| Entries |
| Document | Title | Date |
|---|
| 20100051501 | IC WAPER CARRIER SEALED FROM AMBIENT ATMOSPHERE DURING TRANSPORTATION FROM ONE PROCESS TO THE NEXT - A wafer carrying structure is provided that allows more efficient operation of the opening and closing mechanisms. More specifically, the wafer carrier includes pressure relief structures that provide appropriate pressure equalization during the opening and closing operations of the wafer carrier. This allows doors on the wafer to be more easily opened and closed while also providing significant environmental isolation for the wafers during transport operations. Relief structures specifically designed to remain closed except for those brief periods of time where pressure relief is necessary to equalize pressure during opening and closing of the carrier. | 03-04-2010 |
| 20100126904 | Thin-plate container - A thin-plate container comprises a container body with an opening and an interior area and being pivotally connected to at least a pair of swing hooks near its opening; a container door for closing the opening of the container body; and a latch component disposed in the container door, which is movable in a to-and-fro direction between a first position and a second position when the container door closes the opening of the container body, wherein in the first position, the latch component is contained in the container door, and in the second position, the latch component extends beyond the container door and is in contact with the pair of swing hooks of the container body for making the container door to move in a sealing direction by using the swing hooks to achieve a sealed status between the container door and the container body. | 05-27-2010 |
| 20110192761 | CLEANING SYSTEM AND A PACKAGE CARRIER FOR A SEMICONDUCTOR PACKAGE - A semiconductor package holder includes two plates, and each plate defining a through-hole. Each of the plates has a set of first members along a periphery of the through-hole and extending into the through-hole. The first members of one of the plates are positioned to overlie the first members of the other of the plates. One of the at least two plates further has a set of second members along a periphery of the through-hole and extending into the through-hole. | 08-11-2011 |
| 20130032508 | TRAY FOR SEMICONDUCTOR INTEGRATED CIRCUITS - The present invention is directed to a tray for semiconductor integrated circuits that enables a BGA semiconductor integrated circuit to be repositioned appropriately in a pocket even if a corner part thereof may fall in a corner part of the recess on the inner bottom surface of a packing pocket. Tapered inner side walls | 02-07-2013 |
| 20100108564 | CLEAN DEVICE WITH CLEAN BOX-OPENING/CLOSING DEVICE - In a load port portion of a conventional clean device, it can happen that cleanliness is reduced by dust caused by wear of bellows and a lid is not separated by its weight from a main body. In order to solve such problems, a clean device is structured as follows: a lid of a clean box has a non-circular reception hole, a load port portion of the clean device has an opening/closing mechanism with a projection fittable in the receiving hole and has a buffer chamber, one end of bellows of the buffer chamber is connected to the bottom surface of the buffer chamber, and the other end of the bellows is fixed, on the outside of the buffer chamber, to raising/lowering means of a port door. | 05-06-2010 |
| 20100006472 | Drain device and method - The present invention provides a drain device for a transporting box with an input/output opening which can be blocked by a box door and which contains substrate wafers stacked according to parallel planes. The drain device comprises a volume limited by a sealed wall divided into at least an upper part with a purging gas inlet orifice and a lower part with a purging gas outlet orifice, with the two parts being separated by a sealed partition, and a range of guides defining the openings arranged parallel to those of the wafers and connecting with the volume of the drain device to direct the purging gas towards the transporting box. | 01-14-2010 |
| 20090095650 | Wafer container with staggered wall structure - A wafer container comprising a base and a cover that nest together. The base includes a staggered wall structure composed of inner and outer walls. The staggered wall structure is arranged so that forces from side impacts are absorbed principally by outer wall segments. A rib on the cover restrains the outer wall segments from flexing beyond the inner wall diameter. Reference tabs on the base facilitate alignment of the base to the cover. | 04-16-2009 |
| 20130092595 | WAFER CARRIER - A wafer carrier comprises a supporting body having a height and comprising an opening, wherein a bottom surface of the opening is a curved surface; and a plurality of supporting rods formed around a periphery of the supporting body. Another aspect of the present application provides a manufacturing method of the wafer carrier. The method comprises forming an epitaxial layer on a growth substrate to form a wafer structure; measuring a curvature radius of the wafer structure; and providing the wafer carrier described above in accordance with the curvature radius of the wafer structure. | 04-18-2013 |
| 20090236261 | ELECTRONIC COMPONENT ACCOMMODATING DEVICE - An electronic component accommodating device which can be stacked in plural, the electronic component accommodating device includes an upper surface side wall part extending from an upper surface of the electronic component accommodating device, the upper surface side wall part being positioned close to a flange extending from a lower surface of another electronic component accommodating device stacked on the electronic component accommodating device, wherein a side surface of the upper surface side wall part a side end part of the electronic component accommodating device is formed in a taper shape and has an inclination angle from a horizontal surface, the inclination angle being equal to or less than 60 degrees. | 09-24-2009 |
| 20130068656 | Large-sized Front Opening Unified wafer POD - A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support wafers in the pod, and with an OHT pad (Overhead Hoist Transport pad), a major function of which is to evenly distribute the weight of the FOUP and the wafers so that the transportation of the FOUP and the wafers by the OHT head can be further stabilized and more weight can be loaded to meet the demands of the process. | 03-21-2013 |
| 20120187024 | WAFER CONTAINER - Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism and an improved bottom holding mechanism for automation. The side protection to the wafers is with multiple staggered inner and outer walls. The improved cover design improves alignment of the top and bottom housings and minimizes rotation of the housings in transit or motion. The housings have a recessed tab ramp feature with bi-directional locking that also increases the rigidity of the containment device when the two housings are assembled. The improved bottom holding mechanism for automation is an integrated feature that is molded into the bottom housing and not assembled in a secondary operation. The molded integration reduces tolerance errors that are present in assembling multiple pieces and joining multiple pieces. | 07-26-2012 |
| 20110284423 | METHOD AND STORAGE SYSTEM FOR REDUCING CONTAMINATION OF A PHOTOMASK - A method for reducing contamination of a photomask that has a pellicle frame holding a pellicle film to cover the photomask, and a sealed space defined by the pellicle frame, the pellicle film and the photomask, includes: (a) providing a pressure regulating hole in the pellicle frame; (b) disposing the photomask into a receiving space of a chamber to fluidly connect the sealed space with the receiving space of the chamber; and (c) varying a temperature of the photomask to change a gas pressure within the sealed space and to thereby produce a gas transfer between the sealed space and the receiving space through the pressure regulating hole. | 11-24-2011 |
| 20090038984 | SUBSTRATE STORAGE CONTAINER AND METHOD OF PRODUCING THE SAME - A substrate storage container that can be highly accurately positioned and produced at increased productivity, and a method of producing the substrate storage container are provided. The substrate container ( | 02-12-2009 |
| 20090038986 | Lid unit thin plate supporting container - The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion. | 02-12-2009 |
| 20100032339 | COVER BODY AND SUBSTRATE RECEIVING CONTAINER - A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking mechanism provided in the casing for locking the casing by causing an engaging piece to project out from the peripheral wall of the casing in a retractable manner based on rotation of a rotator so as to interfere with the inner periphery of the opening portion of the container body, a cover for enclosing the locking mechanism, and an operational window formed in the cover so as to oppose the rotator. | 02-11-2010 |
| 20110215029 | Pod with Guiding-Locking piece therein - The present invention discloses a pod which includes a lower cover member, an upper cover member and a guiding locking piece. The a guiding locking piece deployed on one side of the upper cover member of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a second slope, two openings deployed on two side areas of the overall structure, and an upper locking piece and a lower locking piece deployed in each of two openings. When the mask is placed into the lower cover member of pod and is covered by the upper cover member, the mask is pushed to certain position and supported and locked by the upper locking piece and the lower locking piece. | 09-08-2011 |
| 20110215028 | SUBSTRATE STORAGE POD AND LID OPENING/CLOSING SYSTEM FOR THE SAME - The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism. | 09-08-2011 |
| 20090152162 | CARRIER APPARATUS AND METHOD FOR SHAPED SHEET MATERIALS - A carrier apparatus for holding a shaped sheet material includes a first frame structure with a first front surface including a first outer peripheral region and a first inner peripheral region separated by a first step. The apparatus further includes a second frame structure with a second front surface including a second outer peripheral region and a second inner peripheral region separated by a second step. The second front surface is configured to engage with the first front surface so that the second outer peripheral region is at least partially in contact with the first outer peripheral region and the second step circumferentially mates the first step with the second inner peripheral region opposing to the first inner peripheral region by a gap. The carrier apparatus further includes one or more locking mechanisms and a shaped wing structure extended from outer peripheral edge of the first frame structure. | 06-18-2009 |
| 20090206000 | ELECTRONIC DEVICE CARRIER TAPE - One aspect provides a carrier tape configured to transport semiconductor packages having a semiconductor package thickness. The carrier tape includes a film having a film thickness extending between a first major surface and a second major surface that is less than the semiconductor package thickness. The film is structured to define at least a first structure and a second structure extending between the first and second major surfaces, the first and second structure(s) each having a structure height that is at least equal to the semiconductor package thickness. A hole is punched entirely through the film thickness to define a pocket positioned between the first and second structures, the pocket having a depth equal to the structure height. | 08-20-2009 |
| 20080237089 | CARRIER TO HOLD SEMICONDUCTOR DEVICE USING OPPOSED ROLLERS - A carrier for a semiconductor device includes a body having an opening formed therein to receive the semiconductor device and a pair of rollers to hold the semiconductor device between the rollers in the opening. | 10-02-2008 |
| 20090277816 | Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith - A package of a thin plate container | 11-12-2009 |
| 20090090653 | Low cost wafer box improvements - The wafer box includes a tray ( | 04-09-2009 |
| 20080277313 | WAFER SUPPORTER - A wafer supporter includes a base and a plurality of rods vertically fixed on the base. Each rod includes holders to support a wafer. Each of the holders has a downwardly slanted top surface relative to the corresponding rod for a pre-determined angle so that the wafer lies on the top surface on its rim. | 11-13-2008 |
| 20090272669 | SUBSTRATE ACCOMMODATING APPARATUS - A substrate accommodating apparatus 10 is constituted by stacking a plurality of accommodation bodies 20 on an upper surface of a rigid plate 15. Each accommodation body 20 is provided with a buffer 21 having elasticity and some conductivity and a load receptacle 22 having a frame-shaped body, while an upper surface of the buffer 21 is provided with a substrate protect layer 23 made of cellulose. The substrate accommodating apparatus 10 is arranged to enclose a substrate S therein by stacking the accommodation bodies 20 where the substrates are placed, and when the accommodation bodies 20 are stacked, each load receptacle 22 places the load of the respective accommodation body 20 on a periphery of the adjacent lower accommodation body 20 so that any load is not placed on the central portion of the lower accommodation body 20 where the substrate S is placed. | 11-05-2009 |
| 20110203967 | Arrangement Comprising at Least One Power Semiconductor Module and a Transport Packaging - An arrangement comprising: at least one power semiconductor module and a transport packaging. The power semiconductor module has a base element, a housing and connection elements. The transport packaging has a cover layer, an interlayer with a respective cutout assigned to the power semiconductor module, and a cover film. The cover layer is generally planar, and has a first main surface facing the power semiconductor module. The interlayer is arranged on the first main surface of the cover layer. The power semiconductor module is arranged in the cutout, on the first main surface of the cover layer, wherein the base element of the power semiconductor module is disposed on the first main surface of the cover layer. The cover film bears on and covers substantial parts of the housing of the power semiconductor module. The cover film is connected to the first main surface of the interlayer. | 08-25-2011 |
| 20090266740 | WAFER CONTAINER WITH CUSHION SHEET - A wafer container with wafer-mounting cushion sheets prevents breaking and damage of semiconductor wafers due to impacts or repetitive warping by maintaining the semiconductor wafer in a flat state and enables the semiconductor wafer to be removed safely and easily without damage. The surface of each wafer-mounting cushion sheet includes a self-sucking portion for exerting a removable vacuum on the semiconductor wafer and a non-sucking portion for enabling separation of the semiconductor wafer. | 10-29-2009 |
| 20080251414 | Container and metal actuator of latching mechanism thereof - A container having a box door and a box is disclosed in this invention, which has an internal area within the box for storage; when the box is joined with the box door, the internal area is sealed off from the external environment. A latching mechanism is disposed within the box door and comprises a metal actuator and a latch plate, and the metal actuator and the latch plate are connected. Movements of the metal actuator allow the latch plate to shift positionally, and thus the latch plate is moved from a first position to a second position. When the latch plate is in the first position, the box and the box door may be separated from each other, whereas when the latch plate is in the second position, the box and the box door are inseparable. | 10-16-2008 |
| 20080251415 | SUBSTRATE CONTAINER AND HANDLE THEREOF - A substrate container includes: a container main body including an opening and containing a substrate; a lid body closing the opening; and a pair of handles provided on a pair of opposing side walls of the container main body, and the handle is secured to an edge portion of the side wall. | 10-16-2008 |
| 20120067770 | CASSETTE ADAPTER, ADAPTER MAIN BODY LOCKING APPARATUS AND SEATING SENSOR MECHANISM - A cassette adapter which makes it possible for a second cassette which accommodates a circular wafer of a diameter of 200 mm to be used on a load port ready for a first cassette which accommodates a different circular wafer of another diameter of 300 mm is locked to the load port by an adapter main body locking apparatus. The locking apparatus includes a locking air cylinder serving as a locking member for locking the first cassette to a carrier base of the load port, and a locking target member provided integrally on a rear face of an adapter plate of the cassette adapter for disengageably engaging with a locking pawl at an end of a rod of the air cylinder. A seating sensor mechanism detects that the second cassette is seated at a correct position on the adapter plate. | 03-22-2012 |
| 20090211940 | CLOSED CONTAINER AND CONTROL SYSTEM FOR CLOSED CONTAINER - A closed container in which a reticle etc. is stored and kept is provided with a pressure sensor, transmission means for transmitting data on the pressure, a controller that controls the operation of them, and a battery serving as a power source of the above elements. The controller has a sleep mode in which it causes the transmission means to transmit the data on the pressure at regular intervals and an active mode in which it causes the transmission means to transmit the data on the pressure when necessary in response to an externally supplied command. By the above described configuration, the pressure in the interior of the container can be checked appropriately. | 08-27-2009 |
| 20100193398 | REUSABLE SAMPLE HOLDING DEVICE PERMITTING READY LOADING OF VERY SMALL WET SAMPLES - A reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. Embodiments may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, embodiments provide a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm. | 08-05-2010 |
| 20100236976 | WAFER CONTAINER WITH OVERLAPPING WALL STRUCTURE - Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism and an improved bottom holding mechanism for automation. The side protection to the wafers is with multiple staggered inner and outer walls. The improved cover design improves alignment of the top and bottom housings and minimizes rotation of the housings in transit or motion. The housings have a recessed tab ramp feature with bi-directional locking that also increases the rigidity of the containment device when the two housings are assembled. The improved bottom holding mechanism for automation is an integrated feature that is molded into the bottom housing and not assembled in a secondary operation. The molded integration reduces tolerance errors that are present in assembling multiple pieces and joining multiple pieces. | 09-23-2010 |
| 20090114563 | RETICLE STORAGE APPARATUS AND SEMICONDUCTOR ELEMENT STORAGE APPARATUS - The present invention provides a reticle storage apparatus and a semiconductor element storage apparatus each equipped with a filtering device. The reticle storage apparatus or the semiconductor element storage apparatus is constructed from a first cover and a second cover, which are assembled together to form an inner space therebetween for accommodating a reticle or a semiconductor element. The second cover of the reticle storage apparatus or the semiconductor element storage apparatus comprises at least one aperture for communicating the inner space and an outer of the reticle storage apparatus or the semiconductor element storage apparatus and a filtering device for covering the aperture. | 05-07-2009 |
| 20110000817 | RETAINER AND SUBSTRATE STORAGE CONTAINER PROVIDED WITH SAME RETAINER - When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupling piece is provided extending in a vertical direction and having both ends thereof coupled to a horizontal direction part of the frame, and a protruding part protruding inside a substrate container is provided on the coupling piece. Then, this protruding part is configured to have an inclined face which is inclined in a direction intersecting the substrate and enabled to come into contact with the periphery of the substrate, and thereby this inclined face guides the substrate to reduce the friction of the substrate and to control the position of the substrate. | 01-06-2011 |
| 20110024325 | WAFER BOX FOR THE TRANSPORT OF SOLAR CELL WAFERS - A wafer box for transporting solar cell wafers includes a bottom and guide elements for positioning the solar cell wafers. Four guide angles having centering ridges are provided coaxially with a centric axis on the upper side of the bottom, wherein the fronts of the centering ridges are oriented toward the inserted solar cell wafers. The distance between the fronts of two opposing centering ridges corresponds to the width of the solar cell wafers. A stacking wall having a grip opening is provided on each of two opposing sides of the bottom, and a support bottom is provided, so as to be guided at least on the centering ridges. The bottom has an opening on the centric axis, and has four apertures, for lifting rams for raising the solar cell wafers on the supporting bottom, on a concentric pitch circle at points of intersection with the diagonals of the bottom. | 02-03-2011 |
| 20110042266 | WAFER CONTAINER WITH CUSHION SHEETS - An elastic wafer-retaining cushion sheet is disposed at a wafer retaining position on the top of a wafer tray. The wafer-retaining cushion sheet has a releasably suction-adhering surface that releasably adheres by suction to the wafer tray. Consequently, there is no likelihood of the semiconductor wafer being damaged during transport or the like. In addition, the wafer-retaining cushion sheet can be readily attached to and detached from the wafer tray for washing or replacement according to need. | 02-24-2011 |
| 20110079539 | WAFER STORAGE CONTAINER - A wafer storage container including a container body having an opening adapted to store wafers is disclosed. The container body includes a window and wafer support parts. Delivery components are attached to the exterior face part of the container body. The delivery components includes a bottom plate disposed at a bottom of the container body, a pair of side handles disposed at both sides of the container body, and a robotic flange disposed at a top of the container body. The container further is provided with a lid adapted to seal the opening of the container body. The lid includes a lid main body, a pair of latch mechanism disposed within the lid main body, a retainer member disposed at an inner surface of the lid main body, a seal gasket member disposed at a periphery of the lid main body such that it contacts a periphery of an opening part of the container body and a lid cover. The container body, the delivery components and the lid main body are formed of a self-extinguishing material, and the latch mechanism and the retainer member are formed of PEEK, and the gasket member is formed of elastomeric resin. | 04-07-2011 |
| 20110210042 | SUBSTRATE STORAGE POD AND LID MEMBER THEREOF, AND PROCESSING APPARATUS FOR A SUBSTRATE - The substrate storage pod includes a pod case for housing a substrate, and an opening, a lid member which closes and seals the opening, a buffer space which is defined in the lid member, an air-supply port for supplying a replacement gas into the buffer space; and multiple holes which are arranged so as to establish communication between the buffer space and an inner plate of the lid member in a state of being fit-inserted to the opening of the pod case, for sending out the replacement gas into the hollow inner space, the replacement gas having been supplied into the buffer space, the inner plate facing the hollow inner space of the pod case. With this, pressure variation of the replacement gas in supply pipes is blocked, and hence replacement-gas flow in a stable laminar state free from disturbance can be obtained. | 09-01-2011 |
| 20110210041 | SUBSTRATE STORAGE POD WITH REPLACEMENT FUNCTION OF CLEAN GAS - The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for exhausting a replacement gas in the hollow inner space of the pod case; and an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port. The exhaust space is defined in the hollow inner space by a multi-hole partition member including multiple holes and by an inner surface of the pod case. In the substrate storage pod, back pressure on an exhaust side can be lowered, and hence dust in the pod can be collected to the exhaust side. | 09-01-2011 |
| 20090050518 | WAFER CONTAINER WITH CUSHION SHEETS - A wafer-retaining cushion sheet ( | 02-26-2009 |
| 20090038985 | PHOTOMASK POD, PHOTOMASK TRANSPORT POD AND SUPPORTER THEREOF - A photomask pod and a photomask transport pod are provided for preventing particles in the environment from defiling a photomask as well as charge accumulation on the photomask from causing ESD damage. The photomask pod comprises two covers and the supporters or retainers on at least one of the two covers are made of a static dissipative material, which facilitates reducing charge accumulation and protecting the photomask from ESD damage. | 02-12-2009 |
| 20100038281 | Front Opening Unified Pod with latch component - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting wafers and an open front is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers within the container, the characteristic in that: at least one latch component including a cam and a pair of moving bars is disposed between outer surface and inner surface of the door, wherein a pair of cam grooves are disposed on the cam for being connected with guide bar on one end of the pair of moving bars, and each moving bar includes a slide groove for being fixed in by roller disposed between outer surface and inner surface of the door, which in turn allows the rotation of the cam to cause to-and-fro movement of another end of the moving bars. | 02-18-2010 |
| 20100065467 | ANTIVIBRATION MECHANISM FOR ARTICLE RECEIVING CONTAINER - An object is to restrict vibration from being transmitted to a shelf member and thus to prevent a substrate supported on the shelf member from being damaged. An FOUP main body | 03-18-2010 |
| 20100126905 | STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE - The present invention provides a storage apparatus for storing a semiconductor element or a reticle. The storage apparatus comprises a first cover, a second cover and a flange. The first cover has a top and a plurality of laterals around the top. The second cover is for being assembled with the first cover to form an inner space for accommodating the reticle. As to the flange, it is provided on the first cover for being mechanically held and placed. The characteristic of the disclosed storage apparatus is that the flange and the first cover are integrally formed. | 05-27-2010 |
| 20110049006 | WAFER CONTAINER WITH RECESSED LATCH - Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism and an improved bottom holding mechanism for automation. The side protection to the wafers is with multiple staggered inner and outer walls. The improved cover design improves alignment of the top and bottom housings and minimizes rotation of the housings in transit or motion. The housings have a recessed tab ramp feature with bi-directional locking that also increases the rigidity of the containment device when the two housings are assembled. The latching mechanism is located in a protective latch well that minimizes accidental opening of the latch(s). The improved bottom holding mechanism for automation is an integrated feature that is molded into the bottom housing and not assembled in a secondary operation. | 03-03-2011 |
| 20110253591 | Reticle Pod Having Function of Gas Exchange - A reticle pod for storing reticles, into the gas channel of partition of which gas is filled through a gas inlet, wherein strong gas flow is formed around the pellicle film and the pellicle film expands outward in accordance with the Bernoulli's principle; when no gas is filled in through the gas inlet, the pellicle film contracts inward. Therefore, by turning on and shutting off the gas inlet valve, the pellicle film will be set in a breathing motion for the gas inside the pellicle film to be exchanged. | 10-20-2011 |
| 20090127160 | STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE - The present invention provides a storage apparatus for storing a semiconductor element or a reticle. The storage apparatus comprises a first cover, a second cover and a flange. The first cover has a top and a plurality of laterals around the top. The second cover is for being assembled with the first cover to form an inner space for accommodating the reticle. As to the flange, it is provided on the first cover for being mechanically held and placed. The characteristic of the disclosed storage apparatus is that the flange and the first cover are integrally formed. | 05-21-2009 |
| 20100282638 | Wafer container - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which, and a door, which is joined with opening of the container body for protecting the plurality of wafers in the container body, the characteristic in that: a magnetic member is formed at the inner edge of the opening of the container body and a magnet is disposed at the inner surface of the door corresponding to the magnetic member, the magnet being disposed in a magnetic yoke with recessed cross section, with the design of which the magnet on the door attracts the magnetic member at the opening of the container body for the door and the container body to be lock-fastened to each other. | 11-11-2010 |
| 20110114534 | WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS - A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion. | 05-19-2011 |
| 20100116709 | VENTILATED FRONT-OPENING UNIFIED POD - An improved substrate transport pod for storing or transporting semiconductor wafer substrates during semiconductor wafer processing has a main body defined by a plurality of side panels. A substantial portion of at least one of the side panels being formed of a semi-permeable membrane allowing any corrosive gas molecules introduced to the interior of the pod to diffuse out of the transport pod through the semi-permeable membrane while preventing particulate contaminants from entering the transport pod. | 05-13-2010 |
| 20110100870 | SUPPORTING BODY AND SUBSTRATE STORAGE CONTAINER - A separate supporting body for supporting semiconductor wafers of φ450 mm is attached to the inner surface of either side wall of a container body. Each supporting body is formed of a front supporting piece that is projected laterally from a frame and horizontally retains the wafer on, at least, the side part in the front peripheral edge; and a rear supporting piece that is projected laterally from frame and horizontally retains the wafer on, at least, the side part in the rear peripheral edge. Front supporting piece is formed of a projected part that extends from the front of frame toward the front peripheral edge of the semiconductor wafer and a curved part that extends rearwards from projected part along the peripheral edge of the semiconductor wafer. | 05-05-2011 |
| 20100059408 | CLOSED CONTAINER AND LID OPENING/CLOSING SYSTEM THEREFOR - In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism. | 03-11-2010 |
| 20090308784 | WAFER STORAGE CARRIER - It is an object of the invention to provide a wafer storage carrier that makes it possible to prevent wafers from being damaged or broken, regardless of the state of wafer warpage. | 12-17-2009 |
| 20120043253 | SEMICONDUCTOR PACKAGE TRANSFERRING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A semiconductor package transferring apparatus is disclosed. The apparatus includes a tray that includes a front side and a rear side opposite the front side, the rear side including a plurality of package covering portions that each correspond to the shape of a semiconductor package and that are arranged to align with corresponding package loading portions on a front side of another tray. Each package covering portion has a surface configured to cover a semiconductor chip disposed below the surface. The apparatus further includes an anti-attachment portion disposed on the surface of one or more of the package covering portions. For each package covering portion on which an anti-attachment portion is disposed, the anti-attachment portion protrudes beyond the surface of the package covering portion. | 02-23-2012 |
| 20120000816 | Port Door Positioning Apparatus and Associated Methods - A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door. | 01-05-2012 |
| 20120018347 | Reticle POD with Sensor - An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container. | 01-26-2012 |
| 20120168346 | WAFER CONTAINER WITH STAGGERED WALL STRUCTURE - A wafer container comprising a base and a cover that nest together. The base includes a staggered wall structure composed of inner and outer walls. The staggered wall structure is arranged so that forces from side impacts are absorbed principally by outer wall segments. A rib on the cover restrains the outer wall segments from flexing beyond the inner wall diameter. Reference tabs on the base facilitate alignment of the base to the cover. | 07-05-2012 |
| 20100206767 | LID BODY FOR SUBSTRATE STORAGE CONTAINER AND SUBSTRATE STORAGE CONTAINER - A substrate storage container includes a locking mechanism, provided in a lid for opening and closing an opened front portion of a container body which stores a substrate of three sheets or less, for locking the lid fitted into the front portion of the container body. The locking mechanism is supported by the lid which is substantially laterally long when viewed from the front. The locking mechanism includes an advance/retreat engaging body that opposes an inner periphery of the front portion of the container body when the lid is fitted into the front portion of the container body, and a spring member that causes the advance/retreat engaging body to advance from the lid to the inner periphery of the front portion of the container body and thus causes a tip end portion side thereof to interfere when the lid is fitted into the front portion of the container body. | 08-19-2010 |
| 20120132561 | WAFER CONTAINER - Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism and an improved bottom holding mechanism for automation. The side protection to the wafers is with multiple staggered inner and outer walls. The improved cover design improves alignment of the top and bottom housings and minimizes rotation of the housings in transit or motion. The housings have a recessed tab ramp feature with bi-directional locking that also increases the rigidity of the containment device when the two housings are assembled. The improved bottom holding mechanism for automation is an integrated feature that is molded into the bottom housing and not assembled in a secondary operation. The molded integration reduces tolerance errors that are present in assembling multiple pieces and joining multiple pieces. | 05-31-2012 |
| 20100051502 | CARRIER HAVING INTEGRAL DETECTION AND MEASUREMENT OF ENVIRONMENTAL PARAMETERS - A carrier includes an enclosure for storing articles sensitive to electrostatic discharge (ESD) and a replacement component that is affixed to the enclosure as an integral component of the carrier. The replacement component includes a housing that provides an enclosure for a device having a sensor for sensing one or more environmental parameters. At least one of the sensed environmental parameters is an ESD parameter. | 03-04-2010 |
| 20120312720 | Semiconductor Wafer Storing Container - The dimensions of the deformation margins (Xh, Xp) of a gasket ( | 12-13-2012 |
| 20110036748 | Wafer Container With Staggered Wall Structure - A wafer container comprising a base and a cover that nest together. The base includes a staggered wall structure composed of inner and outer walls. The staggered wall structure is arranged so that forces from side impacts are absorbed principally by outer wall segments. A rib on the cover restrains the outer wall segments from flexing beyond the inner wall diameter. Reference tabs on the base facilitate alignment of the base to the cover. | 02-17-2011 |
| 20120273389 | SEMICONDUCTOR TRAY CARRIER - A semiconductor tray carrier has a base part and first and second side parts. The first and second side parts are movable between a stowed position and a deployed position in which the side parts extend from the base part to form side walls. Multiple tray carriers can be stacked one upon the other when the side walls are in either the stowed or deployed positions. When stacked in the stowed position, the tray carriers require very little storage space. Windows are provided for attaching details on the contents of the tray carriers. | 11-01-2012 |
| 20120080354 | Cassette for Loading Substrate - Disclosed is a cassette for loading a substrate, which includes a cassette main body which includes upper and lower frames spaced apart at upper and lower sides, a plurality of internal support bars for supporting the substrate, side frames provided at opposite sides of the upper and lower frames and forms a box shape to internally receive the substrate; a center frame which includes a plurality of internal support bars for supporting the substrate and is vertically disposed in a back of the upper and lower frames; and a connecting member which is provided between the center frame and the cassette main body and detachably connects the center frame to the cassette main body, wherein the connecting member comprises a first fixing unit fixed to the cassette main body, and a second fixing unit fixed to the center frame and detachably coupled to the first fixing unit, the first fixing unit being installed at each of a front and a back of the cassette main body. | 04-05-2012 |
