| Entries |
| Document | Title | Date |
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| 20130043594 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - According to one embodiment, between the mounting substrate and the semiconductor chip, there is a joint support layer including a metal or its alloy selected from the group of Cu, Al, Ag, Ni, Cr, Zr and Ti and a melt layer laminated across the joint support layer, and formed of a metal selected from the group of Sn, Zn and In or of an alloy of at least two metals selected from the same metals. The process of joining the mounting substrate and the semiconductor chip includes intervening a joining layer which is formed, at least for its outermost layer, by the melt layer, maintaining the temperature to be higher than the melting point of the melt layer, then forming an alloy layer which has a higher melting point than the melt layer by liquid phase diffusion. | 02-21-2013 |
| 20130026634 | Hybrid Interconnect Technology - In one embodiment, an interconnect structure between an integrated circuit (IC) chip and a substrate comprises a plurality of materials. | 01-31-2013 |
| 20130026636 | LAMINATED AND SINTERED CERAMIC CIRCUIT BOARD, AND SEMICONDUCTOR PACKAGE INCLUDING THE CIRCUIT BOARD - A circuit board that can decrease thermal stress acting between a semiconductor element and a board in association with temperature alteration and has high mechanical strength (rigidity) as a whole board (including a multilayer wiring layer) is provided. Ceramic base material having a coefficient of thermal expansion close to that of a semiconductor element and inner layer wiring are integrally sintered, and the circuit board is configured so that fine-lined conductor structure corresponding to a multilayer wiring layer in the inner layer wiring has predetermined width, intralayer interval and interlayer interval. Thereby, thermal stress acting between a semiconductor element and the board when the board is exposed to temperature alteration in a condition where it is joined with the semiconductor element is suppressed, rigidity of the board is maintained, and its reliability against temperature cycle is increased. | 01-31-2013 |
| 20100052174 | COPPER PAD FOR COPPER WIRE BONDING - An integrated circuit package comprising an integrated circuit that includes transistors coupled to copper interconnect structures. The integrated circuit package also comprises copper pads located on the integrated circuit and directly contacting uppermost ones of the copper interconnect structures. Each of copper pads has a thickness of at least about 2 microns. The integrated circuit package further comprises copper wires pressure-welded directly to the copper pads. | 03-04-2010 |
| 20130026635 | Hybrid Copper Interconnect Structure and Method of Fabricating Same - A hybrid interconnect structure containing copper regions that have different impurities levels within a same opening is provided. In one embodiment, the interconnect structure includes a patterned dielectric material having at least one opening located therein. A dual material liner is located at least on sidewalls of the patterned dielectric material within the at least one opening. The structure further includes a first copper region having a first impurity level located within a bottom region of the at least one opening and a second copper region having a second impurity level located within a top region of the at least one opening and atop the first copper region. In accordance with the present disclosure, the first impurity level of the first copper region is different from the second impurity level of the second copper region. The copper regions containing the different impurities levels can be achieved utilizing a combination of physical vapor deposition of a copper region having a low impurity level (i.e., less than 20 ppm) and copper reflow, with electroplating another copper region having a high impurity level (i.e., 100 ppm or greater). | 01-31-2013 |
| 20110193232 | CONDUCTIVE PILLAR STRUCTURE FOR SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURE - A conductive pillar structure for a die includes a passivation layer having a metal contact opening over a substrate. A bond pad has a first portion inside the metal contact opening and a second portion overlying the passivation layer. The second portion of the bond pad has a first width. A buffer layer over the bond pad has a pillar contact opening with a second width to expose a portion of the bond pad. A conductive pillar has a first portion inside the pillar contact opening and a second portion over the buffer layer. The second portion of the conductive pillar has a third width. A ratio of the second width to the first width is between about 0.35 and about 0.65. A ratio of the second width to the third width is between about 0.35 and about 0.65. | 08-11-2011 |
| 20100038793 | INTERCONNECT STRUCTURES COMPRISING CAPPING LAYERS WITH LOW DIELECTRIC CONSTANTS AND METHODS OF MAKING THE SAME - Interconnect structures comprising capping layers with low dielectric constants and good oxygen barrier properties and methods of making the same are provided. In one embodiment, the integrated circuit structure comprises: an interlevel dielectric layer disposed above a semiconductor substrate; a conductive interconnect embedded in the interlevel dielectric layer; a first capping layer comprising Si | 02-18-2010 |
| 20100096756 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device has a multilayer interconnection including a copper interconnection film formed in a predetermined area within an insulating film, a liner film, and a high-melting-point metal film. The copper interconnection film is polycrystalline, and crystal grains occupying 40% or more of an area of a unit interconnection surface among crystal grains forming the polycrystal are oriented to (111) in a substrate thickness direction. The copper interconnection film has crystal conformity with the noble metal liner film. In a case where the high-melting-point metal film is formed of Ti and the noble metal liner film is a Ru film, the high-melting-point metal of Ti dissolves into Ru in a solid state to form the noble metal liner. Thus, a copper interconnection is formed with both of Cu diffusion barrier characteristics and Cu crystal conformity. | 04-22-2010 |
| 20090160060 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - Embodiments relate to a method of manufacturing a semiconductor device having a porous low-k dielectric layer. According to embodiments, a method may include forming an inter metal dielectric (IMD) layer on and/or over a semiconductor substrate, forming copper lines having a stepped structure in the IMD layer, forming a barrier insulating layer on and/or over upper surfaces of the copper lines and the IMD layer, exposing a portion of the upper surface of the IMD layer by photolithography and etching processes, and forming air cavities in the IMD layer using a wet etching process on and/or over the exposed portion of the upper surface of the IMD layer. According to embodiments, a value of the dielectric constant (k) of the IMD layer or the porous low-k dielectric layer may be close to that of a vacuum state. | 06-25-2009 |
| 20090294970 | HIGH FREQUENCY INTERCONNECT PAD STRUCTURE - An integrated circuit includes a high speed circuit, an interconnect pad, a passivation layer under the interconnect pad, a first patterned metal layer, and a first via. The high speed circuit is for a high speed signal at a terminal of the high speed circuit. The interconnect pad is on a top surface of the integrated circuit structure. The first patterned metal layer is under the passivation layer having a first portion and a second portion. The first portion of the first patterned metal layer is connected to the terminal of the high speed circuit. The second portion of the first patterned metal layer is under the interconnect pad and is electrically floating when the high frequency signal is present on the interconnect pad portion. The result is reduced capacitive loading on the high speed signal which improves performance. | 12-03-2009 |
| 20130082386 | INTEGRATED CIRCUIT PACKAGE AND A METHOD FOR MANUFACTURING AN INTEGRATED CIRCUIT PACKAGE - An integrated circuit package includes a package module including one or more circuit interconnections formed in a carrier, wherein at least one top-side package contact is formed over the top-side of the package module and electrically connected to at least one circuit interconnection of the one or more circuit interconnections and wherein a cavity is formed at the top-side of the package module; a chip disposed in the cavity, the chip including at least one chip front side contact and at least one chip back side contact, wherein the at least one chip front side contact is electrically connected to at least one further circuit interconnection of the one or more circuit interconnections; an electrically conductive structure connecting the at least one top-side package contact to the chip back side contact; and a metallic layer formed over the electrically conductive structure and on the chip back side contact. | 04-04-2013 |
| 20090236747 | Semiconductor device and method for fabricating the same - A multilevel interconnect structure in a semiconductor device comprises a first insulating layer ( | 09-24-2009 |
| 20130113107 | SEMICONDUCTOR DEVICE - A semiconductor device includes: a substrate comprised by gallium arsenide; an active layer provided on the substrate; a first nickel-plated layer provided on a lower face of the substrate facing the active layer; a copper-plated layer provided on a lower face of the first nickel-plated layer; and a second nickel-plated layer provided on a lower face of the copper-plated layer. | 05-09-2013 |
| 20090026623 | BURIED METAL-SEMICONDUCTOR ALLOY LAYERS AND STRUCTURES AND METHODS FOR FABRICATION THEREOF - A method for forming a metal-semiconductor alloy layer uses particular thermal annealing conditions to provide a stress free metal-semiconductor alloy layer through interdiffusion of a buried semiconductor material layer and a metal-semiconductor alloy forming metal layer that contacts the buried semiconductor material layer within an aperture through a capping layer beneath which is buried the semiconductor material layer. A resulting semiconductor structure includes the metal-semiconductor alloy layer that further includes an interconnect portion beneath the capping layer and a contiguous via portion that penetrates at least partially through the capping layer. Such a metal-semiconductor alloy layer may be located interposed between a substrate and a semiconductor device having an active doped region. | 01-29-2009 |
| 20130119548 | METHOD TO FABRICATE HIGH PERFORMANCE CARBON NANOTUBE TRANSISTOR INTEGRATED CIRCUITS BY THREE-DIMENSIONAL INTEGRATION TECHNOLOGY - Techniques for fabricating carbon nanotube-based devices are provided. In one aspect, a method for fabricating a carbon nanotube-based integrated circuit is provided. The method comprises the following steps. A first wafer comprising carbon nanotubes is provided. A second wafer comprising one or more device elements is provided. One or more of the carbon nanotubes are connected with one or more of the device elements by bonding the first wafer and the second wafer together. A carbon nanotube-based integrated circuit is also provided. | 05-16-2013 |
| 20120235302 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE - A semiconductor manufacturing method includes: forming a seed film including a first metal over a bottom surface and a side wall of an opening portion formed over interlayer insulating films and a field portion located over the interlayer insulating film except the opening portion, forming a resist over the seed film and filling the opening portion with the resist, removing part of the resist, exposing the seed film formed over the upper portion of the side walls of the opening portion and the field portion, forming a cover film including a second metal, whose resistivity is higher than that of the first metal, over the seed film located over the upper portion of the side wall of the opening portion and the field portion, exposing the seed film by removing the resist, and forming a plating film including the first metal over the exposed seed film. | 09-20-2012 |
| 20110115092 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - There is provided a semiconductor device and a manufacturing method therefor, the semiconductor device requiring flip-chip mounting of a fine pitch electrode, wherein the fine electrode is easily manufactured, resin sealing is not required, and reliability can be improved. In the semiconductor device, one or more LSI chips ( | 05-19-2011 |
| 20110298135 | INTEGRATED CIRCUIT AND PROCESS FOR FABRICATING THEREOF - A process for fabricating an Integrated Circuit (IC) and the IC formed thereby is disclosed. The process comprises providing a substrate. The process further comprises forming a plurality of longitudinal trenches in the substrate and depositing a layer of a first conductive material on at least one longitudinal trench of the plurality of longitudinal trenches. A first layer of a second conductive material is deposited on the layer of the first conductive material. Thereafter, the process includes depositing a second layer of the second conductive material on the first layer of the second conductive material. The second layer of the second conductive material at least partially fills the at least one longitudinal trench. The first conductive material is selected such that a reduction potential of the first conductive material is less than a reduction potential of the second conductive material. | 12-08-2011 |
| 20110291281 | PARTIAL AIR GAP FORMATION FOR PROVIDING INTERCONNECT ISOLATION IN INTEGRATED CIRCUITS - Partial air gap formation for providing interconnect isolation in integrated circuits is described. One embodiment is an integrated circuit (“IC”) structure includes a substrate having two adjacent interconnect features formed thereon; caps formed over and aligned with each of the interconnect features; sidewalls formed on opposing sides of each of the interconnect features and a gap formed between the interconnect features; and a dielectric material layer disposed over the substrate to cover the caps and the gap. | 12-01-2011 |
| 20090294972 | SUBSTRATE FOR SEMICONDUCTOR PACKAGE, METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUCTOR PACKAGE HAVING THE SAME - A method for manufacturing a substrate for a semiconductor package includes the steps of attaching first and second insulation layers which have first surfaces and second surfaces and are formed with conductive layers on the first surfaces, by the medium of a release film which has adhesives attached to both surfaces thereof, such that the second surfaces of the first and second insulation layers face each other; forming first conductive patterns on the first surfaces of the first and second insulation layers by patterning the conductive layers; forming solder masks on the first surfaces of the first and second insulation layers including the first conductive patterns to open portions of the first conductive patterns; and separating the first and second insulation layers from each other by removing the release film. | 12-03-2009 |
| 20090283913 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A semiconductor device includes: a copper (Cu) wire having a first region and a second region in which densities of silicon (Si) and oxygen (O) atoms are higher than in the first region; a compound film that is selectively formed on the Cu wire and contains Cu and Si; and a dielectric film formed on a side surface side of the Cu wire. | 11-19-2009 |
| 20130009312 | INTERCONNECT STRUCTURE FABRICATED WITHOUT DRY PLASMA ETCH PROCESSING - An interconnect structure within a microelectronic structure and a method for fabricating the interconnect structure within the microelectronic structure use a developable bottom anti-reflective coating layer and at least one imageable inter-level dielectric layer located thereupon over a substrate that includes a base dielectric layer and a first conductor layer located and formed embedded within the base dielectric layer. Incident to use of the developable bottom anti-reflective coating layer and the at least one imageable inter-level dielectric layer, an aperture, such as but not limited to a dual damascene aperture, may be formed through the at least one imageable inter-level dielectric layer and the developable anti-reflective coating layer to expose a capping layer located and formed upon the first conductor layer, absent use of a dry plasma etch method when forming the interconnect structure within the microelectronic structure. | 01-10-2013 |
| 20090189286 | FINE PITCH SOLDER BUMP STRUCTURE WITH BUILT-IN STRESS BUFFER - A fine pitch solder bump structure with a built-in stress buffer that is utilized in electronic packages, and a method of producing the fine pitch solder bump structure with built-in stress buffer. Employed is a very thick final passivation layer that is constituted of a polyimide as a so-called “cushion” for a minimal thickness of UBM (BLM) pad and solder material, while concurrently completely separating the resultingly produced polyimide islands, so that the polyimide material provides most of the physical height for the “standoff” of a modified C4 (controlled collapse chip connection) structure. In employing the polyimide material as the primary structural component of the vertical chip package interconnect in this particular inventive manner, the inherent stress buffering property of the polyimide material is utilized to full advantage by effectively reducing the high stresses encountered during chip manufacture processing steps, such as chip join, reflow, preconditioning and reliability thermal cycle stressing. | 07-30-2009 |
| 20100109161 | REDUCING METAL VOIDS IN A METALLIZATION LAYER STACK OF A SEMICONDUCTOR DEVICE BY PROVIDING A DIELECTRIC BARRIER LAYER - Metallization systems on the basis of copper and low-k dielectric materials may be efficiently formed by providing an additional dielectric material of enhanced surface conditions after the patterning of the low-k dielectric material. Consequently, defects such as isolated copper voids and the like may be reduced without significantly affecting overall performance of the metallization system. | 05-06-2010 |
| 20090134521 | INTEGRATED CIRCUIT AND MANUFACTURING METHOD OF COPPER GERMANIDE AND COPPER SILICIDE AS COPPER CAPPING LAYER - A method is provided for forming a capping layer comprising Cu, N, and also Si and/or Ge onto a copper conductive structure, said method comprising the sequential steps of: forming, at a temperature range between 200° C. up to 400° C., at least one capping layer onto said copper conductive structure by exposing said structure to a GeH | 05-28-2009 |
| 20090309227 | FABRICATION OF INTERCONNECTS IN LOW-K INTERLAYER DIELECTRICS - A method for forming deep lithographic interconnects between a first metal and a second metal is provided. The method comprises depositing a first insulator layer on a semiconductor substrate; etching the first insulator layer at a selected location to provide at least a first via to the semiconductor substrate; depositing the first metal on the semiconductor substrate to form at least a first metal contact plug in the first via in contact with the semiconductor substrate; treating the semiconductor substrate with an in-situ plasma of a nitrogen containing gas wherein the plasma forms a nitride layer of the first metal at least capping a top surface of the first metal plug in the first via; and forming a second metal contact to the metal nitride layer capping at least the top surface of the first metal plug. | 12-17-2009 |
| 20110147940 | ELECTROLESS CU PLATING FOR ENHANCED SELF-FORMING BARRIER LAYERS - Methods and an apparatus are described for an integrated circuit within which an electroless Cu plated layer having an oxygen content is formed on the top of a seed layer comprising Cu and Mn. The integrated circuit is then exposed to a sufficient high temperature to cause the self-formation of a MnSiOx barrier layer. | 06-23-2011 |
| 20110169166 | SEMICONDUCTOR DEVICE SEALED IN A RESIN SECTION AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes a first semiconductor chip having a pad electrode formed on an upper surface thereof; a resin section sealing the first semiconductor chip with the upper surface and a side surface of the first semiconductor chip being covered and a lower surface of die first semiconductor chip being exposed; a columnar electrode communicating between the upper surface and the lower surface of the resin section with the upper surface and the lower surface of the columnar electrode being exposed on the resin section and at least a part of the side surface of the columnar electrode being covered; and a bonding wire connecting the pad electrode and the columnar electrode with a part of the bonding wire being embedded in the columnar electrode as one end of the bonding wire being exposed on the lower surface of the columnar electrode and the remaining part of the bonding wire being covered with the resin section, and a method for manufacturing the same. | 07-14-2011 |
| 20080211104 | High Temperature, Stable SiC Device Interconnects and Packages Having Low Thermal Resistance - A method of forming packages containing SiC or other semiconductor devices bonded to other components or conductive surfaces utilizing transient liquid phase (TLP) bonding to create high temperature melting point bonds using in situ formed ternary or quaternary mixtures of conductive metals and the devices created using TLP bonds of ternary or quaternary materials. The compositions meet the conflicting requirements of an interconnect or joint that can be exposed to high temperature, and is thermally and electrically conductive, void and creep resistant, corrosion resistant, and reliable upon temperature and power cycling. | 09-04-2008 |
| 20080211105 | Method of assembling chips - A method of assembling chips. A first chip and a second chip are provided. At least one conductive pillar is formed on the first chip, and a conductive connecting material is formed on the conductive pillar. The second chip also comprises at least one conductive pillar. The first chip is connected to the second chip via the conductive pillars and the conductive connecting material. | 09-04-2008 |
| 20080211103 | SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME - In order to improve the reliability of a semiconductor device having a fuse formed by a Damascene technique, a barrier insulating film and an inter-layer insulating film are deposited over a fourth-layer wiring and a fuse. The barrier insulating film is an insulating film for preventing the diffusion of Cu and composed of a SiCN film deposited by plasma CVD like the underlying barrier insulating film. The thickness of the barrier insulating film covering the fuse is larger than the thickness of the underlying barrier insulating film so as to improve the moisture resistance of the fuse. | 09-04-2008 |
| 20090294971 | ELECTROLESS NICKEL LEVELING OF LGA PAD SITES FOR HIGH PERFORMANCE ORGANIC LGA - A structure comprises: a substrate; at least one conductor on the substrate; at least one contact pad on the substrate; a mask over the conductor (wherein the mask comprises an opening over the contact pad and wherein the mask comprises a bottom surface contacting the substrate and a top surface opposite the bottom surface); and a contact pad plating layer on the contact pad and within the opening of the mask. The contact pad plating layer comprises a bottom surface contacting the contact pad and a top surface opposite the bottom surface, and the top surface of the contact pad plating layer is coplanar with the top surface of the mask. | 12-03-2009 |
| 20090008784 | Power semiconductor substrates with metal contact layer and method of manufacture thereof - A power semiconductor substrate comprising an insulating planar base, at least one conductor track and at least one contact area as part of the conductor track, wherein a layer of a metallic material is disposed on the contact area by means of pressure sintering. The associated method comprises the steps of: producing a power semiconductor substrate that includes a planar insulating base, conductor tracks and contact areas; arranging a pasty layer, composed of a metallic material and a solvent, on at least one contact area of the power semiconductor substrate; and applying pressure to the pasty layer. | 01-08-2009 |
| 20080246156 | Semiconductor device and method of manufacturing the same - A method of manufacturing a semiconductor device includes: forming a first pad including a first metal and an inter-connection line including the first metal in a scribe lane region; forming a second pad including the first metal in a chip region; sequentially forming an etch-stop layer and a first insulation layer on the first pad, the inter-connection line, and the second pad; exposing the first and second pads by patterning the etch-stop layer and the first insulation layer; forming third and fourth pads including a second metal on the first and second pads; sequentially forming second and third insulation layers on the third pad, the fourth pad, and the patterned first insulation layer; and etching the first, second, and third insulation layers using the patterned photosensitive layer on the third insulation layer to expose the third and fourth pads. | 10-09-2008 |
| 20080246155 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device according to an embodiment includes: a semiconductor substrate having a semiconductor element formed on a surface thereof; an interwiring insulating film formed above the semiconductor substrate; a wiring formed in the interwiring insulating film; a first intervia insulating film formed under the interwiring insulating film; a first via formed in the first intervia insulating film and connected to a lower surface of the wiring; a second intervia insulating film formed on the interwiring insulating film; a second via formed in the second intervia insulating film and connected to an upper surface of the wiring; and a CuSiN film formed in at least one of a position between the interwiring insulating film and the first intervia insulating film, and a position between the interwiring insulating film and the second intervia insulating film. | 10-09-2008 |
| 20090166874 | Semiconductor Device and Method of Fabricating the Same - A semiconductor device and manufacturing method thereof are provided. The semiconductor device can include an interlayer dielectric layer on a substrate, a metal layer on the interlayer dielectric layer, and an impure anti-reflection film on the metal layer. The impure anti-reflection film can be formed through an in situ process. | 07-02-2009 |
| 20080284033 | Semiconductor device and method for manufacturing semiconductor device - A semiconductor device includes a first metal foil, an insulating sheet mounted on an upper surface of the first metal foil main, at least one second metal foil mounted on the insulating sheet, at least one solder layer mounted on the at least one second metal foil, and at least one semiconductor element mounted on the at least one second metal foil through the at least one solder layer. The at least one semiconductor has a thickness of 50 μm or greater and less than 100 μm. | 11-20-2008 |
| 20080303161 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A method of manufacturing a semiconductor device includes: preparing a semiconductor element having a first metal layer made of first metal on a surface thereof, and a metal substrate made of second metal, the metal substrate having a fourth metal layer made of fourth metal on a surface thereof, and mounting the semiconductor element on the surface thereof; providing metal nanopaste between the first metal layer and the fourth metal layer, the metal nanopaste being formed by dispersing fine particles made of third metal with a mean diameter of 100 nm or less into an organic solvent; and heating, or heating and pressurizing the semiconductor element and the metal substrate between which the metal nanopaste is provided, thereby removing the solvent. Further, each of the first, third and fourth metals is made of any metal of gold, silver, platinum, copper, nickel, chromium, iron, lead, and cobalt, an alloy containing at least one of the metals, or a mixture of the metals or the alloys. By the manufacturing method, it is possible to bond the semiconductor element to the metal substrate favorably. | 12-11-2008 |
| 20080272494 | Semiconductor device - A semiconductor device is provided, including: a first barrier metal film provided by a PVD process in a recess formed in at least one insulating film, and containing at least one metal element belonging to any of the groups 4-A, 5-A, and 6-A; a second barrier metal film continuously provided by at least one of CVD and ALD processes on the first barrier metal film without being opened to atmosphere, and containing at least one metal element belonging to any one of the groups 4-A, 5-A, and 6-A; a third barrier metal film continuously provided by the PVD process on the second barrier metal film without being opened to the atmosphere, and containing at least one metal element belonging to any one of the groups 4-A, 5-A, and 6-A; and a first Cu film continuously provided on the third barrier metal film without being opened to the atmosphere and thereafter heated. | 11-06-2008 |
| 20080265424 | SEMICONDUCTOR DEVICE - A manufacturing method of a semiconductor device of this invention includes forming metal pads on a Si substrate through a first oxide film, bonding the Si substrate and a holding substrate which bolsters the Si substrate through a bonding film, forming an opening by etching the Si substrate followed by forming a second oxide film on a back surface of the Si substrate and in the opening, forming a wiring connected to the metal pads after etching the second oxide film, forming a conductive terminal on the wiring, dicing from the back surface of the Si substrate to the bonding film and separating the Si substrate and the holding substrate. | 10-30-2008 |
| 20080258306 | Semiconductor Device and Method for Fabricating the Same - The present invention provides a semiconductor device and a method for fabricating the same. The semiconductor device includes a chip having an active surface and an opposing non-active surface, wherein a plurality of bond pads are formed on the active surface, and first metal layers are formed on the bond pads and to edges of the non-active surface; conductive traces disposed on the non-active surface of the chip; a dielectric layer covering sides of the chip and formed with a plurality of openings therein to expose a portion of the conductive traces; and a plurality of second metal layers formed in the openings of the dielectric layer and on the first metal layers, such that the bond pads are electrically connected to the conductive traces via the first and second metal layers. | 10-23-2008 |
| 20090085215 | Semiconductor component comprising copper metallizations - A semiconductor component having improved thermomechanical durability has in a semiconductor substrate at least one cell comprising a first main electrode zone, a second main electrode zone and a control electrode zone lying in between. For making contact with the main electrode zone, at least one metallization layer composed of copper or a copper alloy is provided which is connected to at least one bonding electrode which likewise comprises copper or a copper alloy. | 04-02-2009 |
| 20090026622 | Semiconductor Device and Method for Manufacturing Same - A multilayered wiring is formed in a prescribed area in an insulating film that is formed on a semiconductor substrate. Dual damascene wiring that is positioned on at least one layer of the multilayered wiring is composed of an alloy having copper as a principal component. The concentration of at least one metallic element contained in the alloy as an added component in vias of the dual damascene wiring is determined according to the differences in the width of the wiring of an upper layer where the vias are connected. Specifically, a larger wiring width in the upper layer corresponds to a higher concentration of at least one metallic element within the connected vias. Accordingly, increases in the resistance of the wiring are minimized, the incidence of stress-induced voids is reduced, and reliability can be improved. | 01-29-2009 |
| 20090184425 | Conductive line structure and the method of forming the same - The conductive line structure of a semiconductor device including a base; at least one patterned conductive layer formed over the base; a conductive line formed over the at least one patterned conductive layer; a protection layer that encompasses the top surface and sidewall of the conductive line to prevent undercut generated by etching. The structure further comprises an underlying layer under the conductive line. The underlying layer includes Ni, Cu or Pt. The conductive line includes gold or copper. The at least one patterned conductive layer includes at least Ti/Cu. The protection layer includes electro-less plating Sn, Au, Ag or Ni. | 07-23-2009 |
| 20090051036 | Semiconductor Package Having Buss-Less Substrate - A ball grid array device with an insulating substrate ( | 02-26-2009 |
| 20120104616 | METHOD FOR DEPOSITING A THIN FILM ELECTRODE AND THIN FILM STACK - A method for depositing at least one thin-film electrode onto a transparent conductive oxide film is provided. At first, the transparent conductive oxide film is deposited onto a substrate to be processed. Then, the substrate and the transparent conductive oxide film are subjected to a processing environment containing a processing gas acting as a donor material or an acceptor material with respect to the transparent conductive oxide film. The at least one thin-film electrode is deposited onto at least portions of the transparent conductive oxide film. A partial pressure of the processing gas acting as the donor material or the acceptor material with respect to the transparent conductive oxide film is varied while depositing the at least one thin-film electrode onto at least portions of the transparent conductive oxide film. Thus, a modified transparent conductive oxide film having reduced interface resistance and bulk resistance can be obtained. | 05-03-2012 |
| 20080315424 | Structure and manufactruing method of chip scale package - A Chip Scale Package (CSP) and a method of forming the same are disclosed. Single chips without the conventional ball mountings, are first attached to an adhesive-substrate (adsubstrate) composite having openings that correspond to the input/output (I/O) pads on the single chips to form a composite chip package. Ball mounting is then performed over the openings, thus connecting the I/O pads at the chip sites to the next level of packaging directly. In another embodiment, the adhesive layer is formed on the wafer side first to form an adwafer, which is then die sawed in CSPs. Then the CSPs with the adhesive already on them are bonded to a substrate. The composite chip package may optionally be encapsulated with a molding material. The CSPs provide integrated and shorter chip connections especially suited for high frequency circuit applications, and can leverage the currently existing test infrastructure. | 12-25-2008 |
| 20080277797 | INTERCONNECT STRUCTURES - A semiconductor structure includes a first dielectric layer over a substrate. At least one first conductive structure is within the first dielectric layer. The first conductive structure includes a cap portion extending above a top surface of the first dielectric layer. At least one first dielectric spacer is on at least one sidewall of the cap portion of the first conductive structure. | 11-13-2008 |
| 20090212436 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and method for forming the same are provided. The semiconductor structure comprises a semiconductor substrate, a plurality of top metallizations on the semiconductor substrate, a high density plasma layer filling gaps between the top metallizations and having a substantially planar upper surface overlying the top metallizations, and a passivation layer overlying the high density plasma layer. A metal bump can be formed overlying the top metallizations through the passivation layer and HDPCVD layer for subsequent bonding. | 08-27-2009 |
| 20090243112 | Copper interconnection structure, semiconductor device, and method for forming copper interconnection structure - A copper interconnection structure includes an insulating layer, an interconnection and a barrier layer. The insulating layer includes silicon (element symbol: Si), carbon (element symbol: C), hydrogen (element symbol: H) and oxygen (element symbol: O). The interconnection is located on the insulating layer, and the interconnection includes copper (element symbol: Cu). The barrier layer is located between the insulating layer and the interconnection. The barrier layer includes an additional element, carbon (element symbol: C) and hydrogen (element symbol: H). The barrier layer has atomic concentrations of carbon (element symbol: C) and hydrogen (element symbol: H) maximized in a region of a thickness of the barrier layer where the atomic concentration of the additional element is maximized. | 10-01-2009 |
| 20090243111 | SEMICONDUCTOR SUBSTRATE, ELECTRODE FORMING METHOD, AND SOLAR CELL FABRICATING METHOD - The present invention is directed to a semiconductor substrate having an electrode formed thereon, the electrode including at least silver and glass frit, the electrode including: a multi-layered structure constituted of a first electrode layer joined directly to the semiconductor substrate, and an upper electrode layer formed of at least one layer and disposed on the first electrode layer; wherein the upper electrode layer is formed by firing a conductive paste having a total silver content of 75 wt % or more and 95 wt % or less, the content of silver particles having an average particle diameter of 4 μm or greater and 8 μm or smaller with respect to the total silver content in the upper electrode layer being higher than that in the first electrode layer. As a consequence, it is possible to form the electrode, which has the high aspect ratio and hardly suffers an inconvenience such as a break, on the semiconductor substrate by a simple method. | 10-01-2009 |
| 20090250821 | CORROSION RESISTANT VIA CONNECTIONS IN SEMICONDUCTOR SUBSTRATES AND METHODS OF MAKING SAME - Devices and methods for protecting the metal within a via in a semiconductor substrate from corrosion are provided. Specifically, embodiments of the present invention relate to disposing a corrosion resistant metal layer within a recess formed in a semiconductor substrate such that the metal subsequently deposited within the via will adhere to the corrosion resistant metal layer, then backgrinding the bottom surface of the semiconductor substrate to expose the corrosion resistant metal. For example, the metal deposited within the recess may be copper, while the corrosion resistant metal may be a noble metal such as palladium. | 10-08-2009 |
| 20090256263 | STRUCTURE AND METHOD FOR HYBRID TUNGSTEN COPPER METAL CONTACT - The present invention in one embodiment provides a method of forming an interconnect comprising, providing a interlevel dielectric layer atop a substrate, the interlevel dielectric layer including at least one tungsten (W) stud extending from an upper surface of the interlevel dielectric to the substrate; recessing an upper surface of the at least one tungsten (W) stud below the upper surface of the interlevel dielectric to provide at least one recessed tungsten (W) stud; forming a first low-k dielectric layer atop the upper surface of the interlevel dielectric layer and the at least one recessed tungsten (W) stud; forming a opening through the first low-k dielectric layer to expose an upper surface of the at least one recessed tungsten stud; and filling the opening with copper (Cu). | 10-15-2009 |
| 20100181675 | SEMICONDUCTOR PACKAGE WITH WEDGE BONDED CHIP - A semiconductor package with wedge bonded chip. One embodiment provides a semiconductor chip, a wire bond and a metal element. The chip includes a bond pad with a copper layer. The wire bond is wedge bonded to the bond pad and ball bonded to the metal element. | 07-22-2010 |
| 20090079080 | Semiconductor Device with Multi-Layer Metallization - One or more embodiments are related to a semiconductor device, comprising: a metallization layer comprising a plurality of portions, each of the portions having a different thickness. The metallization layer may be a final metal layer. | 03-26-2009 |
| 20100213613 | ARRANGEMENT FOR ELECTRICALLY CONNECTING SEMICONDUCTOR CIRCUIT ARRANGEMENTS TO AN EXTERNAL CONTACT DEVICE AND METHOD FOR PRODUCING THE SAME - An electrical connection arrangement between a semiconductor circuit arrangement and an external contact device, and to a method for producing the connection arrangement is disclosed. In one embodiment, a metallic layer is deposited onto at least one contact terminal and/or the contacts and the wire, the metallic layer protecting the contact terminal or the electrical connection against ambient influences and ensuring a high reliability. | 08-26-2010 |
| 20100276806 | Plastic package and method of fabricating the same - A plastic package includes a plurality of terminal members each having an outer terminal, an inner terminal, and a connecting part connecting the outer and the inner terminal; a semiconductor device provided with terminal pads connected to the inner terminals with bond wires; and a resin molding sealing the terminal members, the semiconductor device and the bond wires therein. The inner terminals of the terminal members are thinner than the outer terminals and have contact surfaces. The upper, the lower and the outer side surfaces of the outer terminals, and the lower surfaces of the semiconductor device are exposed outside. The inner terminals, the bond wires, the semiconductor device and the resin molding are included in the thickness of the outer terminals. | 11-04-2010 |
| 20100213612 | THROUGH-SILICON VIA FORMED WITH A POST PASSIVATION INTERCONNECT STRUCTURE - An integrated circuit structure includes a semiconductor substrate, a through-silicon via (TSV) extending into the semiconductor substrate, a pad formed over the semiconductor substrate and spaced apart from the TSV, and an interconnect structure formed over the semiconductor substrate and electrically connecting the TSV and the pad. The interconnect structure includes an upper portion formed on the pad and a lower portion adjacent to the pad, and the upper portion extends to electrically connect the TSV. | 08-26-2010 |
| 20100213614 | Methods for Passivating Metallic Interconnects - One or more embodiments of the present invention relates to a method for passivating metallic interconnects, said method including: forming a metallic conductor embedded in at least one surrounding dielectric layer, said metallic conductor including a metal or alloy chosen from a group consisting of Cu, Ag, and alloys including one or more of these metals, said metallic conductor and said at least one surrounding dielectric layer having top surfaces; and forming a capping passivation film directly on the top surface of the metallic conductor, but not over the top surface of the at least one surrounding dielectric layer, wherein said capping passivation film including one or more materials selected from the group consisting of copper sulfide, silver sulfide, copper selenide, silver selenide, copper telluride, and silver telluride, wherein the copper sulfide refers to CuS | 08-26-2010 |
| 20120139117 | Dense Seed Layer and Method of Formation - A semiconductor device includes a workpiece and a first material layer disposed over the workpiece. The first material layer has a first number of atoms at a surface. A seed layer is disposed over the first material layer. The seed layer includes a chemisorbed monolayer of a second number of atoms at the surface having a surface coverage of at least 0.5 such that the ratio of the number of first atoms at the surface to the number of second atoms at the surface is no more than 2:1. The second atoms of the seed layer include oxygen or nitrogen. | 06-07-2012 |
| 20100140803 | SEMICONDUCTOR ELEMENT, METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT, MULTI-LAYER PRINTED CIRCUIT BOARD, AND METHOD OF MANUFACTURING MULTI-LAYER PRINTED CIRCUIT BOARD - A method of manufacturing a semiconductor device having a transition layer, including (a) forming a wiring and a die pad on a wafer, (b) forming a thin film layer on an entire surface of the wafer obtained in the step (a), (c) forming a resist layer on the thin film layer, and forming a thickening layer on a resist layer unformed section, (d) peeling the resist layer, (e) removing the thin film layer by etching, and (f) dividing the wafer to thereby form semiconductor devices. | 06-10-2010 |
| 20110233783 | SUBSTRATE ARRANGEMENT - In an embodiment, a substrate arrangement is provided. The substrate arrangement may include a semiconductor substrate including a first contact portion and a second contact portion on a first surface of the semiconductor substrate, wherein the semiconductor substrate is arranged such that the first contact portion and the second contact portion face each other. The substrate arrangement may further include an electrical connector configured to connect the first contact portion and the second contact portion. | 09-29-2011 |
| 20100252930 | Method for Improving Performance of Etch Stop Layer - A method of forming an interconnect structure includes providing a dielectric layer; forming a metal line in the dielectric layer; and forming a composite etch stop layer (ESL), which includes forming a lower ESL over the metal line and the dielectric layer; and forming an upper ESL over the lower ESL. The upper ESL and the lower ESL have different compositions. The step of forming the lower ESL and the step of forming the upper ESL are in-situ performed. | 10-07-2010 |
| 20090039516 | Power semiconductor component with metal contact layer and production method therefor - A power semiconductor component having a basic body and at least one contact area. At least one first thin metallic layer of a first material is arranged on the contact area. A second metallic layer—thicker than the first—of a second material is arranged on the first material by a pressure sintering connection of said material. The associated method has the following steps: producing a plurality of power semiconductor components in a wafer; applying at least one first thin metallic layer on at least one contact area of a respective power semiconductor component; arranging a pasty layer, composed of the second material and a solvent, on at least one of the first metallic layers for each power semiconductor component; pressurizing the pasty layer; and singulating the semiconductor components. | 02-12-2009 |
| 20090072407 | THERMO-COMPRESSION BONDED ELECTRICAL INTERCONNECT STRUCTURE AND METHOD - An electrical structure and method for forming. The electrical structure includes a first substrate comprising a first electrically conductive pad, a second substrate comprising a second electrically conductive pad, and an interconnect structure electrically and mechanically connecting the first electrically conductive pad to the second electrically conductive pad. The interconnect structure comprises a non-solder metallic core structure and a first solder structure. The first solder structure electrically and mechanically connects a first portion of the non-solder metallic core structure to the first electrically conductive pad. A second portion of the non-solder metallic core structure is thermo-compression bonded to the second electrically conductive pad. | 03-19-2009 |
| 20090108455 | INTEGRATED CIRCUIT AND PROCESS FOR FABRICATING THEREOF - A process for fabricating an Integrated Circuit (IC) and the IC formed thereby is disclosed. The process comprises providing a substrate. The process further comprises forming a plurality of longitudinal trenches in the substrate and depositing a layer of a first conductive material on at least one longitudinal trench of the plurality of longitudinal trenches. A first layer of a second conductive material is deposited on the layer of the first conductive material. Thereafter, the process includes depositing a second layer of the second conductive material on the first layer of the second conductive material. The second layer of the second conductive material at least partially fills the at least one longitudinal trench. The first conductive material is selected such that a reduction potential of the first conductive material is less than a reduction potential of the second conductive material. | 04-30-2009 |
| 20100133694 | METAL INTERCONNECT AND IC CHIP INCLUDING METAL INTERCONNECT - A metal interconnect and an IC chip including the metal interconnect are disclosed. One embodiment of the method may include providing an integrated circuit (IC) chip up to and including a middle of line (MOL) layer, the MOL layer including a contact positioned within a first dielectric; recessing the first dielectric such that the contact extends beyond an upper surface of the first dielectric; forming a second dielectric over the first dielectric such that the second dielectric surrounds at least a portion of the contact, the second dielectric having a lower dielectric constant than the first dielectric; forming a planarizing layer over the second dielectric; forming an opening through the planarizing layer and into the second dielectric to the contact; and forming a metal in the opening to form the metal interconnect. | 06-03-2010 |
| 20100133693 | Semiconductor Package Leads Having Grooved Contact Areas - A packaged semiconductor device ( | 06-03-2010 |
| 20110024910 | METALLURGY FOR COPPER PLATED WAFERS - Improved protective metallization arrangements are described that are particularly useful in bumped copper-top type semiconductor chips. In one aspect of the invention, the semiconductor device includes integrated circuits and has a top wafer fabrication passivation layer. A plurality of I/O pads are exposed through contact pad openings formed in the top wafer fabrication passivation layer. A patterned copper layer is formed over the top wafer fabrication passivation layer. The patterned copper layer is electrically coupled to the contact pads through the contact pad openings. A metallic barrier layer is provided between the contact pads and the patterned copper layer. A titanium metallization layer overlies at least portions of the patterned copper layer and preferably cooperates with the barrier layer to envelop the copper layer in the regions of the contact pads. A first aluminum metallization layer overlies at least portions of the titanium metallization layer. An electrically insulating protective layer overlies the first aluminum metallization layer and the top wafer fabrication passivation layer. The protective layer is preferably formed from an organic material and includes a plurality of contact openings. Underbump metallization stacks are formed in the contact openings. Each underbump metallization stack is electrically connected to the first aluminum metallization layer through its associated contact opening in the protective layer. Solder bumps are preferably then adhered to the underbump metallization stacks. | 02-03-2011 |
| 20110018135 | METHOD OF ELECTRICALLY CONNECTING A WIRE TO A PAD OF AN INTEGRATED CIRCUIT CHIP AND ELECTRONIC DEVICE - A wire is electrically connected to an electrical bonding pad of an integrated circuit chip and electronic device through an intermediate electrical interconnect block that is interposed between the electrical bonding pad and one end of the electrical lead wire. | 01-27-2011 |
| 20080315423 | SEMICONDUCTOR DEVICE - A semiconductor device includes a carrier, a chip including a first face having a contact area, where the chip is attached to the carrier such that the contact area faces away from the carrier, a copper connector configured for attachment to the contact area, and a solder material configured to couple the copper connector to the contact area. | 12-25-2008 |
| 20110042815 | SEMICONDUCTOR DEVICE AND ON-VEHICLE AC GENERATOR - An object of the present invention is to provide, at low costs, an environmental friendly bonding material for a semiconductor, having sustained bonding reliability even when used at a temperature as high as 200° C. or higher for a long period of time, the semiconductor device having a semiconductor element, a supporting electrode body bonded to a first face of the semiconductor element via a first bonding member, and a lead electrode body bonded to a second face of the semiconductor element supported by the supporting electrode body via a second bonding member, the semiconductor device having a Ni-based plating layer and an intermetallic compound layer containing at least one of Cu | 02-24-2011 |
| 20100164113 | METHOD FOR FORMING COPPER WIRING IN SEMICONDUCTOR DEVICE - A method for forming copper wirings in a semiconductor device may include depositing a lower insulating film over a semiconductor substrate; forming vias in the lower insulating film; depositing tungsten over the entire surface of upper portion of the lower insulating film so that the vias are gap-filled with the tungsten; forming tungsten plugs by performing a tungsten chemical mechanical polishing process to remove excess tungsten deposited over the upper portion of the lower insulating film; removing the tungsten remaining over the upper portion of the lower insulating film by performing a tungsten etchback process; depositing an upper insulating film over the upper portion of the lower insulating film; exposing upper portions of the tungsten plugs by forming trenches on the upper insulating film; depositing copper over the entire surface of the upper insulating film so that the trenches are gap-filled with the copper; and planarizing the copper over the upper portion of the trenches. | 07-01-2010 |
| 20110079909 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A generation of a void in a recessed section is inhibited. A method for manufacturing a semiconductor device includes: an operation of forming recessed sections in an insulating film, which is formed on a semiconductor substrate; an operation of forming a seed film in the recessed section; an operation of forming a cover metal film in the recessed section; an operation of selectively removing the cover metal film to expose the seed film over the bottom section of the recessed section; and an operation to carrying out a growth of a plated film to fill the recessed section by utilizing the seed film exposed in the bottom section of the recessed section as a seed. | 04-07-2011 |
| 20090212437 | SEMICONDUCTOR DEVICE - In a semiconductor device having a Low-k film as an interlayer insulator, peeling of the interlayer insulator in a thermal cycle test is prevented, thereby providing a highly reliable semiconductor device. In a semiconductor device having a structure in which interlayer insulators in which buried wires each having a main electric conductive layer made of copper are formed and cap insulators of the buried wires are stacked, the cap insulator having a relatively high Young's modulus and contacting by its upper surface with the interlayer insulator made of a Low-k film having a relatively low Young's modulus is formed so as not to be provided in an edge portion of the semiconductor device. | 08-27-2009 |
| 20090218696 | SEMICONDUCTOR DEVICE INCLUDING A PADDING UNIT - A semiconductor device includes bit lines formed over a substrate and a padding unit formed over the bit lines. The padding unit includes stacked padding layers. A lower padding layer is formed between the bit lines and an upper padding layer. The upper layer as a slit formed therein. The lower padding layer prevents damage to the bit lines due to plasma gas entering through the slit. | 09-03-2009 |
| 20120146226 | INTEGRATED CIRCUIT CHIP AND FABRICATION METHOD - An integrated circuit chip includes a substrate die and integrated circuits and a layer incorporating a front electrical interconnect network formed on a front face of the substrate die. A local electrical connection via made of an electrically conductive material is formed in a hole of the substrate die. The via is linked to a connection portion of the electrical interconnect network. An electrical connection pillar made of an electrically conductive material is formed on a rear part of the electrical connection via. A local external protection layer at least partly covers the electrical connection via and the electrical connection pillar. | 06-14-2012 |
| 20120199977 | SEMICONDUCTOR DEVICE - To prevent generation of cracks in an insulating film provided under a bonding pad, a semiconductor device includes a three-layered bonding pad, and the three-layered bonding pad includes a first metal film, a second metal film, and a third metal film, in which the second metal film has a Young's modulus higher than a Young's modulus of the first metal film and a Young's modulus of the third metal film. | 08-09-2012 |
| 20110074034 | METHOD OF MANUFACTURING A SEMICONDUCTOR COMPONENT AND STRUCTURE - A semiconductor component and methods for manufacturing the semiconductor component that includes a double exposure of a layer of photoresist or the use of multiple layers of photoresist. A metallization structure is formed on a layer of electrically conductive material that is disposed on a substrate and a layer of photoresist is formed on the metallization structure. The layer of photoresist is exposed to light and developed to remove a portion of the photoresist layer, thereby forming an opening. Then, a larger portion of the photoresist layer is exposed to light and an electrically conductive interconnect is formed in the opening. The larger portion of the photoresist layer that was exposed to light is developed to expose edges of the electrically conductive interconnect and portions of the metallization structure. A protection layer is formed on the top and edges of the electrically conductive interconnect and on the exposed portions of the metallization structure. | 03-31-2011 |
| 20090026625 | ADHESION ENHANCEMENT FOR METAL/DIELECTRIC INTERFACE - An interconnect structure and method of fabricating the same in which the adhesion between a chemically etched dielectric material and a noble metal liner is improved are provided. In accordance with the present invention, a chemically etching dielectric material is subjected to a treatment step which modified the chemical nature of the dielectric material such that the treated surfaces become hydrophobic. The treatment step is performed prior to deposition of the noble metal liner and aides in improving the adhesion between the chemically etched dielectric material and the noble metal liner. | 01-29-2009 |
| 20090026624 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING METAL LINE THEREOF - A method for manufacturing a metal line of a semiconductor device includes forming an interlayer dielectric layer over the whole surface of a semiconductor substrate including a first metal line. A plurality of trenches are formed in trench areas each having a predetermined depth from a surface thereof by selectively removing portions of the interlayer dielectric layer. A first metal film is formed in the plurality of trenches. A first photoresist pattern is formed over the interlayer dielectric layer exposing contact areas and the first metal line. Via holes are formed in the contact areas by etching the interlayer dielectric layer using the first photoresist pattern and the first metal film as masks. A second metal film is formed in the via holes. Accordingly, misalignment of masks caused during formation of the metal line can be restrained, thereby minimizing the defect rate and improving yield. | 01-29-2009 |
| 20090001591 | REDUCING RESISTIVITY IN METAL INTERCONNECTS BY COMPRESSIVE STRAINING - Techniques for reducing resistivity in metal interconnects by compressive straining are generally described. In one example, an apparatus includes a dielectric substrate, a thin film of metal coupled with the dielectric substrate, and an interconnect metal coupled to the thin film of metal, the thin film of metal having a lattice parameter that is smaller than the lattice parameter of the interconnect metal to compressively strain the interconnect metal. | 01-01-2009 |
| 20090309226 | Interconnect Structure for Electromigration Enhancement - An interconnect structure having enhanced electromigration resistance is provided in which a lower portion of a via opening includes a multi-layered liner. The multi-layered liner includes, from a patterned surface of a dielectric material outwards, a diffusion barrier, a multi-material layer and a metal-containing hard mask. The multi-material layer includes a first material layer comprised of residue from an underlying dielectric capping layer, and a second material layer comprised of residue from an underlying metallic capping layer. The present invention also provides a method of fabricating such an interconnect structure which includes the multi-layered liner within a lower portion of a via opening formed within a dielectric material. | 12-17-2009 |
| 20100244267 | INTERCONNECT STRUCTURE FOR A SEMICONDUCTOR DEVICE AND RELATED METHOD OF MANUFACTURE - A semiconductor device having a device substrate is provided. The semiconductor device comprises an electrically-conductive pad formed overlying the device substrate, an electrically-conductive platform formed overlying the electrically-conductive pad and enclosing a cavity, the electrically-conductive platform having a perimeter portion extending away from the electrically-conductive pad and a capping portion atop the perimeter portion, and a cushioning material disposed in the cavity. | 09-30-2010 |
| 20080230914 | SEMICONDUCTOR ELEMENT, METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT, MULTI-LAYER PRINTED CIRCUIT BOARD, AND METHOD OF MANUFACTURING MULTI-LAYER PRINTED CIRCUIT BOARD - A transition layer | 09-25-2008 |
| 20120032333 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A first insulating film is formed on a semiconductor substrate, an interconnect groove is formed in the first insulating film, the inside of the interconnect groove is filled with a metal film, thereby forming a first interconnect. Then, a protective film is formed on the first insulating film and the first interconnect, and the surface of the protective film is exposed to reactive gas, thereby forming a reaction layer on an interface between the first interconnect and the protective film. | 02-09-2012 |
| 20080203575 | Integrated Circuit with Re-Route Layer and Stacked Die Assembly - An apparatus and a method of manufacture for a stacked-die assembly. A first die is placed on a substrate such that the backside of the die, i.e., the side opposite the side with the bond pads, is coupled to the substrate, preferably by an adhesive. Wire leads electrically couple the bond pads of the first die to contacts on the substrate. A second die is placed on the first die, and wire leads electrically couple the bond pads of the second die to contacts on the substrate. Preferably, a spacer is placed between the first die and the second die. Additional dies may be stacked on the second die. | 08-28-2008 |
| 20100148368 | SEMICONDUCTOR DEVICE - A semiconductor device where an outside connection terminal of a semiconductor element and an electrode of a wiring board are connected to each other via a conductive adhesive, the conductive adhesive includes a first conductive adhesive; and a second conductive adhesive covering the first conductive adhesive; wherein the first conductive adhesive contains a conductive filler including silver (Ag); and the second conductive adhesive contains a conductive filler including a metal selected from a group consisting of tin (Sn), zinc (Zn), cobalt (Co), iron (Fe), palladium (Pd), and platinum (Pt). | 06-17-2010 |
| 20110095432 | ELECTRONIC COMPONENT AND SEMICONDUCTOR DEVICE, METHOD OF MAKING THE SAME AND METHOD OF MOUNTING THE SAME, CIRCUIT BOARD AND ELECTRONIC INSTRUMENT - A semiconductor device with its package size close to its chip size has a stress absorbing layer, allows a patterned flexible substrate to be omitted, and allows a plurality of components to be fabricated simultaneously. There is: a step of forming electrodes on a wafer; a step of providing a resin later as a stress relieving layer on the wafer, avoiding the electrodes; a step of forming a chromium layer as wiring from electrodes over the resin layer; and step of forming solder balls as external electrodes on the chromium layer over the resin layer; and a step of cutting the wafer into individual semiconductor chips; in the steps of forming the chromium layer and solder balls, metal thin film fabrication technology is used during the wafer process. | 04-28-2011 |
| 20110095431 | THERMO-COMPRESSION BONDED ELECTRICAL INTERCONNECT STRUCTURE - An electrical structure and method for forming. The electrical structure includes a first substrate comprising a first electrically conductive pad, a second substrate comprising a second electrically conductive pad, and an interconnect structure electrically and mechanically connecting the first electrically conductive pad to the second electrically conductive pad. The interconnect structure comprises a non-solder metallic core structure and a first solder structure. The first solder structure electrically and mechanically connects a first portion of the non-solder metallic core structure to the first electrically conductive pad. A second portion of the non-solder metallic core structure is thermo-compression bonded to the second electrically conductive pad. | 04-28-2011 |
| 20110260324 | ELECTRONIC DEVICE PACKAGE AND METHOD OF MANUFACTURE - A method of manufacturing an electronic device package. Coating a first side of a metallic layer with a first insulating layer and coating a second opposite side of the metallic layer with a second insulating layer. Patterning the first insulating layer to expose bonding locations on the first side of the metallic layer, and patterning the second insulating layer such that remaining portions of the second insulating layer on the second opposite side are located directly opposite to the bonding locations on the first side. Selectively removing portions of the metallic layer that are not covered by the remaining portions of the second insulating layer on the second opposite side to form separated coplanar metallic layers. The separated coplanar metallic layers include the bonding locations. Selectively removing remaining portions of the second insulating layer thereby exposing second bonding locations on the second opposite sides of the separated coplanar metallic layers. | 10-27-2011 |
| 20100244266 | METALLIC BONDING STRUCTURE FOR COPPER AND SOLDER - The present invention discloses a metallic bonding structure for copper and solder, which applies to connect at least one electronic element. The metallic bonding structure comprises at least one copper-based member and at least one zinc bonding member. The copper-based members are arranged on the electronic element through at least one solder member. The zinc bonding members are arranged between the copper-based members and the solder members. The solder members are tin-based solder bumps. | 09-30-2010 |
| 20080217783 | SEMICONDUCTOR DEVICE - A semiconductor device is provided having an insulating layer structure with a low dielectric constant and excellent barrier properties against copper. This semiconductor device has a copper wiring layer and includes at least one layered structure having a copper wiring line, an amorphous carbon film with a density of 2.4 g/cm | 09-11-2008 |
| 20080217784 | SUBSTRATE WITH FEEDTHROUGH AND METHOD FOR PRODUCING THE SAME - A substrate has at least one feedthrough with at least one channel from a first main surface of the substrate to a second main surface of the substrate. The at least one channel is closed off with a first material. The at least one closed-off channel is filled with an electrically conductive second material. | 09-11-2008 |
| 20110215476 | METHOD FOR FABRICATING CIRCUIT COMPONENT - A cylindrical bonding structure and its method of manufacture. The cylindrical bonding structure is formed over the bonding pad of a silicon chip and the chip is flipped over to connect with a substrate board in the process of forming a flip-chip package. The cylindrical bonding structure mainly includes a conductive pillar and a solder cap. The conductive pillar is formed over the bonding pad of the silicon chip and the solder cap is attached to the upper end of the conductive pillar. The solder cap has a melting point lower than the conductive pillar. The solder cap can be configured into a cylindrical, spherical or hemispherical shape. To fabricate the cylindrical bonding structure, a patterned mask layer having a plurality of openings that correspond in position to the bonding pads on the wafer is formed over a silicon wafer. Conductive material is deposited into the openings to form conductive pillars and finally a solder cap is attached to the end of each conductive pillar. | 09-08-2011 |
| 20090174077 | Method for Structuring a Substrate - A method and intermediate product for structuring a substrate is disclosed. At least one seed layer including a first metal compound is positioned at least partially on the substrate. The seed layer is subjected to a solution comprising ions of a second metal compound. The ions are reduced in the solution by reduction means so that the second metal compound is deposited as mask layer on the seed layer. | 07-09-2009 |
| 20110304049 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME - To suppress peeling of an Au pad for external coupling provided in a rewiring containing Cu as a main component. | 12-15-2011 |
| 20120306086 | SEMICONDUCTOR DEVICE AND WIRING SUBSTRATE - A semiconductor device according to an embodiment includes an insulating substrate, a wiring layer formed on a first main surface of the insulating substrate, and a semiconductor element mounted on the wiring layer. In this semiconductor device, the wiring layer includes a first copper-containing material containing copper and a metal having the thermal expansion coefficient smaller than that of copper and the thermal expansion coefficient of the first copper-containing material is smaller than that of copper. | 12-06-2012 |
| 20120306085 | PROTECTIVE LAYER FOR PROTECTING TSV TIPS DURING THERMO-COMPRESSIVE BONDING - A method of protecting through substrate via (TSV) die from bonding damage includes providing a substrate including a plurality of TSV die having a topside including active circuitry, a bottomside, and a plurality of TSVs that include an inner metal core that reaches from the topside to protruding TSV tips that extend out from the bottomside. A protective layer is formed on or applied to the bottomside of the TSV die including between and over the protruding TSV tips. The TSV die is bonded with its topside down onto a workpiece having a workpiece surface and its bottomside up and in contact with a bond head. The protective layer reduces damage from the bonding process including warpage of the TSV die by preventing the bond head from making direct contact to the protruding TSV tips. | 12-06-2012 |
| 20120168951 | PRINTED CIRCUIT BOARD AND SEMICONDUCTOR PACKAGE COMPRISING THE SAME - Provided are a printed circuit board (PCB) and a semiconductor package including the same. The PCB includes a core layer having a stacked structure including at least a first layer made of a first material that has a first coefficient of thermal expansion (CTE) and a second layer made of a second material that has a second CTE different from the first CTE, an upper wiring layer disposed on a first surface of the core layer, and a lower wiring layer disposed on a second surface of the core layer opposite the first surface. | 07-05-2012 |
| 20100327450 | SEMICONDUCTOR DEVICE BONDING WIRE AND WIRE BONDING METHOD - It is an object of the present invention to provide a copper-based bonding wire whose material cost is low, having excellent ball bondability, reliability in a heat cycle test or reflow test, and storage life, enabling an application to thinning of a wire used for fine pitch connection. The bonding wire includes a core material having copper as a main component and an outer layer which is provided on the core material and contains a metal M and copper, in which the metal M differs from the core material in one or both of components and composition. The outer layer is 0.021 to 0.12 μm in thickness. | 12-30-2010 |
| 20110156259 | METAL-TO-CONTACT OVERLAY STRUCTURES AND METHODS OF MANUFACTURING THE SAME - The present invention provides a semiconductor device with a metal-to-contact overlay structure. The semiconductor device includes a substrate, a dielectric layer on the substrate, a contact coupled to the substrate in the dielectric layer, a first conductive region on the contact in the dielectric layer, a dielectric sidewall on the contact in the dielectric layer, the dielectric sidewall surrounding the first conductive region, and a second conductive region on the first conductive region on the dielectric layer. | 06-30-2011 |
| 20090108456 | Solder-top Enhanced Semiconductor Device and Method for Low Parasitic Impedance Packaging - A solder-top enhanced semiconductor device is proposed for packaging. The solder-top device includes a device die with a top metal layer patterned into contact zones and contact enhancement zones. At least one contact zone is electrically connected to at least one contact enhancement zone. Atop each contact enhancement zone is a solder layer for an increased composite thickness thus lowered parasitic impedance. Where the top metal material can not form a uniform good electrical bond with the solder material, the device die further includes an intermediary layer sandwiched between and forming a uniform electrical bond with the top metal layer and the solder layer. A method for making the solder-top device includes:
| 04-30-2009 |
| 20120013011 | Conductive Lines and Pads and Method of Manufacturing Thereof - A semiconductor device and method are disclosed. The semiconductor device includes a substrate having a first region and a second region and an insulating layer arranged on the substrate. A first conductive layer is arranged in or on insulating layer in the first region and a second conductive layer is arranged in or on the insulating layer in the second region. The first conductive layer comprises a first conductive material and the second conductive layer comprises a second conductive material wherein the first conductive material is different than the second conductive material. A metal layer is arranged on the first conductive layer. | 01-19-2012 |
| 20120205809 | DEVICES CONTAINING SILVER COMPOSITIONS DEPOSITED BY MICRO-DEPOSITION DIRECT WRITING SILVER CONDUCTOR LINES - Embodiments of the invention relate to a silicon semiconductor device, and a conductive thick film composition for use in a solar cell device. | 08-16-2012 |
| 20120025383 | INTEGRATED CIRCUIT STRUCTURE INCORPORATING A CONDUCTOR LAYER WITH BOTH TOP SURFACE AND SIDEWALL PASSIVATION AND A METHOD OF FORMING THE INTEGRATED CIRCUIT STRUCTURE - Disclosed are embodiments of a structure having a metal layer with top surface and sidewall passivation and a method of forming the structure. In one embodiment, a metal layer is electroplated onto a portion of a seed layer at the bottom of a trench. Then, the sidewalls of the metal layer are exposed and, for passivation, a second metal layer is electroplated onto the top surface and sidewalls of the metal layer. In another embodiment, a trench is formed in a dielectric layer. A seed layer is formed over the dielectric layer, lining the trench. A metal layer is electroplated onto the portion of the seed layer within the trench and a second metal layer is electroplated onto the top surface of the metal layer. Thus, in this case, passivation of the top surface and sidewalls of the metal layer is provided by the second metal layer and the dielectric layer, respectively. | 02-02-2012 |
| 20120025384 | ELECTRONIC DEVICE AND METHOD FOR PRODUCTION - An electronic device and method for production is disclosed. One embodiment provides an integrated component having a first layer which is composed of copper or a copper alloy or which contains copper or a copper alloy, and having an electrically conductive second layer, whose material differs from the material of the first layer, and a connection apparatus which is arranged on the first layer and on the second layer. | 02-02-2012 |
| 20120153486 | SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR - An object of the invention is to provide a method for producing a conductive member having low electrical resistance, and the conductive member is obtained using a low-cost stable conductive material composition that does not contain an adhesive. In the semiconductor device, silver arranged on a semiconductor element and silver arranged on a base are bonded. No void is present or a small void, if any, is present at an interface between the semiconductor element and the silver arranged on the semiconductor element, no void is present or a small void, if any, is present at an interface between the base and the silver arranged on the base, and one or more silver abnormal growth grains and one or more voids are present in a bonded interface between the silver arranged on the semiconductor element and the silver arranged on the base. | 06-21-2012 |
| 20120153484 | METHODS FOR DIRECTLY BONDING TOGETHER SEMICONDUCTOR STRUCTURES, AND BONDED SEMICONDUCTOR STRUCTURES FORMED USING SUCH METHODS - Embodiments of the present invention include methods of directly bonding together semiconductor structures. In some embodiments, a cap layer may be provided at an interface between directly bonded metal features of the semiconductor structures. In some embodiments, impurities are provided within the directly bonded metal features of the semiconductor structures. Bonded semiconductor structures are formed using such methods. | 06-21-2012 |
| 20120153485 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME - A device may includes a first conductive film, a first insulating film, a second conductive film, a third conductive film, and a fourth conductive film. The first conductive film includes copper. The first insulating film is disposed over the first conductive film. The first insulating film has a first contact hole. The contact hole reaches a first surface of the first conductive film. The second conductive film includes aluminum. The second conductive film is disposed in the first contact hole. The third conductive film includes titanium nitride. The third conductive film is disposed in the contact hole. The third conductive film covers a part of the first surface of the first conductive film. The fourth conductive film is free of titanium nitride. The fourth conductive film is disposed between the second and third conductive films. | 06-21-2012 |
| 20110089566 | WIRE BONDING STRUCTURE AND METHOD THAT ELIMINATES SPECIAL WIRE BONDABLE FINISH AND REDUCES BONDING PITCH ON SUBSTRATES - A semiconductor package has a semiconductor die disposed on a substrate. A bond wire is connected between a first bonding site on the semiconductor die and a second bonding site on the substrate. The first bonding site is a die bond pad; the second bonding site is a stitch bond. The second bonding site has a bond finger formed on the substrate, a conductive layer in direct physical contact with the bond finger, and a bond stud coupled to the bond wire and in direct physical contact with the conductive layer to conduct an electrical signal from the semiconductor die to the bond finger. The bond finger is made of copper. The conductive layer is made of copper or gold. The bond stud is made of gold and overlies a side portion and top portion of the copper layer. | 04-21-2011 |
| 20120313246 | SEMICONDUCTOR APPARATUS - The disclosure relates to integrated circuit fabrication, and more particularly to a semiconductor apparatus with a metallic alloy. An exemplary structure for an apparatus comprises a first silicon substrate; a second silicon substrate; and a contact connecting each of the first and second substrates, wherein the contact comprises a Ge layer adjacent to the first silicon substrate, a Cu layer adjacent to the second silicon substrate, and a metallic alloy between the Ge layer and Cu layer. | 12-13-2012 |
| 20120248614 | METHODS FOR FORMING A SEMICONDUCTOR STRUCTURE AND RELATED STRUCTURES - Methods of forming a Ni material on a bond pad are disclosed. The methods include forming a dielectric material over a bond pad, forming an opening within the dielectric material to expose the bond pad, curing the dielectric material to form a surface of the dielectric material having a steep curvilinear profile, and forming a nickel material over the at least one bond pad. The dielectric material having a steep curvilinear profile may be formed by altering at least one of a curing process of the dielectric material and a thickness of the dielectric material. The dielectric material may be used to form a relatively thick Ni material on bond pads smaller than about 50 μm. Semiconductor structures formed by such methods are also disclosed. | 10-04-2012 |
| 20120168953 | STRUCTURE WITH SELF ALIGNED RESIST LAYER ON AN INTERCONNECT SURFACE AND METHOD OF MAKING SAME - A structure is provided with a self-aligned resist layer on a surface of metal interconnects for use in forming air gaps in an insulator material and method of fabricating the same. The non-lithographic method includes applying a resist on a structure comprising at least one metal interconnect formed in an insulator material. The method further includes blanket-exposing the resist to energy and developing the resist to expose surfaces of the insulator material while protecting the metal interconnects. The method further includes forming air gaps in the insulator material by an etching process, while the metal interconnects remain protected by the resist. | 07-05-2012 |
| 20120168952 | SEMICONDUCTOR DEVICE HAVING A COPPER PLUG - Disclosed is a process of making a semiconductor device wherein an insulation layer has a copper plug in contact with the last wiring layer of the device. There may also be a barrier layer separating the copper plug from the insulation layer. There may also be a cap layer over the copper plug to protect it from oxidation. There may also be a dielectric layer over the cap layer. | 07-05-2012 |
| 20120168950 | DIE STRUCTURE, MANUFACTURING METHOD AND SUBSTRATE THEREOF - A die structure, a manufacturing method and a substrate, wherein the die structure is constituted by a chip on wafer (COW) and the substrate, and the substrate is formed by stacking and then cutting a plurality of thermal and electrical conductive poles and a plurality of insulating material layers. Moreover, the fabricating of the die structure comprises a plurality of COWs carried on a carrier board is bonded on the substrate, the plurality of COWs are in contact with the plurality of thermal and electrical conductive poles on the substrate, and then the carrier board is removed. After that, a phosphor plate is adhered on the plurality of COWs so as to form a stacked structure. Thereafter, the stacked structure is cut, thus forming a plurality of die structures having at least one COW. | 07-05-2012 |
| 20100052175 | REDUCING LEAKAGE AND DIELECTRIC BREAKDOWN IN DIELECTRIC MATERIALS OF METALLIZATION SYSTEMS OF SEMICONDUCTOR DEVICES BY FORMING RECESSES - By recessing metal lines and/or the dielectric material of a metallization layer of sophisticated semiconductor devices, the time to dielectric breakdown may be increased due to reducing electrical fields and diffusion paths at the top of the metal lines. | 03-04-2010 |
| 20090096107 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE - In a semiconductor integrated circuit device, an element forming region and a metal wiring layer are covered with a passivation layer on a semiconductor substrate which is cut out in a rectangular shape. At four corners of the device, the passivation layer is provided with corner non-wiring regions formed directly on the semiconductor substrate. Thus, crack generation on the passivation layer due to heat stress can be suppressed. | 04-16-2009 |
| 20120228774 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A barrier insulating film is constituted from a first SiCN film formed with a tetramethylsilane gas flow rate lower than usual, a second SiCN film formed over the first SiCN film and formed with a usual tetramethylsilane gas flow rate, and a SiCO film formed over the second SiCN film. | 09-13-2012 |
| 20100314769 | FOR REDUCING ELECTROMIGRATION EFFECT IN AN INTEGRATED CIRCUIT - An integrated circuit comprising one or more dielectric layers the or each dielectric layer being provided with one or more interconnects wherein the interconnect comprises metallic atoms moving from a first region of the interconnect to a second region of the interconnect when a current flows, characterised in that the interconnect comprises a donor zone in the first region of the interconnect for providing metallic atoms in order to compensate for movement of atoms from the first region and a receptor zone at the second region of the interconnect for receiving metallic atoms in order to compensate for movement of atoms to the second region. | 12-16-2010 |
| 20100314768 | INTERCONNECT STRUCTURE FABRICATED WITHOUT DRY PLASMA ETCH PROCESSING - An interconnect structure within a microelectronic structure and a method for fabricating the interconnect structure within the microelectronic structure use a developable bottom anti-reflective coating layer and at least one imageable inter-level dielectric layer located thereupon over a substrate that includes a base dielectric layer and a first conductor layer located and formed embedded within the base dielectric layer. Incident to use of the developable bottom anti-reflective coating layer and the at least one imageable inter-level dielectric layer, an aperture, such as but not limited to a dual damascene aperture, may be formed through the at least one imageable inter-level dielectric layer and the developable anti-reflective coating layer to expose a capping layer located and formed upon the first conductor layer, absent use of a dry plasma etch method when forming the interconnect structure within the microelectronic structure. | 12-16-2010 |
| 20100237505 | METAL-METAL BONDING OF COMPLIANT INTERCONNECT - Embodiments of the invention provide a first component with a compliant interconnect bonded to a second component with a land pad by a metal to metal bond. In some embodiments, the first component may be a microprocessor die and the second component a package substrate. | 09-23-2010 |
| 20120299187 | Aluminum Bond Pad With Trench Thinning for Fine Pitch Ultra-Thick Aluminum Products - Embodiments of an aluminum pad thinning in bond pad for fine pitch ultra-thick aluminum pad structures are provided herein. Embodiments include a conductive structure formed on a substrate. A first passivation layer is formed over the substrate and the conductive structure, the first passivation layer having an opening formed over the conductive structure. An ultra-thick conductive structure having a thinned trench region formed over the opening of the first passivation layer. The ultra-thick conductive structure is in contact with the conductive structure. A second passivation layer formed over the first passivation region and the ultra-thick conductive structure. The second passivation layer having an opening formed over the thinned trench region of the ultra-thick conductive structure. | 11-29-2012 |
| 20110006431 | METHOD FOR ALIGNING AND BONDING ELEMENTS AND A DEVICE COMPRISING ALIGNED AND BONDED ELEMENTS - The present invention is related to a method for aligning and bonding a first element ( | 01-13-2011 |
| 20120273954 | SEMICONDUCTOR DEVICE WITH PROTECTIVE MATERIAL AND METHOD FOR ENCAPSULATING - A semiconductor device and method for encapsulating the semiconductor device are provided. The method includes: forming a plurality of wire bonds on a surface of the semiconductor device by bonding each of a plurality of copper wires onto corresponding ones of a plurality of aluminum pads; applying a protective material around the plurality of wire bonds, the protective material having a first pH; and encapsulating at least a portion of the semiconductor device and the protective material with an encapsulating material having a second pH, wherein the first pH of the protective material is for neutralizing the second pH of the encapsulating material around the plurality of wire bonds. | 11-01-2012 |
| 20120273955 | SYSTEM COMPRISING A SEMICONDUCTOR DEVICE AND STRUCTURE - A system includes a semiconductor device. The semiconductor device includes a first semiconductor layer comprising first transistors, wherein the first transistors are interconnected by at least one metal layer comprising aluminum or copper. The second mono-crystallized semiconductor layer includes second transistors and is overlaying the at least one metal layer, wherein the second mono-crystallized semiconductor layer is less than 150 nm in thickness, and at least one of the second transistors is an N-type transistor and at least one of the second transistors is a P-type transistor. | 11-01-2012 |
| 20120273956 | SEMICONDUCTOR DEVICE HAVING GROOVE-SHAPED VIA-HOLE - The semiconductor device has insulating films | 11-01-2012 |
| 20120080797 | METAL WIRING STRUCTURES FOR UNIFORM CURRENT DENSITY IN C4 BALLS - In one embodiment, a sub-pad assembly of metal structures is located directly underneath a metal pad. The sub-pad assembly includes an upper level metal line structure abutting the metal pad, a lower level metal line structure located underneath the upper level metal line structure, and a set of metal vias that provide electrical connection between the lower level metal line structure located underneath the upper level metal line structure. In another embodiment, the reliability of a C4 ball is enhanced by employing a metal pad structure having a set of integrated metal vias that are segmented and distributed to facilitate uniform current density distribution within the C4 ball. The areal density of the cross-sectional area in the plurality of metal vias is higher at the center portion of the metal pad than at the peripheral portion of the planar portion of the metal pad. | 04-05-2012 |
| 20120080796 | DEVICE - According to one embodiment, a device includes an insulating layer with a first trench, a first interconnect layer in the first trench, the first interconnect layer including copper and includes a concave portion, and a first graphene sheet on an inner surface of the concave portion. | 04-05-2012 |
| 20120080795 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MAKING SAME - One or more embodiments relate to a method for forming a semiconductor structure, comprising: providing a workpiece; forming a dielectric barrier layer over the workpiece; forming an opening through the dielectric barrier layer; forming a seed layer over the dielectric barrier layer and within the dielectric barrier layer opening; and electroplating a first fill layer on the seed layer. | 04-05-2012 |
| 20130020709 | SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING THE SAME - A semiconductor package and a method of fabricating the same. The semiconductor package includes a carrier having a plurality bonding pads disposed on a surface thereof, a packaging layer formed on the surface of the carrier and having a plurality of openings corresponding to the bonding pads, a conductive material filled in the openings and electrically connected to the bonding pads, and an electronic component installed on the packaging layer and having a plurality of conductive pillars correspondingly received in the openings and electrically connected to the conductive material. The formation of the openings in the packaging layer can control the position and size of the conductive material to enable the overall height of the conductive structure to be level and to keep the electronic component from tilting. | 01-24-2013 |
| 20120091590 | Electroless Deposition of Platinum on Copper - Embodiments of the current invention describe a method of plating platinum selectively on a copper film using a self-initiated electroless process. In particular, platinum films are plated onto very thin copper films having a thickness of less than 300 angstroms. The electroless plating solution and the resulting structure are also described. This process has applications in the semiconductor processing of logic devices, memory devices, and photovoltaic devices. | 04-19-2012 |
| 20110309511 | METHOD FOR PRODUCING LOW-k FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME - Hydrophobicity of a low dielectric constant film comprising a porous silica film is improved by applying a raw material for forming a porous silica film onto a substrate, and performing vapor-phase transport treatment to expose the substrate to an atmosphere of organic amine vapor to which no water is added. Simultaneously, reduction in a dielectric constant, reduction in leakage current, and improvement in mechanical strength are attained by controlling a pore diameter in a predetermined range. | 12-22-2011 |
| 20120139116 | BUMPLESS BUILD-UP LAYER AND LAMINATED CORE HYBRID STRUCTURES AND METHODS OF ASSEMBLING SAME - A structure includes a hybrid substrate for supporting a semiconductive device that includes a bumpless build-up layer in which the semiconductive device is embedded and a laminated-core structure. The bumpless build-up layer and the laminated-core structure are rendered an integral apparatus by a reinforcement plating that connects to a plated through hole in the laminated-core structure and to a subsequent bond pad of the bumpless build-up layer structure. | 06-07-2012 |
| 20130009311 | SEMICONDUCTOR CARRIER, PACKAGE AND FABRICATION METHOD THEREOF - A semiconductor package includes: a first encapsulant having tapered through holes each having a wide top and a narrow bottom; tapered electrical contacts disposed in the tapered through holes; circuits disposed on a top surface of the first encapsulant and each having one end connecting one of the electrical contacts and the other end having a bonding pad disposed thereon such that the bonding pads are circumferentially arranged to define a die attach area on the top surface of the first encapsulant. As such, a semiconductor chip can be disposed on the top surface of the first encapsulant in the die attach area and electrically connected to the bonding pads through conductive elements, and further a second encapsulant encapsulates the semiconductor chip, the conductive elements, the circuits and the first encapsulant so as to prevent falling off of the electrical contacts and reduce the length of the conductive elements. | 01-10-2013 |
| 20130020710 | SEMICONDUCTOR SUBSTRATE, PACKAGE AND DEVICE AND MANUFACTURING METHODS THEREOF - A semiconductor structure and a manufacturing method of the same are provided. The semiconductor structure includes a carrier. The carrier has a first surface and a second surface opposite to the first surface. The carrier includes an inner core layer and an exterior clad layer, and the inner core layer is covered by the exterior clad layer. | 01-24-2013 |
| 20080251928 | Carbonization of metal caps - An integrated circuit structure includes a semiconductor substrate; a dielectric layer over the semiconductor substrate; a conductive wiring in the dielectric layer; and a metal carbide cap layer over the conductive wiring. | 10-16-2008 |
| 20080251927 | Electromigration-Resistant Flip-Chip Solder Joints - A semiconductor device contact structure practically eliminating the copper diffusion into the solder as well as the current crowding at the contact with the subsequent electromigration in the solder. A column-like electroplated copper stud ( | 10-16-2008 |
| 20100090344 | SEMICONDUCTOR DEVICE - A semiconductor device includes an insulating film formed on a semiconductor substrate, a contact wiring formed in the insulating film, a protective film formed on the contact wiring and the insulating film, an opening portion formed in the protective film, the contact wiring being exposed through the opening portion, and an electrode pad formed in the opening portion, the electrode pad being electrically connected to the contact wiring. A region where the contact wiring is not provided is present below the opening portion. | 04-15-2010 |
| 20080230913 | Stackable semiconductor device and fabrication method thereof - The invention provides a stackable semiconductor device and a fabrication method thereof, including providing a wafer having a plurality of dies mounted thereon, both the die and the wafer having an active surface and a non-active surface opposing one another respectively, wherein each die has a plurality of solder pads formed on the active surface thereof and a groove formed between adjacent solder pads to form a first metal layer therein that is electrically connected to the solder pads; subsequently thinning the non-active surface of the wafer to where the grooves are located to expose the first metal layer therefrom, and forming a second metal layer on the non-active surface of the wafer for electrically connecting with the first metal layer; and separating the dies to form a plurality of stackable semiconductor devices. Thereby, the first and second metal layers formed on the active surface and the non-active surface of the semiconductor device can be stacked and connected to constitute a multi-die stack structure, thereby increasing integration without increasing the area of the stacked dies. Further, the problems known in the prior art of poor electrical connection, complicated manufacturing process and increased cost as a result of using wire bonding and TSV can be avoided. | 09-25-2008 |
