Class / Patent application number | Description | Number of patent applications / Date published |
073514360 | Pendulum or beam | 13 |
20090071251 | ACCELERATION SENSOR - An acceleration sensor includes a frame-shaped beam portion disposed above an XY substrate surface of a base in a floating state and a beam-portion supporting/fixing unit arranged to attach the beam portion to the base with support portions so as to be supported on two sides. The acceleration sensor also includes weight portions disposed above the XY substrate surface of the base in a floating state and connecting portions for attaching the weight portions to the beam portion in a cantilever state. The weight portions are movable in three axial directions including an X-axis direction, a Y-axis direction, and a Z-axis direction when the beam portion is deflected. The beam portion is provided with an X-axis-direction acceleration detection unit arranged to detect an acceleration in the X-axis direction, a Y-axis-direction acceleration detection unit arranged to detect an acceleration in the Y-axis direction, and a Z-axis-direction acceleration detection unit arranged to detect an acceleration in the Z-axis direction. The Z-axis-direction acceleration detection unit is disposed near proximal ends of Y-axis-direction extending portions of the beam portion, and the Y-axis-direction acceleration detection unit is disposed near distal ends of the Y-axis-direction extending portions. | 03-19-2009 |
20090107240 | INVERTED PENDULUM TYPE MOVING BODY AND METHOD OF CONTROLLING THE SAME - An inverted pendulum type moving body according to the present invention includes: first actuators that rotationally drive wheels each disposed on an axle; and a turning motion control portion that controls the first actuators when the inverted pendulum type moving body comes into contact with an obstacle so as to allow the inverted pendulum type moving body to perform a turning motion. | 04-30-2009 |
20090241671 | Acceleration sensor - An acceleration sensor includes a weight portion; a frame portion disposed around the weight portion and away from the weight portion; a beam portion connecting the weight portion and the frame portion; and a stopper portion having a displacement restricting portion for restricting the weight portion from moving upwardly in a vertical direction and a flexible portion connected to the displacement restricting portion and away from the weight portion, the frame portion, and the beam portion. | 10-01-2009 |
20090320597 | MICRO ELECTRO MECHANICAL SYSTEMS ELEMENT FOR MEASURING THREE-DIMENSIONAL VECTORS - Provided that an x-axis, a y-axis and a z-axis are three axes of a rectangular coordinate system, a micro electro mechanical systems element comprises a support section whose length in the y-direction is shorter than a length in the x-direction, parallel arranged two film-like beam sections whose length in the y-direction is shorter than a length in the x-direction, a weight section, whose length in the y-direction is shorter than a length in the x-direction, spanning centers of the two beam sections and comprising a connecting part spanning the two beam sections, two projection parts projecting to opposite directions from the connecting part in a space between the two beam sections, and a plurality of distortion detectors which are placed on each beam section and detect distortion corresponding to deformation of the beam sections to measure xyz components of a vector corresponding to force acting on the weight section. | 12-31-2009 |
20110113881 | ACCELERATION SENSOR AND METHOD OF FABRICATING ACCELERATION SENSOR - There is provided an acceleration sensor including: a weight portion; plural fixed portions formed above a bottom plate around a periphery of the weight portion; a beam portion coupling the fixed portions and the weight portion, and holding the weight portion at a position separated from the bottom plate; a detection portion provided at the beam portion and detecting deformation of the beam portion; a frame portion provided so as to project out from the bottom plate and surround the fixed portions at a position separated from the fixed portions; and a lid portion of plate shape that seals an opening of the frame portion. | 05-19-2011 |
20120167686 | LOW FREQUENCY FOLDED PENDULUM WITH HIGH MECHANICAL QUALITY FACTOR, AND SEISMIC SENSOR UTILIZING SUCH A FOLDED PENDULUM - The invention concerns a folded pendulum, comprising:
| 07-05-2012 |
20130283914 | ACCELERATION SENSOR - An acceleration sensor includes a frame having a hollow space at an inside thereof, four beams extending from the frame to the hollow space, four plummets connected to ends of the four beams, and four sensing units provided on the four beams. One ends of the beams is connected to portions of the frame opposite to each other with respect to the hollow space. The two plummets face each other across the center of the hollow space. One ends of the other two beams are connected to portions of the frame opposite to each other with respect to the hollow space. The other two plummets face each other across the center of the hollow space. This acceleration sensor reduces variations and temporal changes in its sensitivity. | 10-31-2013 |
20140069191 | ACCELEROMETER AND ITS FABRICATION TECHNIQUE - An accelerometer, comprises, a measurement mass, a top cap silicon wafer and a bottom cap silicon wafer, which both are coupled with the said measurement mass; the measurement mass comprises a support frame, a mass, and a plurality of resilient beams; the mass and the resilient beams are located within the support frame; the mass and the support frame are connected by several sets of the resilient beams, and each set comprises two resilient folding beams; the resilient folding beams are symmetrically provided with respect to the midline of the mass; a connection beam is provided in between each set of the resilient folding beams to connect the resilient folding beams together. Silicon wafers with electrodes are bonded on the top and bottom surfaces of the measurement mass; and forms a capacitor with the measurement mass. The accelerometer in the present invention has a large mode isolation ratio, and it is symmetrical in high order vibrational modes , which further decreases the noise of the MEMS chip. Therefore, the accelerometer has the advantages of high measurement accuracy, high stability, and low noise. | 03-13-2014 |
20140123756 | PENDULAR ACCELEROMETER - A device for measuring the acceleration of a moving body includes a pendulum capable of oscillating about an instantaneous center of rotation and a detection system capable of detecting an oscillation of the pendulum that is likely to result from the acceleration. The pendulum has a geometric configuration enabling it to interact with the detection system. The geometric configuration is such that the detection system only indicates an oscillation of the pendulum that exceeds a threshold oscillation value. | 05-08-2014 |
20150114119 | ACCELERATION SENSOR - Embodiments of the invention provide an acceleration sensor, including a mass body part including a first mass body and a second mass body, flexible beams coupled with the first mass body, and a support part including first support parts, which are connected to the flexible beams and are disposed to face the second mass body, and second support parts, which are coupled with the first support parts. The mass body part, the flexible beams, and the support parts are configured of a first substrate and a second substrate coupled with each other so as to be stacked, and when the mass body part is excessively displaced, the second mass body contacts the first support parts to limit the displacement of the mass body part. | 04-30-2015 |
20150135834 | MICRO ELECTRO MECHANICAL SYSTEMS SENSOR - There is provided a MEMS sensor including: a mass body; a support part floatably supporting the mass body; and a flexible beam having one end connected to the mass body and the other end connected to the support part. At least one end of the flexible beam connected to the mass body or the support part includes a curved portion to maximize an effective length supporting a load. | 05-21-2015 |
20160003865 | SENSOR WITH ELECTROSTATIC PENDULAR ACCELEROMETER AND METHOD OF CONTROLLING SUCH A SENSOR - An accelerometer sensor and method of controlling the sensor, the accelerometer sensor including at least one electrostatic pendular accelerometer having stationary first and second electrodes fastened to a housing and connected to an exciter circuit, and a third electrode carried by a pendulum connected to the housing, thereby being movable and being connected to a detector circuit. The exciter circuit has an output connected to a switch connected to the first and second electrodes, the switch having a first connection position and a second connection position for selectively connecting the first or second electrode to the exciter circuit. The detector circuit, the exciter circuit, the switch, and the detector circuit are connected to a control circuit arranged so the first and second electrodes are excited by pulse trains, thus keeping the pendulum in a setpoint position and determining an acceleration to which the pendulum is subjected. | 01-07-2016 |
073514370 | Including a pivot support | 1 |
20140290364 | ACCELEROMETER - An accelerometer for sensing acceleration along a sensing axis, includes a flexure member (having a pendulum member pivotably connected to a support member via a hinge arrangement), a housing, and at least one mounting structure configured for clamping the support member to the housing in load bearing contact while concurrently allowing for differential movement between the support member and the housing. Also disclosed are a corresponding housing member for use with a flexure member of an accelerometer, and a flexure member for use with a housing of an accelerometer. | 10-02-2014 |