Entries |
Document | Title | Date |
20080290291 | Charged Particle Beam Processing Apparatus - In view of the fact that in line processing, when processing is performed to a certain depth, the processing does not advance with the passage of a further processing time, a processing apparatus is provided which can appropriately control the depth of grooves in linear groove processing and perform the processing at high speed. A line width and line depth are calculated so as to minimize a processing time of processing on a line to a required depth and processing is performed using the width and line depth as set values of processing. Furthermore, processing is performed with the area in which the beam is actually irradiated superimposed on the scanned image of a focused ion beam and displayed on a screen. In the case of an ion beam inclined with respect to the sample surface, processing is also performed by displaying the area where the beam is actually irradiated by taking the inclination of the sample with respect to the beam into consideration. | 11-27-2008 |
20090140166 | TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION - Techniques for low-temperature ion implantation are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for low-temperature ion implantation. The apparatus may comprise a wafer support mechanism to hold a wafer during ion implantation and to facilitate movement of the wafer in at least one dimension. The apparatus may also comprise a cooling mechanism coupled to the wafer support mechanism. The cooling mechanism may comprise a refrigeration unit, a closed loop of rigid pipes to circulate at least one coolant from the refrigeration unit to the wafer support mechanism, and one or more rotary bearings to couple the rigid pipes to accommodate the movement of the wafer in the at least one dimension. | 06-04-2009 |
20090218511 | Stage apparatus and exposure apparatus - The present invention provides a stage apparatus wherein an object is disposed in an atmosphere with a gas pressure lower than atmospheric pressure, and the object can be driven with high accuracy. The stage apparatus that drives a reticle comprises: a vacuum chamber, which forms a space and has an opening; an integrated coarse and fine motion table, which has an electrostatic chuck that holds the object, that, when driven, moves the electrostatic chuck inside the space; a counter mass, which is disposed so that it covers the opening, that is capable of moving because of the reaction force produced when the integrated coarse and fine motion table is driven; and a vacuum cover, which forms a space that houses the counter mass; wherein the space and the space are set to prescribed gas pressures. | 09-03-2009 |
20100090125 | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND LASER IRRADIATION APPARATUS - According to the present invention, oxygen and nitrogen are effectively prevented from mixing into the semiconductor film by doping Ar or the like in the semiconductor film in advance, and by irradiating the laser light in the atmosphere of Ar or the like. Therefore, the variation of the impurity concentration due to the fluctuation of the energy density can be suppressed and the variation of the mobility of the semiconductor film can be also suppressed. Moreover, in TFT formed with the semiconductor film, the variation of the on-current in addition to the mobility can be also suppressed. Furthermore, in the present invention, the first laser light converted into the harmonic easily absorbed in the semiconductor film is irradiated to melt the semiconductor film and to increase the absorption coefficient of the fundamental wave. | 04-15-2010 |
20100155621 | MULTI-AXIS / MULTI-FIELD CHARGED PARTICLE CANCER THERAPY METHOD AND APPARATUS - The invention relates to method and apparatus for treatment of solid cancer. More particularly, the invention comprises a multi-axis and/or multi-field charged particle cancer therapy system. The system independently controls patient translation position, patient rotation position, two-dimensional beam trajectory, delivered beam energy, delivered beam intensity, timing of charged particle delivery, and/or distribution of radiation striking healthy tissue. The system operates in conjunction with a negative ion beam source, synchrotron, patient positioning, imaging, and/or targeting method and apparatus to deliver an effective and uniform dose of radiation to a tumor while distributing radiation striking healthy tissue. | 06-24-2010 |
20100243914 | SUPER CRITICAL ANGLE FLUORESCENCE SCANNING SYSTEM - A scanning system that provides for detection based on supercritical angle fluorescence (SAF) is described. The system provides for the optical coupling of a sample to the scanner in a sandwich structure that uses first and second refractive index matching materials to provide optical coupling through the sandwich arrangement. | 09-30-2010 |
20100314552 | ION IMPLANTER - An ion implanter includes an implantation chamber into which an ion beam is introduced, a holder for holding substrates on two columns of a first column and a second column in an X-direction, and a holder driving unit having a function of setting the holder in a horizontal state and then positioning the holder in a substrate exchange position and a function of setting the holder in a standing state and then driving reciprocally and linearly the holder along the X-direction in an irradiation area of the ion beam. Also, the ion implanter includes two load lock mechanisms, and two substrate carrying units equipped with arms, which carry the substrates between the load lock mechanisms and a substrate exchange position respectively, every two arms. | 12-16-2010 |
20110006215 | RADIATION SYSTEM WITH ROTATING PATIENT SUPPORT - A patient support system includes a patient support having a surface for supporting a patient and a longitudinal axis, and a positioner coupled to the patient support for positioning the patient support, wherein the positioner is configured to move the patient support along a path that has an arc, circular, or zig-zag shape, and wherein the path lies within a plane that forms an angle with the surface of the patient support. | 01-13-2011 |
20110095202 | BOOK STERILIZER - A book sterilizer is provided, which includes a sterilizing chamber having an upper wall, a lower wall, and an inclined rear wall between the upper and lower walls, and at least one holding member for a book which is provided in the sterilizing chamber and has a free end adjacent to the inclined rear wall, so that a book is easily held by virtue of having been inserted between the inclined rear wall and the holding member with the leaves and book covers separately opened such that they unfold under their own weight and gravity, so that upon spraying air, the book covers and the leaves of the book smoothly unfold and thus sterilizing rays from a sterilization and disinfection lamp are uniformly radiated deep into the book covers and the leaves, thereby providing excellent sterilizing effects at an economical cost. | 04-28-2011 |
20110121197 | TREATMENT TABLE SYSTEM - Lesion positioner systems and, which perform positioning of a lesion A by moving a top board for allowing a subject to be placed thereon, set an isocenter of a diagnostic 3D imaging unit as a virtual isocenter at the time when a treatment table is in a 3D imaging diagnosis position, and positions the lesion A to the virtual isocenter, based on a three-dimensional diagnostic image in consideration of particle beam therapy. A treatment table moving mechanism moves the treatment table to the treatment position relative to the particle beam therapy system while maintaining states of the top board and the lesion positioner systems and at the time of positioning, thereby positioning the lesion A to the isocenter of the particle beam therapy system. | 05-26-2011 |
20110147611 | MEDICAL IMAGING EQUIPMENT AND A MEASURING METHOD FOR DETECTING THE POSITION OF A CONVEYING DEVICE OF THE MEDICAL IMAGING EQUIPMENT - A medical imaging equipment has a conveying device that can be moved at least partially in at least one direction. A position-detecting device has at least one transmitting element which detects a position of the conveying device and emits position-measuring radiation. The position-detecting device has at least one detector element. The position-detecting device has at least one semi-transparent reflector element. | 06-23-2011 |
20110147612 | SUPPORT AND POSITIONING STRUCTURE, SEMICONDUCTOR EQUIPMENT SYSTEM AND METHOD FOR POSITIONING - The invention relates to a charged particle system provided with a support and positioning structure for supporting and positioning a target on a table, the support and positioning structure comprising a first member and a second member and at least one motor so as to move the first member relative to the second member, wherein a shield is present to shield at least one charged particle beam from electromagnetic fields generated by said at least one motor, the support and positioning structure further comprising a spring mechanically coupling the first member and the second member for at least partially bearing the weight of the first member, table and target. | 06-23-2011 |
20110192989 | SYSTEM AND METHOD FOR TREATMENT OF MATERIALS BY ELECTROMAGNETIC RADIATION (EMR) - Embodiments of the invention are directed to a system for treatment of material by microwave radiation. The system may include a casing, a waveguide connected to the casing to conduct microwave radiation from a radiation source into the casing, an inner container transparent to microwave radiation, the container having an inlet to receive material to be treated and an outlet to discharge treated material and a transport unit to carry the treated material. | 08-11-2011 |
20110204255 | Stage device - A stage device to be used in a vacuum includes: a gas supply unit for generating a gas; a base member having four of upper, lower, right, and left surfaces; a slider formed in a frame shape surrounding the base member and having surfaces facing the respective surfaces of the base member, and disposed to be movable; and an air bearing configured to float the slider by supplying the gas to a space between the base member and the slider. The slider includes: an air chamber provided on the surface facing the base member for accumulating air, and the base member includes thereinside a slider-moving air flow passage configured to supply the gas from an inlet port for letting in the gas generated by the gas supply unit to an outlet port for supplying the gas to the air chamber of the slider. | 08-25-2011 |
20110240882 | Radiation Sterilization of Implantable Medical Devices - A system and method for sterilization of medical devices includes methods for reducing the variance in dose levels over the medical device by either varying the dose levels for each pass before a radiation source, such as an electron beam, or by increasing the number of passes before a radiation source. | 10-06-2011 |
20110248182 | ION IMPLANTING APPARATUS - An ion implanting apparatus is provided, which can accurately measure a quantity of atoms that are implanted. The ion implanting apparatus according to the present invention has an object to be measured, and the object to be measured is arranged in an irradiating range in which ions are irradiated. When atoms are implanted into an object to be processed by irradiating ions of a processing gas and neutralized particles thereof, the object to be measured is heated through the irradiation with the processing gas ions and the neutralized particles. A control unit determines a quantity of the atoms that are implanted into the object to be processed from the temperature of the object to be measured. | 10-13-2011 |
20110248183 | ULTRAVIOLET REFLECTOR WITH COOLANT GAS HOLES AND METHOD - A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a centrally positioned longitudinal strip and first and second side reflectors to form a parabolic-type surface. The longitudinal strip and first and second side reflectors have curved reflective surfaces with dichroic coatings and the longitudinal strip comprises a plurality of through holes to direct a coolant gas toward the ultraviolet lamp. A chamber that uses an ultraviolet lamp module with the reflector, and a method of ultraviolet treatment are also described. | 10-13-2011 |
20110291022 | Post Implant Wafer Heating Using Light - An ion implantation system, method, and apparatus for abating condensation in a cold ion implant is provided. An ion implantation apparatus is configured to provide ions to a workpiece positioned in a process chamber. A sub-ambient temperature chuck supports the workpiece during an exposure of the workpiece to the plurality of ions. The sub-ambient temperature chuck is further configured to cool the workpiece to a processing temperature, wherein the process temperature is below a dew point of an external environment. A load lock chamber isolates a process environment of the process chamber from the external environment. A light source provides a predetermined wavelength of electromagnetic radiation to the workpiece concurrent with the workpiece residing within the load lock chamber, wherein the predetermined wavelength or range of wavelengths is associated with a maximum radiant energy absorption range of the workpiece, wherein the light source is configured to selectively heat the workpiece. | 12-01-2011 |
20110291023 | HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM - A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis. | 12-01-2011 |
20110297845 | EFFECTIVE ALGORITHM FOR WARMING A TWIST AXIS FOR COLD ION IMPLANTATIONS - A method for warming a rotational interface in an ion implantation environment provides a scan arm configured to rotate about a first axis and an end effector coupled to the scan arm via a motor to selectively secure a workpiece. The end effector is configured to rotate about a second axis having a bearing and a seal associated with the second axis and motor. The motor is activated, and the rotation of motor is reversed after a predetermined time or when the motor faults due to a rotation the end effector about the second axis. A determination is made as to whether the rotation of the end effector about the second axis is acceptable, and the scan arm is reciprocated about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis. | 12-08-2011 |
20120001088 | DEVICE FOR TESTING AN INTEGRATED CIRCUIT AND METHOD FOR IMPLEMENTING SAME - The invention relates to a device for testing an integrated circuit. The device comprises a plate for receiving and subjecting the integrated circuit to a test. The plate comprises a component for powering and operating the integrated circuit and another component for measuring the operation of the integrated circuit during the test. The device also comprises an irradiation device for subjecting the circuit to a proton bombardment and a mask with a variable thickness provided between a bombardment access region on the integrated circuit and an established zone of the integrated circuit. | 01-05-2012 |
20120043474 | LASER PROCESSING METHOD AND LASER PROCESSING APPARATUS - The present disclosure relates to laser processing and a laser processing apparatus for processing materials using laser. Processing performed after loading a wafer on a work stage and a laser processing apparatus for implementing such processing, among others, are disclosed. The laser processing includes loading a wafer on a work stage; determining the number of chips formed on the wafer loaded on the work stage, performing chip defect inspection and aligning the wafer while moving the work stage; measuring a height of a surface of the wafer loaded on the work stage using a displacement sensor; monitoring output power of a processing laser using a power meter; and shifting the work stage while irradiating a laser beam on the wafer to process the wafer. | 02-23-2012 |
20120043475 | PATIENT POSITIONING SYSTEM AND METHODS FOR DIAGNOSTIC REDIOLOGY AND RADIOTHERAPY - The system provides new ways to ensure that a patient is positioned correctly, e.g. identically with an original planning scan if the patient is to undergo radiotherapy. The system also detects if there is patient movement during a scan. It is an aspect of the present method to immobilize the patient based on a specific site of interest by using positioning sensors that record patient physical orientation based on measurements of patient weight distribution and pressure distribution among other features. | 02-23-2012 |
20120080610 | OPTICAL CAMERA ALIGNMENT - A camera alignment system that can enable alignment in at least one of three planes and about an axis of at least one of the planes. An alignment mount can mate to a camera and lens. The alignment mount can comprise a mechanism to adjust the camera relative to the lens to that an image plane of the camera aligns with an image plane of the lens in a predetermined orientation. One predetermined orientation can be that the image plane of the camera being parallel to the image plane of the lens. | 04-05-2012 |
20120085923 | Ion Beam Sample Preparation Apparatus and Methods - Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. Additionally, apparatus kits are disclosed that enable the use of the same shields in the observation of prepared samples. | 04-12-2012 |
20120085924 | METHOD AND APPARATUS FOR SPECIMEN FABRICATION - A focused ion beam apparatus, including: a sample holder provided with a fixing surface for fixing, via a deposition film, a micro-specimen extracted from a specimen using a method for fabrication by a focused ion beam, in which a width of the fixing surface is smaller than 50 microns; a specimen transferring unit having a probe to which the specimen can be joined through the deposition film, and transferring the micro-specimen extracted from the specimen by the focused ion-beam fabrication method, to the sample holder; and a sample chamber in which the sample, the sample holder and the probe are laid out, wherein, in the sample chamber, the micro-specimen extracted from the specimen by the focused ion-beam fabrication method is fixed to the fixing surface of the sample holder through the deposition film, and the micro-specimen fixed to the fixing surface is fabricated by irradiating the focused ion beam. | 04-12-2012 |
20120085925 | CHARGED PARTICLE RADIATION DEVICE - An electron gun that serves to reduce the quantity of electron stimulated desorption and accomplishes vacuum evacuation efficiently with a sufficient degree of vacuum. An electron source | 04-12-2012 |
20120091363 | PROCESSING SYSTEM - A processing system includes a particle beam column for generating a particle beam directed to a first processing location; a laser system for generating a laser beam directed to a second processing location located at a distance from the first processing location; and a protector including an actuator and a plate connected to the actuator. The actuator is configured to move the plate between a first position in which it protects a component of the particle beam column from particles released from the object by the laser beam and a second position in which the component of the particle beam column is not protected from particles released from the object by the laser beam. | 04-19-2012 |
20120104276 | MODULAR PATIENT SUPPORT SYSTEM - A radiation treatment system ( | 05-03-2012 |
20120112092 | Mobile radiation therapy - The invention provides techniques for diagnosing medical conditions and providing appropriate treatment at a patient's home residence. A mobile x-ray team can be dispatched to the patient's home residence. A technical team reviews patient data to determine a proper therapy plan. A mobile radiation therapy apparatus is dispatched to the patient's home as required by the therapy plan. The mobile radiation therapy apparatus includes a radiation source and shielding, and is capable of superficial radiation therapy and/or High Dose Rate (HDR), Low Dose Rate (LDR), and Medium Dose Rate (MDR) implant therapy and/or particle therapy. For HDR, LDR and MDR therapy, the mobile radiation therapy apparatus itself is a specialized radiation vault which the patient will enter. The technical team adjusts the therapy plan based on the additional analysis, and the mobile radiation therapy apparatus is dispatched in accordance with adjusted therapy plan. | 05-10-2012 |
20120175527 | LITHOGRAPHY SYSTEM AND METHOD OF PROCESSING SUBSTRATES IN SUCH A LITHOGRAPHY SYSTEM - The invention relates to a lithography system comprising a plurality of lithography system units. Each lithography system unit comprises a lithography apparatus arranged in a vacuum chamber for patterning a substrate; a load lock system for transferring substrates into and out of the vacuum chamber; and a door for enabling entry into the vacuum chamber for servicing purposes. The load lock system and the door of each lithography system unit are provided at the same side and face a free area at a side of the lithography system, in particular the service area. | 07-12-2012 |
20120181445 | ELECTRON BEAM RECORDING APPARATUS | 07-19-2012 |
20120187309 | Method for Fabricating an Electromagnetic Actuator, an Electromagnetic Actuator, and a Charged Particle Device Comprising the Same - The present invention is related to a method for fabricating an electromagnetic actuator. It is further related to an electromagnetic actuator and a charged particle device comprising such an actuator. According to the present invention, the method for fabricating is characterized by determining an optimal allocation of permanent magnets to reduce the magnetic stray field caused by deviations between the nominal and actual magnetization values of the permanent magnets. The invention further provides a charged particle device comprising an electromagnetic actuator fabricated using the method according to the invention. | 07-26-2012 |
20120223249 | SCANNER FOR GCIB SYSTEM - Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus. | 09-06-2012 |
20120241645 | MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD - According to one embodiment, a mask inspection apparatus includes a decompression chamber, a holder, a light irradiation unit, a detection unit, an electrode, and a control unit. The holder is provided in the decompression chamber and holds a mask. The light irradiation unit irradiates a major surface of the mask held by the holder with a light. The detection unit is provided in the decompression chamber to detect electrons generated when the major surface of the mask is irradiated with the light. The electrode is provided between the holder and the detection unit and guides the electrons in a direction from the holder toward the detection unit. The control unit compares a detection result of the electrons detected by the detection unit with a reference value. | 09-27-2012 |
20120248331 | DRIVING TYPE PATIENT PLATFORM, CONTROL DEVICE FOR DRIVING TYPE PATIENT PLATFORM, CONTROL PROGRAM FOR DRIVING TYPE PATIENT PLATFORM, AND PARTICLE BEAM THERAPY SYSTEM UTILIZING THESE ITEMS - A patient platform for making the position and posture of a diseased site coincide with those established by a treatment plan. Translation units translate a top board in the X, Y and Z directions respectively, in a fixed coordinate system. Rotation units rotate the top board in the θ, φ, and ξ directions respectively. A controller controls the translation units and rotation units, based on desired rotation center point and desired rotation angle. The controller has a rotation drive signal generation unit that generates a signal for moving the top board in a rotating manner from the reference state “a” of the translation units and the rotation units to a desired rotation angle; and a translation drive signal generation unit that generates a signal for translating the translation units so the amount of translation movement, of the desired rotation center point, caused by the rotation movement is a predetermined value. | 10-04-2012 |
20120256099 | MOBILE X-RAY IMAGING SYSTEM - A mobile diagnostic imaging system includes a battery system and charging system. The battery system is located in the rotating portion of the imaging system, and includes one or more battery packs, comprising electrochemical cells. Each battery pack includes a control circuit that controls the state of charge of each of the electrochemical cells, and implements a control scheme that causes the electrochemical cells to have a similar charge state. The battery system communicates with a charging system on the non-rotating portion to terminate charge when one or more of the electrochemical cells reach a full state of charge. The imaging system also includes a docking system that electrically connects the charging system to the battery system during charging and temporarily electrically disconnects the rotating and non-rotating portions during imaging, a drive mechanism for rotating the rotating portion relative to the non-rotating portion. | 10-11-2012 |
20120261590 | APPARATUS FOR STERILIZING THE INSIDE OF A CONTAINER - A sterilization apparatus for sterilizing containers, such as plastic water bottles employs ultra violet (UV) light sterilization technology in a portable fashion. The apparatus is a standalone unit that is intended for residential use, is portable, and is specifically configured to receive and treat multiple sized bottles without additional add-ons. The apparatus positions and includes features to hold the bottle in a horizontal position within the housing of the apparatus such that the horizontally oriented UV bulb is disposed within the inside of the bottle. | 10-18-2012 |
20120267550 | THERMAL CONDITIONING SYSTEM FOR THERMAL CONDITIONING A PART OF A LITHOGRAPHIC APPARATUS AND A THERMAL CONDITIONING METHOD - A conditioning system for conditioning a part of a lithographic apparatus, includes an evaporator positioned in thermal contact with the part for extracting heat from the part by evaporation of a fluid inside the evaporator; a condenser for removing heat from the fluid inside the condenser; fluid lines arranged between the evaporator and the condenser to form a fluid circuit; a pump arranged in the circuit to circulate the fluid in the circuit; an accumulator to hold fluid, wherein the accumulator is in fluid communication with the circuit and comprises a heat exchanger to transfer heat from or to fluid inside the accumulator; a temperature sensor to provide a signal representative of the fluid temperature; and a controller to maintain a substantially constant temperature of the fluid inside the circuit by regulating the amount of heat transferred by the heat exchanger based on the signal. | 10-25-2012 |
20120267551 | APPARATUS AND METHODS FOR CHIRALITY DETECTION - Technologies are generally described for systems and methods for detecting chiral properties of materials and separating materials based on their chiral properties. A chiral vector is constructed from anisotropy properties of a polarization-dependent output signal from a sample. Different types of molecules from the sample can be differentiated based on a magnitude of the chiral vector. Chiral properties of the sample can be detected based on an angle of the chiral vector. The output signal can be a fluorescent emission from the sample and can be used to detect chiral properties of a substantially opaque sample. | 10-25-2012 |
20120273693 | COOLED PULSED LIGHT TREATMENT DEVICE - A device and appliance is provided for the high-speed decontamination of objects by means of pulsed light, including: an illuminating structure suitable for illuminating a decontamination area in which the objects are arranged, the illuminating structure being suitable for producing streams of light pulses having wavelengths of 200 nm to 300 nm and an adjustable pulse rate; and a positioner suitable for positioning the objects in the decontamination area according to a predetermined arrangement, also including a cooler suitable for maintaining the temperature of the decontamination area substantially below a predetermined temperature when the decontamination area is illuminated, the cooler including an apparatus for circulating a cooling fluid built into the positioner. | 11-01-2012 |
20120298884 | Ion Milling Device, Sample Processing Method, Processing Device, and Sample Drive Mechanism - In view of the above-mentioned problems, an object of the present invention is to provide a processing method that is not dependent on the material or the ion beam irradiation angle. In order to achieve the object above, the present invention provides a processing device that processes a sample by irradiating the sample with an ion beam, the processing device comprising a sample tilting/rotating mechanism that rotates/tilts the sample relative to the ion beam, wherein the sample rotating mechanism comprises a rotating shaft that rotates the sample relative to the ion beam, and a tilting shaft that is orthogonal to the rotating shaft and that tilts the sample relative to the ion beam, the sample rotating mechanism being adapted to simultaneously perform the rotating and tilting of the sample. | 11-29-2012 |
20120319004 | Nanotube Assisted Self-Cleaning Material - A self-cleaning material is generally described that may include a substrate having a first surface. A self-cleaning layer of aligned nanotube structures may be formed on the first surface of the substrate, where absorption of light by the nanotube structures may cause a change in state of the self-cleaning material based on an angle of incidence of the light and an orientation vector corresponding to the layer of aligned nanotube structures. | 12-20-2012 |
20130009074 | UNIFORM LARGE-GRAINED AND GRAIN BOUNDARY LOCATION MANIPULATED POLYCRYSTALLINE THIN FILM SEMICONDUCTORS FORMED USING SEQUENTIAL LATERAL SOLIDIFICATION AND DEVICES FORMED THEREON - Methods for processing an amorphous silicon thin film sample into a polycrystalline silicon thin film are disclosed. One method includes generating a sequence of excimer laser pulses, controllably modulating each pulse to a predetermined fluence, homoginizing each modulated pulse in a predetermined plane, masking portions of each homoginized pulse with a pattern of slits to generate a sequence of fluence controlled pulses of line patterned beamlets, each slit in the pattern of slits being sufficiently narrow to prevent inducement of significant nucleation in region of a silicon thin film sample irradiated by a beamlet corresponding to the slit, irradiating an amorphous silicon thin film sample with the sequence of fluence controlled slit patterned beamlets to effect melting of portions corresponding to each fluence controlled patterned beamlet pulse, and controllably sequentially translating a relative position of the sample with respect to each of the fluence controlled pulse of slit patterned beamlets. | 01-10-2013 |
20130020502 | CHARGED PARTICLE BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE - A charged particle beam drawing apparatus includes: a charged particle optical system; a substrate stage; an interferometer configured to measure a position of the stage in the direction of the optical axis of the charged particle optical system; a measuring device configured to measure a characteristic of the charged particle beam; and a controller configured to correct the measurement, obtained by the interferometer, using correction information. The controller is configured to cause first measurement as measurement by the interferometer and second measurement as measurement by the measuring device to be performed in parallel, and to obtain the correction information based on the first measurement and the second measurement obtained with respect to each of the plurality of positions. | 01-24-2013 |
20130119268 | METHOD AND APPARATUS FOR CURING THE COATING OF A COMPONENT BY MEANS OF FREE RADICALS GENERATED BY ULTRAVIOLET (UV) RADIATION - Apparatus for curing the coating of a workpiece ( | 05-16-2013 |
20130126751 | OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM - An optical device may include: a first beam shaping unit configured to transform a first laser beam incident thereon into a second laser beam having an annular cross section; and a first focusing optical element for focusing the second laser beam in a first predetermined location so as to generate a Bessel beam. | 05-23-2013 |
20130140470 | Installation for Treating Articles by Electron Bombardment - An installation for treating articles with radiation, the installation comprising a structure having pivotally mounted thereon an inlet starwheel and an outlet starwheel respectively arranged facing an inlet and an outlet of a shielded enclosure in which there are mounted at least one pivotal treatment starwheel and at least one electron emitter in the vicinity of the treatment starwheel. The installation comprises a linear inlet conveyor and a linear outlet conveyor extending inside the shielded enclosure respectively facing the inlet and the outlet, the linear conveyors each comprising a respective transporter surrounding a shielded wall forming a baffle. | 06-06-2013 |
20130146785 | SUPPORT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A support for an object having a support surface configured to support the object; wherein the support surface includes a main part and a moveable part, the moveable part of the support surface being moveable between a retracted position in which the moveable part of the support surface is adapted to be substantially in the same plane as the main part of the support surface and an extended position in which the moveable part of the support surface protrudes from the plane of the main part of the support surface. | 06-13-2013 |
20130153786 | OPTICAL SYSTEM CALIBRATION VERIFICATION - A sample processing apparatus ( | 06-20-2013 |
20130181142 | Method Of Generating Low-Energy Secondary Electrons For Applications In Biological Sciences, Radiochemistry, And Chemistry Of Polymers And Physics Of Radiotherapy - The present disclosure relates to a method and a system for generating low-energy electrons in a biological material. The biological material is held in position by a support. Laser beam pulses are directed by a focusing mechanism toward a region of interest within the biological material. This generates filaments of low-energy electrons within the region of interest. The method and system may be used for radiotherapy, radiochemistry, sterilization, nanoparticle coating, nanoparticle generation, and like uses. | 07-18-2013 |
20130228702 | Ion Beam Sample Preparation Apparatus and Methods - Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle. A rotating shield retention stage is also disclosed which works in concert with the tilting ion beam irradiating means. | 09-05-2013 |
20130234040 | Method of handling a substrate support structure in a lithography system - Method of handling a substrate support structure for clamping a substrate on a surface thereof in a lithography system. First, a substrate support structure adapted to absorb energy from a substrate clamped thereon and a substrate are provided. The substrate is clamped on a surface of the substrate support structure. The substrate support structure with the substrate clamped thereon is transferred to a lithography apparatus, in which a lithographic process is performed on the substrate clamped onto the substrate support structure. The substrate support structure with the substrate clamped thereon is then removed from the lithography system. The substrate is removed from the substrate support structure, and the substrate support structure is conditioned by removing energy stored in the substrate support structure before providing a new substrate onto the substrate support structure. | 09-12-2013 |
20130256559 | METHOD AND APPARATUS FOR ALIGNING A MULTI-MODALITY IMAGING SYSTEM - A target object for aligning a multi-modality imaging system includes a body having a cavity therein, a first imaging source being disposed within the cavity, the first imaging source including a body having a cavity defined therein and an emission responsive material disposed within the first imaging source cavity, the first imaging source having a first shape, and a second imaging source being disposed within the cavity, the second imaging source including a body having a cavity defined therein and a magnetic resonance responsive material disposed within the second imaging source cavity, the second imaging source having a second shape that is different than the first shape. A method of aligning a multi-modality imaging system is also provided. | 10-03-2013 |
20130264494 | ARRANGEMENT OF RETICLE POSITIONING DEVICE FOR ACTINIC INSPECTION OF EUV RETICLES - A reticle positioning apparatus for actinic EUV reticle inspection including a sealed inspection chamber containing a reticle stage for holding a reticle. The reticle stage has a. magnetically suspended upper stage with a long travel in a “y” direction and a magnetically suspended lower stage with a long travel in an “x” direction; and a cable stage chamber isolated from the inspection chamber by a cable chamber wall. The cable stage chamber has a cable stage movable in the “y” direction; and a tube connected at one end to the reticle stage and to the cable stage at the other end, The tube passes from the cable stage through the inspection chamber through a seal in the chamber wail and opening into the cable entry chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage. | 10-10-2013 |
20130320234 | METHODS AND SYSTEMS FOR POSITIONING DETECTORS FOR NUCLEAR MEDICINE IMAGING - Methods and systems for positioning detectors for Nuclear Medicine (NM) imaging are provided. One system includes a gantry supporting one or more imaging detectors, wherein the gantry has a portion configured for movable operation. The system also includes a table on one side of the gantry configured to support a patient thereon, wherein the table is further configured to move within an opening of the gantry. The system further includes a patient support device movably positioned on an opposite side of the gantry from the table, wherein the patient support device is configured for movable operation. | 12-05-2013 |
20130334439 | Modular Patient Handling System for Medical Imaging Apparatus - A patient table mounts to a patient imaging apparatus support base. When attached to first and second support ends of an imaging apparatus, the patient table has a generally planar patient support adapted for spanning the imaging apparatus field of view (FOV), and is analogous to a beam spanning the FOV. The beam-like patient support has sufficient rigidity for supporting and imaging a patient placed thereupon without any additional external support columns affixed to the imaging room floor, as was utilized in previously existing imaging apparatus. Elimination of external patient table supports reduces imaging apparatus installation complexity and costs, frees up floor space, and facilitates easier patient transfer to the imaging apparatus. | 12-19-2013 |
20140014854 | DUAL SIDED WORKPIECE HANDLING - A processing apparatus includes a process chamber defining an enclosed volume, and a dual sided workpiece assembly disposed in the enclosed volume. The dual sided workpiece assembly includes a base portion and a flip portion coupled to the base portion. The flip portion has a support surface configured to support at least one dual sided workpiece and is configured to rotate about a flipping axis. The processing apparatus also includes a controller configured to control the dual sided workpiece assembly to expose a first side of the at least one dual sided workpiece to accelerating ions in the process chamber during a first time interval and to expose a second side of the at least one dual sided workpiece to accelerating ions during a second time interval different than the first time interval by rotating the flip portion about the flipping axis. | 01-16-2014 |
20140021367 | POLARIZED LIGHT SPLITTING ELEMENT - Provided are a polarized light splitting element, a method of manufacturing the same, a light radiating device, a method of radiating light, and a method of manufacturing an ordered photo-alignment film. The polarized light splitting element has excellent durability with respect to UV rays and heat, and low pitch dependence of polarization characteristics, so that it is easily manufactured. In addition, the polarized light splitting element may realize a high polarization degree and extinction ratio even in a short wavelength region. | 01-23-2014 |
20140027651 | Continuous Sterilization System - A continuous sterilization system is provided which reliably supports a sterilization target so that the sterilization target is not tipped over during a sterilization process and can stably ensure uniform irradiation periods on any portion of inner and outer surfaces and moreover, a portion sterilized by electron beam irradiation is not contaminated again. The continuous sterilization system is provided with a first conveying means, a first electron beam accelerator, a second conveying means, a second electron beam accelerator, and a third electron beam accelerator. | 01-30-2014 |
20140034846 | IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS - An ion implantation system provides ions to a workpiece positioned in a vacuum environment of a process chamber on a cooled chuck. A pre-chill station within the process chamber has a chilled workpiece support configured to cool the workpiece to a first temperature, and a post-heat station within the process chamber, has a heated workpiece support configured to heat the workpiece to a second temperature. The first temperature is lower than a process temperature, and the second temperature is greater than an external temperature. A workpiece transfer arm is further configured to concurrently transfer two or more workpieces between two or more of the chuck, a load lock chamber, the pre-chill station, and the post-heat station. | 02-06-2014 |
20140042338 | STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS - A stage apparatus includes a column for irradiating a sample with a charged particle beam, a vacuum sample chamber to which the column is attached, moving tables disposed in the vacuum sample chamber to move the sample relatively to the column, and position detectors for detecting positions of the moving tables. The stage apparatus includes an attachment member disposed between the column and the vacuum sample chamber. The attachment member has an opening which restricts movement of the column in a same direction as directions of the moving tables. Reference mirrors in the position detectors for detecting the positions of the tables are attached to the attachment member. Each of the reference mirrors has an adjustment apparatus to adjust a relative angle between the reference mirror and the laser beam. | 02-13-2014 |
20140048720 | SAMPLE HOLDER OF ELECTRON BEAM EXPOSURE APPARATUS AND ELECTRON BEAM EXPOSURE METHOD USING THE SAME - A sample holder to be disposed between an electrostatic chuck and a sample smaller than the upper surface of the electrostatic chuck is provided, the sample holder including: a base plate formed in the same size as the upper surface of the electrostatic chuck; a sample placement portion located on the upper surface of the base plate, and designed to place the sample thereon; and a circumferential portion being a portion of the upper surface of the base plate other than the sample placement portion, and having a conductive material exposed to the outside. | 02-20-2014 |
20140070113 | Automated Method for Coincident Alignment of a Laser Beam and a Charged Particle Beam - A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system. | 03-13-2014 |
20140097354 | Systems and Methods to Measure and Display the Scintillation Potential of a Diamond or Other Gemstone - Systems and methods for generating an image of a gemstone under evaluation which is coded according to angular ranges in its angular spectrum across a broad range of tilts, this allows for scintillation of a gemstone to be demonstrated based on a singular coded image of the gemstone. Scintillation information is thus presented in a single image, or as a plurality of images showing fire scintillation, flash scintillation, and other scintillation related criteria as a series of static images. | 04-10-2014 |
20140110600 | METHODS, DEVICES, AND MEDIUMS ASSOCIATED WITH OPTICAL LIFT MECHANISM - An apparatus includes a light foil device configured to move based on radiation pressure associated with light received by the light foil device. The apparatus includes a mechanism configured to transition between operational states in response to the movement of the light foil device, or includes a valve configured to control a flow of material through a conduit based, at least in part, on the movement of the light foil device. | 04-24-2014 |
20140138558 | METHOD FOR FORMING AN ELECTRICAL CONNECTION TO AN SAMPLE SUPPORT IN AN ELECTRON MICROSCOPE HOLDER - An electrical connector for use in electron microscopy sample holders. The electrical connector provides electrical contacts to the sample support devices which are positioned in the sample holders for electrical, temperature and/or electrochemical control. | 05-22-2014 |
20140145092 | METHOD AND APPARATUS FOR CURING THIN FILMS ON LOW-TEMPERATURE SUBSTRATES AT HIGH SPEEDS - A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information. | 05-29-2014 |
20140151574 | TRAYS FOR USE IN SECURITY SCREENING - The present invention the present invention relates to methods and systems for performing security screening using trays which may be identifiable by a unique tray identification number. | 06-05-2014 |
20140158908 | Container Scanning System and Method - A system and method of scanning a number of objects such as crates or intermodal containers in a storage area having a plurality of movable racks, each rack occupying at least one level and capable of carrying at least one object. The racks are capable of being moved to establish successive vacant multi-level aisles among the racks. At least one scanner is movable substantially vertically within the successive vacant aisles to scan successive objects substantially adjacent to each vacant aisle to detect at least one pre-determined characteristic. | 06-12-2014 |
20140203187 | Charged Particle Beam Lithography System and Target Positioning Device - The invention relates to a charged particle beam lithography system comprising: a charged particle optical column arranged in a vacuum chamber for projecting a charged particle beam onto a target, wherein the column comprises deflecting means for deflecting the charged particle beam in a deflection direction, a target positioning device comprising a carrier for carrying the target, and a stage for carrying and moving the carrier along a first direction, wherein the first direction is different from the deflection direction, wherein the target positioning device comprises a first actuator for moving the stage in the first direction relative to the charged particle optical column, wherein the carrier is displaceably arranged on the stage and wherein the target positioning device comprises retaining means for retaining the carrier with respect to the stage in a first relative position. | 07-24-2014 |
20140239192 | ILLUMINATION AND DISPLACEMENT DEVICE FOR A PROJECTION EXPOSURE APPARATUS - An illumination and displacement device for a projection exposure apparatus comprises an illumination optical unit for illuminating an illumination field. An object holder serves for mounting an object in such a way that at least one part of the object can be arranged in the illumination field. An object holder drive serves for displacing the object during illumination in an object displacement direction. A correction device serves for the spatially resolved influencing of an intensity of the illumination at least of sections of the illumination field, wherein there is a spatial resolution of the influencing of the intensity of the illumination of the illumination field at least along the object displacement direction. This results in an illumination and displacement device in which field-dependent imaging aberrations which are present during the projection exposure do not undesirably affect a projection result. | 08-28-2014 |
20140264073 | PHOTOLUMINESCENCE QUANTUM YIELD (PLQY) TEST OF QUANTUM DOT (QD) FILMS - Photoluminescence quantum yield (PLQY) testing of quantum dots is described. In one embodiment, a method involves heating a sample including quantum dots and illuminating the sample with a light source. The method involves measuring spectra of luminescence from the illuminated quantum dots of the sample at each of a plurality of temperatures. The method involves measuring each of the plurality of temperatures with a temperature sensor. The PLQY at each of the plurality of temperatures is computed based on the measured spectra. The method further involves computing a relationship between QD emission wavelength of the measured spectra and the plurality of temperatures measured with the temperature sensor. The relationship is used to determine the QD temperature corresponding to each of the PLQY computations. In one embodiment, an integrating sphere moves on a gantry over the samples. | 09-18-2014 |
20140284494 | RECONFIGUREABLE PROCESSING ENCLOSURES - Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) or other materials are processed to produce useful intermediates and products, such as energy, fuels, foods or materials. For example, systems and methods are described that can be used to treat feedstock materials, such as cellulosic and/or lignocellulosic materials, in a vault in which the walls and optionally the ceiling include discrete units. Such vaults are re-configurable. | 09-25-2014 |
20140299785 | Method and Arrangement for Manufacturing a Sample for Microstructural Materials Diagnostics and Corresponding Sample - Method for manufacturing a sample for microstructural materials diagnostics, especially for transmission electron microscopy examinations, for scanning electron microscopy examinations for transmission electron-backscatter diffraction, for Rutheford backscatter diffraction, for elastic recoil detection analysis, for X-ray absorption spectroscopy or for X-ray diffraction, comprising detaching a basic structure from a preferably flat substrate by irradiating the substrate with a high energy beam, preferably with a laser beam, wherein the basic structure comprises a supported structure being supported by a supporting structure, preferably a cantilever beam which is supported at least at one of its both ends, preferably at both of its ends, by the supporting structure, the supporting structure being configured to be held by a jig, preferably to be clamped in the jig, and thinning the supported structure at least in sections by cutting, preferably by grazing, its surface, preferably at least at one of its lateral faces and/or of its front faces, preferably two opposing ones of its lateral faces, with the high energy beam. | 10-09-2014 |
20140306123 | STAGE APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - A stage apparatus includes: a stage; a linear motor configured to drive the stage; a magnetic shield unit configured to surround the linear motor to shield a magnetic field generated by a magnet of the linear motor; and a degaussing coil located in a space surrounded by the magnetic shield unit and configured to degauss the magnetic shield unit. | 10-16-2014 |
20140306124 | Yellow Room System - Arranging an application apparatus, an exposure apparatus, a developing apparatus, and similar apparatus together within a large yellow room makes it difficult to change a layout in association with a change of a recipe and to streamline a layout area and similar parameter. A yellow room system includes: a plurality of portable unit process apparatuses | 10-16-2014 |
20140312246 | SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BEAM APPARATUS - Provided is a sample positioning technology wherein micro-vibrations of a top table on which a sample is placed are suppressed such that the quality of an image to be observed or the precision of a measured dimension value can be improved. A sample positioning apparatus according to the present invention is provided with an active brake for stopping the top table, an inner frame which surrounds the active brake, an outer frame which surrounds the inner frame, and actuators for driving the active brake. The actuators, after driving the active brake to stop the top table with respect to a stage, press the outer frame to adjust the position of the top table. | 10-23-2014 |
20140319372 | MASK COVER, CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHOD - A mask cover according to one embodiment of the present invention comprises a frame body having an opening at the center, a conductive earth plate installed on the frame body such that its end protrudes into the opening of the frame body, an earth pin provided on the end of the earth plate and electrically connected to the earth plate, and a conductive cover part surrounding the earth pin such that the tip end of the earth pin protrudes and a gap is present between the cover part and the earth pin. | 10-30-2014 |
20140319373 | CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHOD - A charged particle beam drawing apparatus according to one embodiment of the present invention comprises a load lock chamber provided for introducing a target object from the outside and capable of switching an atmosphere state and a vacuum state, a transfer chamber arranged so as to be able to communicate with the load lock chamber and transferring the target object, a soaking chamber arranged so as to be able to communicate with the transfer chamber and having a temperature adjustment container for housing the target object therein and controlling a temperature of the target object with radiation and a temperature adjustment part for controlling a temperature of the temperature adjustment container, and a drawing chamber arranged so as to be able to communicate with the transfer chamber and drawing on the target object at a constant temperature. | 10-30-2014 |
20140332696 | LOW CONTAMINATION SCANNER FOR GCIB SYSTEM - Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus. The apparatus further includes shields and other features for reducing process contamination resulting from scattering of the GCIB from the scanning apparatus. | 11-13-2014 |
20140367587 | SCAN HEAD AND SCAN ARM USING THE SAME - A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head comprises a case, a shaft assembly, an ESC, a first driving mechanism and a second driving mechanism. The case has a normal center line. The shaft assembly passes through a first side of the case and has a twist axis, a first pivot point fixed relative to the case and a first end located outside the case. The ESC is fastened on the first end and capable of holding a work piece. The first driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to tilt relative to the normal center line. The second driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to rotate about the twist axis. | 12-18-2014 |
20140367588 | Method and System for E-Beam Lithography with Multi-Exposure - The present disclosure provides a method for electron-beam (e-beam) lithography patterning. The method includes forming a resist layer on a substrate; performing a first e-beam exposure process to the resist layer according to a first pattern; performing a second e-beam exposure process to the resist layer according to a second pattern, wherein the second patterned is overlapped to the first pattern on the resist layer; and developing the resist layer. | 12-18-2014 |
20140374621 | Nanostructure device that enhances fluorescence and luminescence - Microstructures and nanostructures ( | 12-25-2014 |
20150021495 | CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING CHAMBER - A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward. | 01-22-2015 |
20150034839 | Installation for processing articles by electron bombardment - An installation for treating articles by radiation, the installation comprising a structure ( | 02-05-2015 |
20150041676 | SOUNDPROOF COVER FOR CHARGED-PARTICLE BEAM DEVICE, AND CHARGED-PARTICLE BEAM DEVICE - It is an object of the present invention to provide a noise-proof cover and a charged particle beam apparatus that realize both of suppression of an image failure caused by a specific frequency and a reduction in size. To attain the object, the present invention proposes a noise-proof cover that surrounds a charged particle beam apparatus, the noise-proof cover including a hollow section forming member that forms a cylindrical body having a wall surface extending along an inner wall of the noise-proof cover, one end of the cylindrical body formed by the hollow section forming member being opened and the other end of the cylindrical section being closed, and the charged particle beam apparatus surrounded by the noise-proof cover. | 02-12-2015 |
20150048256 | SAMPLE HOLDING CARRIER, AND FLUORESCENCE DETECTION SYSTEM AND FLUORESCENCE DETECTION DEVICE THAT USE SAME - The present invention provides a sample holding carrier that can accurately measure a sample with a simple configuration, and a fluorescence detection system and device that use the same. Biosensor substrate includes: base substrate on which excitation light is incident from a lower surface; reflecting film that is arranged on an upper surface of base substrate to partially reflect the excitation light; and plural wells that are arranged on an upper surface side of reflecting film and have bottom surface portions. The excitation light is converged to be incident on base substrate. Distance from reflecting surface that is of a boundary between reflecting film and base substrate to bottom surface portion of well is less than or equal to a focal depth of the excitation light. Therefore, the sample accommodated in bottom surface portion of well can surely and efficiently be irradiated with the excitation light, and accurately be measured. | 02-19-2015 |
20150090901 | TRAYS FOR USE IN SECURITY SCREENING - The present invention the present invention relates to methods and systems for performing security screening using trays which may be identifiable by a unique tray identification number. | 04-02-2015 |
20150108366 | Electron Beam Irradiation Device - An electron beam irradiation device which can irradiate an electron beam uniformly to an entire outer surface of an object of irradiation by using a small-sized low-energy electron accelerator with a narrow irradiation window is provided. The device has electron beam irradiation means forming an electron beam irradiation zone and gripping/moving means gripping a part of an object of irradiation and causing the object of irradiation to pass through the electron beam irradiation zone, and the whole surface of the object of irradiation can uniformly pass through the electron beam irradiation zone by combining re-gripping of the object of irradiation by two gripping mechanisms provided on the gripping/moving means, rotation of the object of irradiation by two rotation mechanisms, and movement of the object of irradiation by two moving mechanisms. | 04-23-2015 |
20150108367 | Scanning Analyzer for Single Molecule Detection and Methods of Use - The invention encompasses analyzers and analyzer systems that include a single molecule analyzer, methods of using the analyzer and analyzer systems to analyze samples, either for single molecules or for molecular complexes. The single molecule uses electromagnetic radiation that is translated through the sample to detect the presence or absence of a single molecule. The single molecule analyzer provided herein is useful for diagnostics because the analyzer detects single molecules with zero carryover between samples. | 04-23-2015 |
20150123012 | Sample Plate Using MALDI-TOF Mass Spectrometer and Manufacturing Method of the Sample Plate - A sample plate in use with a MALDI-TOF (matrix-assisted laser desorption ionization time-of-flight) mass spectrometer. The sample plate is usable for the mass spectrometry of a polymeric material on the order of several hundreds of Da and a method of manufacturing the same sample plate. The sample plate including a target plate, an organic matrix formed on one surface of the target plate, and a Parylene thin film formed on the target plate on which the organic matrix is formed, the Parylene thin film entirely covering the organic matrix. | 05-07-2015 |
20150129778 | SPECIMEN HOLDER USED FOR MOUNTING SAMPLES IN ELECTRON MICROSCOPES - A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices. | 05-14-2015 |
20150129779 | DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a drawing apparatus which performs drawing on a substrate with a charged particle beam, the apparatus comprising a deflector configured to scan the charged particle beam on the substrate, a stage configured to hold the substrate and be movable, and a controller configured to control main-scan by the deflector and sub-scan by movement of the stage, wherein the controller is configured to control a width of the main-scan based on a width of a target drawing region on the substrate in a direction of the main-scan. | 05-14-2015 |
20150137003 | SPECIMEN PREPARATION METHOD - A method of preparing ultra-thin TEM specimens is provided by flipping the sample upside down for FIB thinning Such preparation method is compatible with the ex-situ lift-out system and offers high quality TEM specimens without the curtaining effect. | 05-21-2015 |
20150137004 | LASER PROCESSING DEVICE - A laser processing device including: a laser oscillator; a processing table; a transmission optical system for transmitting laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to an object to be processed; a moving mechanism for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed; and a variable curvature spherical mirror. The transmission optical system includes a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator. The reflective beam expander mechanism includes a spherical mirror and a concave mirror having different curvatures in two orthogonal axes. | 05-21-2015 |
20150137005 | CAPILLARY ARRAY - The invention relates to arrays with a plurality of capillaries being arranged in a plane and mechanically attached to the array, wherein the distance of adjacent capillaries is approximately 2.25 mm or an integer multiple thereof. At least one free end of each capillary projects from the array in such a way that the free ends of the capillaries may be simultaneously inserted into wells of a microwell plate. | 05-21-2015 |
20150137006 | MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE CORRECTION FOR GCIB SYSTEM - Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus. | 05-21-2015 |
20150293050 | ANALYTICAL CELL - An analytical cell includes first and second holders. The first and second holders each contain a substrate having a through-hole and a transmission membrane with an electron beam permeability so as to cover the through-hole. The first and second holders are stacked to form an overlapping portion such that the transmission membranes face each other and that an inner space therein containing the electrolytic solution is sealed. The through-holes face each other across the transmission membranes to form an observation window. Negative and positive electrode active materials are separated from each other and contact the electrolytic solution in the observation window. A transmission body containing an electron beam permeable solid is formed between at least one of the negative and positive electrode active materials and the transmission membrane. | 10-15-2015 |
20150313090 | IRRADIATION DEVICE FOR IRRADIATING PLANTS - A device is provided which ensures uniform irradiation of plants with infrared radiation along with ultraviolet and/or visible radiation and requires a small number of infrared emitters relative to the cultivation area. The infrared emitters are designed for temperatures of 800° C. to 1800° C. Each has a cylindrical emitter tube having a length of 50 mm to 500 mm. The emitter tubes extend parallel to one another in an emitter zone located above the culture plane. The infrared emitter occupation density relative to the area of the culture plane is between 0.2 m | 11-05-2015 |
20150323725 | CABINET CAPABLE OF GUIDING LIGHT - A cabinet capable of guiding light, which is used for detecting a biological sample strained with a fluorescent dye, includes a main body, at least one light source, and at least one light guiding structure. The main body has a sample table to place the biological sample. The at least one light source is provided on the main body and near the sample table, wherein the at least one light source provides light required to excite the fluorescent dye incorporated in the biological sample. The at least one light guiding structure is provided between the sample table and the at least one light source to refract the light provided by the at least one light source onto the sample table and the biological sample. Whereby, the biological sample is exposed to more light, and therefore the intensity of the light released from the biological sample is enhanced. | 11-12-2015 |
20150325405 | PROCESSING APPARATUS AND METHOD OF TREATING A SUBSTRATE - A processing apparatus including a process chamber, a plasma source disposed within the process chamber, wherein the plasma source is movable in a first direction and is configured to emit an ion beam along a second direction that is orthogonal to the first direction. The apparatus may further include a platen disposed within the process chamber for supporting a substrate, and an ion beam current sensor that is disposed adjacent to the platen. | 11-12-2015 |
20150328777 | TARGETS AND PROCESSES FOR FABRICATING SAME - In one embodiment, the present disclosure provides a target or mold having one or more support arms coupled to a substrate. The support arm can be used in handling or positioning a target. In another embodiment, the present disclosure provides target molds, targets produced using such molds, and a method for producing the targets and molds. In various implementations, the targets are formed in a number of disclosed shapes, including a funnel cone, a funnel cone having an extended neck, those having Gaussian-profile, a cup, a target having embedded metal slugs, metal dotted foils, wedges, metal stacks, a Winston collector having a hemispherical apex, and a Winston collector having an apex aperture. In yet another embodiment, the present disclosure provides a target mounting and alignment system. | 11-19-2015 |
20150348746 | MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE CORRECTION FOR GCIB SYSTEM - Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus. | 12-03-2015 |
20150364299 | ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION APPARATUS - Provided is an ion implantation apparatus including: a vacuum processing chamber in which an ion implantation process for a wafer is performed; one or more load lock chambers that are used for bringing the wafer into the vacuum processing chamber and taking out the wafer from the vacuum processing chamber; an intermediate conveyance chamber that is disposed to be adjacent to both the vacuum processing chamber and the load lock chamber; a load lock chamber-intermediate conveyance chamber communication mechanism including a gate valve capable of sealing a load lock chamber-intermediate conveyance chamber communication port; and an intermediate conveyance chamber-vacuum processing chamber communication mechanism including a movable shielding plate capable of shielding a part or the whole of the intermediate conveyance chamber-vacuum processing chamber communication port. | 12-17-2015 |
20150375263 | UV IRRADIATION DEVICE FOR CLOCKED OPERATION - An irradiation device including at least one radiation source, which emits both UV-radiation and W-radiation, i.e. visible light and/or IR radiation. The device includes a transport device for delivering substrates to be irradiated. At least one wavelength-selective filter reflects UV-radiation at an angle of 45° and transmits W-radiation. Means for the absorption of IR radiation are arranged downstream of the optical filter in the propagation direction in the beam path of the W-radiation not deflected by the wavelength-selective filter. The means for the absorption of IR radiation are also designed to absorb visible light and UV rays, and the irradiation device includes movement means in order to guide the wavelength-selective filter into and out of the beam path of the radiation source. | 12-31-2015 |
20160013017 | METHOD AND APPARATUS FOR A HIGH RESOLUTION IMAGING SYSTEM | 01-14-2016 |
20160023805 | TRAYS FOR USE IN SECURITY SCREENING - The present invention the present invention relates to methods and systems for performing security screening using trays which may be identifiable by a unique tray identification number. | 01-28-2016 |
20160027641 | MULTI-STEP SYSTEM AND METHOD FOR CURING A DIELECTRIC FILM - A multi-step system and method for curing a dielectric film in which the system includes a drying system configured to reduce the amount of contaminants, such as moisture, in the dielectric film. The system further includes a curing system coupled to the drying system, and configured to treat the dielectric film with ultraviolet (UV) radiation and infrared (IR) radiation in order to cure the dielectric film. | 01-28-2016 |
20160042913 | IMPLANT MASKING AND ALIGNMENT - System and method to align a substrate under a shadow mask. A substrate holder has alignment mechanism, such as rollers, that is made to abut against an alignment straight edge. The substrate is then aligned with respect to the straight edge and is chucked to the substrate holder. The substrate holder is then transported into a vacuum processing chamber, wherein it is made to abut against a mask straight edge to which the shadow mask is attached and aligned to. Since the substrate was aligned to an alignment straight edge, and since the mask is aligned to the mask straight edge that is precisely aligned to the alignment straight edge, the substrate is perfectly aligned to the mask. | 02-11-2016 |
20160064187 | CHARGED PARTICLE BEAM APPARATUS | 03-03-2016 |
20160071686 | LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS - An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled to a drive mechanism adapted to selectively move the carriage along the shaft. A platen assembly can be coupled to the carriage, and a linkage conduit can extend between a side wall of the enclosure and the carriage. The linkage conduit can include a plurality of pivotably interconnected linkage members that define a contiguous internal volume that is sealed from the process chamber. The contiguous volume can be held at a desired vacuum pressure separate from the vacuum environment of the process chamber. | 03-10-2016 |
20160082138 | ULTRAVIOLET DISINFECTION UNIT - An ultraviolet (UV) disinfection unit for disinfecting catheter line connections is provided. The unit can be used to disinfect solution set and transfer set catheters used for peritoneal dialysis. The unit can comprise a concavely curved bottom surface. A tubing trough of the unit can allow for ambidextrous positioning. | 03-24-2016 |
20160089461 | SANITIZING DEVICE - The shoe sole sanitizer provides a UV radiation emitting system that kills microbial pathogens deposited on shoe sole surfaces. The system includes a housing containing at least one UV radiation source. Bottom and side portions of the housing are opaque to provide a UV shield while directing the UV upward towards a top housing portion. The top housing portion has a plurality of holes forming an approximate shape of two shoe sole bottoms. The holes allow the UV radiation to escape the housing and target sole surfaces disposed on and over the exterior of the housing top. Each shoe sole approximation area has a pivotal tang that extends therefrom. Shutters attached internally to the tangs extend or limit UV exposure from the top surface depending on the size of the sole disposed on the top. The system is powered by standard AC electrical power or battery sources. | 03-31-2016 |
20160099138 | MALDI SUPPORT WITH MAGNETICALLY HELD SPRING STEEL PLATE - The invention relates to a low-cost spring steel plate as the sample support on a dimensionally stable and precisely shaped substructure, machined from an aluminum alloy, for example, and using a pattern of embedded magnets so that said plate is removable and that a body is created overall which is suitable for use in robots, for example by giving it the dimensions of a conventional microtitration plate. The planarity of the surface onto which the (organic) samples are applied is provided within the near region by the spring steel plate itself and in the far region over the whole spring steel plate by the substructure. The spring steel plate may be designed for single use in order to satisfy IVD diagnostic regulations also, for example. It can be equipped with identification codes, sample site markings and pre-coatings for different types of analytical tasks, such as MALDI-TOF mass spectrometric analysis. | 04-07-2016 |
20160126057 | Ion Milling Device - The present invention aims at providing an ion milling apparatus for emitting an ion beam to a sample to process the sample and capable of controlling the temperature of the sample with high accuracy regardless of deformation or the like of the sample being irradiated with the ion beam, and proposes an ion milling apparatus including at least one of a shield holding member for supporting a shield for shielding the sample from the ion beam while exposing a part of the sample to the ion beam; a shifting mechanism for shifting a surface of the sample stand in contact with the sample following deformation of the sample during irradiation with the ion beam, the shifting mechanism having a temperature control mechanism for controlling temperature of at least one of the shield holding member and the sample stand; and a sample holding member disposed between the shield and the sample, the sample holding member deforming following deformation of the sample during irradiation with the ion beam, for example. | 05-05-2016 |
20160139398 | Specimen Holder, Specimen Preparation Device, and Positioning Method - A specimen holder is used for an optical microscope, comprising: a specimen support that supports a specimen to enable the specimen to tilt relative to the optical axis of the optical microscope; an adjustment plate that has an observation surface for making observations using the optical microscope; and an adjustment plate support that supports the adjustment plate, so that the angle formed by the optical axis and the observation surface is larger than the angle formed by the optical axis and a specimen surface of the specimen. | 05-19-2016 |
20160144199 | RADIATION SYSTEM WITH ROTATING PATIENT SUPPORT - A patient support system includes a patient support having a surface for supporting a patient and a longitudinal axis, and a positioner coupled to the patient support for positioning the patient support, wherein the positioner is configured to move the patient support along a path that has an arc, circular, or zig-zag shape, and wherein the path lies within a plane that forms an angle with the surface of the patient support. | 05-26-2016 |
20160166041 | DEVICE FOR HARDENING NAIL VARNISH BY RADIATION | 06-16-2016 |
20160254497 | DEVICE AND METHOD FOR TRANSFERRING DISPLAY PANEL | 09-01-2016 |