Class / Patent application number | Description | Number of patent applications / Date published |
073514340 | Piezoelectric sensor | 41 |
20080216574 | Sensor device and method for fabricating sensor device - The sensor device includes a dead-weight portion, a frame portion disposed so as to surround the dead-weight portion, a supporting portion provided at the frame portion via a first insulating layer, a mass portion provided at the dead-weight portion via a second insulating layer, a beam portion connecting the supporting and mass portions, a first concave portion, and a second concave portion, wherein a depth of the first or second concave portion is from 3.3% or more to 5.0% or less of the width of the frame portion. | 09-11-2008 |
20080223132 | Vibration Piezoelectric Acceleration Sensor - A vibration piezoelectric acceleration sensor including a pair of diaphragms linearly and oppositely disposed on a frame, a support body supporting the diaphragm, and a holding part holding the support body slidably in a linear direction, and another pair of diaphragms disposed linearly and oppositely crossing the pair of diaphragms detecting acceleration in two axes, i.e. X and Y directions. The diaphragms are extended and retracted by the acceleration transmitted to the support body through the holding part, changing a natural oscillation frequency. Accordingly, a high change ratio of resonance frequency can be provided with the detection of the acceleration, and the acceleration in two axes directions can be detected without being affected by a change in temperature. | 09-18-2008 |
20080229826 | ACCELERATION SENSOR AND ELECTRONIC DEVICE - An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer and having a base section affixed to the vibration section forming layer and two beam sections extending from the base section, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on each of the beam sections; the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency; and the detection circuit detects a change in the frequency of vibrations of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the beam sections extend, and outputs a signal corresponding to the acceleration based on the change in the frequency. | 09-25-2008 |
20080236283 | ACCELERATION SENSOR AND ELECTRONIC DEVICE - An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on the vibration section, the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency, and the detection circuit detects a change in the frequency of vibration of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the vibration section extends, and outputs a signal corresponding to the acceleration based on the change in the frequency. | 10-02-2008 |
20080245149 | Sensor - An acceleration sensor for measuring an acceleration comprises a housing including a measuring-plate, which has a first surface. The measuring plate has a second surface in parallel with and opposite to the first surface. A post is bonded via a post-bonding-face to the first surface. A temperature-compensating-element for compensating a temperature-effect caused by a temperature acting on the measuring-plate, is bonded via an element-bonding-face to the second surface of the measuring-plate. In addition, a sensor as described above is in a measuring device. | 10-09-2008 |
20090056450 | ACCELERATION SENSOR - An acceleration sensor includes a detection element having a plurality of piezoelectric ceramic layers laminated together and a pair of retaining members that retain an end portion of the detection element in a longitudinal direction thereof at two principal surfaces of the end portion. The detection element includes electrodes between the ceramic layers and on principal surfaces. The detection element obtains a voltage or a charge generated in the detection element in response to an application of acceleration from the principal-surface electrodes and the interlayer electrodes. The piezoelectric ceramic layers are not polarized in areas between the principal-surface electrodes and the interlayer electrodes within a retaining area in which the detection element is retained by the retaining members. | 03-05-2009 |
20090078044 | Ultra-low noise MEMS piezoelectric accelerometers - Sensing structures are provided which are designed using non-conventional designs. These sensing structures have improved sensitivity and noise floor at low frequencies. | 03-26-2009 |
20090084182 | MICROMECHANICAL SENSOR ELEMENT - A micromechanical sensor element ( | 04-02-2009 |
20100005886 | SENSOR AND ITS FABRICATION PROCESS - The invention provides a sensor comprising a frame, a plurality of beams extending inwardly from said frame, a weight portion supported by the beams, a piezoelectric-resistor formed on each beam and an insulating layer that covers the piezoelectric-resistor. The piezoelectric-resistor has at least one bend, and a metal wiring is located on the insulting layer positioned at the bend. The metal wiring is connected to the bend via at least two contact holes formed in the insulating layer. Contact holes are formed in the insulating layer positioned at both ends of the piezoelectric-resistor, and a bridge circuit wiring is connected to the piezoelectric-resistor via the contact holes. | 01-14-2010 |
20100037693 | Acceleration Sensor - An acceleration sensor has a pair of main surface protection members arranged at one end of both main surfaces of a piezoelectric oscillation element, and spaced from the main surfaces through a pair of main surface spacer members. An end surface protection member is arranged on an end surface at the other end of the main surface protection members by having an interval between the end surface protection member and the piezoelectric oscillation element, through a pair of end surface spacer members. A pair of side surface protection members is arranged at one end of the both side surfaces of the piezoelectric vibration element, the pair of main surface protection members, the end surface protection member, the pair of main surface spacer members, and a pair of side surface spacer members arranged on both side surfaces of the end surface spacer members. | 02-18-2010 |
20100064809 | System and Method to Determine Mechanical Resonance of an Accelerometer - Systems and methods are provided for determining mechanical resonance of a sensor. In one embodiment, a system is provided that comprises a bias voltage source configured to apply a bias voltage impulse signal to a terminal of the sensor and a zero crossing detector configured to detect zero crossing cycles of a sensor output signal response to the bias voltage impulse signal. The system further comprises a controller configured to determine the resonance frequency of the sensor based on the detected zero crossing cycles of the sensor output signal response. | 03-18-2010 |
20100236329 | METHODS AND APPARATUS FOR INTEGRATED ENERGY HARVESTING POWER SOURCES AND INERTIAL SENSORS FOR GUN-FIRED MUNITIONS - A method for generating electrical power from an acceleration of an object is provided. The method including: vibrating a mass-spring unit upon an acceleration of an object; transmitting a force resulting from the acceleration from the mass-spring unit to the one or more piezoelectric elements; converting the vibration of the mass-spring unit to an electrical energy; and calculating at least one of the force and acceleration based on an output of the one or more piezoelectric elements. | 09-23-2010 |
20100242604 | MEMS Device with Opposite Polarity Spring Bimorph - A MEMS device has a mass supported at least in part by a spring. Among other things, the spring has first and second layers, and first and a second electrodes. The first and second layers are between the first and second electrodes, and the first and second layers, which are oppositely polarized, form a bimorph. | 09-30-2010 |
20100263447 | TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERENTIAL OUTPUT SIGNALS - A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit. | 10-21-2010 |
20110048133 | VIBRATION ELEMENT COUPLED WITH NON-LINEAR FORCE TO IMPROVE NON-RESONANT FREQUENCY RESPONSE - Embodiments of the invention couple a non-linear force to a vibration element such as a piezoelectric cantilever to introduce chaotic, i.e., non-resonant vibration in the vibration element and thereby improve the non-resonant response of the vibration element. By doing so, the vibration element is responsive to a wider frequency range of vibrations and thus may be more efficient in scavenging energy in environments where the vibration frequency is not constant, e.g., in environment subject to multi-mode or random vibration sources. | 03-03-2011 |
20110146404 | INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME - Disclosed herein is an inertial sensor, which includes a diaphragm having a piezoelectric element or a piezoresistive element formed on one surface thereof, a mass element integrated with the center of the other surface of the diaphragm in which the distal end of the mass element has a larger width than the width of the proximal end in contact with the diaphragm, and a supporter formed along the edge of the other surface of the diaphragm, so that the use of the mass element having the above shape results in decreased spring constant and increased distance from the center of the diaphragm to the center of the mass element, thereby simultaneously realizing a reduction in the size of the inertial sensor and an increase in performance thereof. A method of manufacturing the inertial sensor is also provided. | 06-23-2011 |
20110174075 | ACCELERATION SENSOR AND ACCELERATION DETECTING APPARATUS - An acceleration sensor includes a piezoelectric sensor and a support plate including a first support surface and a second support surface for supporting the piezoelectric sensor, wherein the support plate includes a first plate piece, a second plate piece, and a hinge portion connecting opposite side edges of the first plate piece and the second plate piece, wherein the piezoelectric sensor element has a longitudinal shape extending in a direction perpendicular to the sensing axis direction and is separated from the support surfaces in the longitudinal direction of the hinge portion so that the center of the sensor element in the lateral direction is located within the width of the hinge portion in the lateral direction. | 07-21-2011 |
20110296918 | MINIATURIZED PIEZOELECTRIC ACCELEROMETERS - The miniaturized piezoelectric accelerometer includes a support frame ( | 12-08-2011 |
20120103095 | PIEZOELECTRIC VIBRATION TYPE YAW RATE SENSOR - A piezoelectric vibration type yaw rate sensor including driving arms and detection arms. A detection sensitivity spectrum of the detection arms has a first peak with a first resonance frequency in a first detection vibration mode, in which the driving and detection arms vibrate in opposite phases, and a second peak with a second resonance frequency in a second detection vibration mode, in which the driving and detection arms vibrate in the same phase. A detection sensitivity at a frequency higher by Δf than one smaller resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency lower by Δf than the one resonance frequency. A detection sensitivity at a frequency lower by Δf than other larger resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency higher by Δf than the other resonance frequency. | 05-03-2012 |
20120198936 | PIEZOELECTRIC ACCELERATION SENSOR - A piezoelectric acceleration sensor comprises a piezoelectric element, a metallic sheet and a circuit board. The piezoelectric element is polarized in a predetermined direction. The circuit board includes a circuit portion and a roughly flat shaped base portion. The base portion protrudes from an end portion of the circuit portion. One of surfaces of the metallic sheet is fixed to and supported by a surface of the base portion. The piezoelectric element is fixed to and supported by a remaining one of the surfaces of the metallic sheet in a manner that the piezoelectric element and the base portion do not overlap each other in the predetermined direction. | 08-09-2012 |
20120204644 | Accelerometer for high temperature applications - This invention is for a hermetic piezoelectric accelerometer sensor that can operates at high temperatures without the degradation observed on the piezoelectric elements, due to Oxygen depletion of the piezoelectric materials, when they are exposed to high temperatures, in reducing atmospheres, or low partial Oxygen pressure, inside a sealed housing. When a piezoelectric element loses Oxygen, becomes more electrically conductive, and this severe loss in resistivity, exacerbated with the increase of the temperature, makes the sensor inoperable, unreliable, or with permanent damage. The accelerometer of this invention operates effectively over a wide range of temperatures, including high temperatures above | 08-16-2012 |
20120234095 | ENERGY HARVESTING POWER SOURCES FOR GENERATING A TIME-OUT SINGAL FOR UNEXPLODED MUNITIONS - A method for generating electrical power from an acceleration of an object is provided. The method including: vibrating a mass-spring unit upon an acceleration of an object; transmitting a force resulting from the acceleration from the mass-spring unit to the one or more piezoelectric elements; converting the vibration of the mass-spring unit to an electrical energy; and calculating at least one of the force and acceleration based on an output of the one or more piezoelectric elements. | 09-20-2012 |
20120266674 | MOTION DETECTOR FOR ELECTRONIC DEVICES - A motion detector includes a chamber, a resilient cantilever arm, a gimbal joint, an air bearing slider, and at least one piezoresistive sensor. The chamber has a front plate and a back plate located on opposite sides of the chamber, and each of the front plate and the back plate has a first through hole and a plurality of second through hole formed therein. The resilient cantilever arm is arranged in the chamber and has a free distal end. The air bearing slider is moveable coupled to the free distal end of the resilient cantilever arm via the gimbal joint. The at least one piezoresistive sensor is attached on the air bearing slider for sensing pitch, roll and yaw associated with the motion of the motion detector. | 10-25-2012 |
20120297880 | Smart Material Actuator with Enclosed Compensator - An actuator driven by a smart material device and suitable for use as an actuator, energy capture device, or sensor, having an enclosed compensator, potting material, at least one actuating arm, and two mechanical webs and a movable supporting member adapted such that application of a suitable electric potential causes a change in shape of the smart material device, thereby flexing the mechanical webs and causing movement of the actuating arm. As an energy capture device or sensor, external motion causes the actuating arm to move, thereby causing the smart material device to generate recoverable electrical energy or an electric signal indicating motion. | 11-29-2012 |
20120312097 | ACCELERATION MEASURING APPARATUS - An acceleration measuring apparatus that can easily detect acceleration with high accuracy is provided. In the apparatus, positional displacement of a swingable pendulum member is detected, feedback control is performed to maintain the pendulum member in a stationary state using an actuator, and acceleration is measured by measuring the output of the actuator at this time. A movable electrode is provided to the pendulum member, and a loop is formed in which a fixed electrode provided to oppose the movable electrode, and an oscillating circuit, a crystal unit, and the movable electrode are electrically connected in series. By measuring an oscillating frequency of the oscillating circuit at this time, a change in the size of a variable capacitance formed between the movable electrode and the fixed electrode is detected, and thereby the positional displacement of the pendulum member is detected. | 12-13-2012 |
20130014586 | DUAL OUTPUT ACCELEROMETER SYSTEMAANM Walling; PaulAACI HampshireAACO GBAAGP Walling; Paul Hampshire GBAANM Yeomans; DavidAACI HampshireAACO GBAAGP Yeomans; David Hampshire GB - There is disclosed a dual output compressive mode accelerometer having first and second output channels, comprising:
| 01-17-2013 |
20130055814 | ARRANGEMENT OF PIEZO-SENSORS IN ACCELEROMETER - An accelerometer ( | 03-07-2013 |
20130091949 | PIEZORESISTIVE TYPE Z-AXIS ACCELEROMETER - A pizeoresistive type Z-axis accelerometer is provided, including a substrate; a plurality of anchors formed over the substrate; a plurality of cantilever beams, wherein the cantilever beams include a piezoresistive material; and a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material. | 04-18-2013 |
20130098154 | Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method - A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track. | 04-25-2013 |
20130125652 | INERTIAL SENSOR - Disclosed herein is an inertial sensor. An inertial sensor according to preferred embodiments of the present invention is configured to include a membrane, a plurality of first electrodes patterned on the membrane, a plurality of piezoelectric elements patterned on the first electrodes, and a second electrode integrally formed to cover the piezoelectric elements. By the configuration, the piezoelectric element is encapsulated with the second electrode that is integrally formed to prevent water or humidity from being permeated into the piezoelectric element, thereby preventing physical properties of the piezoelectric element from being changed or preventing the piezoelectric element from being delaminated. | 05-23-2013 |
20130133427 | OMNIDIRECTIONAL ACCELEROMETER DEVICE AND MEDICAL DEVICE INCORPORATING SAME - A portable medical device is provided with an internal accelerometer device. The medical device includes a circuit board, the accelerometer device, and a response module coupled to the accelerometer device. The accelerometer device is mechanically and electrically coupled to the circuit board, and it includes a plurality of mass-supporting arms for a plurality of electrically distinct sensor electrodes, piezoelectric material for the mass-supporting arm, and a proof mass supported by the mass-supporting arms. Each of the mass-supporting arms has one of the sensor electrodes located thereon. Acceleration of the proof mass causes deflection of the piezoelectric material, which generates respective sensor signals at one or more of the sensor electrodes. The response module is configured to initiate an acceleration-dependent operation of the portable medical device in response to generated sensor signals present at the sensor electrodes. | 05-30-2013 |
20130152687 | INERTIAL SENSOR AND METHOD FOR MEASURING ACCELERATION USING THE SAME - Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art. | 06-20-2013 |
20130152688 | MICRO-ELECTRO-MECHANICAL SENSING DEVICE AND MANUFACTURING METHOD THEREOF - A micro-electro-mechanical sensing device including a substrate, a semiconductor layer, a supporting pillar, a first suspended arm, a connecting member, a second suspended arm, and a proof mass is provided. The semiconductor layer is disposed on or above the substrate. The supporting pillar is disposed on or above the semiconductor layer. The first suspended arm is disposed on the supporting pillar. The supporting connects a portion of the first suspended arm. The connecting member directly or indirectly connects another portion of the first suspended arm. The second suspended arm has a first surface and a second surface opposite to the first surface. The connecting member connects a portion of the first surface. The proof mass connects the second suspended arm and it includes a portion of the second suspended arm as a portion of the proof mass. A method for manufacturing the device is also provided. | 06-20-2013 |
20130167642 | Piezoelectric Transducers - An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator. | 07-04-2013 |
20130255383 | INERTIAL SENSOR AND POLLING METHOD USING THE SAME - Disclosed herein is an inertial sensor. The inertial sensor includes a sensor unit provided with an electrode layer and including piezo-electric elements so as to detect a movement of a driving unit supported to be able to be displaced to detect inertial force; an IC electrically connected to the sensor unit; and a switch connected between the sensor unit and an IC so as to control electrical connection between the sensor unit and the IC. | 10-03-2013 |
20150135833 | INERTIAL FORCE SENSOR - An inertial force sensor includes a base, a connection electrode on the base; a flexible section supported by the base, a driving section on an upper surface of the flexible section, a detection section on the upper surface of the flexible section, an interlayer insulating layer on the upper surface of one of the driving section and the detection section, and a wiring electrically connecting another of the driving section and the detection section to a connection electrode via an upper surface of the interlayer insulating layer. This inertial force sensor can have improved sensitivity and a small size. | 05-21-2015 |
20150338433 | GEOPHYSICAL ACCELERATION SENSOR AND METHOD - A method and geophysical acceleration sensor ( | 11-26-2015 |
20160003864 | METHOD FOR PRODUCING AN ACCELERATION SENSOR - The invention relates to a method for producing an acceleration sensor having a housing ( | 01-07-2016 |
20160018435 | MEMS ACCELEROMETER - A MEMS acceleration sensor comprising: a frame, a plurality of proofmasses; a plurality of flexures; a plurality of hinges and a plurality of gauges. The frame, proofmasses, flexures, hinges and gauges designed to measure acceleration in a direction perpendicular to the device plane while being generally resistant to motions parallel to the device plane. The measurement of the acceleration is accomplished through the piezoresistive effect of the strain in the gauges. | 01-21-2016 |
20220137086 | ACCELERATION TRANSDUCER - An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body disposed within a housing and defining tangential side faces arranged tangentially to the vertical axis, and a normal side face arranged normally to the vertical axis. A piezoelectric element is secured to one of the tangential side faces, and a seismic mass secured to the piezoelectric element. A signal output is attached to the housing and includes a signal conductor spaced apart by an assembly gap from a tangential side face that is not attached to the piezoelectric element. The assembly gap extends perpendicularly to the vertical axis. The normal side face includes main body output conductors spanning the assembly gap in a direction perpendicular to the vertical axis and directly contacting the signal conductor. | 05-05-2022 |
20220137089 | ACCELERATION TRANSDUCER - An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body defining tangential side faces arranged tangentially to the vertical axis, and normal side faces arranged normally to the vertical axis. The transducer includes exactly three piezoelectric elements and three seismic masses. Exactly one piezoelectric element is secured to each of the three tangential side faces, and exactly one seismic mass is secured to each of the three piezoelectric elements. Each piezoelectric element has a high sensitivity for a shear force exerted by the attached seismic mass along a principal tangential axis that is another one of the three axes for each of the three piezoelectric elements. | 05-05-2022 |