| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 073504150 | Cantilever | 66 |
| 20130074597 | SENSOR ELEMENT, MANUFACTURING METHOD OF SENSOR ELEMENT, SENSOR DEVICE, AND ELECTRONIC APPARATUS - A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms. | 03-28-2013 |
| 20120216613 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions. | 08-30-2012 |
| 20090007663 | Inertia Force Sensor - An inertial force sensor is provided in which each of switches is connected in parallel with each of resistors of low-pass filter and high-pass filter, respectively, and capacitor of high-pass filter can be boost charged by making switches on without mediate resistors. | 01-08-2009 |
| 20110041608 | Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors - A new high G-range damped acceleration sensor is proposed with a proof mass optimized for maximized, bi-directional and symmetrical damping to accommodate acceleration ranges above and beyond several thousand G's. In order to achieve the maximum, bi-directional and symmetrical damping, the high G-range acceleration sensor is designed to have minimum amount of mass in the proof mass while maximizing its surface areas. Such high G-range damped acceleration sensor can be applied to any application in which damping (or suppression of ringing) is desired at quite high frequencies. | 02-24-2011 |
| 20100005884 | High Performance Sensors and Methods for Forming the Same - A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass. | 01-14-2010 |
| 20120024060 | ELEMENT VIBRATING IN TWO UNCOUPLED MODES, AND USE IN VIBRATING RATE GYROSCOPE - The present disclosure relates to a vibrating element which is planar parallelly to an electrical crystallographic axis of a piezoelectric material such as quartz. The element comprises a beam holding electrodes, a stationary portion rigidly connected to one end of the beam, and a solid portion rigidly connected to the other end of the beam. The structure with facets from the chemical machining of the element has an axis of symmetry parallel to the electrical axis, and the solid portion has a center of gravity on the axis of symmetry. The useful vibration modes of the vibrating element, according to which the solid portion is reciprocatingly rotated about the axis of symmetry and reciprocatingly moved parallel to the plane of the element, are uncoupled. The measurement of an angular speed by a rate gyroscope including said vibrating elements is more precise. | 02-02-2012 |
| 20080282800 | DETECTION APPARATUS, DETECTION METHOD, AND ELECTRONIC APPARATUS - A detection apparatus is provided which includes a cantilever vibration gyro including a piezoelectric element having a first side provided with a drive electrode and a pair of detection electrodes sandwiching the drive electrode with predetermined gaps therebetween and a second side opposed to the first side and provided with a common electrode, which vibrates by a drive signal input between the drive electrode and the common electrode and generates a pair of detected signals corresponding to Coriolis force from the detection electrodes. The detection apparatus also includes a bias applying section for applying a bias voltage to the detection electrodes, an adding section adding the pair of detected signals, a first phase delay section delaying a phase of the detected signal obtained by the addition by a range larger than 45° and smaller than 90°, and an amplitude control section controlling the delayed detected signal to a predetermined voltage amplitude to output as the drive signal. | 11-20-2008 |
| 20080257044 | Vibratory Gyrosensor - To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor | 10-23-2008 |
| 20090183569 | COMBINED SENSOR - A combined detection element ( | 07-23-2009 |
| 20100300203 | SENSOR FOR DETECTING ACCELERATION AND ANGULAR VELOCITY - A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the movable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the acceleration detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction. | 12-02-2010 |
| 20120167683 | MEMS device and deformation protection structure therefor and method for making same - The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) device with a deformation protection structure. The MEMS device is located on a substrate, and it includes: a movable part; and a deformation protection structure, which has: a fixed plug, which is fixed on the substrate; multiple metal layers, including a top metal layer; and multiple plugs connecting the multiple metal layers. From top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance. | 07-05-2012 |
| 20110296914 | ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS, AND METHOD OF DETECTING AN ANGULAR VELOCITY - An angular velocity sensor includes an annular frame, a drive part, and a detection part. The frame has first beams and second beams. The first beams extend in an a-axis direction and are opposed to each other in a b-axis direction orthogonal to the a-axis direction. The second beams extend in the b-axis direction and are opposed to each other in the a-axis direction. The drive part causes the frame to oscillate within an XY plane to which the a-axis and the b-axis belong, in an oscillation mode where, when one of the first and second beams come closer to each other, the other separates from each other. The detection part detects an angular velocity around an axis in the Z-axis direction orthogonal to the XY plane, based on an amount of deformation of the frame oscillating in the oscillation mode within the XY plane. | 12-08-2011 |
| 20090320593 | VIBRATION TYPE GYRO SENSOR - A vibration type gyro sensor according to the present invention includes vibrating elements | 12-31-2009 |
| 20100300202 | GYROSCOPE PACKAGING ASSEMBLY - Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described. | 12-02-2010 |
| 20100326190 | VIBRATION SENSOR - A vibration sensor includes a base, a conducting ring, a number of cantilevers, a number of resistors, a number of helical springs, and a number of pairs of first and second pins. One end of each cantilever is connected to the base; the other end of each cantilever defines a guiding cutout. The resistors are correspondingly inserted in the guiding cutout. The helical springs are correspondingly deposited between the conducting ring and the holding block. The conducting ring slides in the guiding cutout due to a vibration and contacts with the resistor. The first and second pins formed in the base for correspondingly connecting to a pair of resistors in each cantilever. The vibration sensor senses the direction of the vibration by detecting a resistance that changes with a position of the conducting ring. | 12-30-2010 |
| 20080196498 | PIEZOELECTRIC DEVICE, OSCILLATION TYPE GYRO SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE - A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside. | 08-21-2008 |
| 073504160 | Tuning fork | 50 |
| 20130042683 | VIBRATING STRUCTURE GYROMETER WITH AT LEAST ONE TUNING FORK - Vibrating structure gyrometer with at least one tuning fork, produced by micro-machining from a thin plate, the said tuning fork comprising a pair of mobile inertial assemblies (EIM | 02-21-2013 |
| 20100043548 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a drive electrode section ( | 02-25-2010 |
| 20100043547 | ELECTRONIC COMPONENT AND METHOD FOR MANUFACTURING THE SAME - An electronic component is disclosed, and this component includes an element with an electrode section which is formed of upper electrode ( | 02-25-2010 |
| 20090044624 | ANGULAR VELOCITY SENSOR AND PROCESS FOR PRODUCING THE SAME - The present invention provides an angular velocity sensor having a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element. | 02-19-2009 |
| 20120216614 | PIEZOELECTRIC RESONATOR ELEMENT, PIEZOELECTRIC RESONATOR, PIEZOELECTRIC OSCILLATOR, RESONATOR GYRO ELEMENT, RESONATOR GYRO SENSOR, AND ELECTRONIC APPARATUS - A piezoelectric substrate includes vibrating arms, a base portion to which one end portion of each vibrating arm is connected, spindle portions formed in the other end portion of each vibrating arm, formed to have a large width, and having first groove portions formed therein, and second groove portions that are formed along the resonator center line of each vibrating arm, and flexure-torsional combined resonator is excited. A piezoelectric resonator element has flexural resonator of flexure-torsional combined resonator that is excited as its principal resonator and sets the cutting angle of the piezoelectric substrate, the widths and the depths of the first groove portion and the second groove portion, and the thickness of the vibrating arm such that the frequency-temperature characteristics represent third-order characteristics with respect to the temperature. | 08-30-2012 |
| 20090272189 | Robust Six Degree-of-Freedom Micromachined Gyroscope with Anti-Phase Drive Scheme and Mehtod of Operation of the Same - A method of operating an anti-phase six degree-of-freedom tuning fork gyroscope system comprises the steps of driving a first three degree-of-freedom gyroscope subsystem, and driving a second three degree-of freedom gyroscope subsystem in an anti-phase mode with the first gyroscope subsystem at an anti-phase resonant frequency. Acceleration or an angular rate of motion is sensed by means of the first and second three degree-of-freedom gyroscope subsystems operating in a flat frequency response range where the anti-phase resonant frequency is designed. Response gain and phase are stable and environmental and fabrication perturbations are avoided by such operation. A anti-phase six degree-of-freedom tuning fork gyroscope system which operates as described is also characterized. | 11-05-2009 |
| 20090013784 | COMPOSITE SENSOR - A composite sensor includes an angular velocity sensor element, an acceleration sensor element, a signal processing IC for processing signals from the angular velocity sensor element and the acceleration sensor element, an inner package for accommodating the angular velocity sensor element, the acceleration sensor element, and the signal processing IC; a coupler connected to this inner package, and a fixing member connected to this coupler for holding the inner package via this coupler. The coupler is elastically deformable. One of the acceleration sensor element and the signal processing IC is located at the right with respect to the center of the inner package, and the other of the acceleration sensor element and the signal processing IC is located at the left with respect to the center of the inner package. The composite sensor angular maintains its characteristics of the angular velocity sensor element while the angular velocity sensor element and the acceleration sensor element are accommodated in one package. | 01-15-2009 |
| 20090007665 | TUNING-FORK-TYPE BIMORPH PIEZOELECTRIC VIBRATOR, VIBRATING GYROSCOPE MODULE INCLUDING THE VIBRATOR, AND METHOD FOR MANUFACTURING THE TUNING-FORK-TYPE BIMORPH PIEZOELECTRIC VIBRATOR - A tuning-fork-type bimorph piezoelectric vibrator includes two piezoelectric bodies that are bonded together and have opposite polarization directions. An intermediate metal layer is disposed between bonding surfaces of the piezoelectric bodies. A first slit is arranged to define legs and a base of the tuning fork structure. Second slits are provided in a first principal surface having a front metal layer to define driving/detecting electrodes. The tuning-fork-type bimorph piezoelectric vibrator provides improved temperature characteristics of a detuning frequency by not including a back metal layer on a second principal surface at least in an area in which greater than a predetermined level of stress is applied during operation. | 01-08-2009 |
| 20100037692 | SOLID-STATE INERTIAL SENSOR ON CHIP - Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis of symmetry of the sensor, the tines being synchronized to have alternate actuation movements inward and outward. | 02-18-2010 |
| 20090314084 | VIBRATING GYROSCOPE - A vibrating gyroscope includes two input buffers each arranged to input voltage signals appearing at respective detection electrodes of one of two piezoelectric vibrators. An adding circuit adds up output voltages of the respective input buffers. An amplitude control circuit automatically controls a loop gain such that an output voltage of the adding circuit has a substantially constant amplitude. A phase-shift circuit controls the phase of a drive voltage supplied to the piezoelectric vibrators such that the piezoelectric vibrators oscillate by positive feedback. Two differential amplifier circuits each amplify a voltage difference corresponding to an angular velocity about an axis. Two synchronous detection circuits each perform detection using a synchronizing signal generated from an oscillation signal, and detect a voltage signal corresponding to the angular velocity. | 12-24-2009 |
| 20090165557 | ANGULAR VELOCITY SENSOR, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC DEVICE USING THE ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a substrate having an upper surface having a first recess provided therein, an electronic component mounted in the first recess, and a vibration element mounted onto the upper surface of the substrate. The first vibration element has a portion located directly above the electronic component. This angular velocity sensor has a small size. | 07-02-2009 |
| 20090120187 | INERTIAL FORCE SENSOR - An inertial force sensor is composed of a plurality of arms and an oscillator having a base for linking the arms, in which a trimming slit is formed on a part of the arm except for a ridge portion, thus controlling damage to a tuning fork arm to be caused by the trimming. | 05-14-2009 |
| 20090120186 | Tuning fork gyro sensor - A tuning fork gyro sensor includes a tuning fork vibrator and a casing. The tuning fork vibrator includes a pair of arms that extend parallel, a base that supports the pair of arms, and supporting members that are arranged on both faces of the base such that the supporting members are positioned at the equal distances from both the pair of arms, and that project from the both faces of the base, the both faces being perpendicular to both a direction in which the pair of arms extend and a direction in which the pair of arms are aligned. The casing is hollow to house and support the tuning fork vibrator by supporting the supporting members. | 05-14-2009 |
| 20120291551 | SENSOR MOUNT VIBRATION REDUCTION - Techniques are provided for reducing mount vibration in an inertial rate sensor (IRS). For example, if oscillation in an IRS's vibratory members, vibrating along a first axis, cause displacement in the IRS's mount along a second axis, the vibratory members can be aligned so that the vibratory members have some component of movement along the second axis during oscillation. This component of movement can help reduce the displacement of the IRS's mount along the second axis. It can further reduce sensitivity to changes in the boundary conditions of an IRS (e.g., vibrations and other movements at the mount from forces external to the IRS). Vibratory members further can have portions of increased mass at the vibratory members' tips, which can impact the alignment of the vibratory members. These examples, however, are not exhaustive. | 11-22-2012 |
| 20090007666 | VIBRATING GYROSCOPE - A vibrating gyroscope includes a tuning-fork vibrator having a base and legs. The vibrator is joined to a support plate by conductive adhesive members. The support plate includes an outer frame portion in which a joining portion is provided at a location near a longitudinal end of the outer frame portion. The joining portion is supported by a first support portion in the air gap portion. The width of the first support portion is less than the width of the joining portion. The vibrator is joined to the joining portion of the support plate. | 01-08-2009 |
| 20080210006 | Angular velocity sensor - An angular velocity sensor includes a tuning-fork oscillator that includes a base portion, arm portions extending from the base portion, and a pair of driving electrodes that are provided to extend from the front face and the back face to a side face of at least one of the arm portions. | 09-04-2008 |
| 20090320594 | INERTIA FORCE SENSOR - An inertia force sensor includes a detection element having two orthogonal arms each formed by connecting one first arm orthogonally to two second arms; a support portion for supporting the two first arms; and two fixing arms connected at one end thereof to the support portion and fixed at the other end thereof to a mounting substrate. The second arms include opposing portions formed by bending the second arms to face the main portions thereof. The second arms are connected at their ends to weight parts, which include recesses to which the ends of the second arms are connected. | 12-31-2009 |
| 20090255338 | ACCELERATION SENSING DEVICE - An acceleration sensing device includes: an outer frame; a first drive arm having both ends supported by sides of the outer frame through respective base parts, the sides opposing each other; a second drive arm extending from one of the base parts of at least one of the sides toward the other side; and a sensing arm that is disposed midway between the first drive arm and the second drive arm and extends form the one base part of the one side toward the other side, the sensing arm having an electrode in order to extract electric charge generated in the sensing arm. In the device, the first drive arm and the second drive arm have excitation electrodes for a flexural vibration and form a tuning fork type resonator, and center positions in thicknesses of sections that are located in the base parts and on an extension line of the first drive arm differ from a center position in a thickness of the first drive arm. | 10-15-2009 |
| 20100147074 | Piezoelectric Frame, Piezoelectric Device and Manufacturing Method for Same - A piezoelectric frame ( | 06-17-2010 |
| 20120192649 | MEMS VIBRATING-BEAM ACCELEROMETER WITH PIEZOELECTRIC DRIVE - A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base. | 08-02-2012 |
| 20120137775 | PIEZOELECTRIC RESONATING DEVICE, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC RESONATOR, AND PIEZOELECTRIC OSCILLATOR - A piezoelectric substrate includes rod-shaped resonating arms; a base portion that connects one set of end portions of the respective resonating arms; weight portions which are formed on the other end portions of the respective resonating arms and which have a width larger than that of the respective resonating arms; and groove portions which are formed on each of the front and rear surfaces along the center line of vibration of the respective resonating arms. The piezoelectric substrate also includes excitation electrodes which are formed on each of the front and rear surfaces of the respective resonating arms including the inner side of the respective groove portions. A plurality of frequency adjustment slits extending in a straight line form along the longitudinal direction of the respective resonating arms are formed on the respective weight portions so as to penetrate through the front and rear surfaces of the weight portions. | 06-07-2012 |
| 20090145224 | METHOD FOR PROCESSING DETECTION SIGNAL OF VIBRATORY INERTIAL FORCE SENSOR AND VIBRATORY INERTIAL FORCE SENSOR - A method for processing a detection signal of a vibratory inertial force sensor is disclosed. This method improves detection accuracy of the vibratory inertial force sensor. A detection circuit of the vibratory inertial force sensor removes harmonic component from signals synchronously wave-detected, and amplifies the resultant signals, and then smoothes the amplified signals. A vibratory inertial force sensor adopting this method is also disclosed. | 06-11-2009 |
| 20100313657 | MICROMACHINED TUNING FORK GYROSCOPES WITH ULTRA-HIGH SENSITIVITY AND SHOCK REJECTION - A vibratory rate z-axis gyroscope is characterized by drive-mode and sense-mode quality factors and rate sensitivity and is fabricated with at least two decoupled vibratory tines, a levered drive-mode mechanism coupled between the tines to structurally force anti-phase drive-mode motion of the tines at a predetermined drive frequency, to eliminate spurious frequency modes of the anti-phase drive-mode motion of the tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the tines, and a sense-mode mechanism coupled between the tines arranged and configured to provide a linearly coupled, dynamically balanced anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity. | 12-16-2010 |
| 20100000322 | ANGULAR VELOCITY SENSOR AND METHOD OF MANUFACTURING THE SAME - Disclosed is an angular velocity sensor. The angular velocity sensor includes a first layer, a piezoelectric layer, and a second layer. The first layer has a first main surface and a second main surface, and includes a vibrator portion and a base portion that supports the vibrator portion. The piezoelectric layer is formed on the first main surface of the first layer. The second layer is integrally bonded to the base portion on a side of the second main surface of the first layer. | 01-07-2010 |
| 20110030474 | Inertial Sensors with Reduced Sensitivity to Quadrature Errors and Micromachining Inaccuracies - Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies include a gyroscope incorporating two specially-configured single-axis gyroscopes for sensing rotations about two orthogonal axes (the axes of sensitivity) in the device plane, where each single-axis gyroscope includes a resonator having two rotationally-dithered shuttles interconnected by a fork and each shuttle is configured to tilt out-of-plane along a tilt axis perpendicular to the axis of sensitivity and includes corresponding Coriolis sensing electrodes positioned along an axis perpendicular to the tilt axis (i.e., parallel to the axis of sensitivity). The two single-axis gyroscopes may be interconnected, e.g., by one or more in-phase or anti-phase couplings interconnecting the forks and/or the shuttles. | 02-10-2011 |
| 20090126488 | Tuning Fork Vibrator and Vibratory Gyroscope Using the Same - A tuning fork vibrator includes a vibrating body having the shape of a tuning fork as a whole. The vibrating body includes legs having a meandering shape and a base coupled to an end of the legs. A support is formed so as to extend between the legs from the base. Two electrodes arranged separately in the width direction are formed on one of the legs, and two electrodes arranged separately in the width direction are formed on the other of the legs. The outermost electrodes on each of the legs are connected to a connection electrode formed on the base. The connection electrode is formed so as to extend toward the support. The innermost electrodes on each of the legs are formed so as to extend toward the support through the base. A common electrode is formed on a second principal surface of the vibrating body. A vibratory gyroscope can be formed using the tuning fork vibrator. | 05-21-2009 |
| 20080314145 | ANGULAR VELOCITY DETECTION APPARATUS - An angular velocity detection apparatus includes: a sensor unit having first and second detection axes serving as angular velocity detection axes, the first and second detection axes intersecting each other; a sensor output correction circuit for making at least one of an offset adjustment and a sensitivity adjustment to a detection output of an angular velocity around the first detection axis and a detection output of an angular velocity around the second detection axis; a sign determination circuit for obtaining a sign of a rotational direction of an angular velocity on any one of the first and second detection axes; and an amplitude calculation circuit for multiplying a square sum average of detection outputs of angular velocities around the first and second detection axes outputted by the sensor output correction circuit and a sign outputted by the sign determination circuit. | 12-25-2008 |
| 20080236281 | Angular velocity sensor and angular velocity sensing device - An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm portion and a lower detection arm portion respectively connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion with the upper detection arm portion in between. The fixed portion includes one or more slits extending at least in a direction intersecting with the extending direction of the upper detection arm portion. | 10-02-2008 |
| 20080210007 | Angular velocity sensor - An angular velocity sensor includes: a first tuning-fork vibrator having a first base and first aims extending from the first base in a first direction; a second tuning-fork vibrator having a second bass and second arms extending from the second base in a second direction; and a double gimbal portion mat has a drive gimbal portion vibrating about an axis extending in a fourth direction, and a sense gimbal portion vibrating about an axis extending in a fifth direction and senses an angular velocity about an axis extending in a third direction. | 09-04-2008 |
| 20110072900 | PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT - Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention has a multilayer structure in which a metal electrode film having a plane orientation of (100), a (Bi,Na)TiO | 03-31-2011 |
| 20100147073 | SYSTEMS AND METHODS FOR AN INERTIAL SENSOR SUSPENSION THAT MINIMIZES PROOF MASS ROTATION - The present invention generally relates to systems and methods for an inertial sensor suspension that minimizes proof mass rotation and translation. The system contains a microelectromechanical sensor (MEMS) device for measuring rotation along an input rotation axis. The MEMS device includes at least one substrate, at least one proof mass, and a suspension system. The suspension system includes at least one flexure connecting the at least one proof mass to a substrate and at least one anchored suspension element with a split support beam having a first split portion and a second split portion. The first split portion and the second split portion are of curved shape. | 06-17-2010 |
| 20100116052 | PIEZOELECTRIC VIBRATOR, AND VIBRATION GYRO - At the frequency of natural vibration with which the driving tines and detection tine of a piezoelectric vibrator resonate, the vibration directions of natural vibrations and the frequency difference between the resonance frequencies are set to reduce the leakage of vibration from the driving tines to the detection tine for suppressing the leakage vibration of the piezoelectric vibrator. In the piezoelectric vibrator, the vibration direction of the driving tines is made orthogonal to the vibration direction of the detection tine, or the frequency difference between the resonance frequency of the driving tines in the in-plane direction and the resonance frequency of the driving tines in the out-of-plane direction is increased sufficiently to suppress the growth of the leakage vibration. This configuration makes the piezoelectric vibrator compact and reduces leakage vibrations. | 05-13-2010 |
| 20090288486 | VIBRATION BODY FOR ANGULAR SPEED SENSOR - A vibration body | 11-26-2009 |
| 20090031807 | ANGULAR VELOCITY SENSOR INTERFACE CIRCUIT AND ANGULAR VELOCITY DETECTION APPARATUS - An angular velocity detection apparatus includes an angular velocity detection signal amplifier circuit which amplifies an angular velocity detection signal Vo output from an angular velocity sensor, and an offset control circuit which controls an offset so as to be a reference voltage which is output when a value of an angular velocity is 0. The angular velocity detection apparatus further includes an input switch circuit which selects the reference voltage and a discharge switch circuit which short-circuits a capacitor included in a high-pass filter in an offset control period. | 02-05-2009 |
| 20090007664 | VIBRATION GYRO - A vibration gyro made of a single crystal piezoelectric material includes: a base; a plurality of resonating arms extending from the base; an excitation electrode formed on a surface of at least one of the plurality of resonating arms so as to vibrate at least the one of the plurality of resonating arms; and a piezoelectric element detecting a vibration component due to a Coriolis force acting perpendicularly to a vibrating direction of the plurality of resonating arms being vibrated by the excitation electrode, the piezoelectric element being mounted on a surface of at least one of the plurality of resonating arms and the base. | 01-08-2009 |
| 20100095772 | METHOD FOR PROCESSING DETECTION SIGNAL OF VIBRATORY INERTIAL FORCE SENSOR AND VIBRATORY INERTIAL FORCE SENSOR - A method for processing a detection signal of a vibratory inertial force sensor is disclosed. This method improves detection accuracy of the vibratory inertial force sensor. A detection circuit of the vibratory inertial force sensor removes harmonic component from signals synchronously wave-detected, and amplifies the resultant signals, and then smoothes the amplified signals. A vibratory inertial force sensor adopting this method is also disclosed. | 04-22-2010 |
| 20090288487 | ANGULAR SPEED SENSOR - An angular velocity sensor includes a vibrator vibrating, first and second differential circuits for outputting first and second difference signals, respectively, and a synchronous detector circuit for synchronously detecting the first and second difference signals. First and second sensors outputs first and second detection signals in response to a distortion produced due to an inertial force. The second detection signal has a phase reverse to a phase of the first detection signal. The first difference signal corresponds to a difference provided by subtracting the first detection signal from the second detection signal. The second difference signal corresponds to a difference provided by subtracting the second detection signal from the first detection signal. This angular velocity sensor detects an angular velocity of the vibrator accurately. | 11-26-2009 |
| 20120132002 | SOLID-STATE INERTIAL SENSOR ON CHIP - Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis of symmetry of the sensor, the tines being synchronized to have alternate actuation movements inward and outward. | 05-31-2012 |
| 20100050768 | TUNING FORK-TYPE VIBRATOR, TUNING FORK-TYPE VIBRATOR MANUFACTURING METHOD, AND ANGULAR VELOCITY SENSOR - A tuning fork-type piezoelectric vibrator includes a substantially rectangular plate-shaped base to be supported by a circuit substrate and two pillar-shaped legs. The base includes a substantially rectangular plate-shaped junction arranged to be connected to the circuit substrate, and a body disposed between the junction and the two legs. In order for the difference between the resonant frequency in the drive mode of the tuning fork-type piezoelectric vibrator and the resonant frequency in in-plane, in-phase mode thereof to be at least about 1 kHz, the base and two legs are configured so that the product of the length of the body divided by the substantial width of the body minus the width of the legs and the resonant frequency in drive mode is at least about 60×10 | 03-04-2010 |
| 20100050769 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes vibrators, an internal circuit that drives the vibrators to detect an angular velocity signal, a circuit substrate on which components such as an IC and a passive component defining the internal circuit are disposed, and electrically connects the vibrators and the components, and a cap that covers a surface of the circuit substrate and encloses the vibrators and internal circuit. An output signal processed by the internal circuit is output from an external electrode provided on the back surface of the circuit substrate. Vibrator inspection electrodes are provided on the back surface of the circuit substrate, and the vibrator inspection electrodes are electrically connected to surface electrodes of the vibrators. Thus, electrical characteristics of the vibrators can be directly measured after assembly. | 03-04-2010 |
| 20100011859 | ANGULAR VELOCITY SENSOR - An angular velocity sensor detects an angular velocity of an object. The angular velocity sensor includes a detecting element, and a driving unit. The detecting element includes a supporting part, a first arm extending from the supporting part and being adapted to be fixed to the object, a second arm extending from the supporting part, and a first weight connected with the second arm. The second arm has substantially a U-shape and includes a first extending part extending from the supporting part, a first facing part facing the first extending part and extending in parallel with the first extending part, and a first joint part joining the first extending part to the first facing part. The first weight is connected with the facing part of the second arm. The driving unit includes first to fourth drivers. The first driver is provided at the first extending part and extends and contracts the first extending part. The second driver is positioned at the first extending part at a more outer circumference of the U-shape of the second arm than the first driver. The second driver extends and contracts the first extending part. The third driver is positioned at the first facing part, and extends and contracts the first facing part. The fourth driver is positioned at the first facing part at a more inner circumference of the U-shape of the second arm than the third driver, and extends and contracts the first facing part. This angular velocity sensor has a small size along a rotation axis about which an angular velocity to be detected. | 01-21-2010 |
| 20120227492 | HIGH PERFORMANCE DOUBLE-ENDED TUNING FORK - An accelerometer device having a proof mass, a support base, a hinge that flexibly connects the proof mass to the support base, a double-ended fork (DETF) having two tines. The tines are made of only piezoelectric material. A plurality of electrode surfaces surround at least portions of the tines for inducing electric fields at the first tine is opposite a direction of the induced electric field at the second tine at similar locations along a longitudinal axis of the tines. This causes the tines to resonate in-plane and out of phase. | 09-13-2012 |
| 20100229647 | ANGULAR VELOCITY SENSOR AND METHOD FOR FABRICATING THE SAME - An angular velocity sensor includes a tuning-fork vibrator having a base and multiple arms extending from the base. Two arms out of the multiple arms driven to vibrate have first end parts opposite to second end parts connected to the base. The first end parts being wider than the second end parts. | 09-16-2010 |
| 20120279303 | ELECTRODES AND ASSOCIATED ELECTRONIC CIRCUITS FOR A PIEZOELECTRIC VIBRATING GYROMETER - The Coriolis-effect gyrometer has a tuning fork having two tines ( | 11-08-2012 |
| 20120325000 | BENDING VIBRATION PIECE AND ELECTRONIC DEVICE - A bending vibration piece has a pair of drive vibration arms and a pair of detection vibration arms in an opposite direction thereto which are connected to a supporting part. The supporting part has recessed portions formed on both lateral parts in a direction of width, and a through-hole formed substantially at the center in a plane part of the supporting part and more toward the drive vibration arms than the recessed portions are. On a surface of the supporting part, drive electrode pads are arranged toward the drive vibration arms and detection electrode pads are arranged toward the detection vibration arms, with these electrode pads being separated from each other in a longitudinal direction by the recessed portions on both lateral part of the supporting part and the through-hole in the plane part. | 12-27-2012 |
| 20130019681 | VIBRATION GYRO ELEMENT, GYRO SENSOR, AND ELECTRONIC APPARATUS - A vibration gyro element includes drive vibrating arms and detection vibrating arms at the opposite side, and has a first detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in an out-of-plane direction in an opposite phase to an action direction of Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in an opposite phase to that of the drive vibrating arms, and a second detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as the action direction of the Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as that of the drive vibrating arms. | 01-24-2013 |
| 20080229824 | ANGULAR RATE SENSOR AND ELECTRONIC DEVICE - An angular rate sensor includes: a piezoelectric vibration device; and a detection section, wherein the piezoelectric vibration device includes a base substrate, a vibration section having a fixed end affixed to the base substrate and a free end that does not contact the base substrate, and a driving section formed above the vibration section for generating flexural vibration of the vibration section; the vibration section has a first support section, four (first-fourth) cantilever sections supported by the first support section, and a second support section that supports the first support section and equipped with the fixed end; the first support section has two center lines that are orthogonal to each other; the first cantilever section and the second cantilever section are symmetrical to each other through one of the center lines of the first support section in a plan view; the third cantilever section and the fourth cantilever section are symmetrical to each other through the one of the center lines of the first support section in a plan view; the first cantilever section and the fourth cantilever section are symmetrical to each other through the other of the center lines of the first support section in a plan view; the second cantilever section and the third cantilever section are symmetrical to each other through the other of the center lines of the first support section in a plan view; the driving section includes a lower electrode for driving section, a piezoelectric layer for driving section formed above the lower electrode for driving section, and an upper electrode for driving section formed above the piezoelectric layer for driving section; and the detection section is formed above the vibration section for detecting an angular rate of rotation applied to the vibration section, and has a lower electrode for detection section, a piezoelectric layer for detection section formed above the lower electrode for detection section, and an upper electrode for detection section formed above the piezoelectric layer for detection section. | 09-25-2008 |
| 20130125650 | UNIT, OSCILLATOR AND ELECTRONIC APPARATUS - In a unit, the unit comprising a quartz crystal resonator having a base portion, and first and second vibrational arms, each of the first and second vibrational arms having a length and opposite main surfaces each including a central linear portion, at least one groove being formed in the central linear portion of at least one of the opposite main surfaces of each of the first and second vibrational arms so that the at least one groove is formed continuously in the central linear portion along the length of the corresponding one of the first and second vibrational arms, a length of the base portion being less than 0.5 mm and an overall length of the quartz crystal resonator being within a range of 1.02 mm to 1.95 mm. | 05-23-2013 |
| 20130098153 | HIGH RANGE DIGITAL ANGULAR RATE SENSOR BASED ON FREQUENCY MODULATION - A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off. | 04-25-2013 |
| 20080202238 | ANGULAR VELOCITY SENSOR AND METHOD FOR FABRICATING THE SAME - An angular velocity sensor includes a tuning-fork vibrator having a base and multiple arms extending from the base. Two arms out of the multiple arms driven to vibrate have first end parts opposite to second end parts connected to the base. The first end parts being wider than the second end parts. | 08-28-2008 |
