 |
20130020903 | ELECTROCHEMICAL METHODS, DEVICES, AND STRUCTURES - The present invention provides devices and structures and methods of use thereof in electrochemical actuation. This invention provides electrochemical actuators, which are based, inter-alia, on an electric field-driven intercalation or alloying of high-modulus inorganic compounds, which can produce large and reversible volume changes, providing high actuation energy density, high actuation authority and large free strain. | 01-24-2013 |
20130020904 | FOUR-WIRE ELECTROSTATIC ACTUATOR AND STATOR - A four-wire electrostatic actuator including: a stator having a substrate with two surfaces and at least four main-movement linear electrodes separately provided on one surface of the substrate and arranged in parallel at regular intervals; and a movable element disposed on the stator. The first and third main-movement linear electrodes of the four main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The second and fourth main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The two signals inputted to the adjacent two electrodes are shifted from each other by a quarter of a period with identical strength. The stator further includes a plurality of one-side auxiliary-movement linear electrodes on one side of the four main-movement linear electrodes, the auxiliary-movement linear electrodes being extended perpendicularly to the four main-movement linear electrodes. | 01-24-2013 |
20130026879 | ELECTROSTATIC ACTUATOR - An electrostatic actuator | 01-31-2013 |
20130026880 | Power Generation Apparatus - A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current. | 01-31-2013 |
20130049529 | ELECTROSTATIC GENERATOR/MOTOR CONFIGURATIONS - Electrostatic generators/motors designs are provided that generally may include a first cylindrical stator centered about a longitudinal axis; a second cylindrical stator centered about the axis, a first cylindrical rotor centered about the axis and located between the first cylindrical stator and the second cylindrical stator. The first cylindrical stator., the second cylindrical stator and the first cylindrical rotor may be concentrically aligned. A magnetic field having field lines about parallel with the longitudinal axis is provided. | 02-28-2013 |
20130049530 | DIELECTRIC ELASTOMER COMPOSITES AND ACTUATORS USING THE SAME - The present invention relates to an actuator which is one of the energy conversion devices, and is characterized by improving the ability to convert electrical energy into mechanical energy by way of using a dielectric elastomer composite comprising a filler with an efficient dispersibility. In case of using a conventional resilient dielectric layer, there was a problem in that the operating voltage is high, while advantageously exhibiting a fast response and a high strain. The present invention can provide dielectric elastomer composite actuators that show excellent electromechanical conversion properties, by adding a dispersing agent such as a pyrene derivative or a polymeric compound having an amine end group when preparing the composite wherein carbon-based conductive fillers such as carbon blacks, single-walled carbon nanotubes (SWCNTs), double-walled carbon nanotubes (DWCNTs), multi-walled carbon nanotubes (MWCNTs) and graphenes, or high dielectric fillers such as copper phthalo-cyanine (CuPc), MOFs (metal organic frameworks) and barium titanate (BaTiO | 02-28-2013 |
20130057110 | POWER GENERATION DEVICE - Provided is a power generation device having a dielectric body and an electret, where power is generated by varying the distance between the dielectric body and the electret. A first electrode is connected to the electret on a side not facing the dielectric body. The first electrode is connected to a grounding terminal via a load. A second electrode may be connected to the dielectric body on a side not facing the electret. The second electrode may be directly connected to the grounding terminal. | 03-07-2013 |
20130062993 | ACTUATOR AND METHOD FOR MANUFACTURING THE SAME - Provided are an actuator that is small, superior in terms of high-speed response, and capable of large displacement, and a manufacturing method that can easily manufacture the actuator. The actuator is configured by a laminated body including multiple electrodes, multiple cation-exchange resin films, and multiple anion-exchange resin films. The cation-exchange resin films and the anion-exchange resin films are stacked alternately, and each of the cation-exchange resin films and the anion-exchange resin films is sandwiched between two of the electrodes. A voltage is applied such that the electrodes between adjacent ones of the cation-exchange resin films and anion-exchange resin films have the same polarity. | 03-14-2013 |
20130069480 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE ELECTROMECHANICAL TRANSDUCER - An electromechanical transducer with less characteristic variation and a method of manufacturing the electromechanical transducer is provided. The electromechanical transducer has a plurality of cells constituted of a first electrode, a vibration film provided with a second electrode provided so as to face the first electrode through a gap, and a supporting portion supporting the vibration film. A structure configured to reduce an uneven flatness between the vibration film and the supporting portion is provided at an outer peripheral portion of a gap while a portion of the supporting portion is interposed between the structure and the gap. | 03-21-2013 |
20130076202 | MICRO-ELECTROMECHANICAL GENERATOR AND ELECTRIC APPARATUS USING SAME - Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented. | 03-28-2013 |
20130088117 | APPARATUS FOR USE AS A MOTOR OR GENERATOR - Apparatus ( | 04-11-2013 |
20130088118 | Pre-charged CMUTs for zero-external-bias operation - Capacitive micromachined ultrasonic transducers (CMUTs) having a pre-charged floating electrode are provided. Such CMUTs can operate without an applied DC electrical bias. Charge can be provided to the floating electrode after or during fabrication in various ways, such as injection by an applied voltage, and injection by ion implantation. | 04-11-2013 |
20130099626 | VIBRATION POWER GENERATOR, VIBRATION POWER GENERATION APPARATUS, AND ELECTRIC DEVICE AND COMMUNICATION DEVICE WITH VIBRATION POWER GENERATION APPARATUS MOUNTED THEREON - A power generator comprises a first substrate | 04-25-2013 |
20130106239 | VIBRATION DEVICE AND HAPTIC FEEDBACK DEVICE INCLUDING THE SAME | 05-02-2013 |
20130119821 | ACTUATOR - An actuator includes a pair of electrodes facing each other, an intermediate layer containing an ionic liquid and arranged between the pair of electrodes, the electrodes and the intermediate layer being deformed when a potential difference larger than a potential window of the ionic liquid is applied between the electrodes, and insulating layers that suppress direct contact between ions of the ionic liquid and the electrodes, the insulating layers being arranged between the intermediate layer and the electrodes. | 05-16-2013 |
20130119822 | MEMS DEVICE AND MANUFACTURING METHOD THEREOF - A Micro-Electro-Mechanical System (MEMS) device and its manufacturing method are provided. Said device comprises a MEMS component and said component comprises a main body ( | 05-16-2013 |
20130134828 | ELECTROSTATIC INDUCTION POWER GENERATOR - An electrostatic induction power generator includes a first base body and a second base body, which are configured to be able to reciprocate relative to each other and between which an annular clearance is formed. The electrostatic induction power generator further includes an electret provided on the first base body, and a first electrode and a second electrode provided on the second base body. The electret is formed by coating a charged dielectric material on a surface of a linear conducting wire and both of the first electrode and the second electrode are formed of a linear conducting wire. | 05-30-2013 |
20130134829 | DISK TYPE MEMS RESONATOR - A variation in a resonance frequency due to variation in dimension accuracy of the supporting structure of the vibrating unit is reduced, and energy loss leaked from the supporting structure is reduced as much as possible. The electrostatic drive disk-type MEMS vibrator includes: a disk type vibrating unit; drive electrodes disposed at a prescribed gap g from the peripheral portion of the disk type vibrating unit and disposed at both sides of the vibrating unit so as to face each other; a unit for applying alternating current bias voltages of the same phase to the drive electrodes; and detection units that obtain outputs corresponding to the capacitance between the disk type vibrating unit and the drive electrodes. The disk type vibrating unit is supported by a pillar-shaped supporting structure disposed upright at the center of the disk and a transverse cross-sectional shape of the supporting structure is non-circular. | 05-30-2013 |
20130140943 | LINEAR DUAL EAP GENERATOR - Systems are described for obtaining energy from water movements in shallow waters. Some systems use panels ( | 06-06-2013 |
20130140944 | MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARATUS AND METHODS - Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer. | 06-06-2013 |
20130147313 | Method for producing a MEMS apparatus with a high aspect ratio, and converter and capacitor - The invention presents a method for producing microstructured apparatuses for microelectromechanical systems (MEMS). In order to increase the maximum aspect ratio conditioned by physical or chemical microstructuring methods, it is proposed to design flat elements of the apparatus, which are structured such that they are movable relative to one another, to be laterally changeable from a first reference position relative to one another (structuring position) to a second reference position (operating position) in a permanent or irreversible manner. As a result, higher trench capacitances can be formed between structured wall sections. The reference position can be changed by means of integrated drives or by supplying energy from the outside and said change is effected in a direction which is substantially different from the measuring direction. In addition to mechanical work and energy from electrical or magnetic fields, heat can be used to shift location in drives as a result of the action of force on an element or induced changes in length. This method makes it possible to produce highly sensitive sensors for very small excitation signals or to produce economical actuators with an extremely high level of efficiency in the form of low-attenuation, area-optimized, highly capacitive converters, as well as variable vertical capacitors with a high capacitance. | 06-13-2013 |
20130175897 | DISK RESONATOR AND ELECTRONIC COMPONENT - A contour mode disk resonator includes a substrate, a disk-shaped vibration plate, a pair of input electrodes, a pair of output electrodes, a supporting joist with one end, and an absorbing portion. The pair of input electrodes is disposed to face one another via the vibration plate in a planar view. The pair of output electrodes is disposed to face one another via the vibration plate in a direction intersecting with a direction where the pair of input electrodes faces one another in the planar view. The one end is integrally secured to a portion corresponding to a vibration node that occurs by a contour vibration in an outer periphery of the vibration plate. The supporting joist includes an absorbing portion configured to absorb strain energy generated by the contour vibration in the supporting joist. | 07-11-2013 |
20130175898 | ELECTROACTIVE POLYMER ACTUATOR - An actuator comprises an electroactive polymer layer ( | 07-11-2013 |
20130175899 | PASTE AND POLYMER TRANSDUCER INCLUDING COATING FILM FORMED FROM SAME AS ELECTROLYTE FILM OR ELECTRODE FILMS - Paste which is prepared by any solid concentration and is excellent in terms of handleability, applicability, and storage stability; an electrolyte film or electrode film which is an even and highly flexible coating film formed in a desired thickness from the paste through a few repetitions of an application/drying step; and a polymer transducer which can be industrially and economically produced and shows excellent performance. The paste comprises: a solid polyelectrolyte (A) consisting of a block copolymer containing; a polymer block (a-1) which is represented by chemical formula (1) | 07-11-2013 |
20130207510 | POLYMER TRANSDUCER AND A CONNECTOR FOR A TRANSDUCER - The invention provides a transducer comprising conductors and a laminate. The laminate comprises a film of a dielectric polymer material arranged between first and second electrodes. Each electrode is in electrically conductive communication with at least one of the conductors to facilitate an electrical potential between the electrodes and thereby enable deflection of the polymer material in response to an electrical field. At least one of the conductors is an elastically deformable conductor comprising a compliant core which is electrically conductive. The core is enclosed in a containment having elastomeric properties. | 08-15-2013 |
20130207511 | METHOD AND APPARATUS FOR BUILDING THREE-DIMENSIONAL MEMS ELEMENTS - The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface. | 08-15-2013 |
20130214638 | SYSTEM FOR GENERATING ELECTRICAL ENERGY THROUGH THE INPUT OF ENERGY TO ALIGNMENT BUCKYPAPER - The electrical energy generating system of the present invention comprises a piece of alignment Buckypaper, an energy generator, a thin deposition and two contacts. The alignment Buckypaper is a thin sheet made from an aggregate of carbon nanotubes. The thin deposition is formed on at least one surface of the alignment Buckypaper by electrolysis to form a semimetal material. A contact is connected with the upper surface of the alignment Buckypaper and the other contact is connected with the lower surface of the alignment Buckypaper. In use, the energy generated by the generator is inputted to the alignment Buckypaper. The energy then ionizes the molecules contained in the alignment Buckypaper. The positive charges move to the upper contact and the negative charges move to the lower contact. Such electrical energy may then be fed to a load connected with the two contacts to do work on the load. | 08-22-2013 |
20130221799 | VIBRATION GENERATOR, VIBRATION GENERATION DEVICE, AND ELECTRONIC EQUIPMENT AND COMMUNICATION DEVICE PROVIDED WITH VIBRATION GENERATION DEVICE - A vibration power generator including a first substrate; first electrodes disposed over one surface of the first substrate; a second substrate spaced from the first substrate and opposed to the one surface of the first substrate; and second electrodes disposed over one surface of the second substrate so as to be opposed to the first electrodes, wherein one of the first and second electrodes includes a film holding a charge; one of the first and second substrates is a vibratory substrate; and an overlapped area between the first and second electrodes becomes minimum and then maximum, or becomes maximum and minimum, and an electrostatic capacity Cp formed between the first and second electrodes when the overlapped area becomes maximum changes, and the change of Cp comprises an increase of Cp, while the vibratory substrate is displaced from the vibration center to the vibration end. | 08-29-2013 |
20130229087 | Vibration Driven Power Generation Element and Method of Manufacture Thereof - A vibration driven power generation element according to the present invention includes: a three dimensionally shaped movable comb tooth electrode comprising a plurality of comb teeth of which interiors are filled with an insulating material, and having an SiO | 09-05-2013 |
20130241343 | ACTIVE MATERIAL ACTUATION UTILIZING TUNABLE MAGNETIC OVERLOAD PROTECTION - A system for and method of providing overload protection for an active material actuator and composing assembly, including a magnetically functioning mechanism comprising one or more permanent magnet, electromagnet, and/or magnetorheological fluid reservoir cooperatively configured to produce a tunable holding force. | 09-19-2013 |
20130241344 | FUEL-FREE NANOWIRE MOTORS - Techniques and systems are disclosed for locomoting fuel-free nanomotors in a fluid. In one aspect of the disclosed technology, a system for locomoting fuel-free nanomotors can include an electrically-driven nanowire diode formed of two or more segments of different electrically conducting materials, a fluid container, and a mechanism that produces an electric field to drive the nanowire diode to locomote in the fluid. In another aspect, a system for locomoting fuel-free nanomotors can include a magnetically-propelled multi-segment nanowire motor formed of a magnetic segment and a flexible joint segment, a fluid container, and a mechanism that generates and controls a magnetic field to drive the multi-segment nanowire motor to locomote in the fluid. The disclosed fuel-free nanomotors can obviate fuel requirements and can be implemented for practical in vitro and in vivo biomedical applications. | 09-19-2013 |
20130241345 | ULTRASONIC TRANSDUCER AND ULTRASONIC DIAGNOSTIC EQUIPMENT USING THE SAME - High transfer sound pressure and high reception sensitivity are realized, and reliability is improved in terms of long term operation, in a capacitive detector-type ultrasonic transducer (CMUT). The ultrasonic transducer, which has a lower electrode ( | 09-19-2013 |
20130241346 | DEVICE FOR CONVERTING MECHANICAL ENERGY INTO ELECTRICAL ENERGY - An apparatus for converting mechanical vibrational energy into electrical power includes first and second collecting electrodes configured for connection to terminals of an electrical load, and an electret placed facing the first electrode. The electret is mounted so as to move relative to the first electrode in one degree-of-freedom in a plane. Relative movement between the electret and the first electrode induces a potential difference across the electrodes. The electret has a continuous layer and a series of protrusions, each of which extends perpendicular to the plane. These protrusions are distributed in the degree-of-freedom with a first pitch, which is smaller than the travel between the first electrode and the electret. The first electrode has faces facing the electret. These faces are distributed in the degree-of-freedom with a second pitch identical to the first pitch. | 09-19-2013 |
20130249348 | ELECTROCHEMICAL ACTUATOR - The present invention provides systems, devices, and related methods, involving electrochemical actuation. In some cases, application of a voltage or current to a system or device of the invention may generate a volumetric or dimensional change, which may produce mechanical work. For example, at least a portion of the system may be constructed and arranged to be displaced from a first orientation to a second orientation. Systems such as these may be useful in various applications, including pumps (e.g., infusion pumps) and drug delivery devices, for example. | 09-26-2013 |
20130257218 | Plate, Transducer and Methods for Making and Operating a Transducer - A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress. | 10-03-2013 |
20130278108 | MEMS SHOCK CUSHION SPRING SYSTEMS AND METHODS - Techniques are disclosed for systems and methods to provide shock impact mitigation for MEMS structures. A MEMS structure may include one or more actuators. An actuator may include a first frame having a spine, where the spine includes a body and a tip. The actuator may include a second frame connected to the first frame and including a shock stop, where the shock stop includes a surface in proximity to the spine tip. An actuator may include a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, where the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface. | 10-24-2013 |
20130293062 | DIELECTRIC FILM, METHOD FOR MANUFACTURING THE SAME, AND TRANSDUCER INCLUDING THE SAME - A dielectric film includes an elastomer, and metallic oxide particles having a particle diameter of 100 nm or less that are chemically bonded to the elastomer and are dispersed in the elastomer in a state of primary particles. A method for manufacturing the dielectric film includes: a chelating process of adding a chelating agent to an organometallic compound to produce a chelate compound of the organometallic compound; a sol manufacturing process of adding an organic solvent and water to the chelate compound to obtain a sol of metallic oxide particles produced by the hydrolytic reaction of the organometallic compound; a mixed solution preparing process of mixing the sol of the metallic oxide particles and a polymer solution containing a rubber polymer having functional groups that optionally react with hydroxy groups; and a film forming process of applying the mixed solution onto a substrate, and curing the resultant coating film. | 11-07-2013 |
20130307370 | ELECTROMECHANICAL CONVERTER, METHOD FOR PRODUCING SAME, AND USE THEREOF - The invention relates to an electromechanical converter, comprising at least one dielectric elastomer layer ( | 11-21-2013 |
20130307371 | CAPACITANCE CHANGE TYPE POWER GENERATION DEVICE - A power generation device includes: a composite layer formed by a dielectric elastomer with ferroelectric particles dispersed therein; and a pair of electrodes disposed on opposite sides of the composite layer, the pair of electrodes being stretchable and compressible along with stretch and compression of the composite layer. The ferroelectric particles have crystal orientability and are orientationally dispersed in the dielectric elastomer, and are polarized in the layer thickness direction of the composite layer. | 11-21-2013 |
20130320803 | ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE - An electronic device includes a first base body, a second base body, a third base body held between the first base body and the second base body, a first functional element disposed in a first cavity surrounded by the first base body and the third base body, and a second functional element disposed in a second cavity surrounded by the second base body and the third base body. | 12-05-2013 |
20130328440 | MECHANICAL META-MATERIALS - The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material. | 12-12-2013 |
20130328441 | POLYMER ACTUATOR DEVICE SYSTEM - A polymer actuator device system includes: a polymer actuator which includes an electrolyte layer, a first electrode layer and a second electrode layer provided to oppose each other with the electrolyte layer interposed therebetween in a thickness direction of the electrolyte layer, and deforms in response to a voltage between the first and second electrode layers; and a sealing member which coats an entirety of the polymer actuator to be enclosed therein. The sealing member has two layers of a resin layer and an inorganic layer, a thickness of the sealing member is 1 to 5 microns, and an outer side of the sealing member in the thickness direction has a wear preventing body. | 12-12-2013 |
20130328442 | MAGNETOSTRICTIVE POWER SUPPLY FOR BOTTOM HOLE ASSEMBLY WITH ROTATION-RESISTANT HOUSING - A power supply includes a rotor having an undulated surface ( | 12-12-2013 |
20140015372 | CARBON NANOTUBE BASED ELECTROSTRICTIVE ELEMENT - An carbon nanotube based electrostrictive element includes two electrostrictive layers spaced with each other, an electrical connector, and two electrodes. The two electrostrictive layers are electrically connected to each other at a first side, and spaced and insulated from each other at a second side via the electrical connector. The two electrodes are located at the second side and electrically connected respectively to the two electrostrictive layers. | 01-16-2014 |
20140015373 | METHOD FOR MANUFACTURING ELECTRONIC COMPONENT MODULE AND ELECTRONIC COMPONENT MODULE - A method for producing an electronic component module prevents a space from collapsing. The method includes a step of preparing an electronic component including an element substrate, a drive device formed on a principal surface of the element substrate, and a protection device covering the drive device so as to form a space around the drive device; a step of fixing the electronic component on a common substrate such that a principal surface of the common substrate and another principal surface of the element substrate face each other; a step of fixing a reinforcing plate on the protection device of the electronic component; and a step of forming a resin layer on the principal surface of the common substrate such that the electronic component is contained therein. | 01-16-2014 |
20140015374 | ELECTROSTATIC INDUCTION GENERATION DEVICE AND ELECTROSTATIC INDUCTION GENERATION APPARATUS HAVING A MOVABLE ELECTRODE FORMED BETWEEN A FIRST FIXED ELECTRODE SUBSTRATE AND A SECOND FIXED ELECTRODE SUBSTRATE - An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode. | 01-16-2014 |
20140021825 | NON-STATIONARY MULTI-FREQUENCY VIBRATION ENERGY HARVESTING WITH TUNABLE ELECTRICAL IMPEDANCE - The present application relates to energy harvesting. More particularly, the present application relates to harvesting energy from non-stationary, multi-frequency mechanical vibrations using a tunable electrical circuit. | 01-23-2014 |
20140028150 | ACOUSTIC TURBINE - A method and apparatus generates kinetic and electrical energy using sound waves and is believed to be particularly useful in high efficiency motors and electrical generators. In particular, the method and apparatus uses sound waves as a catalyst to convert ambient heat energy into kinetic and/or electrical energy. In one embodiment, sound waves at particular frequencies are propagated across one side of a plate or other barrier element, causing flow of fluid (e.g. air) across the surface of the plate which, in turn, causes a reduction in the ambient fluid (air) pressure near the surface of the plate. The difference in fluid pressure on opposite sides of the plate results in net positive thrust on the plate, thereby causing movement of the plate. This movement can be harnessed using, for example, a windmill type of rotor and stator arrangement to generate useful kinetic and electrical energy. | 01-30-2014 |
20140035432 | MEMS DEVICE WITH INCREASED TILTING RANGE - A micro-electro-mechanical (MEMs) devices including a compound hot electrode, which increases the tilting range of the MEMs device. A substantially vertical hot electrode is mounted adjacent to the end or the sides of a pivoting ground electrode, formed of the underside of a pivoting mirror, and combine with a conventional horizontal hot electrode to make up the compound hot electrode. | 02-06-2014 |
20140035433 | MEMS DEVICE, ELECTRONIC APPARATUS, AND MANUFACTURING METHOD OF MEMS DEVICE - A MEMS device is a MEMS device having a MEMS vibrator which includes a plurality of MEMS constituent elements laminated and formed above a first foundation portion which is laminated above a main surface of a wafer substrate, and the MEMS constituent elements are laminated above a first oxide film and a nitride film so as to cover an opening which is formed in the nitride film and exposes a second foundation portion above which the nitride film is laminated. | 02-06-2014 |
20140035434 | MEMS Device Comprising An Under Bump Metallization - The present invention concerns a MEMS device comprising an under bump metallization ( | 02-06-2014 |
20140042869 | OUT-OF-PLANE TRAVEL RESTRICTION STRUCTURES - The present disclosure includes structures and methods of forming structures for restricting out-of-plane travel. One example of forming such structures includes providing a first wafer | 02-13-2014 |
20140070663 | ELECTROKINETIC NANOTHRUSTERS AND APPLICATIONS THEREOF - An electrokinetic actuator for a propulsion system is described. The actuator includes an array of channels, with each channel having an inlet and an outlet. A reservoir is included that contains an ionic solution of particles. A first electrode proximate to (or deposited at) the inlet and a second electrode proximate to (or deposited at) the outlet are connected to a voltage source. The voltage source and electrodes apply a voltage across the length of the channels to generate an electric field parallel to each channel. The electric field causes an electro-osmotic flow of ions from the reservoir to the outlet producing electrokinetic thrust at the outlet. By varying the concentration of the ionic solution and the magnitude of the electric field, the electro-osmotic flow of ions is controlled. | 03-13-2014 |
20140070664 | VIBRATION POWER GENERATOR - There is provided a vibration power generator for converting vibration energy into electric power. The vibration power generator includes a fixed substrate, and a vibrator capable of vibrating with respect to the fixed substrate. Fixed electrode pieces are disposed on the fixed substrate, and electret electrode pieces opposed to the fixed electrode pieces are disposed on the vibrator. The vibration power generator is adapted to generate electricity, through changes in capacitances between the fixed electrode pieces and the electret electrode pieces, due to the vibration of the vibrator. The electret electrode pieces have opposite end portions in the vibration direction which have a higher average electric-charge density per unit area than that of middle portions, in the vibration direction, of the electret electrode pieces. | 03-13-2014 |
20140084747 | ELECTROMECHANICAL CONVERTER HAVING A TWO-LAYER BASE ELEMENT, AND PROCESS FOR THE PRODUCTION OF SUCH AN ELECTROMECHANICAL CONVERTER - The present invention relates to electromechanical converters at least comprising a polymer layer composite with voids ( | 03-27-2014 |
20140084748 | Triboelectric Nanogenerator for Powering Portable Electronics - A triboelectric generator includes a first contact charging member and a second contact charging member. The first contact charging member includes a first contact layer and a conductive electrode layer. The first contact layer includes a material that has a triboelectric series rating indicating a propensity to gain electrons due to a contacting event. The conductive electrode layer is disposed along the back side of the contact layer. The second contact charging member is spaced apart from and disposed oppositely from the first contact charging member. It includes an electrically conductive material layer that has a triboelectric series rating indicating a propensity to lose electrons when contacted by the first contact layer during the contacting event. The electrically conductive material acts as an electrode. A mechanism maintains a space between the first contact charging member and the second contact charging member except when a force is applied thereto. | 03-27-2014 |
20140091674 | STRESS RELIEVED MICROFABRICATED CANTILEVER - A micromechanical device has a functional layer. One or more layers are provided between the functional layer and the micromechanical device to provide stress relief. | 04-03-2014 |
20140091675 | ULTRASONIC TRANSDUCER ASSEMBLY INSTALLATION DEVICE AND METHODS - Transducer assemblies and associated methods are provided for facilitating alignment of ultrasonic transducers with respect to pipes onto which the transducers are installed. The transducer assembly can include a transducer housing having a track on along which the transducers can be slidingly engaged. The transducer assembly can include attachment structures having alignment features used to align the transducers parallel to the axial centerline of the pipe while ensuring that the reception/emission sides of the transducers are oriented normal to the outer surface of the pipe. In some embodiments a transducer assembly alignment system can be used to align two transducer assemblies on circumferentially opposite sides of a pipe. | 04-03-2014 |
20140097722 | ELECTROHYDRODYNAMIC (EHD) FLUID MOVER WITH COLLECTOR ELECTRODE LEADING SURFACE SHAPING FOR SPATIALLY SELECTIVE FIELD REDUCTION - In various electrohydrodynamic (EHD) fluid mover designs disclosed herein, electric field strength may be locally reduced in peripheral regions of an emitter-to-collector electrode gap. As a result, detrimental accumulations of silica, dust and other airborne contaminants can be reduced on surfaces in such peripheral regions, which may otherwise be susceptible to accumulations and/or difficult to clean or condition. In some cases, localized reduction in electric field near sidewall surfaces can provide desirable localized reductions in susceptibility to contaminant related spark or shunting current paths. In some cases, such as when a field blunting structure is employed and (as a result) a generally more uniform electric field pattern is provided locally, an engineered or purposeful local reduction both electric field strength and ion generation in peripheral regions of an emitter-to-collector electrode gap may be quite desirable. | 04-10-2014 |
20140103778 | VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, AND MOBILE UNIT - A MEMS vibrator includes a wafer substrate, a fixed lower electrode (first electrode) disposed on a principal surface of the wafer substrate, a support member whose one end is fixed to the wafer substrate, and a movable upper electrode (second electrode) joined to the other end of the support member and having a region overlapping the fixed lower electrode with a gap. The support member has a reinforcing region where the thickness of the support member in a thickness direction of the wafer substrate is larger than the thickness of the movable upper electrode in the thickness direction of the wafer substrate. | 04-17-2014 |
20140111060 | MICRO-ELECTRO-MECHANICAL GENERATOR AND ELECTRICAL DEVICE USING THE SAME - Provided is a micro-electro-mechanical generator including: a first substrate configured to hold an electric charge on a surface of the substrate, and to have an electret film continuously provided on the surface; a second substrate having a collecting electrode provided on a surface facing the electret film; and a movable substrate having conductive property, disposed between the first and the second substrates, and supported movably along a predetermined direction with respect to the first and the second substrates. The movable substrate includes an opening penetrating through the movable substrate from a side of the first substrate to a side of the second substrate and allowing an electric field emitted from the electret film to pass through. The movement of the movable substrate causes or stops to cause the electric field to be emitted to the collecting electrode through the opening, and power is generated by the electric charge being excited in and discharged from the collecting electrode depending on whether or not the electric field is caused to be emitted. | 04-24-2014 |
20140111061 | VIBRATION POWER GENERATOR - A vibration power generator comprises: a fixed substrate; a vibrating body having a surface opposed to the fixed substrate, the vibrating body being vibratable to the fixed substrate; electret electrodes aligned in a vibration direction on one of the surface of the fixed substrate and the surface of the vibrating body; and first fixed electrodes and second fixed electrodes alternately aligned in the vibration direction on the other thereof, wherein when the vibrating body is at a resting position, each of the electret electrodes overlaps with both electrodes of a corresponding fixed electrode pair, the corresponding fixed electrode pair being one of the first fixed electrodes and one of the second fixed electrodes that are opposed to the electret electrode, and when the vibrating body is not at a resting position, each of the electret electrodes always overlaps with at least one electrode of the corresponding fixed electrode pair. | 04-24-2014 |
20140125193 | Ultrasonic Sensor Microarray and Method of Manufacturing Same - A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 kHz. | 05-08-2014 |
20140132111 | ELECTRET AND PROCESS FOR ITS PRODUCTION, AND ELECTROSTATIC INDUCTION-TYPE CONVERSION DEVICE - An electret having an electric charge injected to a laminate having a resin layer (A) and a resin layer (B) laminated directly on the resin layer (A), wherein the resin layer (A) contains a reaction product of a fluorinated polymer with a silane coupling agent, the resin layer (B) does not contain a reaction product of a fluorinated polymer with a silane coupling agent and contains a fluorinated polymer, the resin layer (B) is disposed as the outermost layer so as to be in contact with air, and the total thickness of the resin layer (B) is from 5 to 55% of the total thickness of the resin layer (A); and an electrostatic induction-type conversion device provided with the electret. | 05-15-2014 |
20140145550 | ELECTROACTIVE POLYMER ENERGY CONVERTER - An energy conversion apparatus configured to convert energy from a mechanical energy source into electrical energy is provided. The energy conversion apparatus includes a transducer comprising a dielectric elastomer module made of stretchable electroactive polymer material. The dielectric elastomer module comprising at least one dielectric elastomer film layer is disposed between at least first and second electrodes. A transmission coupling mechanism is configured to couple the mechanical energy source and is operatively attached to the transducer to cyclically strain and relax the transducer in response to the mechanical energy acting on the transmission coupling mechanism. A conditioning circuit is coupled to the at least first and second electrodes and configured to apply an electric charge to the dielectric elastomer film when the dielectric elastomer film is in a strained state, to disconnect from the dielectric elastomer film when the dielectric elastomer film transitions from the strained state to a relaxed state, and to remove electrical charge from the dielectric elastomer film when the dielectric elastomer film reaches a relaxed state. | 05-29-2014 |
20140145551 | VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A vibrator includes: a vibrating portion; a support portion extended from the vibrating portion; and a fixing portion disposed at the support portion, wherein the support portion includes a first beam portion extending in a first direction from the vibrating portion and a second beam portion extending in a second direction intersecting the first direction. | 05-29-2014 |
20140145552 | VIBRATION ELEMENT AND ELECTRONIC DEVICE - A MEMS vibration element | 05-29-2014 |
20140145553 | VIBRATION ELEMENT AND ELECTRONIC DEVICE - A MEMS vibration element | 05-29-2014 |
20140184017 | RIPPLED DISC ELECTROSTATIC GENERATOR/MOTOR CONFIGURATIONS UTILIZING MAGNETIC INSULATION - Electrostatic generators/motors designs are provided that generally may include a first rippled stator centered about a longitudinal axis; a second rippled stator centered about the axis, a first rippled rotor centered about the axis and located between the first rippled stator and the second rippled stator. A magnetic field having field lines about parallel with the average plane of at least one of the first rippled stator or the second rippled stator is provided with either a Halbach array configuration or a conductor array configuration. | 07-03-2014 |
20140197712 | RESONANT TRANSDUCER AND MANUFACTURING METHOD OF RESONANT TRANSDUCER - A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate. | 07-17-2014 |
20140203682 | ELECTROMECHANICAL TRANSDUCER AND PRODUCTION METHOD THEREFOR - An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap being disposed therebetween. Dummy cells that are not electrically connected to the cells are provided around the outer periphery of the unit of the cells. | 07-24-2014 |
20140232236 | Electrostatic Transducer - An electrostatic transducer comprises an electrically conductive first layer ( | 08-21-2014 |
20140232237 | Power Generation Apparatus - A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current. | 08-21-2014 |
20140239768 | CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) WITH THROUGH-SUBSTRATE VIA (TSV) SUBSTRATE PLUG - A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate of a single crystal material having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region, and a through-substrate via (TSV) extending a full thickness of the first substrate. The TSV is formed of the single crystal material, is electrically isolated by isolation regions in the single crystal material, and is positioned under a top side contact area of the first substrate. A membrane layer is bonded to the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A metal layer is over the top side substrate contact area and over the movable membrane including coupling of the top side substrate contact area to the movable membrane. | 08-28-2014 |
20140239769 | CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) DEVICE WITH THROUGH-SUBSTRATE VIA (TSV) - A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region. A membrane layer is bonded on the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A through-substrate via (TSV) includes a dielectric liner which extends from a bottom side of the first substrate to a top surface of the membrane layer. A top side metal layer includes a first portion over the TSV, over the movable membrane, and coupling the TSV to the movable membrane. A patterned metal layer is on the bottom side surface of the first substrate including a first patterned layer portion contacting the bottom side of the first substrate lateral to the TSV. | 08-28-2014 |
20140239770 | Capacitive Micromachined Ultrasound Transducers with Pressurized Cavities - A capacitive micromachined ultrasonic transducer (CMUT) is provided that includes a substrate, a bottom conductive layer disposed on a bottom surface of the substrate, a cavity disposed into a top surface of the substrate, a nonconductive layer disposed on the substrate top surface and on the cavity, a CMUT plate disposed on the nonconductive layer and across the cavity, a top conductive layer disposed on a top surface of the CMUT plate, a pressure control via that spans from the cavity to an ambient environment, and an active pressure controller connected to the pressure control via, wherein the active pressure controller is capable of actively varying a pressure differential across the CMUT plate. | 08-28-2014 |
20140246948 | TRANSDUCER, AND MANUFACTURING METHOD OF THE TRANSDUCER - A transducer, and a method for manufacturing the transducer are provided. The transducer includes a substrate-side electrode provided in one side of an insulative substrate and an opposite plate including an opposite electrode disposed opposite to the substrate-side electrode, and which performs a function such as a reduction in impedance, conversion of capacitance, signal amplification, thereby achieving size reduction of the transducer itself. An upper plate is made of a silicon monocrystal and is arranged so as to face a substrate-side electrode. In the upper plate, an integrated circuit section which is an impurity region of an IC circuit is formed by a thermal diffusion method or an ion implantation method. By this transducer, an improvement in conversion efficiency, an improvement in productivity, and a size reduction of a mount system are achieved. | 09-04-2014 |
20140265719 | METHOD OF FORMING A TRANSDUCER CONTROLLER AND APPARATUS THEREFROM - In one embodiment, a transducer controller is configured to form an integrated distance measuring and diagnostic cycle that includes measuring a decay time of a transducer and to selectively adjust a period of the transmitted signal responsively to a value of a reverberation period. | 09-18-2014 |
20140265720 | METHODS AND DEVICES RELATING TO CAPACITIVE MICROMACHINED DIAPHRAGMS AND TRANSDUCERS - Monolithically integrated capacitive micromachined transducers (CMTs) offer combined process steps, shared layers, simplified packaging, and reduced die size by overlapping the CMTs with the integrated circuit (IC) electronics. Moreover, a CMT array directly above the electronics also allows for varying the excitation signal phase to each CMT element thereby enabling beam-forming techniques. Above-IC integration is particularly attractive by not requiring any alteration of the semiconductor fabrication process and allowing subsequent implementation independent of IC fabrication. Naturally, this scheme requires that the CMT technology limit itself to IC compatible materials and chemicals, as well as process step temperatures within a specific thermal budget. Embodiments of the invention expanding upon surface micromachining technology allow the fabrication of IC-compatible CMT structures with superior mechanical properties and resistance to harsh environments such as high temperature, corrosive media and high-g shocks, by exploiting silicon carbide (SiC) structures to form the upper CMT structural layer. | 09-18-2014 |
20140265721 | PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH ANNULAR-SHAPED COLLAPSED REGION - The present invention relates to a pre-collapsed capacitive micro -machined transducer cell ( | 09-18-2014 |
20140285060 | ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, there is disclosed an electrical component. The electrical component includes a substrate, a MEMS device on the substrate. The MEMS device includes a first electrode fixed on the substrate, a second electrode above the first electrode opposed to the first electrode and configured to be movable, an anchor member on the substrate and configured to support the second electrode, and a spring member continuously formed from a region on an upper surface of the second electrode to a region on an upper surface of the anchor member and configured to connect the second electrode and the anchor member. The electrical component includes a reinforcing member provided on a lower surface of the spring member and configured to reinforce strength of the spring member. | 09-25-2014 |
20140292137 | Actuation device with a drive element actuated by crawling - The subject matter here is an actuation device ( | 10-02-2014 |
20140292138 | Rotating Cylindrical and Spherical Triboelectric Generators - A generator includes a first member, a second member and a sliding mechanism. The first member includes a first electrode and a first dielectric layer affixed to the first electrode. The first dielectric layer includes a first material that has a first rating on a triboelectric series. The second member includes a second material that has a second rating on the triboelectric series that is different from the first rating. The second member includes a second electrode. The second member is disposed adjacent to the first dielectric layer so that the first dielectric layer is disposed between the first electrode and the second electrode. The sliding mechanism is configured to cause relative movement between the first member and the second member, thereby generating an electric potential imbalance between the first electrode and the second electrode. | 10-02-2014 |
20140300246 | VOLUME WAVE RESONATOR USING EXCITATION/DETECTION OF VIBRATIONS - The invention relates to an acoustic volume wave resonator configured to resonate at a predetermined work frequency comprising:
| 10-09-2014 |
20140300247 | REACTIVE IONIC LIQUID, AND ION-IMMOBILIZED METAL OXIDE PARTICLE, ION-IMMOBILIZED ELASTOMER, AND TRANSDUCER USING SAME - A reactive ionic liquid to be used as an ionic component that is contained in an ion-containing layer in a transducer arranged in contact with a high-resistance layer as a dielectric layer of the transducer, and is restrained from migrating from the ion-containing layer to the high-resistance layer on application of a voltage is provided. The reactive ionic liquid comprises an ion pair that consists of an anion and a cation. In the reactive ionic liquid, (a) the anion comprises (a1) a reactive group that consists of an alkoxysilyl group and (a2) an anionic group consisting of a carboxylate (—COO | 10-09-2014 |
20140300248 | Single Electrode Triboelectric Generator - A triboelectric generator includes a first contact charging member, a second contact charging member and an electrical load. The first contact charging member has a contact side and an opposite back side. The first contact charging member includes a material that has a first rating on a triboelectric series and also has a conductive aspect. The second contact charging member has a second rating on the triboelectric series, different from the first rating, and is configured to come into contact with the first contact layer and go out of contact with the first contact layer. The electrical load electrically is coupled to the first contact charging member and to a common voltage so that current will flow through the load after the second contact charging member comes into contact with the first contact charging member and then goes out of contact with the first contact charging member. | 10-09-2014 |
20140300249 | MEMS DEVICE ANCHORING - Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered. | 10-09-2014 |
20140312733 | MEMS VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A MEMS vibrator includes: a vibrating portion; an electrode portion provided to face the vibrating portion with a gap therebetween; and a support portion extended in a first direction from the vibrating portion. The vibrating portion includes a functional portion having a different thickness viewed from the first direction. | 10-23-2014 |
20140327337 | VIBRATION SENSOR AND EXTERNAL DETECTION DEVICE - A vibration sensor has a first substrate, a second substrate relatively movable by an external vibration while opposed to the first substrate, an electret group having a plurality of electrets that are arrayed in a relative movement direction on a side of one of surfaces of the first substrate, and an electrode group having a plurality of electrodes that are arrayed in the relative movement direction on a side of a surface of the second substrate. The surface of the second substrate is opposed to the electret group. A positional relationship between the electret group and the electrode group changes with a relative change in position of the first and second substrates by the external vibration to output an external vibration detection signal. | 11-06-2014 |
20140339953 | MEMS RESONATOR ACTIVE TEMPERATURE COMPENSATION METHOD AND THERMALLY-ACTUATED MEMS RESONATOR - A MEMS resonator active temperature compensation method is provided. The MEMS resonator active temperature compensation method includes: a MEMS resonator is provided, wherein a structural resistance of the MEMS resonator is varied with an environmental temperature; a structural resistance shift value is formed by a variation of the environmental temperature; an electrical circuit is provided, wherein the electrical circuit is electrically connected with the MEMS resonator for providing an adjustment mechanism to the MEMS resonator; and a compensation value is provided from the adjustment mechanism for controlling the structural resistance shift value. | 11-20-2014 |
20140339954 | VIBRATION POWER GENERATOR - A vibration power generator includes: a fixed substrate; a first fixed electrode piece disposed on the fixed substrate, the first fixed electrode piece having a first width of 2w; a second fixed electrode piece disposed on the fixed substrate, the second fixed electrode piece having a second width of 2w; a cover substrate disposed with a space g from the fixed substrate, the cover substrate being opposed to the fixed substrate; a vibrating body disposed between the fixed substrate and the cover substrate; and an electret electrode piece disposed on a side opposed to the first fixed electrode piece and the second fixed electrode piece of the vibrating body, the electret electrode piece having a width that is greater than 2w and less than or equal to 2w+s. | 11-20-2014 |
20140361660 | Transducing apparatus - A transducing apparatus that is sensitive to physical vibrations. The transducing apparatus converts physical manifestations into electrical signals. | 12-11-2014 |
20140375168 | CAPACITIVE MICRO-MACHINED TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - The present invention relates to a method of manufacturing a capacitive micro-machined transducer ( | 12-25-2014 |
20150008788 | LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES - A method of providing microelectromechanical structures (MEMS) that are compatible with silicon CMOS electronics is provided. The method providing for processes and manufacturing sequences limiting the maximum exposure of an integrated circuit upon which the MEMS is manufactured to below 350° C., and potentially to below 250° C., thereby allowing direct manufacturing of the MEMS devices onto electronics, such as Si CMOS circuits. The method further providing for the provisioning of MEMS devices with multiple non-conductive structural layers such as silicon carbide separated with small lateral gaps. Such silicon carbide structures offering enhanced material properties, increased environmental and chemical resilience whilst also allowing novel designs to be implemented taking advantage of the non-conductive material of the structural layer. The use of silicon carbide being beneficial within the formation of MEMS elements such as motors, gears, rotors, translation drives, etc where increased hardness reduces wear of such elements during operation. | 01-08-2015 |
20150022053 | PASSIVE INDEXING OF A MOVABLE ELEMENT HAVING TEETH - The invention relates to a device including: a movable element ( | 01-22-2015 |
20150048714 | ELECTROACTIVE POLYMER STRUCTURES PRINTED WITH VARYING COMPOSITIONS OF IONS - An electroactive polymer structure includes a first flexible electrode, a second flexible electrode, and a polymer dielectric layer with ionic liquid on top of the first electrode including at least two regions. Each region of the polymer dielectric layer includes a different ionic liquid concentration. The polymer dielectric layer is in between the first flexible electrode and the second flexible electrode. | 02-19-2015 |
20150048715 | PAPER-BASE FLEXIBLE POWER-GENERATION APPARATUS, AND MANUFACTURING METHOD THEREOF - A paper-base flexible power-generation apparatus, and a manufacturing method thereof. The flexible power-generation apparatus comprises: a first assembly ( | 02-19-2015 |
20150061455 | VIBRATION DEVICE AND METHOD OF MANUFACTURING VIBRATION DEVICE - A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region. | 03-05-2015 |
20150069880 | VIBRATION POWER GENERATOR AND POWER GENERATOR - A vibration power generator configured to generate power by displacement between an electret group having a plurality of electrets and an electrode group having a plurality of electrodes in a relative movement direction in response to an external vibration, includes a casing in which the electret group and the electrode group are disposed, a fixed member in which one of the electret group and the electrode group is disposed, the fixed member being fixed to a side of the casing, and a movable member in which the other of the electret group and the electrode group is disposed. The movable member is disposed in the casing such that the movable member is relatively movable in response to the external vibration while opposed to the fixed member. | 03-12-2015 |
20150076961 | METHOD FOR REDUCTION OF STICTION WHILE MANIPULATING MICRO OBJECTS ON A SURFACE - A system and method reduce stiction while manipulating micro objects on a surface. The system and method employed a field generator configured to generate a driving force at a frequency and amplitude to at least partially overcome stiction between the micro objects and the surface. The field generator is further configured to generate a manipulation force to manipulate the micro objects on the surface in two dimensions. The manipulation force is spatially programmable. | 03-19-2015 |
20150076962 | METHOD AND SYSTEM FOR HARVESTING ENERGY USING AN EAP BASED DEFORMABLE BODY - Method for harvesting energy using an EAP based deformable body. The EAP based deformable body is an elastically deformable body including an arrangement of stretchable synthetic material and electrodes being arranged as a variable capacitor with a capacitance that varies as the deformable body stretches and relaxes. The method includes: looping through an energy harvesting cycle with a) stretching the deformable body from a minimal relaxed size L | 03-19-2015 |
20150084480 | DEVICE FOR CONVERTING HEAT ENERGY INTO MECHANICAL ENERGY WITH IMPROVED EFFICIENCY - The invention relates to a device for converting heat energy into mechanical energy comprising a first ( | 03-26-2015 |
20150091411 | METHOD OF MANUFACTURING A DEVICE WITH A CAVITY - A micro-device includes a substrate with a cavity. The cavity is covered with a porous layer that is permeable to vapor hydrofluoric acid (HF) etchant. The micro-device comprises a Microelectromechanical Systems (MEMS) device with a component that is moveable in operational use of the MEMS device. The component is arranged within the cavity. | 04-02-2015 |
20150097465 | Harvesting Energy from Interaction with Papers - There is provided a system and method for harvesting electrical energy from interaction with papers. The system comprising an electret disposed between a first electrode and a second electrode, and an interactive device connected to one end of the first electrode and one end of the second electrode to provide an electrical potential, the interactive device configured to receive the electrical potential by moving the second electrode relative to the electret for generating electrical energy. Interactive devices that can be activated by the generator can include a light-emitting diode, an electronic paper display, an infrared communication, and a buzzer. | 04-09-2015 |
20150108871 | ULTRASONIC TRANSDUCER WITH DIELECTRIC ELASTOMER AS ACTIVE LAYER - There is provided a new type of ultrasound transducer, where a Dielectric Elastomer (DE) material is used as the active layer (actuation and/or sensing). Such a transducer operates by applying a combination of a DC and an AC voltage signal to achieve frequencies above 100 kHz. The DE material is typically sandwiched between two planar electrodes. | 04-23-2015 |
20150108872 | Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same - Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. | 04-23-2015 |
20150115767 | Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same - Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. | 04-30-2015 |
20150123513 | ENERGY CONVERSION SUBSTRATE USING LIQUID - The present invention relates to an energy conversion substrate using a liquid and, more specifically, to an energy conversion substrate using a liquid capable of converting mechanical energy into electric energy through a flow of a liquid on a substrate having an energy conversion layer. Thus, the present invention enables easy manufacture and easy liquid circulation to be obtained by implementing an energy conversion device using a liquid through one substrate instead of a pair of opposing substrates and can implement the energy conversion device without a lubricating layer. | 05-07-2015 |
20150137659 | VIBRATION POWER GENERATOR - Power generated by a vibration power generator utilizing an electret is efficiently supplied to a power supply load. A vibration power generator includes a first substrate and a second substrate configured to be moved relative to each other by external vibration while remaining opposite each other, a group of a plurality of electrets arranged in the relative movement direction on one surface side of the first substrate, and a group of electrodes arranged in the relative movement direction on a surface side of the second substrate opposite to the group of electrets, and including a first current collecting electrode and a second current collecting electrode. A power supply load to which power generated by the external vibration is supplied and which has an impedance lower than an internal impedance of the vibration power generator is electrically connected to each of the first and second current collecting electrodes. | 05-21-2015 |
20150145372 | WAFER AND METHOD OF MANUFACTURING THE SAME - The present invention relates to a wafer ( | 05-28-2015 |
20150295516 | ENERGY CONVERSION DEVICE USING CHANGE OF CONTACT SURFACE WITH LIQUID - The present invention relates to an energy conversion device using a change of a contact surface with liquid and, more specifically, to a method and a device for converting mechanical energy into electrical energy by applying an opposite phenomenon to an electrowetting phenomenon. The energy conversion device having a simplified structure and reduced manufacturing costs with minimal malfunctions by changing a contact surface with liquid between a pair of electrodes and using the change of the contact surface with the liquid to generate electrical energy such that channel blocking can be prevented or a lubricating layer or electrodes complicatedly patterned on a channel are not required. | 10-15-2015 |
20150298963 | POLYMER ACTUATOR ELEMENT - A polymer actuator element includes an electrolyte layer and electrode layers, in which the electrode layer includes an activated carbon nanofiber and a carbon nanohorn. | 10-22-2015 |
20150303831 | ENERGY CONVERSION DEVICE USING LIQUID - The present invention relates to an energy conversion device using a liquid and, more specifically, to a method and a device for converting mechanical energy into electrical energy by applying an opposite phenomenon to an electrowetting phenomenon. The contact surface with liquid is being changed within a pair of electrodes, and the resulting change in the contact surface with liquid is being utilized for generating electrical energy. The device can be simplified and the manufacturing cost thereof is being reduced, furthermore it is effective in implementing an energy conversion device that is less faulty, by preventing channel blocking phenomenon and not requiring a lubricating layer or an electrode complicatedly patterned on a channel. Besides, it is advantageous in that a flexible device can be realized and a large area application is facilitated by simplifying the device structure. | 10-22-2015 |
20150311823 | IMPULSE GENERATOR AND GENERATOR SET - The present disclosure provides an impulse generator and a generator set. The impulse generator comprises: a first substrate; a first conductive film layer on the first substrate; an insulation film layer on the first conductive film layer; a second substrate; a second conductive film layer on the second substrate; and an elastic connection body for connecting the first substrate with the second substrate such that the insulation film layer and the second conductive film layer face each other; wherein, when no external force is applied on the first substrate or the second substrate, the insulation film layer is separated from the second conductive film layer; and, when an external force is applied on the first substrate or the second substrate, the insulation film layer is contacted with the second conductive film layer such that, a surface charge transfer is generated by the contact between the insulation film and the second conductive film layer, owing to their difference in triboelectric series. For the impulse generator according to the present disclosure, when a periodic external force is applied on the substrate of the generator, AC pulse signal output may be formed between the first conductive film layer and the second conductive film layer. | 10-29-2015 |
20150333661 | VIBRATION POWER GENERATOR - A vibration power generator in which an electret group including a plurality of electrets and an electrode group including a plurality of electrodes are displaced in a relative movement direction by an external vibration, and vibration power generation is thereby performed, has a housing portion that accommodates the electret group and the electrode group, a fixed member that is fixed to a bottom surface side of the housing portion and has one of the electret group and the electrode group as a fixed member-side power generation element, a movable member that is accommodated in the housing portion so as to be capable of relative movement by the external vibration while opposing the fixed member, and has the other of the electret group and the electrode group as a movable member-side power generation element, and a plurality of support members. | 11-19-2015 |
20150340968 | MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A MEMS structure includes: a substrate; a lower electrode disposed on the substrate; an upper electrode including a movable portion disposed facing and spaced from the lower electrode; and a reinforcing portion disposed in the upper electrode so as to extend along an extending direction of the movable portion, the reinforcing portion being composed of a material having a higher Young's modulus than the upper electrode. | 11-26-2015 |
20150340970 | FLEXIBLE ENERGY CONVERSION DEVICE USING LIQUID - The present invention relates to a flexible energy conversion device using a liquid, and more specifically, to a method and a device for converting mechanical energy into electric energy by applying an opposite phenomenon of electrowetting, which can change a surface contacting the liquid between one pair of electrodes, and use the change of the surface contacting the liquid to generate electric energy, so as to prevent channel blocking or so that a lubricating layer or electrodes patterned onto a channel in a complicated manner are not required, thereby enabling simplification of the device, reduction of manufacturing cost, and the energy conversion device that is less faulty. | 11-26-2015 |
20150372617 | MINIATURE MEMS ACTUATOR ASSEMBLIES - In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame. | 12-24-2015 |
20150372620 | INTEGRATED MICRO/NANOGENERATOR AND METHOD OF FABRICATING THE SAME - The present disclosure discloses an integrated micro/nanogenerator and a method of fabricating the same The integrated micro/nanogenerator has a structure comprising a conducting layer, a PET layer, a PDMS layer, a micro-nano hierarchical PDMS array and a metal film layer, the conducting layer being manufactured on a surface of the PET layer, the PET layer being made of polyethylene terephthalate; the PDMS layer being made of polydimethylsiloxane, and the micro-nano hierarchical PDMS array being manufactured on a surface of the PDMS layer. The method comprises steps of: 1) fabricating a micro-scale structure on a substrate through a combination of lithography and chemical etching or physical etching; 2) fabricating a nano-scale structure with high density and high depth-to-width ratio directly on a surface of the micro-scale structure through a mask-free optimized deep reactive ion etching process; 3) using a PDMS casting film transfer process by adjusting and controlling process parameters, by means of using the mold of mirco-nano hierarchical array structure as a template; 4) fabricating a conducting layer on a surface of the PET layer by using an evaporation or sputtering or chemical vapor deposition process; 5) bonding the PDMS layer and the PET layer through high temperature bonding or normal temperature physical pressing; and 6) assembling in sequence and packaging the bonded structure obtained in step 5), the metal film layer, and another bonded structure obtained in step 5). | 12-24-2015 |
20150381078 | MEMS Device and Method for Manufacturing the MEMS Device - A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene. | 12-31-2015 |
20160001324 | ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a technology for decreasing a dispersion of the performance among electromechanical transducers each having through wiring. A method for manufacturing an electromechanical transducer includes: obtaining a structure in which an insulative portion having a through hole therein is bonded onto an electroconductive substrate; filling the through hole with an electroconductive material to form a through wiring which is electrically connected with the electroconductive substrate; and using the electroconductive substrate as a first electrode, forming a plurality of vibrating membrane portions including a second electrode, which opposes to the first electrode through a plurality of gaps, on an opposite side of the first electrode to the side having the insulative portion, to thereby forming a plurality of cells. | 01-07-2016 |
20160006372 | DYNAMICALLY-BALANCED FOLDED-BEAM SUSPENSIONS - It is believed that the folded-beam suspension responds as a linear spring. Though true for the static response, this is not true for dynamic responses. For shuttle displacements in the order of the width of the flexure beams, the response becomes strongly nonlinear. This nonlinearity is caused by axial stresses which are induced due mainly to the inertia of the flying bar. A solution for this problem is given by shortening the anchored beams of the suspension by a predetermined amount, such that the flexure beams between anchor and flying bar, and between flying bar and shuttle have different lengths. In this dynamically-balanced suspension, the ratio between the motions of the shuttle and of the flying-bar ensures that the effective shortening of all beams is the same. Therefore, no axial stresses are induced, and the motion ratio is constant and unaffected by motion amplitude, resulting in a linear dynamic spring response. | 01-07-2016 |
20160020709 | ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - An ultrasonic transducer and a method of manufacturing the same are provided. The ultrasonic transducer includes a substrate, a first insulation layer, and a first thin film layer; a plurality of support members formed on the first thin film layer; a second thin film layer supported by the plurality of support members; a cavity between the first thin film layer and the second thin film layer; and a common ground electrode on the second thin film layer. | 01-21-2016 |
20160023244 | HIGH DISPLACEMENT ULTRASONIC TRANSDUCER - In some examples, a transducer apparatus includes a spring structure that enables a large, reliable amount of displacement of a transducer plate. For instance, an individual cell of the transducer apparatus may include a substrate having a first electrode portion, with at least one spring anchor extending from a first side of the substrate. At least one spring member may be supported by the at least one anchor, and may be connected to a plate that includes a second electrode portion. Accordingly, the spring member may support the plate, at least in part, for enabling the plate to move in a resilient manner toward and away from the substrate. In some cases, the spring member may be a bar-shaped spring that is cantilevered to an anchor or supported by two or more anchors. Additionally, a cavity between the plate and the substrate may be sealed by a sealing material. | 01-28-2016 |
20160027995 | METHOD FOR PRODUCING A MULTILAYER ELECTROMECHANICAL TRANSDUCER - The invention relates to a process for the production of at least one multilayer electromechanical transducer ( | 01-28-2016 |
20160028327 | METHOD OF PRODUCING A TRIBOELECTRIC GENERATOR WITH ROUGH DIELECTRIC POLYMER - Production of a triboelectric generator element based on a given dielectric polymer material , provided with a rough surface comprising conical micro-tip shaped structures obtained by means of a heat treatment of the polymer material (FIG. | 01-28-2016 |
20160031701 | Micromechanical Structure and Method for Fabricating the Same - A micromechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure has a functional region configured to deflect with respect to the substrate responsive to a force acting on the functional region. The functional structure includes a conductive base layer and a functional structure comprising a stiffening structure having a stiffening structure material arranged at the conductive base layer and only partially covering the conductive base layer at the functional region. The stiffening structure material includes a silicon material and at least a carbon material. | 02-04-2016 |
20160043664 | LOW PROFILE TRANSDUCER MODULE - A transducer structure is disclosed. The transducer structure may include a substrate with a MEMS structure located on a first side of the substrate and a lid coupled to the first side of the substrate and covering the MEMS structure. The substrate may include an electric contact which is laterally displaced from the lid on the first side of the substrate and electrically coupled to the MEMS structure. | 02-11-2016 |
20160043665 | Linearly deployed actuators - A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame. | 02-11-2016 |
20160065091 | TRIBOELECTRIC NANOGENERATOR - A generator includes a first cylindrical member and a second cylindrical member. The first cylindrical member includes a first dielectric layer including a first material that has a first rating on a triboelectric series; and a first conductive strip disposed around an exterior surfaces of the first cylindrical member. The first conductive strip includes a second material that has a second rating on the triboelectric series that is different from the first rating. The second cylindrical member is disposed about the first cylindrical member and includes a second dielectric layer that includes the first material. The second cylindrical member also includes the second material and at least one second conductive strip disposed around an interior surface of the second cylindrical member. A sliding mechanism causes lateral relative motion between the first cylindrical member against the second cylindrical member, generating an electric potential imbalance between the first and second conductive strip. | 03-03-2016 |
20160079884 | ELECTROSTATIC ACTUATOR AND METHOD FOR PRODUCING THE SAME - An electrostatic actuator having a stationary electrode and a fixedly cantilevered bender is described, wherein the bender includes a cantilever electrode disposed opposite to the stationary electrode in an overlapping area and being deflectable in the direction of the stationary electrode. | 03-17-2016 |
20160079953 | INTEGRATED MEMS AND IC SYSTEMS AND RELATED METHODS - An integrated MEMS and IC system (MEMSIC), as well as related methods, are described herein. According to some embodiments, a mechanical resonating structure is coupled to an electrical circuit (e.g., field-effect transistor). For example, the mechanical resonating structure may be coupled to a gate of a transistor. In some cases, the mechanical resonating structure and electrical circuit may be fabricated on the same substrate (e.g., Silicon (Si) and/or Silicon-on-Insulator (SOI)) and may be proximate to one another. | 03-17-2016 |
20160087551 | CONTROL APPARATUS FOR CAPACITIVE ELECTROMECHANICAL TRANSDUCER, AND METHOD OF CONTROLLING THE CAPACITIVE ELECTROMECHANICAL TRANSDUCER - Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacitance between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress. | 03-24-2016 |
20160094155 | Plate, Transducer and Methods for Making and Operating a Transducer - A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress. | 03-31-2016 |
20160094156 | MEMS SENSOR INCLUDING AN OVER-TRAVEL STOP AND METHOD OF MANUFACTURE - A MEMS sensor is disclosed. The MEMS sensor includes a MEMS structure and a substrate coupled to the MEMS structure. The substrate includes a layer of metal and a layer of dielectric material. The MEMS structure moves in response to an excitation. A first over-travel stop is formed on the substrate at a first distance from the MEMS structure. A second over-travel stop on the substrate at a second distance from the MEMS structure. At least one electrode on the substrate at a third distance from the MEMS structure. The first, second and third distances are all different. | 03-31-2016 |
20160099663 | ELECTROSTATIC MACHINE SYSTEM AND METHOD OF OPERATION - An illustrative electrostatic machine includes a shaft that is configured to rotate about an axis, a rotor electrode, and a stator electrode. The rotor electrode and the stator electrode are separated by a gap and form a capacitor. The rotor electrode is fixed to the shaft. The electrostatic machine can also include a housing that is configured to enclose the rotor electrode, the stator electrode, and at least a portion of the shaft. The stator electrode is fixed to the housing. A dielectric fluid fills a void defined by the housing, the rotor electrode, and the stator electrode. | 04-07-2016 |
20160099702 | Temperature compensated compound resonator - The invention concerns microelectromechanical resonators. In particular, the invention provides a resonator comprising a support structure, a doped semiconductor resonator suspended to the support structure by at least one anchor, and actuator for exciting resonance into the resonator. According to the invention, the resonator comprises a base portion and at least one protrusion extending outward from the base portion and is excitable by said actuator into a compound resonance mode having temperature coefficient of frequency (TCF) characteristics, which are contributed by both the base portion and the at least one protrusion. The invention enables simple resonators, which are very well temperature compensated over a wide temperature range. | 04-07-2016 |
20160099703 | Temperature compensated beam resonator - The invention provides a microelectromechanical resonator device comprising a support structure and a resonator manufactured on a (100) or (110) semiconductor wafer, wherein the resonator is suspended to the support structure and comprises at least one beam being doped to a doping concentration of 1.1*10 | 04-07-2016 |
20160101437 | CMUT ASSEMBLY WITH ACOUSTIC WINDOW - In some examples, a capacitive micromachined ultrasonic transducer (CMUT) apparatus includes one or more CMUTs formed on a CMUT substrate to have an operational direction facing away from the CMUT substrate. As one example, the one or more CMUTs may include a plurality of CMUT cells arranged in groups to form CMUT elements, and a plurality of the CMUT elements may be configured as an array on the CMUT substrate. An acoustic window is disposed over the one or more CMUTs and may contact an external medium. For instance, the acoustic window may be positioned to pass acoustic energy to or from the one or more CMUTs in the operational direction. A coupling medium may be disposed between the CMUTs and the acoustic window to couple acoustic energy between the one or more CMUTs and the acoustic window. | 04-14-2016 |
20160118954 | COMPOUND SPRING MEMS RESONATORS FOR FREQUENCY AND TIMING GENERATION - A compound spring MEMS resonator includes a resonator body constructed using one or more spring unit cells forming a compound spring block and one or more compound spring blocks forming the resonator body. Each compound spring block is anchored at nodal points to ensure a high quality factor. The resonator body further includes masses attached to the open ends of the compound spring block and capacitively coupled to drive/sense electrodes. The dimensions of the spring unit cells, the number of spring unit cells for a compound spring block, the size and weight of the masses, and the length and width of the support beams are selected to realize a desired resonant frequency. Meanwhile, the number of compound spring blocks is selected to tune the desired electrical characteristics, such as impedance, of the MEMS resonator. | 04-28-2016 |
20160122178 | DRIVING APPARATUS - A driving apparatus ( | 05-05-2016 |
20160126926 | MICROELECTROMECHANICAL RESONATORS - Embodiments relate to MEMS resonator structures and methods that enable application of a maximum available on-chip voltage. In an embodiment, a MEMS resonator comprises a connection between a ground potential and the gap electrode of the resonator. Embodiments also relate to manufacturing systems and methods that are less complex and enable production of MEMS resonators of reduced dimensions. | 05-05-2016 |
20160164433 | PIEZOELECTRIC ELEMENT INCLUDING MESOPOROUS PIEZOELECTRIC THIN FILM - A piezoelectric element includes: an upper electrode having acoustic transparency; a lower electrode; and a diaphragm disposed between the upper electrode and the lower electrode and configured of a mesoporous piezoelectric thin film. The upper electrode, the lower electrode, and the diaphragm are electrically insulated from one another. | 06-09-2016 |
20160164435 | GARMENT HAVING TRANSDUCER CAPABILITIES - The invention provides a garment having transducer capabilities and comprising an outer layer ( | 06-09-2016 |
20160173001 | ELECTROSTATICALLY DEFLECTABLE MICROMECHANICAL DEVICE | 06-16-2016 |
20160173002 | MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE WITH ENHANCED STRUCTURAL STRENGTH | 06-16-2016 |
20160183007 | ACOUSTIC GALVANIC ISOLATION DEVICE | 06-23-2016 |
20160197262 | GENERATOR UNIT FOR ENERGY HARVESTING WITH A SINGLE FORCE INPUT POINT | 07-07-2016 |
20180026555 | Reciprocal Hall Effect Energy Generation Device | 01-25-2018 |