Entries |
Document | Title | Date |
20080210005 | Micro-Machined Gyrometric Sensor For Differential Measurement of the Movement of Vibrating Masses - The invention relates to a microgyroscope, that is to say an inertial micromechanical sensor dedicated to the measurement of angular velocities, which is produced by micromachining techniques, and has a novel arrangement of the modules for measuring the movement of the vibrating masses. The gyroscope comprises two symmetrical moving assemblies ( | 09-04-2008 |
20080229822 | Angular Velocity Measuring Device - An angular velocity measuring device includes an angular having a mounting surface on which a velocity detection element, element-side drive electrodes and element-side detection electrodes are provided and a ground electrode is disposed between the drive electrodes and the detection electrodes. On the top surface of a multilayer substrate, substrate-side drive electrodes and substrate-side detection electrodes are provided and a ground electrode is disposed between the drive electrodes and the detection electrodes. The electrodes of the angular velocity detection element are connected to the electrodes of the multilayer substrate and the two ground electrodes are arranged to face each other. Furthermore, on the top surface of the multilayer substrate, drive wirings connected to the drive electrodes are provided and, inside the multilayer substrate, detection wirings connected to the detection electrodes are provided. Ground wirings sandwiching the detection wirings in the thickness direction are disposed in the multilayer substrate. | 09-25-2008 |
20080229823 | Method For Temperature-Compensated Gyrometric Measurement and Gyrometric Measurement Device Using Same - The invention concerns gyrometric measurement compensated as a function of the instantaneous internal temperature of a mechanical resonator in a gyrometric measurement device comprising a loop controlling the amplitude of the resonator vibration and a gyrometric loop delivering a gyrometric signal (S); the gain control (P) of the loop varies as a monotonous function, preferably increasing and of the first order, of the internal temperature of the resonator in a given range of temperature; during a calibrating step, a correspondence is established and stored between the values of the gyrometric scaling factor (Fe) and the gyrometric bias (So) and the values of the gain control signal (P), that is F(P) and Q(P) respectively; in operation, the following operations are carried out: P→F(P), P→Q(P), and Ω′ | 09-25-2008 |
20080236279 | INERTIAL SENSOR AND FABRICATION METHOD OF INERTIAL SENSOR - An inertial sensor and a fabrication method of an inertial sensor are provided. An inertial sensor includes: an elastic support whose one end is supported by a support part disposed on a substrate; an oscillator which is supported by the other end of the elastic support as it is separated from the substrate; and a displacement detecting part which detects a displacement of the oscillator to output a signal, wherein the oscillator is formed with one or both of a groove and a through hole in a direction in parallel with a drive direction of the oscillator. | 10-02-2008 |
20080245148 | INERTIAL SENSOR AND ELECTRICAL OR ELECTRONIC DEVICE - An inertial sensor includes an oscillator that is supported by an elastic supporting member such that the oscillator is floating relative to a base and the oscillator is displaceable along a single axis, and a displacement detection unit detecting a displacement of the oscillator. The oscillation of the oscillator is a simple harmonic motion along a Z axis. An X axis, a Y axis, and the Z axis, serving as reference axes of an oscillation coordinate system for the oscillator, are shifted to provide x, y, and z axes, serving as new reference axes. Position coordinates of the oscillator of the x, y, and z axes are determined in at least two points during one period of the oscillator. A difference vector (Δx, Δy, Δz) is calculated on the basis of the determined position coordinates. An angular velocity or an acceleration is obtained using the difference vector. | 10-09-2008 |
20080257042 | Gyro module - A gyro module includes: two gyro element pieces outputting a signal, the signal being obtained by combining a signal of an angular velocity of a first detection axis and a signal of an angular velocity of a second detection axis; and an arithmetic circuit for performing an addition and a subtraction with respect to the signal outputted from the two gyro element pieces. The two gyro element pieces are a first gyro element piece and a second gyro element piece. The first and second gyro element pieces are arranged such that a detection sensitivity polarity of the first detection axis of the first gyro element piece is same as that of the second gyro element piece, and a detection sensitivity polarity of the second detection axis of the first gyro element piece and that of the second gyro element piece are inverted. | 10-23-2008 |
20080257043 | Angular velocity sensor - An angular velocity sensor includes: a package housing a vibrator to sense an angular velocity; a mounting portion mounting the package, the mounting portion having a first terminal for making a connection with the package; a second terminal for making an external connection, and a resin portion covering the first and second terminals so that a part of the first terminal and a part of the second terminal are exposed; and a cover having a joint portion made of a metal and covering the package, the cover being fixed to the mounting portion by joining the joint portion to a joint terminal made of a metal and provided to the mounting portion. | 10-23-2008 |
20080264167 | SENSOR - A sensor includes a detecting oscillator supported in such a manner that the detecting oscillator is allowed to oscillate; first and second electrodes; a detecting electrode facing the first and second electrodes; and signal supplying units configured to supply first and second AC signals respectively to the first and second electrodes. Either the first and second electrodes or the detecting electrode is provided on the detecting oscillator. The first and second AC signals respectively supplied to the first and second electrodes by the signal supplying units cause the detecting oscillator to be maintained at a neutral position for detection without being displaced when no physical quantity is input. When the detecting oscillator is displaced, an input physical quantity is detected on the basis of a signal corresponding to charges induced at the detecting electrode by the first and second AC signals supplied respectively to the first and second electrodes. | 10-30-2008 |
20080271532 | FREQUENCY SHIFTING OF ROTATIONAL HARMONICS IN MEMS DEVICES - Structures and methods for frequency shifting rotational harmonics in MEMS devices are disclosed. An illustrative MEMS device can include a substrate, a sense electrode coupled to the substrate, and a proof mass adjacent to the sense electrode. A number of non-uniformly dispersed holes or openings on the proof mass can be configured to alter the distribution of mass within the proof mass. During operation, the presence of the holes or openings alters the frequency at which the proof mass rotates about a centerline in a rotational mode, reducing the introduction of harmonics into the drive and sense systems. | 11-06-2008 |
20080289418 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a protrusion protruding in a Y′-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y′ axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected. | 11-27-2008 |
20080295596 | Novel silicon micromechanical gyroscope - The present invention relates to a novel silicon micromechanical gyroscope, which is used in control technology field to measure pose measurement of a rotating body, such as aerobat, motor tire and drilling platform, wherein the novel silicon micromechanical gyroscope main includes a sensing element and a signal process circuit. The sensing element further comprises a silicon slice frame, a silicon slice, an upper electrode ceramics plate and a bottom electrode ceramics plate. The signal process circuit further comprises a signal detecting bridge circuit used as bridge arm of the capacitor sensing element, and a SCM signal process circuit with data process module. The novel silicon micromechanical gyroscope is able to replace a drive force from the drive conformation with a rotating force from the rotation of the rotating body so as to achieve a novel silicon micromechanical gyroscope without a drive conformation. The novel silicon micromechanical gyroscope without a drive conformation to mostly achieve purposes like minify in craft, simply in structure and reduced in volume so as to effectively lower cost and save energy. | 12-04-2008 |
20080302183 | APPARATUS AND METHOD FOR GYROSCOPIC PROPULSION - Disclosed is a combination of six substantially identical interconnected rotating masses, with a pair each of the rotating masses being configured to rotate in one of each of the three planes (X, Y, and Z). Regardless of the orientation of the six masses, each pair of the six interconnected rotating masses may share substantially the same center of gravity and generate a separate yet interactive kinetic energy and angular momentum in each of the three planes, thereby providing resistance to rotational forces from external sources. This is known as “equal force presence. In one embodiment, the rotating masses are ring-like masses. In alternative embodiment, the rotating masses are solid masses, similar to flywheels. | 12-11-2008 |
20080314144 | Method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity - The invention relates to measuring devices used in measuring angular velocity, and, more precisely, to vibrating micromechanical sensors of angular velocity. In the solution for a sensor of angular velocity according to the invention, a mass is suspended by means of spring structures having non-orthogonal primary and secondary axes such, that a test activation in phase with the primary motion is induced in a detection resonator, and the angular velocity to be measured is, by means of a phase detector, detected from the phase difference between the primary motion and the secondary motion. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for a sensor of angular velocity. | 12-25-2008 |
20090007662 | FORCE REBALANCE CONTROL SYSTEM AND METHOD USING AUTOMATIC GAIN CONTROL LOOP - The present invention relates to a force rebalance control system and method using an automatic gain control loop, which are configured to perform the force rebalance feedback control of a vibratory gyroscope using the automatic gain control loop for controlling the velocity signal of a mass body. Accordingly, the present invention is advantageous in that a conventional digital circuit, which is complicated and sensitive to noise, can be implemented using a simple analog circuit, and the present invention can be extended and applied to general-purpose vibratory gyroscopes or various sensor fields, such as those of an inertial sensor, a pressure sensor, and a temperature sensor, as well as micro-gyroscopes. | 01-08-2009 |
20090031805 | Method for Operating a Vibrating Gyroscope and Sensor Arrangement - The invention relates to a method for operating a vibrating gyroscope and to a sensor arrangement comprising such a vibrating gyroscope. Said vibrating gyroscope is used as a resonator and is part of at least one control circuit that excites the vibration gyroscope by feeding an excitation signal with its natural frequency. An output signal can be tapped from the vibrating gyroscope from which the excitation signal can be derived by filtering and amplification. The invention is characterized in that, once the sensor arrangement is switched on, the frequency of the excitation signal is adjusted by exciting the vibrating gyroscope, before the excitation signal is fed, to oscillate freely, measuring the frequency of the free oscillation and feeding the excitation signal to the vibrating gyroscope with the measured frequency. | 02-05-2009 |
20090031806 | Micromechanical Rotational Speed Sensor - The present invention relates to a micromechanical rotational rate sensor with a substrate ( | 02-05-2009 |
20090049909 | Hydraulic Controller - A hydraulic controller including a cabinet, a hydraulic pipe block having a passage, a linearly driving actuator having a piston to open and close the passage in the hydraulic pipe block, a printed wiring board having a circuit for driving the linearly driving actuator, and a vibrating angular velocity sensor having two vibrators which can move in a Coriolis force detection direction orthogonal to vibration directions, wherein
| 02-26-2009 |
20090056443 | DUAL-AXIS RESONATOR GYROSCOPE - The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the out-of-plane resonant frequency from the wafer thickness. The use of separate plates for the force-balance and for the electric spring enables decoupling of the two functions. The invention also provides resonant frequency servo-loop for locking of the sense-mode resonant frequency to the drive-mode frequency, an online self-test, a split force balance loop for self cancellation of the quadrature signal, decoupling of the force-balance and resonant frequency servo-loops and stabilization of the inertial rate-sensing sensitivity—when operated in an open loop mode, all without interfering with the normal operation of the gyroscope. An optional sensing of the Z-axis acceleration perpendicular to the sensor plane is also provided which can be used for compensating acceleration-induced errors. | 03-05-2009 |
20090064781 | Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope - Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., ˜0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth. In a reduced-to-practice embodiment, a 6 mW, 3V CMOS ASIC and control algorithm are interfaced to a mode-matched MEMS tuning fork gyroscope to implement an angular rate sensor with bias drift as low as 0.15°/hr and angle random walk of 0.003°/√hr, which is the lowest recorded to date for a silicon MEMS gyroscope. The system bandwidth can be configured between 0.1 Hz and 1 kHz. | 03-12-2009 |
20090100930 | HIGH SENSITIVITY MICROELECTROMECHANICAL SENSOR WITH ROTARY DRIVING MOTION - A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector. | 04-23-2009 |
20090114015 | METHOD AND CIRCUIT ARRANGEMENT FOR SECURE START-UP OF A RATE-OF-TURN SENSOR - A method and a circuit arrangement for the start-up of a rate-of-turn sensor (DRS) comprising at least one oscillator element are disclosed, wherein the operational control of the rate-of-turn sensor amplifies a signal (v(t), x(t)) proportional to the instantaneous speed or deflection of the oscillator element used as operating signal (F(t)) to operate the oscillator element. During the start-up process for the rate-of-turn sensor (DRS) the amplification of the amplitude (AF) of the operating signal (F(t)) is set to a constant pre-settable value (AFC) the stimulation frequency of the operating signal (F(t)) being essentially continuously raised from a starting value (f | 05-07-2009 |
20090114016 | INTEGRATED MICROELECTROMECHANICAL SYSTEMS (MEMS) VIBRATING MASS Z-AXIS RATE SENSOR - A sensor that measures angular velocity about an axis that is normal to a sensing plane of the sensor. The sensor comprises a sensing subassembly that includes a planar frame parallel to the sensing plane, a first proof mass disposed in the sensing plane, a second proof mass disposed in the sensing plane laterally to the first proof mass, and a linkage within the frame and connected to the frame. The linkage is connected to the first proof mass and to the second proof mass. The sensor further includes actuator for driving the first proof mass and the second proof mass into oscillation along a drive axis in the sensing plane. The sensor further includes a first transducer to sense motion of the frame in response to a Coriolis force acting on the oscillating first proof mass and the oscillating second proof mass. | 05-07-2009 |
20090114017 | Method for Operating a Vibrating Gyroscope and Sensor Arrangement - The invention relates to a method for operating a vibrating gyroscope and to a sensor arrangement comprising such a vibrating gyroscope. Said vibrating gyroscope is used as a resonator and is part of at least one control circuit that excites the vibration gyroscope by feeding an excitation signal with its natural frequency. An output signal can be tapped from the vibrating gyroscope from which the excitation signal can be derived by filtering and amplification. The invention is characterized in that, once a sensor arrangement comprising the vibrating gyroscope is switched on, an initial value for the natural frequency is calculated from a previously measured value of the natural frequency stored in a memory and parameters that effect a modification of the natural frequency since start of the measurement, and the excitation signal is fed to the vibrating gyroscope with the calculated initial value of the frequency. | 05-07-2009 |
20090133496 | Driver device, physical quantity measuring device, and electronic instrument - An oscillation driver circuit includes a current-voltage converter which converts a current value of an oscillation signal in an oscillation loop into a voltage value, and a comparator which outputs a signal corresponding to the result of comparison between the output signal from the current-voltage converter and a given reference signal. The comparator has an output current limiting function. The oscillation driver circuit causes the vibrator to produce driving vibrations based on the output from the comparator. | 05-28-2009 |
20090133497 | Tuning Bar Vibrator and Vibrating Gyroscope Using the Same - A tuning bar vibrator formed on a substrate and including a vibrating body. The vibrating body is formed into a meander shape as a whole, and a middle vibrating reed is used as a first detection unit. At one end side of the vibrating body, two sensing electrodes are formed and connected respectively to two extended electrodes. A further sensing electrode and a common electrode are formed on a first principal surface of the first detection unit. A common electrode formed on a second principal surface of the vibrating body is connected to the common electrode on the first principal surface via a through-hole. The further sensing electrode and the common electrode are connected respectively to another set of extended electrodes. A tuning bar vibrator that is small in size, may be reduced in profile and may be used as a vibrating gyroscope having a desirable detection sensitivity, and a vibrating gyroscope using the tuning bar vibrator are obtained. | 05-28-2009 |
20090158846 | Measurement by gyroscopic system - A gyroscopic system is disclosed comprising at least a vibrating gyroscope, a first means of angle measurement, designed to provide a first measurement of angle values according to a measurement axis; and—a second means of angle measurement, designed to provide a second measurement of angle values according to said measurement axis. First angle values through the first angle measurement means vibrating in a current vibration position and second angle values through the second angle measurement means are provided simultaneously; and from these second angle values corrected on the basis of a comparison of the first and second angle values are deduced. Then the vibration position of the first angle measurement means is changed from the current position to another vibration position. First angle values through the first angle measurement means and second angle values through the second angle measurement means are then provided simultaneously; and from these first angle values corrected on the basis of a comparison of the first and second angle values are deduced. | 06-25-2009 |
20090158847 | Angular Velocity Sensor | 06-25-2009 |
20090165554 | Angular velocity sensor and angular velocity sensing device - Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top of an sensor support section of a case, a detection arm extending along a plane parallel to the sensor support section, and a pair of upper drive arm and lower drive arm extending along the plane parallel to the sensor support section and extending in a direction opposite to each other so as to intersect an extending direction of the detection arm. | 07-02-2009 |
20090165555 | Vibration-Type Inertia Force Sensor And Electronic Apparatus Using The Same - A vibration-type inertia force sensor includes: an oscillator; a driving section for oscillating the oscillator; a sensing section for sensing a strain caused in the oscillator due to an inertia force; and a power supply section for supplying power to the driving section and the sensing section in a normal state and for supplying power to one of the driving section and the sensing section and not supplying power to the other of the driving section and the sensing section in a power-saving state. | 07-02-2009 |
20090165556 | Angular velocity sensing element - An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element | 07-02-2009 |
20090173156 | ANGULAR RATE SENSOR - An angular rate sensor includes: a substrate; and a vibrator having a beam part supported in a state of floating from the substrate and a pair of supports formed on the substrate and provided at both ends of the beam part for supporting the beam part. The vibrator includes a piezoelectric film formed in the beam part, a detecting electrode for detecting an angular rate, the detecting electrode being formed on the piezoelectric film so as to extend toward a center portion of the beam part from one end thereof, and a driving electrode for vibrating the vibrator, the driving electrode being formed on the piezoelectric film so as to extend toward the center portion of the beam part from the other end thereof and to be spaced from the detecting electrode. | 07-09-2009 |
20090188318 | Silicon integrated angular rate sensor - A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon. | 07-30-2009 |
20090193892 | DUAL MODE SENSING FOR VIBRATORY GYROSCOPE - An angular rate sensor is disclosed. The angular rate sensor comprises a substrate and a drive subsystem partially supported by a substrate. The drive subsystem includes at least one spring, at least one anchor, and at least one mass; the at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis. Coriolis force acts on moving the drive subsystem along or around a second axis in response to angular velocity of the substrate around the third axis. The angular rate sensor also includes a sense subsystem partially supported by a substrate. The sense subsystem includes at least one spring, at least one anchor, and at least one mass. | 08-06-2009 |
20090193893 | ANGULAR VELOCITY SENSOR - Provided is an angular velocity sensor including: a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator. | 08-06-2009 |
20090205421 | PHYSICAL QUANTITY SENSOR - [Problems to be Solved] To confirm whether a physical quantity sensor operates normally or not with a simple structure. | 08-20-2009 |
20090205422 | METHOD OF DETERMINING A SPEED OF ROTATION OF AN AXIALLY SYMMETRICAL VIBRATING SENSOR, AND A CORRESPONDING INERTIAL DEVICE - The method of determining a speed of rotation of an axially symmetrical vibrating sensor having a vibrating member associated with control electrodes and with detection electrodes for generating vibration presenting an elastic line possessing periodicity of order n and having a position that is variable as a function of the rotation of the sensor, the method comprising the steps of:
| 08-20-2009 |
20090217757 | PHYSICAL QUANTITY MEASURING APPARATUS AND ELECTRONIC DEVICE - A physical quantity measuring apparatus includes an oscillation drive circuit that forms an oscillation loop together with a physical quantity transducer and excites a drive oscillation of the physical quantity transducer, and a detection circuit that detects an analog detection signal outputted from the physical quantity transducer using a detection circuit first and thence converts the signal that has been detected into a digital signal using an A/D converter to output the digital signal. The oscillation drive circuit has a drive amplitude detection circuit that detects amplitude of the drive oscillation. A voltage level of a reference of the A/D converter included in the detection circuit is controlled on the basis of a detection output signal of the drive amplitude detection circuit. | 09-03-2009 |
20090235742 | ANGULAR VELOCITY MEASURING DEVICE - An oscillator is oscillated at a predetermined oscillation frequency. A detecting unit exerts Coriolis force on the oscillator. A repetitive control system applies an external force to the oscillator so as to cancel out the Coriolis force to achieve an angular velocity measuring operation at a high sensitivity and a high S/N ratio. | 09-24-2009 |
20090241662 | SYSTEMS AND METHODS FOR ACCELERATION AND ROTATIONAL DETERMINATION FROM AN OUT-OF-PLANE MEMS DEVICE - A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods are operable to determine linear acceleration and rotation. An exemplary embodiment applies a first linear acceleration rebalancing force via a first electrode pair to a first proof mass, applies a second linear acceleration rebalancing force via a second electrode pair to a second proof mass, applies a first Coriolis rebalancing force via a third electrode pair to the first proof mass, applies a second Coriolis rebalancing force via a fourth electrode pair to the second proof mass, determines a linear acceleration corresponding to the applied first and second linear acceleration rebalancing forces, and determines a rotation corresponding to the applied first and second Coriolis rebalancing forces. | 10-01-2009 |
20090241663 | Angular velocity sensor element - There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element section thereof. An angular velocity sensor element | 10-01-2009 |
20090241664 | Angular rate detection apparatus providing stable output - Disclosed is an angular rate detection apparatus which provides a stable output with high detection accuracy regardless of a fluctuation of a reference voltage accompanying a fluctuation of a power supply voltage. The angular rate detection apparatus includes at least a gyro sensor detection circuit connected to an oscillator, an A/D converter, a digital calculation device, and a reference voltage generation circuit. The gyro sensor detection circuit drives the oscillator, and detects an angular rate acting on the oscillator and outputs an analog detection signal. The A/D converter converts the output analog detection signal into a digital signal. The digital calculation device carries out a calculation based on the converted digital signal. The reference voltage generation circuit supplies a common reference voltage generation circuit supplies a common reference voltage to the gyro sensor detection circuit and the A/D converter. | 10-01-2009 |
20090249873 | OSCILLATING MASS RESONATOR - Suspension and coupling beams of oscillating masses in a device which serves, for example, as a gyro and that includes oscillating masses form a single continuous network that allows the device to have a compact design. Preferably, a junction beam surrounds the two masses. | 10-08-2009 |
20090249874 | RATE-OF-TURN SENSOR - Disclosed is a method for driving and simultaneously determining the deflection (x(t)) and/or the rate of motion (v(t)) of an electrostatically excited oscillator element. According to said method, the deflection (x(t)) and/or the rate of motion e (v(t)) of the oscillator element is/are determined based on the excitation current (i | 10-08-2009 |
20090249875 | RATE-OF-TURN SENSOR - A method for operation of and simultaneous analysis of a rate-of-turn sensor, comprising an oscillator element and a Coriolis element arranged on the oscillation element is disclosed, comprising the following method steps: generation of a digital operating signal with an excitation frequency corresponding to the resonant frequency of the oscillator element, digital to analogue conversion of the digital operating signal and operation of the oscillator element with the analogue operating signal, recording a Coriolis speed of the Coriolis element occurring about a normal to both oscillation axes due to the rotation of the rate-of-turn sensor with generation of an analogue Coriolis' signal proportional to the Coriolis speed, analogue-to-digital conversion of the analogue Coriolis signal, phase-sensitive multiplication of the digital Coriolis signal with the digital operating signal to form an intermediate signal, generation of a control signal proportional to the rate of turn of the rate of-turn sensor from the intermediate signal, multiplication of the control signal with the digital operating signal to give a digital compensation signal in phase with the digital operating signal, digital-to-analogue conversion of the digital compensation signal to give an analogue compensation signal in phase with the analogue operating signal and subjecting the Coriolis element to the analogue compensation signal and output of the control signal. | 10-08-2009 |
20090249876 | SENSOR DEVICE - A sensor device includes a time determining part that determines time point information, and adds the time point information to the output supplied from a part subjected to failure diagnosis and related to generation of a failure detection signal, and to the output related to generation of a sense signal. With this structure, the failure detection signal is correlated with the sense signal by the time point information. Alternatively, the sensor device includes an output circuit that correlates the failure detection signal with the sense signal supplied at the same time point as the failure detection signal, and outputs both signals using a time division method. | 10-08-2009 |
20090255336 | SYSTEMS AND METHODS FOR ACCELERATION AND ROTATIONAL DETERMINATION FROM AN IN-PLANE AND OUT-OF-PLANE MEMS DEVICE - A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods determine linear acceleration and rotation in the in-pane and out-of-plane directions of the MEMS inertial sensor. An out-of-plane linear acceleration of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode pair. An in-plane rotation of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode. An in-plane linear acceleration of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb. An out-of-plane rotation of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb. | 10-15-2009 |
20090255337 | ROTATING MOTION SENSOR - A rotating motion sensor includes at least one electroacoustic resonator to stimulate a surface acoustic wave. The at least one electroacoustic resonator is configured so that rotation of the at least one electroacoustic resonator about an axis of rotation causes a change in resonance frequency of the at least one electroacoustic resonator. The at least one electroacoustic resonator includes oscillating structures configured to oscillate in a first direction that is a direction of propagation of the surface acoustic wave and/or a second direction that is transverse to the direction of propagation of the surface acoustic wave. | 10-15-2009 |
20090260435 | Method and System for Monitoring a Sensor Arrangement - The invention relates to a method and a system for monitoring a sensor arrangement comprising a vibrating gyroscope. Said vibrating gyroscope is used as a resonator and is part of at least one control circuit that excites the vibration gyroscope by feeding an excitation signal with its natural frequency. An output signal can be tapped from the vibrating gyroscope from which the excitation signal can be derived by filtering and amplification. The invention is characterized in that a first value of temperature change is calculated from the difference of the actual value of the natural frequency and a value of the natural frequency measured at a reference temperature during a comparison and stored in a memory, and the temperature coefficient of the natural frequency in relation to the measured temperature. A second value of the temperature change is calculated from the difference between the output values of a temperature sensor at the actual temperature and at a reference temperature stored in the memory and the temperature coefficient of the temperature sensor. The two calculated values are compared and an error signal is produced in case they deviate by a degree exceeding a predetermined value. | 10-22-2009 |
20090260436 | Angular velocity sensor element - An angular velocity sensor element is provided which is capable of preventing even transmission of sudden externally-applied vibration to an element portion by absorbing the vibration. An angular velocity sensor element | 10-22-2009 |
20090260437 | Vibrating micro-mechanical sensor of angular velocity - The invention relates to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention is adapted to measure angular velocity in relation to two or three axes, and at the least two seismic masses ( | 10-22-2009 |
20090266162 | BULK ACOUSTIC WAVE GYROSCOPE - Capacitive bulk acoustic wave x, y and z-axes gyroscopes implemented on (100) and (111) silicon substrates are disclosed. Exemplary gyroscopes comprise a handle substrate, a bulk acoustic wave resonator element supported by the handle substrate, and a plurality of electrodes surrounding and separated from the resonator element by very small capacitive gaps. The electrodes can excite and detect at least two degenerate bulk acoustic wave resonant modes in the resonator. Advantages include reduced size; higher Q, which improves noise and bias stability; larger bandwidth, and improved shock resistance. In addition, the high Q is maintained in atmospheric or near-atmospheric pressure which reduces the cost and complexity of the wafer-scale packaging of the gyroscope. | 10-29-2009 |
20090266163 | SENSOR - A sensor includes detecting element ( | 10-29-2009 |
20090282914 | Acceleration sensor having a surrounding seismic mass - A micromechanical acceleration sensor has a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, which seismic mass is suspended over the substrate with the aid of the suspension. The seismic mass has a mass center of gravity, and the suspension has at least two anchors on the substrate, the at least two anchors being situated next to the mass center of gravity at a distance which is small compared to a horizontal extension of the seismic mass. The stationary capacitive electrodes are provided in recesses of the seismic mass. The seismic mass directly surrounds the suspension. | 11-19-2009 |
20090282915 | Physical quantity sensor and method of making the same - A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing. | 11-19-2009 |
20090282916 | System and Method for Providing High-Range Capability with Closed-Loop Inertial Sensors - An inertial sensing system including an inertial sensor having a proof mass providing a deflection signal in response to application of an inertial force, wherein the proof mass has a physical deflection limit and a selected saturation limit set below the deflection limit, elements for providing a closed-loop output in response to the deflection signal from the inertial sensor, wherein the closed-loop output is proportional to the inertial force until the saturation limit of the inertial sensor is reached, elements for providing an open-loop output in response to the deflection signal from the inertial sensor once the saturation limit is reached, and elements for summing the closed-loop output with the open-loop output when the saturation limit of the inertial sensor is reached, to provide a high-range output response for the system. | 11-19-2009 |
20090301193 | FREQUENCY TUNING OF DISC RESONATOR GYROSCOPES VIA RESONATOR MASS PERTURBATION BASED ON AN IDENTIFIED MODEL - Techniques for reducing the frequency split between the Coriolis-coupled modes in disc resonator gyroscopes (DRGs) by perturbing the mass distribution on the disc resonator based on an identified model are disclosed. A model-identification method of tuning a resonator comprises perturbing the mass and measuring a frequency response matrix of the resonator. The frequency response matrix includes a plurality of inputs and a plurality of outputs and the resonator has a plurality of coupled resonance modes. A reduced structural mechanics matrix model of the resonator in sensor and actuator coordinates is identified from the measured frequency response matrix and analyzed to determine generalized eigenvectors of the structural mechanics model and their variations due to selected mass perturbations which is then estimated to improve degeneracy of the plurality of coupled resonance modes based on the generalized eigenvectors of the mass and the stiffness. | 12-10-2009 |
20090301194 | SYSTEMATIC DISC RESONATOR GYROSCOPE TUNING - Tuning an axisymmetric resonator such as in a disc resonator gyroscope (DRG) is disclosed. Frequency tuning a DRG in a single step informed by a systematic physical model of the resonator structure, sensing and actuation elements, such as a finite element model, is provided. The sensitivity of selected trimming positions on the resonator to reducing asymmetry terms is determined via perturbations of the systematic model. As well, the dependence of the parameters of model transfer functions between actuation and sensing elements on resonator asymmetry are systematically determined. One or two measured transfer functions may then be analyzed according to the systematic model to fully determine the needed asymmetry correction components of the DRG. One or two of four groups of four electrostatic bias electrodes or four groups of four laser trimming locations for the DRG are utilized to correct the asymmetry components which can give rise to mistuning. | 12-10-2009 |
20090320591 | PARAMETRIC AMPLIFICATION OF A MEMS GYROSCOPE BY CAPACITANCE MODULATION - Parametric amplification of the output of a MEMS gyroscope is achieved by modulating the sense capacitance, or an auxiliary capacitance having an applied DC voltage. The capacitance modulation is produced by the driven motion of the gyroscope mechanism, so the pump signal of the parametric amplifier is not subject to phase errors in the electronics. The capacitance modulation affects the mechanical gain of the sensor (transfer function from input force to sensor mechanism displacement), as well as the electrical gain of the sensor (transfer function from sensor mechanism displacement to output electrical signal). The mechanical and electrical gains of the sensor become phase-dependent, so the Coriolis rate signal can be amplified while the unwanted quadrature-phase signal is attenuated. | 12-31-2009 |
20090320592 | MULTISTAGE PROOF-MASS MOVEMENT DECELERATION WITHIN MEMS STRUCTURES - A micro-electromechanical systems (MEMS) device includes a substrate comprising at least one anchor, a proof mass having first and second deceleration extensions extending therefrom, a motor drive comb, a motor sense comb, a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb. The suspensions are anchored to the substrate. A body is attached to the substrate. At least one deceleration beam extends from a first side of said body. The at least one deceleration beam is configured to engage at least one of the first and second deceleration extensions and slow or stop the proof mass before the proof mass contacts the motor drive comb and the motor sense comb. | 12-31-2009 |
20100000321 | YAW RATE SENSOR - A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions. | 01-07-2010 |
20100011856 | PHYSICAL QUANTITY SENSOR - A physical quantity sensor comprises a sensor circuit that converts an externally applied physical quantity to an electrical signal and outputs a detection signal; an adjustment circuit that adjusts the detection signal, which is received from the sensor circuit, to a predetermined signal; and an output circuit that forms an output signal from the signal of the adjustment circuit wherein the sensor circuit and the output circuit are driven by a common power supply voltage. The adjustment circuit comprises a pulse generation circuit that generates a pulse modulation signal based on the power supply voltage; and an amplifier circuit that amplifies the detection signal, which is received from the sensor circuit, with a gain made variable by the pulse modulation signal, wherein the detection sensitivity of the output signal is made variable according to the power supply voltage. This configuration enables the amplifier circuit, provided in the adjustment circuit, to output a sensor output that has high linearity characteristics and, as a result, implements a physical quantity sensor with highly accurate sensor detection sensitivity and allows the physical quantity sensor to have good detection-sensitivity ratiometrics characteristics, high linearity, and desired-characteristic detection sensitivity. | 01-21-2010 |
20100011857 | ARRANGEMENT FOR MEASURING A RATE OF ROTATION USING A VIBRATION SENSOR - An arrangement for measuring a rate of rotation using a vibration sensor, being excited and measured by means of capacitive drive elements, and the rotation of said sensor in an axis, excited by a rotation in another axis by means of the Coriolis force, being measured by means of capacitive measuring elements. Excitation voltages can be supplied to the fixed electrodes of the drive elements, the frequency of said voltages corresponding to the resonance frequency or the subharmonic of the resonance frequency of the vibration sensor. An alternating voltage having a first measuring frequency which is higher than the excitation frequency can be supplied to capacitive elements for measuring the excited vibration. Alternating voltages having a second measuring frequency higher than the excitation frequency are supplied to the fixed electrodes of the measuring elements can be supplied to drive elements causing a vibration excitation in a direction on the basis of the excitation voltage, being in antiphase with the excitation voltage. | 01-21-2010 |
20100011858 | ANGULAR VELOCITY DETECTION CIRCUIT AND ANGULAR VELOCITY DETECTION APPARATUS - An angular velocity detection circuit is connected to a resonator for making excited vibration on the basis of a drive signal and detects an angular velocity. The angular velocity detection circuit includes: a self-vibration component extraction unit that receives, from the resonator, a detection signal including an angular velocity component based on a Coriolis force and a self-vibration component based on the excited vibration of the resonator and extracts the self-vibration component from the detection signal; a direct-current conversion unit including an integration unit that integrates an output signal of the self-vibration component extraction unit; and an offset addition unit that adds an offset value to an output signal of the direct-current conversion unit. | 01-21-2010 |
20100024547 | ANGULAR SPEED SENSOR AND ELECTRONIC APPARATUS - An angular speed sensor includes two oscillating portions arranged to oscillate in X-axis direction and Y-axis direction, where the oscillating portions are spaced from each other in X-axis direction. The sensor also includes two coupling beams capable of producing a standing wave oscillation, elongated in X-axis direction and spaced from each other in Y-axis direction, with the oscillating portions located therebetween. The coupling beams are connected to a supporting substrate via fixing posts. The coupling beams are bridged by first and second link portions, the first link portion being also connected to one of the oscillating portions and the second link portion to the other. The fixing posts are connected to the coupling beams at fixed points of the standing wave oscillation. The link portions include widened portions connected to the coupling beams at the fixed points of the standing wave oscillation. | 02-04-2010 |
20100037691 | INERTIAL SENSOR - One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction. | 02-18-2010 |
20100043546 | SENSOR AND METHOD OF MANUFACTURING THE SAME - Provided is a sensor including a movably supported movable element and an opposing member. The sensor detects a relative positional relationship between the movable element and the opposing member which are provided with a spacing therebetween The opposing member has an impurity-doped portion which is provided to one of an opposing portion which is opposed to the movable element and an adjoining portion which adjoins the opposing portion. At least a part of the impurity-doped portion is formed on an opposite surface opposite to a surface which is opposed to the movable element, from which opposite surface an electrical wiring is led out. | 02-25-2010 |
20100050767 | Angular velocity sensor - An angular velocity sensor includes first and second oscillators and a coupling beam. The coupling beam couples the first and second oscillators together in such a manner that the first and second oscillators vibrate relative to each other in a predetermined direction. The coupling beam includes a first post portion joined to a surface of the first oscillator, a second post portion joined to a surface of the second oscillator, and a spring portion that joins the first post portion to the second post portion. The spring portion is spaced from the first and second oscillators and has elasticity in the predetermined direction. | 03-04-2010 |
20100058861 | Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers - Transducers comprising a frame structure made of piezoelectric material convert energy, through piezoelectric effect, between electrostatic energy associated with voltage differential between the electrodes sandwiching the frame structure and mechanical energy associated with deformation of the frame structure. Inertial sensors such as gyroscopes and accelerators, including inertial sensors comprising ring resonators, utilize said transducers both to generate oscillations of their resonators and to sense the changes in such oscillations produced, in the sensors' frame of reference, by Coriolis forces appearing due to the movement of the sensors. | 03-11-2010 |
20100058862 | VIBRATING GYRO - A piezoelectric vibrator of a vibration gyro vibrates in response to a drive voltage V | 03-11-2010 |
20100058863 | MANUFACTURING METHOD FOR A ROTATION SENSOR DEVICE AND ROTATION SENSOR DEVICE - A device and manufacturing method for a rotation sensor device includes a holding device, an oscillating mass, and a spring, via which the oscillating mass is connected to the holding device. The spring is designed so that the oscillating mass can be set into an oscillating movement around an oscillation axis with respect to the holding device with the aid of a drive. The steps include: producing a layer sequence having a first layer made of semiconductor material and/or metal and a second layer made of semiconductor material and/or a metal, a boundary surface of the first layer, at least partially being covered by an insulating layer; structuring the spring out of the first layer; and structuring at least one oscillating mass subunit of the oscillating mass, which can be set into the oscillating movement around the oscillation axis with the aid of the drive, out of the second layer. | 03-11-2010 |
20100064805 | LOW INERTIA FRAME FOR DETECTING CORIOLIS ACCELERATION - A sensing frame that moves in response to torque generated by the Coriolis acceleration on a drive subsystem is disclosed. The sensing frame include a first rail. The first rail is constrained to move along the first axis parallel to the first rail. The frame includes a second rail substantially parallel to said first rail. The second rail is constrained to move along the first axis. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. A first guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail and a second guiding arm is flexibly coupled to the first rail and flexibly coupled to the second rail. The first guiding arm is flexibly suspended to the base at a first anchoring point for allowing rotation of the first guiding arm around the second axis that is perpendicular to the first axis and normal to the plane, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm around the third axis parallel to the second axis. The sensing frame includes a plurality of coupling flexures connecting said sensing frame to the drive subsystem and a transducer for sensing motion of the first and second rails responsive to said angular velocity. | 03-18-2010 |
20100064806 | ANGULAR VELOCITY SENSOR ELEMENT, ANGULAR VELOCITY SENSOR, AND ELECTRONIC APPARATUS - An angular velocity sensor element includes a main body having three vibrator portions including a vibrator portion that is vibrated in a first phase and a vibrator portion that is vibrated in a second phase opposite to the first phase, a first detecting piezoelectric layer that detects a vibration of the vibrator portion vibrated in the first phase and is formed on the vibrator portion vibrated in the first phase, a second detecting piezoelectric layer that detects a vibration of the vibrator portion vibrated in the first phase and is formed on the vibrator portion vibrated in the first phase and disposed away from the first detecting piezoelectric layer, and a driving piezoelectric layer that vibrates the vibrator portion that is vibrated in the second phase and is formed on the vibrator portion vibrated in the second phase and disposed away from the first and second detecting piezoelectric layer. | 03-18-2010 |
20100071467 | INTEGRATED MULTIAXIS MOTION SENSOR - A system and method describes an inertial sensor assembly, the assembly comprises a substrate parallel to the plane, at least one in-plane angular velocity sensor comprising a pair proof masses that are oscillated in anti-phase fashion along an axis normal to the plane. The first in-plane angular velocity sensor further includes a sensing frame responsive to the angular velocity of the substrate around the first axis parallel to the plane and perpendicular to the axis normal to the plane. The assembly also includes at least one out-of-plane angular velocity sensor comprising a pair of proof masses that are oscillated in anti-phase fashion in the plane parallel to the plane. The out-of-plane angular velocity sensor further comprises a sensing frame responsive to the angular velocity of the substrate around the axis normal to the plane. | 03-25-2010 |
20100071468 | INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE - An inertia force sensor includes a detection element having an acceleration detection section ( | 03-25-2010 |
20100077858 | INERTIA SENSOR - A multi-axis accelerometer or a multi-axis angular rate sensor which can be made by an easy process and the size of which can be greatly reduced is provided. An inertia sensor has a substrate, a flat proofmass formed on the substrate and a stacked structure including at least a lower electrode, a piezoelectric film, and an upper electrode, an anchor unit formed in a cutout inside of the proofmass and fixed on the substrate, and a plurality of flat piezoelectric beams each having one end connected to the proofmass, the other end connected to the anchor unit, and a stacked structure formed in a cutout inside of the proofmass and including at least a lower electrode, a piezoelectric film, and an upper electrode, wherein the inertia sensor enables to detect an acceleration applied on the proofmass based on charges generated to the electrodes of the piezoelectric beams. | 04-01-2010 |
20100077859 | MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal arranged surrounding the weight portion and joined to the fixed portion, the second structure being arranged and stacked on the first structure, a first base connected to the fixed portion and arranged and stacked on the first structure, and a second base connected to the pedestal and arranged and stacked on the second structure. The weight portion is adjusted in thickness after the first structure is made and before the second base and the second structure are joined. | 04-01-2010 |
20100083754 | MATCHED MULTIPLIER CIRCUIT HAVING REDUCED PHASE SHIFT FOR USE IN MEMS SENSING APPLICATIONS - Apparatus and methods are provided for multiplier circuits having reduced phase shift. A multiplier circuit comprises an input node for an input signal and an output node for an output signal. A first multiplier is coupled to the input node and has a first multiplier output, wherein the first multiplier multiplies the input signal by a first signal to produce a second signal at the first multiplier output. A second multiplier is coupled to the output node and is matched to the first multiplier. The second multiplier multiplies the output signal by a third signal to produce a fourth signal at a second multiplier output. An amplifier is coupled to the first multiplier output and the second multiplier output and produces the output signal at an amplifier output coupled to the output node based upon the second signal and the fourth signal. | 04-08-2010 |
20100083755 | MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A mechanical quantity sensor includes: a first structure having a fixed portion with an opening, a displaceable portion disposed in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion to each other; a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, the second structure being stacked on the first structure; a first base having a first driving electrode which is disposed on a surface facing the displaceable portion and is made of a conductive material containing Al and Nd, the first base being stacked on the first structure while being connected to the fixed portion; and a second base having a second driving electrode which is disposed on a surface facing the weight portion and is made of the conductive material, the second base being stacked on the second structure while being connected to the pedestal. | 04-08-2010 |
20100083756 | Micromechanical Inertial Sensor for Measuring Rotation Rates - A rotation rate sensor for sensing a rotation Ω by which the sensor is rotated has a substrate and a driving and sensing arrangement located substantially flat in an X-Y plane above a substrate surface of the substrate and having a center. The driving and sensing arrangement has a drive mass and a sense mass that are arranged at different spacings from the center of the driving and sensing arrangement symmetrically about the center. The oscillation modes of the drive mass and the sense mass are partially transmittable onto one another and are partially decoupled. The rotation Ω is sensed in that a tilting of the sense mass out of a surface plane of the driving and sensing arrangement is sensed. A first one of the drive and sense masses that has a greater spacing to the center is tilted under the effect of Coriolis force out of the surface plane The first one of the drive and sense masses is connected by symmetrically arranged external anchors to the substrate such that a restoring action for the tilting action of the first one of the drive and sense masses is assisted by the external anchors. | 04-08-2010 |
20100083757 | SENSOR DEVICE - A sensor device includes a time determining part that determines time point information, and adds the time point information to the output supplied from a part subjected to failure diagnosis and related to generation of a failure detection signal, and to the output related to generation of a sense signal. With this structure, the failure detection signal is correlated with the sense signal by the time point information. Alternatively, the sensor device includes an output circuit that correlates the failure detection signal with the sense signal supplied at the same time point as the failure detection signal, and outputs both signals using a time division method. | 04-08-2010 |
20100089156 | MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, and arranged and stacked on the first structure, and a base having a driving electrode and a detection electrode arranged on a face facing the weight portion, connected to the pedestal, and arranged and stacked on the second structure. The second structure has a projection arranged in an area on a face of the weight portion facing the base, the area corresponding to an area where the driving electrode and the detection electrode are not arranged, the projection having a thickness larger than thicknesses of the driving electrode and the detection electrode. | 04-15-2010 |
20100089157 | Micro-Machined Accelerometer - The invention relates to a micromachined accelerometer in a flat plate comprising a base and at least two resonator measuring cells provided with a common mobile seismic element, the two measuring cells being placed one on each side of the common mobile seismic element along the sensitive axis of the accelerometer, such that under the effect of an acceleration, the resonator of one measuring cell undergoes a traction whilst the resonator of the other measuring cell undergoes a compression, said measuring cells respectively comprising means of amplification of the acceleration force generating the translation of the common mobile seismic element provided with a respective anchoring foot-piece. Said common mobile seismic element comprises at least two mobile seismic masses able to be displaced in translation along said sensitive axis of the accelerometer and/or in rotation with respect to a respective axis of rotation substantially orthogonal to said sensitive axis under the effect of an acceleration along said sensitive axis, connected to each other by a mechanical connecting member able to prevent, at least partly, deformations of the amplification means resulting from deformations of the accelerometer generated by external thermal stresses. | 04-15-2010 |
20100089158 | VIBRATING STRUCTURAL GYROSCOPE WITH QUADRATURE CONTROL - An apparatus and/or method that corrects for tuning errors in vibrating structure gyroscopes that are configured to be driven along a plurality of axes without the need for dedicated torque elements. The correction is accomplished by introducing a phase offset in the drive signal of one or more of the drive elements relative to other drive elements to minimize or reduce the quadrature signal. The tuning may be accomplished as a one time “set and forget” adjustment, as a manual adjustment performed at the discretion of the user, or as a closed loop active correction system. The technique improves the tuning of the resonator assembly, rather than merely compensating for the mistuning. Accordingly, for various embodiments of the invention, the destructive interference between the plurality of drive axes is reduced. Conservation of vibrational energy present in the resonator is thus enhanced, with less vibrational energy transferred to the support structure. | 04-15-2010 |
20100095769 | Angular Velocity Measuring Device - Disclosed herein is an angular velocity measuring device including: first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and an oscillating means for oscillating the first and the second oscillator for differential oscillation, wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam. | 04-22-2010 |
20100095770 | FREQUENCY MODULATED MICRO GYRO - A micro gyro consisting of a vibrating micro scale structure produces a signal whose characteristic frequency shifts in proportion to the applied angular velocity. The vibrating structure consists of a suspended proof mass resonator supported on springs and connected to at least one detector resonator. The structure can be made with multiple semiconductor materials such as silicon, poly-silicon, silicon dioxide, and silicon nitride, using one of many MEMS fabrication processes. The proof mass resonator is designed to have two closely coupled resonant frequencies, with one resonant mode for the drive motion and the second resonant mode for the sense motion. Detector resonators are connected to the vibrating structure such that when the proof mass resonator oscillates due to the Coriolis force in its sense mode, the connections to the detector resonators are stressed by the proof mass resonator, thus changing the resonant frequency of the detector resonators. By measuring the shift in the resonant frequency of the detectors, the applied angular rate can be determined. | 04-22-2010 |
20100095771 | Gyroscopic Measurement by a Vibratory Gyroscope - A gyroscopic system supplies measurements on the basis of a vibratory gyroscope, which vibrates in a first vibration position and supplies a measurement signal. A periodic command signal is applied to it over a time period to cause the vibration geometrical position to turn a first way during one part of the time period, causing a change in accordance with a first speed profile from the first position to a second position; and to cause the vibration geometrical position to turn a second way opposite the first way during the other part of the time period, causing a change in accordance with a second speed profile from the second position to the first position. The speed profiles indicate a speed variation of the change of position. The measurements supplied by the system are then based on a corrected signal obtained by subtracting the command signal from the measurement signal supplied by the gyroscope. | 04-22-2010 |
20100101323 | Method for operating a sensor system, and sensor system - In a method for operating a sensor system including a substrate having a main plane of extension and an oscillating structure which is movable relative to the substrate, drive elements excite the oscillating structure to a torsional oscillation about an axis of oscillation running essentially perpendicular to the main plane of extension, first detection elements detect a first tilting movement of the oscillating structure about a first tilting axis essentially parallel to the main plane of extension, and further detection elements detect an angular acceleration of the substrate superposed to the torsional oscillation essentially about the axis of oscillation. | 04-29-2010 |
20100107759 | Angular velocity detecting method - In a method of detecting an angular velocity V | 05-06-2010 |
20100107760 | DETECTION DEVICE, GYROSENSOR, AND ELECTRONIC INSTRUMENT - A detection device includes a driver circuit and a detection circuit. The detection circuit includes an amplifier circuit which amplifies an output signal from a vibrator, a sensitivity adjustment circuit which performs sensitivity adjustment by variably controlling a gain, and a synchronous detection circuit which performs synchronous detection based on a reference signal. The sensitivity adjustment circuit is provided in the preceding stage of the synchronous detection circuit. The sensitivity adjustment circuit operates as a programmable-gain amplifier and a high-pass filter. | 05-06-2010 |
20100116050 | CORIOLIS GYRO - A Coriolis gyro having an arrangement which comprises a substrate, at least two individual structures and spring elements. The spring elements couple the individual structures to the substrate and to one another. Force transmitters and taps are provided. The arrangement has at least one excitation mode which can be excited by the force transmitters and at least one detection mode which can be measured by the taps. The excitation mode and the detection mode are closed, as a result of which no disturbance excitations of the excitation mode and of the detection mode can be caused by linear accelerations and/or vibrations if there is no need to take account of manufacturing tolerances. | 05-13-2010 |
20100116051 | ANGULAR VELOCITY SENSOR - There is provided a signal separation circuit of an angular velocity sensor where a first sensing section, a second sensing section and a third sensing section which are arranged in two second arms are connected to a detection circuit section, and in this detection circuit section, an angular velocity is detected based upon angular velocity signals outputted from the first to third sensing electrode sections. | 05-13-2010 |
20100122576 | Rotation rate sensor - A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account. | 05-20-2010 |
20100122577 | EVALUATION ELECTRONICS SYSTEM FOR A ROTATION-RATE SENSOR - An evaluation electronics system for a rotation-rate sensor, having a first and a second seismic mass, is developed for the purpose of ascertaining a rotation rate, acting on the rotation-rate sensor, from a deflection of the first and second seismic masses. The evaluation electronics system, in this instance, has a regulation member in order to minimize an undesired deflection of the first and second seismic masses, caused by interference influences. | 05-20-2010 |
20100126270 | INERTIA FORCE SENSOR - An inertial force sensor includes a weight, a first fixing portion linked to the weight, a second fixing portion linked to the weight via the first fixing portion, a first electrode on a first surface of the weight, a second electrode facing the first electrode, and first and second elastic portions elastically deforming so as to displace the weight. The first elastic portion displaces the weight along an X-axis but not along any of a Y-axis and a Z-axis. The second elastic portion displaces the first fixing portion along the Y-axis but not along any of the X-axis and the Z-axis. This inertial force sensor detects an acceleration at high sensitivity. | 05-27-2010 |
20100126271 | INERTIAL VELOCITY SENSOR SIGNAL PROCESSING CIRCUIT AND INERTIAL VELOCITY SENSOR DEVICE INCLUDING THE SAME - An inertial velocity sensor signal processing circuit ( | 05-27-2010 |
20100132460 | X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING - An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment. | 06-03-2010 |
20100132461 | QUADRATURE COMPENSATION FOR A ROTATION-RATE SENSOR - A rotation-rate sensor includes a substrate having a surface, a movable element situated above the surface, which is deflectable based on a Coriolis force along a first axis that runs perpendicular to the surface, a driving device which is prepared to activate the movable element along a second axis that runs parallel to the surface, a compensation device, in order to generate an electrostatic force along the first axis, including electrodes corresponding to one another, developed on the substrate and on the movable element; a relative degree of covering of the electrodes in the direction of the first axis being a function of the deflection of the movable element along the second axis; and the electrode developed on the movable element runs around an insulating region of the movable element. | 06-03-2010 |
20100132462 | Angular Velocity Detecting Apparatus - An angular velocity detecting apparatus including one synchronous detection unit alternately detecting synchronously a displacement signal from a vibrating body with a plurality of synchronous detection signals; one integral calculation unit alternately carrying out integral calculations of a plurality of outputs of the synchronous detection unit; a unit alternately multiplying a plurality of AC signals with two outputs obtained with the synchronous detection unit; a unit adding the two multiplied outputs; and a unit feeding back the output of the addition unit to vibrating body. | 06-03-2010 |
20100132463 | READING CIRCUIT FOR A MULTI-AXIS MEMS GYROSCOPE HAVING DETECTION DIRECTIONS INCLINED WITH RESPECT TO THE REFERENCE AXES, AND CORRESPONDING MULTI-AXIS MEMS GYROSCOPE - A multi-axis gyroscope includes a microelectromechanical structure configured to rotate with respective angular velocities about respective reference axes, and including detection elements, which are sensitive in respective detection directions and generate respective detection quantities as a function of projections of the angular velocities in the detection directions. The gyroscope including a reading circuit that generates electrical output signals, each correlated to a respective one of the angular velocities, as a function of the detection quantities. The reading circuit includes a combination stage that combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination of the detection directions with respect to the reference axes. | 06-03-2010 |
20100132464 | MOTION ASSISTING DEVICE - According to a motion assisting device | 06-03-2010 |
20100139399 | ROTATION RATE SENSOR - A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis. | 06-10-2010 |
20100139400 | MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A mechanical quantity sensor includes a first structure having a fixed portion with an opening, a displaceable portion arranged in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion, a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, and arranged and stacked on the first structure, and a base having a driving electrode and a detection electrode arranged on a face facing the weight portion, connected to the pedestal, and arranged and stacked on the second structure. The second structure has a recessed portion arranged in an area on a face of the weight portion facing the second base, the area corresponding to an area where the driving electrode and the detection electrode are not arranged. | 06-10-2010 |
20100154540 | SENSOR DEVICE - An sensor device with high detection accuracy. The sensor device includes an angular velocity sensor for outputting an angular velocity sensing signal, an acceleration sensor for outputting an acceleration sensing signal, and an output circuit for outputting the angular velocity sensing signal and the acceleration sensing signal. The output circuit outputs signals in a digital format according to the time-division system, so as to link timewise the angular velocity sensing signal and the acceleration sensing signal detected at the same timing as one signal. | 06-24-2010 |
20100154541 | MICROELECTROMECHANICAL GYROSCOPE WITH ENHANCED REJECTION OF ACCELERATION NOISES - An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration. | 06-24-2010 |
20100154542 | SENSING ELEMENT OF CORIOLIS FORCE GYROSCOPE - A gyroscope includes a ring-shaped resonator mounted in a housing, and a bottom plate attached to the resonator. A plurality of openings arranged substantially circumferentially on the bottom plate, and a plurality of grooves between the openings. A plurality of piezoelectric elements are located in the grooves. The resonator is substantially cylindrical. The plurality of openings are arranged substantially symmetrically. The piezoelectric elements can be outside the resonator, or inside the resonator. A cylindrical flexible suspension connecting the bottom to the resonator to the ring shaped resonator, wherein an average radius of the cylindrical flexible suspension and the ring shaped resonator, accounting for variation thickness of wall, is the same throughout. | 06-24-2010 |
20100186503 | Microelectromechanical sensor and operating method for a microelectromechanical sensor - A microelectromechanical sensor and operating method therefor. The sensor has at least one movable electrode. An electrode arrangement is spaced apart from the movable electrode with a plurality of electrodes that can be driven separately and to which corresponding electrode signals can be applied that can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode. An electrode signal generation unit is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode. The electrode signal generation unit generates each electrode signal in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and matches the electrode signals to one another so that the application of force, the spring constant and the read-out factor of the movable electrode can be set/changed to specific desired values independently of one another. | 07-29-2010 |
20100186504 | METHOD AND HAND-OPERATED SENSOR WITH ADAPTIVE DETECTION THRESHOLD FOR THE DETECTION OF FOREIGN OBJECTS EMBEDDED IN BUILDING STRUCTURE SUBGRADES - A method for the detection of objects embedded in building structure subgrades such as cable, concrete reinforcing bars, conduit pipe and the like as well as a hand-operated sensor with an adaptive detection threshold operating according to the method, is disclosed. To reduce an over-detection with the adaptation of the detection threshold, a change in the direction of movement of the sensor being guided over the surface area is recorded with respect to an embedded object. The determination of a change in the direction of movement preferably takes place by measuring the sensor acceleration in two directions with respect to the embedded object. Corresponding speeds are computed at least as estimates from the acceleration values in order to generate a conclusion about a reversal of the direction of movement. | 07-29-2010 |
20100186505 | ROTATION RATE SENSOR AND METHOD FOR OPERATING A ROTATION RATE SENSOR - A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable, by way of excitation means, to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element. | 07-29-2010 |
20100186506 | GYROMETER IN SURFACE TECHNOLOGY, WITH OUT-OF-PLANE DETECTION BY STRAIN GAUGE - The invention concerns a gyrometer-type device, comprised in a substrate ( | 07-29-2010 |
20100192690 | MICROMECHANICAL STRUCTURES - A micromechanical structure including a substrate having a main plane of extension, and including a first seismic mass, the first seismic mass including a grid structure made of intersecting first mass lines and the first seismic mass being flexibly secured with the aid of first bending-spring elements, and moreover, a first line width of the first mass lines parallel to the main plane of extension being between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension. | 08-05-2010 |
20100199761 | INERTIA FORCE SENSOR - When detecting an angular rate in a detecting element ( | 08-12-2010 |
20100199762 | MICROMECHANICAL DEVICE HAVING A DRIVE FRAME - A micromechanical device includes at least one drive frame and at least one vibrator, the vibrator being situated in a region surrounded by the drive frame; the vibrator being mechanically coupled to the drive frame. The drive frame is able to be excited to generate a flexural vibration. | 08-12-2010 |
20100199763 | Vibration compensation for yaw-rate sensors - A compensation circuit for a yaw-rate sensor includes a first evaluation unit for generating a quadrature-compensation signal, taking a differential value or cumulative value from a first and a second measured value into account. The compensation circuit has a second evaluation unit which is provided to generate a vibration-compensation signal, taking a cumulative value or differential value from the first and second acquired measured value into account. A corresponding detection circuit and a corresponding yaw-rate sensor are also described. A compensation method for a yaw-rate sensor includes the steps of acquiring a first and a second measured value at a detection-sensor element, generating a first differential value or cumulative value from the first and second measured value, generating a quadrature-compensation signal, taking the first differential value or cumulative value into account, generating a second cumulative value or differential value from the first and second measured value, and generating a vibration-compensation signal, taking the second cumulative value or differential value into account. | 08-12-2010 |
20100199764 | MICROMECHANICAL RATE-OF-ROTATION SENSOR - A micromechanical rate-of-rotation sensor for detecting a rate of rotation about a sense axis includes a substrate, a detection unit, means for generating a rotational oscillation of the detection unit about a drive axis which is orthogonal to the sense axis, and a central suspension means rotatably coupling the detection unit to the substrate in a fulcrum of the detection unit. The central suspension means is configured to permit the detection unit to perform a detection movement about a detection axis orthogonal to the sense axis in the form of a rotational oscillation about the central suspension means. The sensor also includes at least two second suspension means coupling the detection unit and the substrate for providing a response behavior specific to rotation about at least one of the drive axis and the detection axis. | 08-12-2010 |
20100206072 | MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT - A micromechanical component may include fixed electrodes and a seismic mass, the seismic mass being connected via a suspension element to a carrier substrate and being movable with respect to it. The seismic mass may include counterelectrodes, which are interconnected via a first electrically conductive connection. The fixed electrodes may include measuring electrodes and decoupled electrodes, the measuring electrodes being provided to function for an electrical evaluation, and the counterelectrodes situated across from the decoupled electrodes being provided to function as a frequency band-altering mechanical element. | 08-19-2010 |
20100206073 | ANGULAR VELOCITY DETECTING DEVICE AND MANUFACTURING METHOD OF THE SAME - An angular velocity detecting device includes a semiconductor substrate ( | 08-19-2010 |
20100206074 | OSCILLATION DRIVE DEVICE, PHYSICAL QUANTITY MEASUREMENT DEVICE AND ELECTRONIC APPARATUS - There is provided an oscillation drive device that forms an oscillation loop with a vibrator for exciting a driving vibration on the vibrator. The oscillation drive device includes: a comparator that excites a driving vibration on the vibrator based on a signal in the oscillation loop with a given voltage as a reference; an oscillation detector that detects oscillation in the oscillation loop; a signal generation circuit that generates a switching control signal based on an oscillation result given by the oscillation detector; and a switch circuit inserted between the vibrator in the oscillation loop and an output of the comparator, wherein, during an oscillation startup stage in which oscillation in the oscillation loop is not detected by the oscillation detector, the switch circuit alternately switches, based on the switching control signal, between a period in which the output of the comparator and the vibrator are electrically connected and a period in which a predetermined set voltage is supplied to the vibrator. | 08-19-2010 |
20100212423 | ACCELERATION SENSOR - An acceleration sensor having a substrate, at least one web, and a seismic mass, the web and the seismic mass being situated over a plane of the substrate. The seismic mass is situated on at least two sides of the web and elastically suspended on the web. The web is anchored on the substrate with the aid of at least one anchor. At least one anchor is situated outside the center of gravity of the seismic mass. | 08-26-2010 |
20100218604 | ANGULAR VELOCITY SENSOR - Disclosed is an angular velocity sensor for achieving downsizing of a variety of electronic devices. For this purpose, the angular velocity sensor has a subtracter for outputting a first differential signal based on two sensor signals output from a first sensing electrode unit and a second sensing electrode unit, an adder for outputting a first additional signal, another subtracter for outputting a second differential signal based on two sensor signals output from a third sensing electrode unit and a fourth sensing electrode unit, and another adder for outputting a second additional signal. The sensor then detects an angular velocity from an additional signal obtained based on the first differential signal and the second differential signal and a differential signal obtained based on the first additional signal and the second additional signal. | 09-02-2010 |
20100218605 | VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures ( | 09-02-2010 |
20100223996 | INERTIAL SENSOR - An inertial sensor includes a drive structure | 09-09-2010 |
20100229645 | INERTIA FORCE SENSOR - Inertial force sensor includes detecting element that detects inertial force. Detecting element includes: two first orthogonal arms each having first arm and second arm that are connected to each other in a substantially orthogonal direction; support portion that supports two first arms; fixing arms; and weights. Second arms include: bent portions; facing portions that are bent at bent portions so as to face second arms; driving electrodes that are formed in two facing portions facing each other, and drive and vibrate facing portions; and detection electrodes that are formed in the other two facing portions facing each other, and detect the distortion of facing portions. According to this structure, it is possible to achieve small inertial force sensor capable of detecting a plurality of different inertial forces and inertial forces acting on a plurality of detection axes. | 09-16-2010 |
20100229646 | OSCILLATING ANGULAR SPEED SENSOR - An oscillating angular speed sensor includes a detector, a driving portion, and a separating portion. When an angular speed is generated while the detector is driven to oscillate by the driving portion, Coriolis force is applied to the detector. Therefore, the angular speed is detected based on a capacitance variation in accordance with a variation of an interval between a movable electrode and a fixed electrode of the detector. The separating portion is distanced from the detector and the driving portion, and is configured to separate a first space accommodating the detector and a second space accommodating the driving portion. | 09-16-2010 |
20100236327 | Tri-axis Angular Rate Sensor - Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation. | 09-23-2010 |
20100236328 | APPARATUS HAVING A MOVABLE BODY - An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion. | 09-23-2010 |
20100242600 | VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER - A transducer ( | 09-30-2010 |
20100251817 | THERMAL MECHANICAL ISOLATOR FOR VACUUM PACKAGING OF A DISC RESONATOR GYROSCOPE - A single layer micromachined thermal and mechanical isolator may be bonded between a microelectromechanical system (MEMS) die and package. Small bond pads of the isolator are attached to the periphery of the die. The isolator material may be chosen to match that of the die, reducing CTE mismatch. Long thin isolation beams can be used to provide thermal isolation against external temperature changes, which may be conducted through the package. Weak and flexible beams can be used to tolerate large displacements with very little resistance. Thus, excessive stress or distortion to the package, from either CTE mismatch or external stress, may be absorbed by the isolator and will not be transmitted to the MEMS die. Beam rigidity may be designed to attenuate vibration of particular frequency range. The isolator can be readily inserted into an existing disc resonator gyroscope package in one thermal compression bond step. | 10-07-2010 |
20100251818 | ENVIRONMENTALLY ROBUST DISC RESONATOR GYROSCOPE - Micromachined disc resonator gyroscopes (DRGs) are disclosed designed to be virtually immune to external temperature and stress effects. The DRG is a vibratory gyroscope that measures angular rate which is designed to have reduced sensitivity to external thermal and mechanical stress. The DRG features an integrated isolator that may be fabricated on the same wafer as the electrode wafer forming a plurality of integrated isolator beams. In addition, the DRG may include a wafer level hermetical vacuum seal, flip chip ball grid array (BGA), and vertical electrical feedthrough to improve reliability and to reduce manufacturing cost. An additional carrier layer may be used with shock stops, vertical electrical feedthrough, and the flip chip BGA. A pyrex or quartz cap with embedded getter and shock stops can be employed. | 10-07-2010 |
20100251819 | DAMPING DEVICE - A device for damping a movement of a seismic mass of a micromechanical inertial sensor, the device being designed to apply a force to the seismic mass damping the movement of the seismic mass as a function of the values of at least one movement parameter of the seismic mass, the damping being produced electrically. | 10-07-2010 |
20100257934 | Gyroscopes Using Surface Electrodes - Gyroscopes using surface electrodes are provided. In this regard, a representative microelectromechanical systems (MEMS) gyroscope, among others, includes a top substrate and a bottom substrate. The top substrate includes an outermost structure that is open and enclosed and a first driving structure that is disposed within the outermost structure and includes first driving electrodes disposed on a bottom surface. The bottom substrate is disposed below the top substrate and includes second driving electrodes disposed on a top surface of the bottom substrate. The second driving electrodes are substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes. The first and second driving electrodes are also configured to provide a capacitance signal based on the movement of the first driving structure. | 10-14-2010 |
20100263445 | MEMS INERTIAL SENSOR WITH FREQUENCY CONTROL AND METHOD - An inertial sensor has a transducer with a sense resonator. The sense resonator is oscillated. A signal responsive to the oscillation is provided. A first baseband signal and a second baseband signal are provided responsive to the signal responsive to the oscillation of the sense resonator. A signal for controlling a resonance frequency of the sense resonator is provided responsive to performing a Goertzel algorithm on the first baseband signal and the second baseband signal. One use of controlling the resonance frequency is to control an offset between the resonance frequency of the sense resonator and the frequency of the oscillation of drive masses in the sense resonator. Using the Goertzel algorithm is particularly efficient in controlling the resonance frequency. | 10-21-2010 |
20100263446 | ANGULAR VELOCITY SENSOR - In an angular velocity sensor, driven mass portions are disposed on a surface of a base plate at point-symmetrical locations with respect to a central point O. The driven mass portions are connected to a coupling beam to be interconnected. The coupling beam is flexibly supported through connecting portions and driven beam. Detecting mass portions are disposed inside the driven mass portions, and the detecting mass portions are supported by detecting beams to be displaceable in the Z-axis direction. Two adjacent ones of the driven mass portions in the circumferential direction are vibrated by vibration generation portions in opposite phases to each other. When angular velocities are exerted in such a state, the detecting mass portions are caused to displace and vibrate in the direction of thickness of the base plate. Displacement detecting portions detect displacements of the detecting mass portions in the direction of the thickness. | 10-21-2010 |
20100281976 | VIBRATING GYROSCOPE USING PIEZOELECTRIC FILM AND METHOD FOR MANUFACTURING SAME - A vibrating gyroscope comprises a ring-shaped vibrating body ( | 11-11-2010 |
20100294039 | Mode-Matching Apparatus and Method for Micromachined Inertial Sensors - A mode matching servo for an inertial sensor having a resonator and an accelerometer provides a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than an accelerometer resonance mode frequency so as to induce acceleration signals from the accelerometer substantially at the test signal frequency when the modes are not matched. A feedback signal is provided in response to such induced signals to substantially nullify the signals. | 11-25-2010 |
20100300201 | ISOLATED ACTIVE TEMPERATURE REGULATOR FOR VACUUM PACKAGING OF A DISC RESONATOR GYROSCOPE - A micromachined thermal and mechanical isolator for MEMS die that may include two layers, a first layer with an active temperature regulator comprising a built-in heater and temperature sensor and a second layer having mechanical isolation beams supporting the die. The isolator may be inserted between a MEMS die of a disc resonator gyroscope (DRG) chip and the leadless chip carrier (LCC) package to isolate the die from stress and temperature gradients. Thermal and mechanical stress to the DRG can be significantly reduced in addition to mitigating temperature sensitivity of the DRG chip. The small form can drastically reduce cost and power consumption of the MEMS inertial sensor and enable new applications such as smart munitions, compact and integrated space navigation solutions, with significant potential cost savings over the existing inertial systems. | 12-02-2010 |
20100307241 | COMBINED MEMS ACCELEROMETER AND GYROSCOPE - A MEMS structure for a combined gyroscope and accelerometer unit ( | 12-09-2010 |
20100307242 | DYNAMIC QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A dynamic quantity sensor includes a sensor chip, a base member, and bumps. The sensor chip includes a semiconductor substrate, a sensor part, and sensor pads electrically coupled with the sensor part. The base member includes a base substrate and base pads disposed on the base substrate. The bumps mechanically and electrically couple the sensor pads and the base pads, respectively, in a state where the sensor chip is curved with respect to the base member. The sensor pads include input pads and output pads. The first surface of the semiconductor substrate includes a first portion and a second portion. The first portion is closer to the base substrate than the second portion is. At least one of the input pads is disposed on the first portion and at least one of the output pads is disposed on the second portion. | 12-09-2010 |
20100307243 | MICROELECTROMECHANICAL GYROSCOPE WITH POSITION CONTROL DRIVING AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL GYROSCOPE - A MEMS gyroscope includes: a microstructure having a fixed structure, a driving mass, movable with respect to the fixed structure according to a driving axis, and a sensing mass, mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass according to a sensing axis, in response to rotations of the microstructure; and a driving device, for keeping the driving mass in oscillation with a driving frequency. The driving device includes a discrete-time sensing interface, for detecting a position of the driving mass with respect to the driving axis and a control stage for controlling the driving frequency on the basis of the position of the driving mass. | 12-09-2010 |
20100307244 | MEMS-Sensor - A MEMS sensor is provided with a substrate and a sensor element. The sensor element moves in response to an influence registered by the sensor primarily in an oscillating turn around a sensor axis that is parallel to the substrate. The sensor has an anchor arranged on the substrate in order to hold the sensor element onto the substrate. A connecting element arranges the sensor element on the anchor. | 12-09-2010 |
20100319451 | Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwith and Gain - The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections. | 12-23-2010 |
20100326188 | RATE-OF-ROTATION SENSOR AND METHOD FOR OPERATING A RATE-OF-ROTATION SENSOR - A rate-of-rotation sensor having a substrate and a first Coriolis element are provided, an excitation arrangement being provided for the excitation of vibrations of the first Coriolis element in a first direction, a first detection arrangement being provided for detecting a first deflection of the first Coriolis element in a third direction running generally perpendicular to the first direction; characterized by the first Coriolis element being developed as balancing rocker. | 12-30-2010 |
20100326189 | PHYSICAL QUANTITY DETECTION APPARATUS, METHOD OF CONTROLLING PHYSICAL QUANTITY DETECTION APPARATUS, ABNORMALITY DIAGNOSIS SYSTEM, AND ABNORMALITY DIAGNOSIS METHOD - An angular velocity detection apparatus (i.e., physical quantity detection apparatus) includes a gyro sensor element (i.e., physical quantity detection element) that allows an angular velocity detection signal that corresponds to the magnitude of an angular velocity (i.e., physical quantity) and a leakage signal of vibrations based on a drive signal (square-wave voltage signal) to flow through a detection electrode, a driver circuit that generates the drive signal, a synchronous detection circuit that performs a synchronous detection process on a detection target signal that includes the angular velocity detection signal and the leakage signal based on a detection signal that is synchronized with the drive signal, and a phase change circuit that changes a relative timing of at least one of a rising edge and a falling edge of the detection signal with respect to the detection target signal based on a control signal so that at least part of the leakage signal is output by the synchronous detection process. | 12-30-2010 |
20110005315 | ANGLE-MEASURING METHOD AND ANGLE-MEASURING GYROSCOPE SYSTEM FOR IMPLEMENTING THE SAME - An angle-measuring method includes: configuring a state observer to calculate a set of estimated signals based on a set of previously calculated estimated parameters; configuring the state observer to calculate a gain thereof using a dynamic equation associated with a gyroscope; configuring the state observer to calculate a set of currently calculated estimated parameters using the dynamic equation associated with the gyroscope based on the gain calculated by the state observer, a set of sensing signals generated by a sensing module, and the estimated signals calculated by the state observer; and configuring an angle calculator to calculate an angle of rotation of the gyroscope based on a position and a velocity in the currently calculated estimated parameters calculated by the state observer and a stiffness coefficient of the gyroscope. An angle-measuring gyroscope system that implements the angle-measuring method is also disclosed. | 01-13-2011 |
20110016972 | MICROELECTROMECHANICAL INERTIAL SENSOR WITH ATMOSPHERIC DAMPING - The present invention relates to an inertial sensor, preferably an acceleration sensor or multi-axis acceleration sensor as a microelectromechanical construction element, said sensor comprising a housing with at least one first gas-filled cavity in which a first detection unit is disposed moveably relative to the housing for detection of an acceleration to be detected, wherein the inertial sensor comprises a damping structure. | 01-27-2011 |
20110030471 | OSCILLATION CONTROL DEVICE - An oscillation control device includes a base body, a movable object, an inertial mass and a driving mechanism. The movable object is supported to the base body. The inertial mass is capable of applying inertial force to the movable object. The driving mechanism mechanically connects the base body and the inertial mass with each other so that the driving mechanism can drive the inertial mass according to a relative movement between the movable object and the base body so that the relative movement therebetween can be suppressed due to the inertial force. | 02-10-2011 |
20110030472 | MEMS MASS-SPRING-DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME - MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed. | 02-10-2011 |
20110030473 | MICROMACHINED INERTIAL SENSOR DEVICES - A micromachined inertial sensor with a single proof-mass for measuring 6-degree-of-motions. The single proof-mass includes a frame, an x-axis proof mass section attached to the frame by a first flexure, and a y-axis proof mass section attached to the frame by a second flexure. The single proof-mass is formed in a micromachined structural layer and is adapted to measure angular rates about three axes with a single drive motion and linear accelerations about the three axes. | 02-10-2011 |
20110041602 | SENSOR SYSTEM AND METHOD FOR PRODUCING A SENSOR SYSTEM - A sensor system is provided having a base plate, a sensor module, a damping element and a support frame, the base plate having a main plane of extension and a recess that is perpendicular to the main plane of extension; the support frame being fastened in the recess; the damping element being situated between the support frame and the recess; and the sensor module further being pressed into the support frame in a form-locking and a force-locking manner. | 02-24-2011 |
20110041603 | Yaw rate sensor and method for operating a yaw rate sensor - A yaw rate sensor is described which includes a substrate having a main plane of extension and a Coriolis element, the Coriolis element being excitable to a driving oscillation along a first direction parallel to the main plane of extension, using a driving arrangement, and a deflection of the Coriolis element along a second direction perpendicular to the first direction being detectable, and the yaw rate sensor having an interference element for exciting the Coriolis element to an interference oscillation. | 02-24-2011 |
20110041604 | Angular rate sensor - An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited. | 02-24-2011 |
20110041605 | Angular rate sensor - An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited. | 02-24-2011 |
20110041606 | VIBRATORY GYROSCOPE USING PIEZOELECTRIC FILM - A vibrating gyroscope according to this invention includes a ring-shaped vibrating body | 02-24-2011 |
20110041607 | INERTIAL FORCE SENSOR - An inertial force sensor which reduces the deterioration of an angular speed detection accuracy and improves the diagnosis accuracy of fault diagnosis is provided. | 02-24-2011 |
20110048129 | Inertial Sensor and Method of Manufacturing the Same - An inertial sensor capable of making pressure of a space in which an inertial sensor such as an acceleration sensor is placed to be higher than that during a sealing step and improving reliability is provided. The inertial sensor can be achieved by means of making an inertial sensor including a substrate, a movable portion on the substrate, a cap member which seals the movable portion so as to cover the movable portion, wherein a gas-generating material is applied to the movable portion side of the cap. | 03-03-2011 |
20110048130 | Micro Scale Mechanical Rate Sensors - An angular rate sensor device is presented. The sensor device comprises a disk-shaped structure having a proof mass region and a flexible portion. The disk-like structure is coupled to a substrate in a manner enabling a wave type precession motion such that during the wave type precession motion each material point of the proof mass performs elliptic motion. | 03-03-2011 |
20110048131 | MICROMECHANICAL COMPONENT - A micromechanical component which has a substrate, a seismic mass, which is deflectably situated on the substrate, and a stop structure for limiting a deflection of the seismic mass in a direction away from the substrate. The stop structure is situated on the substrate and has a limiting section for limiting the deflection of the seismic mass, which is in a plane with the seismic mass. Furthermore, a method for manufacturing a micromechanical component is described. | 03-03-2011 |
20110056291 | Angular Velocity Detecting Apparatus - An angular-velocity detecting apparatus including a synchronous-detection unit for performing the synchronous detection of a displacement signal from a vibrator, a unit for changing a voltage value so that the output of the synchronous-detection unit always becomes equal to its maximum value, the voltage value being applied to a resonant-frequency adjusting electrode, and a unit for feeding back the output of the voltage-value changing unit to the resonant-frequency adjusting electrode in a detection-axis direction. | 03-10-2011 |
20110056292 | Oscillation angular velocity sensor - Each of first and second oscillators includes a detector portion and a driver portion. The detector portion includes a stationary detector electrode and a detector weight, which includes a movable detector electrode opposed to the stationary detector electrode. The driver portion includes a driver weight having a movable driver electrode, which oscillates the detector portion, and a stationary driver electrode opposed to the movable driver electrode. The driver weights of the first and second oscillators are directly connected through a driver joint beam. The detector weights of the first and second oscillators are directly connected through a detector joint beam. | 03-10-2011 |
20110056293 | EXTERNAL-FORCE DETECTING APPARATUS AND METHOD OF DETECTING LINE BREAK - An external-force detecting apparatus includes at least one drive line connecting the corresponding drive electrodes to a driving unit and at least one monitor line connecting the corresponding monitor electrodes to the driving unit. The driving unit outputs a drive signal to the at least one of the drive electrodes through the at least one of the drive lines to drive an oscillator and performs automatic gain control to the level of the drive signal based on the oscillation state of the oscillator acquired from the at least one of the monitor electrodes through the at least one of the monitor lines. The external-force detecting apparatus further includes a switching circuit arranged to switch between connection and disconnection of an electric path between the oscillator and the driving unit via at least one of the drive lines or the multiple monitor lines | 03-10-2011 |
20110061460 | EXTENSION -MODE ANGULAR VELOCITY SENSOR - An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode. | 03-17-2011 |
20110061461 | DETECTOR, PHYSICAL QUANTITY MEASURING DEVICE, AND ELECTRONIC APPARATUS - A detector that detects a detection signal corresponding to a driving vibration, which excites a vibrator in an oscillation loop, and a physical quantity to be measured, includes: an amplifying circuit that amplifies a signal corresponding to the driving vibration and the physical quantity; a synchronous detection circuit that detects the amplified signal of the amplifying circuit in synchronization with an oscillation signal in the oscillation loop; an impedance conversion circuit that converts an output impedance of the synchronous detection circuit; a first low pass filter to which an output signal of the impedance conversion circuit is supplied and which outputs a first detection signal; and a second low pass filter to which the output signal of the impedance conversion circuit is supplied and which outputs a second detection signal. | 03-17-2011 |
20110079079 | YAW RATE SENSOR, YAW RATE SENSOR SYSTEM, AND METHOD FOR OPERATING A YAW RATE SENSOR - A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction. | 04-07-2011 |
20110079080 | Micromechanical structure and method for operating a micromechanical structure - A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction. | 04-07-2011 |
20110083506 | Micromechanical structure and method for manufacturing a micromechanical structure - A micromechanical structure includes: a substrate; a seismic mass movable relative to the substrate along a first direction parallel to a main plane of extension of the substrate; a first electrode structure is connected to the substrate; and a second electrode structure connected to the substrate. The seismic mass includes a counterelectrode structure having finger electrodes situated between first finger electrodes of the first electrode structure and second finger electrodes of the second electrode structure, along the first direction. The first electrode structure is fastened to the substrate by a first anchoring element in a central region of the micromechanical structure, and the second electrode structure is anchored to the substrate by a second anchoring element situated in the central region. | 04-14-2011 |
20110083507 | Yaw rate sensor and method for operating a yaw rate sensor - A yaw rate sensor includes a substrate which has a main plane of extension and a Coriolis element which is movable relative to the substrate. The yaw rate sensor has an excitation arrangement for exciting a drive oscillation of the Coriolis element along a first direction parallel to the main plane of extension. The yaw rate sensor has a detection arrangement for detecting a Coriolis deflection of the Coriolis element along a third direction which is perpendicular to the main plane of extension. In addition, the yaw rate sensor has a quadrature compensation structure which includes a comb electrode structure and a plate capacitor structure. | 04-14-2011 |
20110083508 | DRIFT-COMPENSATED INERTIAL ROTATION SENSOR - An inertial rotation sensor including a vibrating member having facing metal-plated portions forming a variable capacitance capacitor associated with a low impedance load circuit via a multiplexer/demultiplexer member. | 04-14-2011 |
20110088469 | ROTATION-RATE SENSOR HAVING TWO SENSITIVE AXES - A method and system are provided including a rotation-rate sensor having a substrate, a bearing, a vibrating structure suspended on the bearing by springs in a rotatable manner for performing a planar driving vibration motion, and drive means for producing the planar driving vibration motion of the vibrating structure. The rotation-rate sensor has first evaluation means for detecting a rotation in a first axis of rotation and second evaluation means for detecting a rotation in a second axis of rotation. | 04-21-2011 |
20110094302 | Micromachined Gyroscopes with 2-DOF Sense Modes Allowing Interchangeable Robust and Precision Operation - A z-axis gyroscope design is presented with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. By decoupling the frame connecting the sense system to a central anchor, x-y symmetry is preserved while enabling a fully coupled 2-DOF sense mode providing control over both the bandwidth and the amount of coupling independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system. | 04-28-2011 |
20110094303 | Physical quantity sensor and method of making the same - A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing. | 04-28-2011 |
20110100121 | Vibratory gyro bias error cancellation using mode reversal - The method and apparatus in one embodiment may have: providing a two-dimensional axisymmetric oscillator having a beam containing two principal elastic axes and two principal damping axes; driving the beam with drive components to oscillate across corners of the beam at approximately 45 degrees to sides of the beam, the drive components having forcer components that provide drive and pickoff components that provide feedback; and oscillating the beam in a normal mode and a reverse mode. | 05-05-2011 |
20110100122 | BIAXIAL ANGULAR VELOCITY SENSOR - A biaxial angular velocity sensor provided herein has good detection sensitivity and allows an oscillator to be fixed stably. The biaxial angular velocity sensor includes an oscillator ( | 05-05-2011 |
20110107836 | ANGULAR VELOCITY SIGNAL DETECTION CIRCUIT AND ANGULAR VELOCITY SIGNAL DETECTION METHOD - An angular velocity signal detection circuit includes: a first current-voltage conversion circuit that converts, into a voltage, a current outputted from a first detection electrode of a gyroscope, and amplifies the voltage, thereby outputs a first conversion signal; a second current-voltage conversion circuit that converts, into a voltage, a current outputted from a second detection electrode of the gyroscope, and amplifies the voltage, thereby outputs a second conversion signal; an arithmetic operation unit that performs arithmetic operations by using the first conversion signal and the second conversion signal, and outputs a first processing signal and a second processing signal; and a third difference arithmetic operation circuit that amplifies a difference between the first processing signal and the second processing signal. | 05-12-2011 |
20110113879 | Inertial Sensor, Inertial Sensor Device and Manufacturing Method of the Same - An inertial sensor, comprises a detection element detecting an amount of a physical quantity in a detection axis direction, a plurality of support members having flexibility and supporting nearly a center of the detection element, and a package substrate housing the detection element and the plurality of support members. In a case when an X-axis is defined as an extending direction of the plurality of support members, a Y-axis is perpendicular to the X-axis in a plane including the detection element, and a Z-axis is perpendicular to the X-axis and the Y-axis, one of load components in a direction of the Y-axis of the detection member applied to the plurality of support members is nearly equal to other among the plurality of support members, and one of load components in a direction of the Z-axis is nearly equal to the other among the plurality of support members. | 05-19-2011 |
20110126621 | Rotation-Rate Sensor Having A Quadrature Compensation Pattern - A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode. The second electrode has a first electrode surface and a second electrode surface which are situated opposite to each other. The first electrode is situated in an intermediate space, between the first electrode surface and the second electrode surface. The first electrode surface and also the second electrode surface, over their extension, are at a different distance from the first electrode. The first electrode surface and the second electrode surface of the second electrode are at generally the same distance from each other, over their extension. | 06-02-2011 |
20110132087 | Yaw rate sensor - A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element. | 06-09-2011 |
20110138911 | VIBRATING REED, VIBRATOR, PHYSICAL QUANTITY SENSOR, AND ELECTRONIC APPARATUS - A resonator element includes: drive beams including a first beam and a second beam that vibrate in torsional vibration modes and are elongated side by side in a first direction; support parts that couple one ends and the other ends of the first beam and the second beam; and detection arms elongated from the respective first beam and second beam in a second direction orthogonal to the first direction in a plan view, wherein, in a drive mode, the first beam and the second beam torsionally vibrate in opposite directions to each other, the respective detection arms vibrate in a normal direction of a plane containing the first direction and the second direction, and the detection arm elongated from the first beam and the detection arm elongated from the second beam vibrate in the same direction as each other. | 06-16-2011 |
20110138912 | MICRO ELECTRO MECHANICAL SYSTEM - In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions | 06-16-2011 |
20110146401 | ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS - Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about an axis parallel to a first direction. The second vibration element detects a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generates an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction. The support substrate supports the first vibration element and the second vibration element. | 06-23-2011 |
20110146402 | MICROELECTROMECHANICAL GYROSCOPE WITH CONTINUOUS SELF-TEST FUNCTION, AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL GYROSCOPE - A microelectromechanical gyroscope includes a body and a sensing mass, which is movable with a degree of freedom in response to rotations of the body about an axis. A self-test actuator is capacitively coupled to the sensing mass for supplying a self-test signal. The capacitive coupling causes, in response to the self-test signal, electrostatic forces that are able to move the sensing mass in accordance with the degree of freedom at an actuation frequency. A sensing device detects transduction signals indicating displacements of the sensing mass in accordance with the degree of freedom. The sensing device is configured for discriminating, in the transduction signals, spectral components that are correlated to the actuation frequency and indicate the movement of the sensing mass as a result of the self-test signal. | 06-23-2011 |
20110146403 | MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS, AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS - A microelectromechanical device includes a body, a movable mass, elastically connected to the body and movable in accordance with a degree of freedom, and a driving device, coupled to the movable mass and configured to maintain the movable mass in oscillation at a steady working frequency in a normal operating mode. The microelectromechanical device moreover includes a start-up device, which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency of a first signal correlated to oscillation of the movable mass with a reference frequency, and for deciding, on the basis of the comparison between the current oscillation frequency and the reference frequency, whether to supply to the movable mass a forcing signal packet so as to transfer energy to the movable mass. | 06-23-2011 |
20110154898 | INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE - An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement. | 06-30-2011 |
20110162450 | VIBRATING ELEMENT, VIBRATOR, AND ELECTRONIC APPARATUS - A vibrating element includes: a first support portion and a second support portion; a first vibrating arm which extends along a first axis, one end of the first vibrating arm being connected to the first support portion; a second vibrating arm which extends along the first axis, one end of the second vibrating arm being connected to the second support portion; an oscillating member which is sandwiched between the other ends of the first vibrating arm and the second vibrating arm, and has openings; and detection arms which extend along a second axis perpendicular to the first axis from the inner walls of the openings of the oscillating member in plan view. | 07-07-2011 |
20110167911 | VIBRATING STRUCTURE GYROSCOPES - An exemplary vibrating structure gyroscope includes a ring structure, an external frame and a flexible support including a pair of symmetrical compliant legs arranged to retain the ring structure within the external frame. A metal track is provided on an upper surface of the ring structure, the compliant legs and the external frame, over an insulating surface oxide layer. Each flexible support is arranged to carry a metal track associated with a single drive or pick-off transducer. The metal track is repeated for eight circuits, one circuit for each transducer. Each circuit of metal track associated with a transducer begins at a first bond-pad on the external frame, runs along a first compliant leg, across an eighth segment of the ring structure and back along the other compliant leg to a second bond-pad on the external frame. | 07-14-2011 |
20110167912 | PHYSICAL QUANTITY SENSOR - A physical quantity sensor includes a sensing portion, a casing, a vibration isolating member, an electrically conductive portion, a pad and a bonding wire. The casing encases the sensing portion therein. The vibration isolating member is disposed between the sensing portion and the casing to reduce a relative vibration between the sensing portion and the casing. The bonding wire electrically connects the electrically conductive portion provided on the casing and the pad provided on a surface of the sensing portion. The bonding wire extends from the pad to the electrically conductive portion and includes a bend. The bonding wire is configured to satisfy a relation of 20×d≦h, in which d is an outer diameter of the bonding wire, and h is a dimension of the bonding wire with respect to a direction perpendicular to the surface of the sensing portion. | 07-14-2011 |
20110174073 | TUNING FORK-TYPE VIBRATOR, TUNING FORK-TYPE VIBRATOR MANUFACTURING METHOD, AND ANGULAR VELOCITY SENSOR - A tuning fork-type vibrator includes a tuning fork-type vibrating body including a base and legs. The tuning fork-type vibrating body includes two piezoelectric substrates, an intermediate electrode, surface electrodes and an entire-surface electrode that are laminated together. The surface electrodes are separated by separating portions extending from the base to each of the legs. The widths of the separating portions at a point of connection to the circuit board are wider than those of the separating portions at other points. The separating portions are formed by dividing an electrode provided on the entire surface of a piezoelectric substrate in the vibrating body with a dicer or by laser radiation or etching. | 07-21-2011 |
20110179867 | PHYSICAL AMOUNT DETECTING DEVICE, PHYSICAL AMOUNT DETECTING APPARATUS, AND ELECTRONIC APPARATUS - A physical amount detecting device includes: one pair of first driving vibration arms are bending-vibrated in a Z-axis direction with a first phase, one pair of second driving vibration arms are bending-vibrated in the Z-axis direction with a second phase that is a reverse phase of the first phase, the one pair of the first driving vibration arms and the one pair of the second driving vibrating arms are vibrated in a Y-axis direction with opposite phases by a Coriolis force that is generated in accordance with angular velocity of a X-axis rotation, and one pair of detection vibration arms are bending-vibrated in the X-axis direction with opposite phases in accordance with vibration of the one pair of the first driving vibration arms and the one pair of the second driving vibration arms in the Y-axis direction. | 07-28-2011 |
20110179868 | PHYSICAL QUANTITY SENSOR SYSTEM AND PHYSICAL QUANTITY SENSOR DEVICE - A physical quantity sensor system drives a physical quantity sensor and detects a physical quantity signal from a sensor signal. An analog-to-digital conversion circuit respectively converts a monitor signal and the sensor signal to a digital monitor signal and a digital sensor signal. A drive control circuit controls a drive signal according to the digital monitor signal. A phase adjustment circuit adjusts the phase difference between the digital monitor signal and the digital sensor signal. A detection circuit detects the physical quantity signal by multiplying the digital monitor signal by the digital sensor signal after the phase difference adjustment by the phase adjustment circuit. | 07-28-2011 |
20110179869 | ANGULAR VELOCITY SENSOR ELEMENT, ANGULAR VELOCITY SENSOR AND ANGULAR VELOCITY SENSOR UNIT BOTH USING ANGULAR VELOCITY SENSOR ELEMENT, AND SIGNAL DETECTING METHOD FOR ANGULAR VELOCITY SENSOR UNIT - The angular velocity sensor of the present invention has one end connected to holding section and the other end connected to weighting section. According to the angular velocity sensor, driving arm has a dog-leg structure of arms extending in a direction perpendicular to a connecting direction of holding section and weighting section. | 07-28-2011 |
20110192226 | Generation, Injection and Use of Pilot Tones for Gyro System Characterization - A microcontroller-based method and apparatus are described for generating one or more amplitude and frequency selectable low frequency pilot tone signals (PT) that are injected into an embedded MEMS sensor ( | 08-11-2011 |
20110197674 | MICROELECTROMECHANICAL GYROSCOPE WITH CALIBRATED SYNCHRONIZATION OF ACTUATION AND METHOD FOR ACTUATING A MICROELECTROMECHANICAL GYROSCOPE - A gyroscope includes a body, a driving mass, which is mobile according to a driving axis, and a sensing mass, which is driven by the driving mass and is mobile according to a sensing axis, in response to rotations of the body. A driving device forms a microelectromechanical control loop with the body and the driving mass and maintains the driving mass in oscillation with a driving frequency. The driving device comprises a frequency detector, which supplies a clock signal at the frequency of oscillation of the driving mass, and a synchronization stage, which applies a calibrated phase shift to the clock signal so as to compensate a phase shift caused by components of the loop that are set between the driving mass and the control node. | 08-18-2011 |
20110197675 | MICROELECTROMECHANICAL GYROSCOPE WITH INVERSION OF ACTUATION FORCES, AND METHOD FOR ACTUATING A MICROELECTROMECHANICAL GYROSCOPE - A microelectromechanical gyroscope includes a body and a driving mass, which is movable with respect to the body according to a driving axis and is capacitively coupled to the body. The gyroscope moreover includes a driving device, which forms a microelectromechanical control loop with the body and the driving mass and is configured for supplying to the driving mass driving signals having a common-mode component and respective differential components so as to maintaining the driving mass in oscillation according to the driving axis. The driving device is provided with an actuation stage configured for inverting in a controlled way the sign of the differential components of the driving signals. | 08-18-2011 |
20110197676 | METHOD FOR CONTROLLING A SENSOR WITH A QUICK-START VIBRATING RESONATOR - A method of controlling an inertial rotation sensor has a vibrating resonator having control channels and detection channels. During an operating stage each control channel (C | 08-18-2011 |
20110203371 | ANGULAR VELOCITY SENSOR - An angular velocity sensor comprising a fixed part, a weight coupled with the fixed part via a flexible part having a bending part, a first electrode disposed outside the bending part, and a second electrode disposed inside the bending part, in which the first electrode and the second electrode have an upper electrode and a lower electrode interposed by a piezoelectric layer, respectively, and the width of the first electrode is smaller than the width of the second electrode, and the difference of the amounts of electric charges generated at the first electrode and the second electrode can be suppressed thereby improving the accuracy of detection. | 08-25-2011 |
20110219873 | Angular Rate Sensor - An angular rate sensor includes a metallic core board having a core meal layer made of a metal plate and a wiring layer including a wiring structure, a semiconductor device for detecting an angular rate fixed on the core metal layer, and a cap fixed to the wiring layer. The semiconductor device for detecting an angular rate is disposed in a hollow chamber formed by the cap and the metallic core board. The metallic core board, the semiconductor device, and the cap are molded with resin. Consequently, the angular rate sensor has a packaging structure in which electromagnetic noise resistance and moisture resistance are improved while stress applied to the semiconductor device for detecting an angular rate is reduced. | 09-15-2011 |
20110226056 | METHOD FOR SIMULATING THE OPERATING BEHAVIOR OF A CORIOLIS GYRO - A method for characterizing Coriolis gyros, in the case of which the interaction of the system comprising force transmitters, a mechanical resonator and excitation/readout vibration pick-offs is represented as a discretized, coupled system of differential equations. The variables of the system of equations represent the force signals supplied by the force transmitters to the mechanical resonator and the readout signals produced by the excitation/readout vibration pick-offs. The coefficients of the system of equations contain information relating to the linear transformation which maps the force signals onto the readout signals. The coefficients are determined by measuring force signal values and readout signal values at different instants and substituting them into the system of equations. The system of equations is numerically resolved in accordance with the coefficients, and the coefficients are used to infer undesired bias properties of the Coriolis gyro which corrupt the rate of rotation of the Coriolis gyro. | 09-22-2011 |
20110226057 | VIBRATION GYRO ELEMENT, VIBRATION GYRO SENSOR, ELECTRONIC DEVICE, AND METHOD OF DETECTING PHYSICAL QUANTITY OF VIBRATION - A vibration gyro element includes: a base section; a detection arm extending from the base section in a first direction; a joint section disposed at an end portion of the base section; a first drive arm extending from the joint section in a second direction intersecting with the first direction in a plan view; a second drive arm extending from the joint section in a direction opposite to the extending direction of the first drive arm; a first set of drive electrodes provided to the first drive arm; a second set of drive electrodes provided to the second drive arm; and a set of detection electrodes provided to the detection arm, wherein the first drive arm vibrates in a third direction perpendicular to the first direction and the second direction, the second drive arm vibrates in a same direction as the first drive arm. | 09-22-2011 |
20110226058 | VIBRATING GYRO DEVICE AND MANUFACTURING METHOD THEREFOR - A vibrating gyro device includes a piezoelectric substrate, an upper main surface electrode, a lower main surface electrode, and a support substrate. The piezoelectric substrate is provided with inner open holes and outer open holes. Side edge surfaces of a frame-shaped region in the X-Y plane are exposed to the interior of the frame through the inner open holes. Side edge surfaces of the frame-shaped region are exposed to the exterior of the frame through the outer open holes. Drive detection electrodes arranged within the upper main surface electrode are bonded to the upper main surface of the frame-shaped region and together with the lower main surface electrode are electromechanically coupled with deformation of the frame-shaped region in the Z-axis direction and deformation of the frame-shaped region in a direction parallel or substantially parallel to the X-Y plane. The support substrate provides a vibration space for the frame-shaped region and supports the piezoelectric substrate. The vibration space prevents interference between the frame-shaped region and the support substrate and connects the inner open holes and the outer open holes. | 09-22-2011 |
20110232382 | PHYSICAL AMOUNT DETECTING DEVICE, PHYSICAL AMOUNT DETECTING APPARATUS, AND ELECTRONIC APPARATUS - A physical amount detecting device includes: one pair of driving vibration arms are bending-vibrated in a direction of a X-axis, one pair of first detection vibration arms and one pair of second detection vibration arms are vibrated in a direction of a Y axis, depending on a Coriolis force that is generated in accordance with rotational angular velocity of X-axis rotation, the one pair of the first detection vibration arms are bending-vibrated with a first phase in a direction of a Z axis in addition to vibration in the direction of the Y axis, and the one pair of the second detection vibration arms are bending-vibrated with a second phase, which is a phase opposite to the first phase, in the direction of the Z axis in addition to vibration in the direction of the Y axis. | 09-29-2011 |
20110232383 | VIBRATION PIECE, ANGULAR VELOCITY SENSOR, AND ELECTRONIC APPARATUS - A vibration piece includes: a base portion; a first driving arm which extends in a first axis direction from one end of the base portion in the first axis direction; a second driving arm which extends in the first axis direction from the other end of the base portion in the first axis direction; driving electrodes which are respectively provided in the first driving arm and the second driving arm; a detection arm which extends in a second axis direction perpendicular to the first axis direction from the base portion; a detection electrode which is provided in the detection arm; and a support portion which extends from the base portion, wherein the support portion is provided so as to surround the detection arm. | 09-29-2011 |
20110232384 | LAMINATED STRUCTURE PROVIDED WITH MOVABLE PORTION - A structure having a first movable portion that is displaced perpendicular to a substrate surface and a second movable portion that is displaced parallel to the substrate surface is realized by a laminated structure, and manufacturing cost is reduced by employing a nested structure for the first movable portion and the second movable portion. The laminated structure is provided with a frame-like outer movable portion and an inner movable portion housed within the frame of the outer movable portion. A y spring is connected to the outer movable portion, and the outer movable portion is displaceably supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner movable portion, and the inner movable portion is displaceably supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer movable portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer movable portion at a height apart from the outer movable portion. | 09-29-2011 |
20110252886 | Angular Velocity Sensor - Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied. An angular velocity sensor is composed of a vibrator which is elastically and displaceably supported on a substrate; a driving means which vibrates the vibrator in the drive axis direction horizontal to the substrate surface; a displacement detecting means in the detection axis direction, which detects a displacement of the vibrator in the detection axis direction horizontal to the substrate surface and perpendicular to the drive axis direction; an angular velocity detecting means which detects an angular velocity based on the displacement of the vibrator in the detection axis direction; a self-vibration detecting means that detects self-vibration of the vibrator, which is generated due to leakage in the detection axis direction of the vibration of the vibrator in the drive axis direction; a self-vibration feedback circuit which completely cancels the self-vibration of the vibrator; and an abnormality determining means which determines abnormality using an output from the self-vibration detecting means. | 10-20-2011 |
20110259100 | MEMS GYROSCOPE - An MEMS gyroscope is disclosed, capable of computing the rotating angle of a DUT being attached thereto without the need to execute an off-line calibration process, of precluding the execution of an integration process, and of executing an on-line compensation process for the error introduced by the sensing circuit defect and by the mechanical structure defect of its gyroscope module. The disclosed MEMS gyroscope comprises: a gyroscope module, a sensing module coupled with the gyroscope module, and a control module couple with the gyroscope module and the sensing module, respectively. The control module receives the system dynamic of the gyroscope module sensed by the sensing module, and applies a gyroscope control method for controlling the gyroscope module and computing the rotating angle of the DUT. Moreover, the control module outputs a control signal including two extra frequency signals, to the gyroscope module, for driving the gyroscope module into operation. | 10-27-2011 |
20110265566 | Micromachined piezoelectric z-axis gyroscope - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device. | 11-03-2011 |
20110265567 | INERTIAL FORCE SENSOR AND DETECTING ELEMENT USED FOR SAME - A detecting element for an inertial force sensor includes a mass section, an excitation section, and a detecting section. The excitation section excites the mass section along a third direction among a first direction, a second direction, and the third direction that are perpendicular to each other. The detecting section outputs a signal corresponding to displacement of the mass section along at least one of the first direction and the second direction. Resonance frequencies Fsx and Fsy of the first direction and the second direction are set greater than a resonance frequency Fxd of the third direction. | 11-03-2011 |
20110271758 | ANGULAR VELOCITY SENSOR - In an angular velocity sensor, a beam portion couples a pair of vibrators with each other and couples each of the vibrators to a substrate to enable the pair of vibrators to be movable in a first direction and a second direction that are perpendicular to each other. The driving portion vibrates the pair of vibrators in opposite phases in the first direction. The detecting portion detects displacement of the pair of vibrators in the second direction as a change in capacitance. The detecting portion includes first and second detecting electrodes. The restricting portion restricts displacement of the pair of vibrators in the second direction based on the change in capacitance. The restricting portion includes first and second restricting electrodes, and an electrode interval between the restricting electrodes is twice a width of the detecting electrodes in the second direction. | 11-10-2011 |
20110271759 | ANGULAR VELOCITY SENSOR - In an angular velocity sensor, a vibrator is coupled with a substrate through a beam part, and is movable in a first direction and a second direction that is perpendicular to the first direction. A driving part is configured to vibrate the vibrator in the first direction. A detecting part is configured to detect displacement of the vibrator in the second direction as a change in capacitance, the displacement being caused by Coriolis force generated in the vibrator due to vibration of the vibrator and an angular velocity around a third direction that is perpendicular to the first direction and the second direction. A restricting part is configured to restrict displacement of the vibrator in the second direction based on the change in capacitance. The angular velocity sensor is configured to satisfy a condition where β sin θ is equal to or less than 1. | 11-10-2011 |
20110271760 | INERTIAL FORCE SENSOR - An inertial force sensor includes a detector element, a supporting body supporting the detector element, and a case holding the detector element via the first supporting body. The supporting body has flexibility and has a plate shape. The detector element includes a weight, a flexible coupling portion extending along a plane and supporting the weight, a fixing portion holding the weight via the coupling portion, and a detector detecting angular velocities about at least two axes non-parallel to each other. The supporting body extends in parallel with the plane from the detector element, and bends at a bending portion in a direction away from the plane. This inertial force sensor can detect the angular velocities while preventing erroneous detection caused by external impacts and vibrations. | 11-10-2011 |
20110283793 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a sensor unit, a detection unit and a connecting part electrically connecting the sensor unit and the detection unit. The detection unit drives the sensor unit and detects an angular velocity acting on the sensor unit. The detection unit supplies a carrier signal to a movable electrode of a capacitor of the sensor unit and supplies a driving signal to a fixed electrode of the capacitor via the connecting part for performing a servo control. A C/V converter circuit of the detection unit receives capacitance generated at the capacitor through a driving signal transmission line of the connecting part in a state where supply of the driving signal is stopped, and converts the capacitance into a voltage. A determination part of the detection unit determines whether the driving signal transmission line has disconnection or not based on the voltage outputted from the C/V converter circuit. | 11-24-2011 |
20110283794 | COUPLING STRUCTURE FOR A YAW RATE SENSOR DEVICE, YAW RATE SENSOR DEVICE, AND METHOD FOR THE PRODUCTION THEREOF - A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus. | 11-24-2011 |
20110290020 | METHOD FOR OPERATING A SENSOR SYSTEM AND SENSOR SYSTEM - A method for operating a sensor system that includes a rotation rate sensor and an electronic component includes generating, by the rotation rate sensor, a sensor signal as a function of a rotation rate measured about a rotational axis, comparing the sensor signal to at least one first threshold value, and, for controlling the electronic component, outputting an interrupt signal to the electronic component as a function of the comparison of the sensor signal and the at least one first threshold value. | 12-01-2011 |
20110296913 | Yaw rate sensor - A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor. | 12-08-2011 |
20110308315 | VIBRATING GYROSCOPE INCLUDING PIEZOELECTRIC FILM AND METHOD FOR MANUFACTURING SAME - A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge. | 12-22-2011 |
20110314910 | Single-axis-control-input gyroscope system having imperfection compensation - The present invention proposes a single-axis-control-input gyroscope system having imperfection compensation, which comprises a gyroscope and a state observer. The gyroscope includes a mechanical structure, and the dynamic behavior of the mechanical structure is described with a plurality of system parameters and a plurality of dynamic equations. The system parameters include a mass of the gyroscope, two main-axis spring constants, a cross-axis spring constant, two main-axis damping coefficients, a cross-axis damping coefficient and an angular velocity. The mechanical imperfections cause the system parameters to deviate from the designed values and become unknown values. The gyroscope receives a single-axis control signal and outputs a plurality of gyroscopic system dynamics. The single-axis control signal includes at least two frequency signals. The state observer is coupled to the gyroscope to receive the gyroscopic system dynamics as the inputs thereof to feed back compensations to the state observer. Thereby is estimated an angular velocity. | 12-29-2011 |
20110314911 | GYROSCOPE SENSOR CIRCUIT - Disclosed is a gyroscope sensor circuit, including a first differential amplifier differentially amplifying signals outputted from first sensing nodes of a gyroscope sensor; a phase shifter shifting a signal from the first differential amplifier by a predetermined shift phase; an amplitude detector detecting the amplitude magnitude of the signal from the first differential amplifier; and a variable gain amplifier amplifying the shifted signal from the phase shifter with gain adjusted depending on the amplitude magnitude from the amplitude detector, and providing the amplified signal to driving nodes of the gyroscope sensor. | 12-29-2011 |
20110314912 | Yaw rate sensor, sensor system, method for operating a yaw rate sensor and method for operating a sensor system - A yaw rate sensor having a substrate and a seismic mass is described, in which the seismic mass is excitable to a working oscillation relative to the substrate via a drive unit, and a Coriolis deflection of the seismic mass is detectable relative to the substrate, in which the yaw rate sensor furthermore has an interrupt interface, the drive unit being configured to reduce a frequency and/or an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface. | 12-29-2011 |
20120006113 | Microelectromechanical Gyroscopes and Related Apparatus and Methods - In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis. | 01-12-2012 |
20120006114 | MICROELECTROMECHANICAL GYROSCOPE WITH OPEN LOOP READING DEVICE AND CONTROL METHOD - A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency. | 01-12-2012 |
20120017677 | MICROMECHANICAL CORIOLIS RATE OF ROTATION SENSOR - The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another. | 01-26-2012 |
20120017678 | Method for Detecting Accelerations and Rotation Rates, and Mems Sensor - The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor ( | 01-26-2012 |
20120024057 | ANGULAR VELOCITY SENSOR - In an angular velocity sensor, there is generated a first parasitic capacitance generated between a first driving electrode and a sensing electrode, and there is generated a second parasitic capacitance generated between a second driving electrode and the sensing electrode. The ratio of the amplitude of a first drive signal to the amplitude of a second drive signal is set to the reciprocal of the ratio of the first parasitic capacitance to the second parasitic capacitance. This allows the noise contents generated by capacitive coupling to be efficiently offset, thereby improving detection accuracy of an angular velocity sensing signal. | 02-02-2012 |
20120024058 | MICROELECTROMECHANICAL GYROSCOPES AND RELATED APPARATUS AND METHODS - In one embodiment, an apparatus comprises a micromechanical gyroscope and a circuit. The micromechanical gyroscope is configured to be excited in a first mode by a drive signal, and configured to be excited in a second mode by a gyroscopic effect. The circuit is coupled to the micromechanical gyroscope and configured to detect the gyroscopic effect when the micromechanical gyroscope is in the second mode. | 02-02-2012 |
20120024059 | Yaw rate sensor and method for manufacturing a mass element - A yaw rate sensor includes a drive device, at least one mass element which is connected to the drive device, and at least one detection electrode for detecting a motion of the mass element. The mass element has a base layer and at least one web which is situated on the base layer. Also, a method for manufacturing a mass element. | 02-02-2012 |
20120031184 | APPARATUS FOR DRIVING GYROSCOPE SENSOR - There is provided an apparatus for driving a gyroscope sensor, including: a detector detecting voltage corresponding to the deformation of a gyroscope sensor due to vibrations generated by a driving voltage supplied through a driving electrode and Coriolis force by using a detecting electrode; a phase shifter shifting the voltage from the detector by a preset phase to generate the driving voltage, in order to meet oscillation phase conditions; an inverter inverting the voltage from the phase shifter to generate the inverting voltage, in order to stop the driving of the gyroscope sensor; a selector selecting any one of the driving voltage from the phase shifter and the inverting voltage from the inverter; and an amplifier amplifying the driving voltage or the inverting voltage from the selector to a preset gain and supplying it to the driving electrode of the gyroscope sensor, in order to meet oscillation amplitude conditions. | 02-09-2012 |
20120042728 | Micromechanical Sensor - A micromechanical sensor comprising a substrate ( | 02-23-2012 |
20120055248 | Microgyroscope for Determining Rotational Motions about At Least One of Three Perpendicular Spatial Axes - A microgyroscope is used to determine rotational motions about at least one of three perpendicular spatial axes x, y, and z. The microgyroscope has a substrate ( | 03-08-2012 |
20120060604 | YAW-RATE SENSOR - A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis. | 03-15-2012 |
20120067123 | Rotation Rate Sensor - A micromechanical rotation rate sensor, in particular for use in motor vehicles, includes a substrate, at least one seismic mass, which is arranged in a sprung manner on the substrate, drive means for production of a periodic movement of the seismic mass, force detection means for detection of a Coriolis force, which acts on the seismic mass as a result of rotation about a rotation axis which is at right angles to the excitation direction, and measurement means, wherein the measurement means are designed for measurement of structural deviations of the rotation rate sensor. | 03-22-2012 |
20120073370 | MICROMECHANICAL STRUCTURE - A micromechanical structure, in particular an acceleration sensor, is described, having a substrate, a seismic mass, which is movable relative to the substrate, and at least one anchoring element, which is fixedly connected to the substrate, the seismic mass being attached to the substrate by the anchoring element, and at least one spring element being situated between the seismic mass and the anchoring element, and furthermore, the anchoring element has at least one stop element for interaction with at least one counterstop element of the seismic mass. | 03-29-2012 |
20120085167 | VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 04-12-2012 |
20120085168 | VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 04-12-2012 |
20120096941 | Vibration Gyro Element - A vibration gyro element that includes a piezoelectric substrate configured to have a shape that is line-symmetrical about each of the two detection axes X | 04-26-2012 |
20120096942 | ANGULAR VELOCITY SENSOR AND SYNCHRONOUS DETECTION CIRCUIT USED THEREIN - In an angular velocity sensor, an upper electrode of a first piezoelectric element and a lower electrode of a second piezoelectric element are connected to an input terminal of a first Q/V conversion circuit, and a lower electrode of the first piezoelectric element and an upper electrode of the second piezoelectric element are connected to an input terminal of a second Q/V conversion circuit. Thus, vibration noise components of the quantities of charge generated at the first and second piezoelectric elements are cancelled out, and Coriolis components of the quantities of charge generated at the first and second piezoelectric elements are added, whereby only the Coriolis components are extracted. | 04-26-2012 |
20120103093 | SIGNAL LEVEL CONVERSION CIRCUIT, PHYSICAL QUANTITY DETECTION DEVICE AND ELECTRONIC APPARATUS - A signal level conversion circuit | 05-03-2012 |
20120111111 | ANGULAR SPEED SENSOR - An angular velocity sensor includes a vibration, first and second sensor electrodes generating an electric charge responsive to an angular velocity applied to the vibration body, first and D/A converters each outputting at least two levels of an electric charge, first and second integrator circuits integrating the electric charge generated by the first and second sensor electrodes and the electric charges output from the first and second D/A converters, respectively, a comparator unit comparing output signals from the first and second integrator circuits, first and second D/A switching units switching levels of the output signals from the first and second D/A converters according to a comparison result of the comparator unit, a first disconnection detecting switch connected between the first sensor electrode and the first integrator circuit, a first voltage source for injecting an electric charge into a point between the first sensor electrode and the first integrator circuit via the first disconnection detecting switch, a second disconnection detecting switch connected between the second sensor electrode and the second integrator circuit, and a second voltage source for injecting an electric charge into a point between the second sensor electrode and the second integrator circuit via the second disconnection detecting switch. This angular velocity sensor has a high reliability and performs stable operation even if ambient environment changes. | 05-10-2012 |
20120118062 | METHOD FOR THE PRECISE MEASURING OPERATION OF A MICROMECHANICAL ROTATION RATE SENSOR - A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (U | 05-17-2012 |
20120125096 | INERTIAL SENSOR - Disclosed herein is an inertial sensor which includes a sensing unit including a mass mounted to be displaced on a flexible substrate part, a driving unit moving the mass, and a displacement detecting unit detecting a displacement of the mass, the inertial sensor comprising: a top cap covering a top of the flexible substrate part; and a bottom cap covering a bottom of the mass. Thereby, the inertial sensor can be implemented in an economic EMC molding package shape, while protecting the mass and the piezo-electric element. Further, the inertial sensor optimizes a thickness of the cap covering the mass and the piezo-electric element and an interval between the mass and the piezo-electric element to have improved freedom in design of space utilization as well as improved driving characteristics and Q values. | 05-24-2012 |
20120125097 | INERTIAL SENSOR CLUSTER AND SENSOR SYSTEM - A sensor device includes an outer casing, a first sensor module and a second sensor module. The outer casing encloses the first sensor module and the second sensor module at least partially. The first sensor module is enclosed at least partially by a first medium, and the second sensor module is enclosed at least partially by a second medium. | 05-24-2012 |
20120125098 | ROTATIONAL RATE SENSOR HAVING INTERMESHING CORIOLIS ELEMENTS - A rotational rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; and a second Coriolis element. The first Coriolis element and the second Coriolis element have a first and a second center of gravity, respectively, and the elements are drivable along a drive direction. In the idle state of the rotational rate sensor, (i) the distance between the first center of gravity and the second center of gravity along the detection direction is less than a first value, and (ii) the distance between the first center of gravity and the second center of gravity along the third direction is less than a second value. | 05-24-2012 |
20120125099 | YAW-RATE SENSOR AND METHOD FOR OPERATING A YAW-RATE SENSOR - A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis. | 05-24-2012 |
20120125100 | VIBRATING GYROSCOPE INCLUDING PIEZOELECTRIC FILM - A vibrating gyroscope according to this invention includes a ring-shaped vibrating body | 05-24-2012 |
20120137773 | Apparatus and Method for Anchoring Electrodes in MEMS Devices - One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces. | 06-07-2012 |
20120137774 | Non-Degenerate Mode MEMS Gyroscope - Bulk acoustic wave (BAW) gyroscopes purposefully operate using non-degenerate modes, i.e., resonant frequencies of drive and sense modes are controlled so they are not identical. The resonant frequencies differ by a small controlled amount (Δf). The difference (Δf) is selected such that the loss of sensitivity, as a result of using non-degenerate modes, is modest. Non-degenerate operation can yield better bandwidth and improves signal-to-noise ratio (SNR) over comparable degenerate mode operation. Increasing Q of a BAW resonator facilitates trading bandwidth for increased SNR, thereby providing a combination of bandwidth and SNR that is better than that achievable from degenerate mode devices. In addition, a split electrode configuration facilitates minimizing quadrature errors in BAW resonators. | 06-07-2012 |
20120152019 | Yaw-rate sensor and method for operating a yaw-rate sensor - A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions. | 06-21-2012 |
20120160028 | VIBRATION GYRO SENSOR, CONTROL CIRCUIT, AND ELECTRONIC APPARATUS - Provided is a vibration gyro sensor including: a vibration element including a piezoelectric element group which has a first side provided with a drive electrode and a detection electrode and a second side opposed to the first side and provided with a common electrode, which vibrates by a drive signal input between the drive electrode and the common electrode and generates an output signal containing a detection signal corresponding to Coriolis force from the detection electrode; a bias section applying a bias voltage to the detection electrode; an oscillation circuit outputting the signal for causing vibration of the vibration element to the drive electrode as the drive signal based on the output signal generated by the detection electrode; and a phase inversion circuit outputting an inversion signal obtained by inverting a phase of the drive signal output from the oscillation circuit to the common electrode. | 06-28-2012 |
20120167680 | APPARATUS FOR DRIVING MULTI-AXIAL ANGULAR VELOCITY SENSOR - Disclosed herein is an apparatus for driving a multi-axial angular driving sensor. The apparatus includes a driving unit; a timing control unit outputting the start control signal to the driving unit, wherein the start control signal, when one axis is driven based on an axis drive stabilization section and a drive off section,; and a sensing unit. Therefore, the present invention can significantly improve the sampling time in a multi-axial sensor. | 07-05-2012 |
20120167681 | MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT - A micromechanical component having a fixing point and a seismic weight, which is connected to the fixing point by at least one spring and is made at least partially out of a first material, the first material being a semiconductor material, the seismic weight being additionally made out of at least one second material, and the second material having a higher density than the first material. In addition, a manufacturing method for a micromechanical component is provided, having the steps of forming a seismic weight at least partially out of a first material, the first material being a semiconductor material, connecting the seismic weight to a fixing point of the micromechanical component, using at least one spring, and forming the seismic weight from the first material and at least one second material, which has a higher density than the first material. | 07-05-2012 |
20120167682 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a vibrator that vibrates with a drive signal; and a first-sensing-electrode on the vibrator that outputs a first signal containing a first-sense-component generated based on an angular velocity of the vibrator and a first-monitor-component generated based on a drive signal. The sensor includes a second-sensing-electrode on the vibrator that outputs a second signal containing a second-sense-component with a phase substantially the same as that of the first-sense-component and a second-monitor-component with a phase substantially opposite to that of the first-monitor-component; a first-signal-line one end of which is connected to the first-sensing-electrode; and a second-signal-line one end of which is connected to the second-sensing-electrode. The sensor includes a first-sensing-terminal connected to the other ends of the first- and second-signal-lines; and a disconnection-sensing-circuit that outputs a disconnection-sense-signal indicating that the first- or second-signal-line is disconnected, based on a signal from the first-sensing-terminal. | 07-05-2012 |
20120186345 | SELF-TEST FOR YAW RATE SENSORS - A yaw rate sensor ( | 07-26-2012 |
20120192647 | READOUT METHOD AND ELECTRONIC BANDWIDTH CONTROL FOR A SILICON IN-PLANE TUNING FORK GYROSCOPE - Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., ˜0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth. In a reduced-to-practice embodiment, a 6 mW, 3V CMOS ASIC and control algorithm are interfaced to a mode-matched MEMS tuning fork gyroscope to implement an angular rate sensor with bias drift as low as 0.15°/hr and angle random walk of 0.003°/√hr, which is the lowest recorded to date for a silicon MEMS gyroscope. The system bandwidth can be configured between 0.1 Hz and 1 kHz. | 08-02-2012 |
20120192648 | Mode-Matching Apparatus and Method for Micromachined Inertial Sensors - In an inertial sensor having a resonator and an accelerometer, acceleration signals are induced by resonating at least one shuttle of the resonator in a device plane at a shuttle resonance mode frequency and modulating the motion of the at least one resonator shuttle to induce accelerometer signals from the accelerometer. The motion may be modulated in the device plane or out of the device plane. A shuttle resonance mode and an accelerometer resonance mode may me matched based on the induced accelerometer signals, for example, by providing a feedback signal to the inertial sensor in response to such induced accelerometer signals to substantially nullify the induced accelerometer signals. | 08-02-2012 |
20120210787 | MEASURING DEVICE MOUNTING METHOD AND STRUCTURE - A measurement device ( | 08-23-2012 |
20120210788 | DOUBLE-AXLE, SHOCK-RESISTANT ROTATION RATE SENSOR WITH LINEAR AND ROTARY SEISMIC ELEMENTS - A micromechanical rotation rate sensor has at least one first and one second seismic mass coupled to at least one first drive device and are suspended such that the first and second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the first and second seismic masses are designed and suspended such that they oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis is detected, and the first and second seismic masses and/or additional seismic masses are designed and suspended such that they oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis is detected. | 08-23-2012 |
20120210789 | PHYSICAL QUANTITY SENSOR AND ELECTRONIC DEVICE - A physical quantity sensor includes: a substrate; first and second displacement members in a spatial plane on the substrate and having rotation shafts; fixed electrodes on the substrate opposed to the first and second displacement members; a support member supporting the rotation shafts; fixing members supporting the support member via a spring unit; and a driving unit oscillating the support member in an oscillation direction. Each of the first and second displacement members shifts perpendicularly to the spatial plane around an axis of the corresponding rotation shaft. Each rotation shaft is shifted in an opposite direction from the center of gravity of the corresponding displacement member. | 08-23-2012 |
20120210790 | Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers - An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator. | 08-23-2012 |
20120216612 | LOW INERTIA FRAME FOR DETECTING CORIOLIS ACCELERATION - A sensing frame is disclosed. The sensing frame includes a first rail and a second rail. The first and second rails are constrained to move along a first axis parallel to the first and second rails. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. First and second guiding arms are flexibly coupled to the first rail and second rail. The first guiding arm is flexibly suspended to the base at first anchoring points for allowing rotation of the first guiding arm, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm. The sensing frame includes a plurality of coupling flexures and a transducer for sensing motion of the first and second rails. | 08-30-2012 |
20120222483 | SPRING STRUCTURE, RESONATOR, RESONATOR ARRAY AND SENSOR - The invention presents a spring structure ( | 09-06-2012 |
20120227488 | INERTIAL SENSOR - Disclosed herein is an inertial sensor including: a driving body displaceably supported on a flexible substrate part in a floating state; a displacement detection unit having a sensing electrode detecting displacement of the driving body; a vibrating part having a vibrating electrode vibrating the driving body; a differential amplifier connected to the sensing electrode and the vibrating electrode, and a circuit unit connected to the differential amplifier to calculate acceleration and angular velocity, wherein the acceleration is calculated by using the sensing electrode and the vibrating electrode. | 09-13-2012 |
20120227489 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a support body, a retaining portion connected to the support body, first to fourth weights, first to fourth arms, a drive unit for driving the first to fourth arms, and a monitor unit for detecting displacements of the first to fourth arms. An X-axis, a Y-axis, and a Z-axis that are perpendicular to each other are defined. The detector unit is symmetrical with respect to both an axis parallel to the X-axis and an axis parallel to the Y-axis. This angular velocity sensor can cancel an undesired signal caused by external disturbances, such as acceleration or impact, thus detecting an angular velocity accurately. | 09-13-2012 |
20120227490 | GYROSCOPIC SENSOR AND METHOD FOR MANUFACUTRING SUCH A SENSOR - The invention relates to a gyroscopic sensor comprising a sensitive element designed to vibrate; an electrode carrier capable of carrying electrodes for exciting the sensitive element and electrodes for detecting the vibration of the sensitive element; and support rods designed to support the electrode carrier, characterized in that the support rods have at least one bulged end. | 09-13-2012 |
20120227491 | ANGULAR VELOCITY DETECTING APPARATUS - An angular velocity detecting apparatus includes a sensor chip having an angular velocity sensor installed therein, wherein the angular velocity sensor includes two mass elements which are driven in a drive direction in opposite phase with each other, and detects an angular velocity based on an oscillation of the mass elements in a direction perpendicular to the drive direction, the angular velocity detecting apparatus comprising: two acceleration sensors provided on the sensor chip, each of the acceleration sensors having a mass element which can oscillate in a single axis direction in a plane parallel to a substrate surface of the sensor chip, wherein the acceleration sensors are arranged in such a positional relationship that the mass elements of the acceleration sensors are oscillated in opposite phase with each other at the time of a rotational vibration of the sensor chip while the mass elements of the acceleration sensors are oscillated in phase with each other at the time of a translational vibration of the sensor chip. | 09-13-2012 |
20120247206 | YAW-RATE SENSOR - A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element. | 10-04-2012 |
20120247207 | PIEZOELECTRIC THIN FILM STRUCTURE AND ANGULAR VELOCITY DETECTION APPARATUS - A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer. | 10-04-2012 |
20120272731 | TWO DEGREE OF FREEDOM DITHERING PLATFORM FOR MEMS SENSOR CALIBRATION - Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer. | 11-01-2012 |
20120272732 | MICROMACHINED GYROSCOPE WITH DETECTION IN THE PLANE OF THE MACHINED WAFER - A gyroscope having a vibrating structure, produced by micromachining in a thin planar wafer, said gyroscope including two symmetrical moving assemblies that are coupled by a coupling structure connecting the two assemblies so as to allow mechanical vibration energy to be transferred between them, each moving assembly including a first moving element connected to the coupling structure and able to vibrate with two degrees of freedom in orthogonal directions Ox and Oy of the plane of the wafer, and a second moving element adjacent the first moving element, capable of vibrating only in the Oy direction and connected to the first moving element via linkage means, wherein the linkage means allow the transmission, in phase opposition, to the second moving element of the vibration movement of the first moving element in the Oy direction. | 11-01-2012 |
20120272733 | ADAPTIVE MODIFICATIONS IN MICRO OPTO-ELECTRO-MECHANICAL SYSTEMS - A micro-opto-electromechanical rotation rate sensor (MOERRS) device, in which a rotation rate sensor is associated with peripheral circuitry. The magnitude of the output signal of the MOERRS is adaptable to correspond to a range of mechanical stimuli to which the sensor is sensitive, in order to accommodate the signal magnitude to the dynamic range available in the MOERRS device. The signal emanating from the rotation rate sensor is facilitated to exploit the dynamic range of said MOERRS device, by modifying some properties of one or more items on the MOERRS. | 11-01-2012 |
20120279301 | DOUBLE-AXIAL, SHOCK-RESISTANT ROTATION RATE SENSOR WITH NESTED, LINEARLY OSCILLATING SEISMIC ELEMENTS - A micromechanical rotation rate sensor, including a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the x-y plane. | 11-08-2012 |
20120279302 | MEMS RESONATOR, SENSOR HAVING THE SAME AND MANUFACUTRING METHOD FOR MEMS RESONATOR - A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled. | 11-08-2012 |
20120285244 | APPARATUS AND METHOD FOR DRIVING INERTIAL SENSOR - Disclosed herein are an apparatus and a method for driving an inertial sensor. The apparatus for driving an inertial sensor includes a detection unit that detects first acceleration detection voltage and detects angular velocity detection voltage when a wake up signal is input; a wake up signal generation unit that generates the wake up signal when the total of acceleration detection voltage is larger than predetermined voltage; a phase conversion unit that generates driving voltage and inversion driving voltage of the corresponding axis; a driving unit that vibrates the inertial sensor; and a control unit that performs a control to wake up the detection unit, the phase conversion unit, and the driving unit or convert them into a sleep mode according to a control signal, whereby power consumption can be minimized in an apparatus requiring low power like mobile environment. | 11-15-2012 |
20120291547 | ANGULAR VELOCITY SENSOR - There is provided an angular velocity sensor, including: a flexible part connecting a fixing part to an oscillation unit; a driving unit formed on the flexible part or the oscillation unit to oscillate the oscillation unit; a sensing unit formed on the flexible part or the oscillation unit to sense a displacement of the oscillation unit according to an angular velocity input; a control piezoelectric element formed on the flexible part to control rigidity of a motion of the oscillation unit; and an impedance element electrically connected to the control piezoelectric element to apply impedance to the control piezoelectric element. | 11-22-2012 |
20120291548 | GYRO SENSOR AND ELECTRONIC DEVICE - A gyro sensor according to the invention includes a first mass portion including a first detection portion, a second mass portion including a second detection portion, first drive portions vibrating the first mass portion in a direction of a first axis, and a force conversion portion fixed to an anchor portion. The first mass portion and the second mass portion are connected with the force conversion portion. The force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plane view. | 11-22-2012 |
20120291549 | EXTENSION-MODE ANGULAR VELOCITY SENSOR - An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode. | 11-22-2012 |
20120291550 | OSCILLATION TYPE INERTIA FORCE SENSOR - An oscillation type inertia force sensor includes an oscillator, an oscillation circuit unit, and a detection circuit unit. The oscillation circuit unit functions as a self oscillation circuit of a closed loop with the oscillator as a resonant element, and includes an AGC circuit. The AGC circuit includes a VGA circuit, a comparison circuit comparing a predetermined reference voltage with a voltage of the monitor signal to output a control signal based on the compared result, and a pulse width modulation circuit modulating the control signal to a pulse width modulation signal. Based on the pulse width modulation signal, the driving signal is modulated with the output of the VGA circuit switched between an ON state and OFF state to control the degree of the amplification factor of the VGA circuit. | 11-22-2012 |
20120297873 | MEMS DEVICES SENSING BOTH ROTATION AND ACCELERATION - A MEMS device comprises a proof mass suspended above a substrate, one or more driving combs, and one or more sensing combs. During operation, a DC actuating potential in series with an AC modulation potential is applied to the proof mass, and an AC actuating potential is applied to the one or more driving combs such that the proof mass moves in an oscillatory manner. An inertial sensing system further comprises a sensing element configured to detect a rotation information coupled with an AC signal and an acceleration information coupled with a DC signal. | 11-29-2012 |
20120297874 | INERTIAL SENSOR - Disclosed herein is an inertial sensor. An inertial sensor | 11-29-2012 |
20120297875 | VIBRATING GYROSCOPE AND TREATMENT PROCESS - The invention relates to a vibrating gyroscope ( | 11-29-2012 |
20120304768 | MODULE AND ELECTRONIC APPARATUS - A module includes a first rigid substrate including an analog circuit; a second rigid substrate including a digital circuit; a third rigid substrate including an angular velocity sensor; a first connecting portion that connects the first rigid substrate and the second rigid substrate so as to electrically connect the analog circuit and the digital circuit, and that has flexibility; and a second connecting portion that connects the first rigid substrate and the third rigid substrate so as to electrically connect the analog circuit and the angular velocity sensor, and that has flexibility. | 12-06-2012 |
20120312095 | GYROSCOPE DYNAMIC MOTOR AMPLITUDE COMPENSATION FOR ENHANCED RATE ESTIMATION DURING STARTUP - A system for gyroscope dynamic motor amplitude compensation during startup comprises various program modules, including an a-priori motor amplitude module configured to generate an a-priori motor amplitude signal based on a model of gyroscope motor amplitude growth during startup; a steady state scale factor module configured to generate a steady state scale factor signal; and a dynamic motor amplitude compensation module configured to receive the a-priori motor amplitude signal, and the steady state scale factor signal. During startup, rate motion is sensed by the gyroscope and a sensed rate signal is output by the gyroscope. The dynamic motor amplitude compensation module receives a measured motor amplitude signal from the gyroscope, the a-priori motor amplitude signal, or a combination thereof, and outputs a time varying scale factor that is applied to the sensed rate signal to produce an accurate sensed rate from the gyroscope during the startup phase. | 12-13-2012 |
20120318059 | SENSOR DEVICE AND MANUFACTURING METHOD THEREOF - A sensor device includes an IC chip as a semiconductor device having a first electrode and a second electrode on a first surface, a frame-like fixing member provided to surround the first electrode and the second electrode, a vibration gyro element as a vibrating piece electrically connected to the first electrode, a lid as a lid body bonded to the first surface via the fixing member and forming a space that covers the vibration gyro element, and a lead wire electrically connected to the second electrode and extending through inside (between an IC-side fixing member and a lid-side fixing member in the embodiment) of the fixing member to outside of the space. | 12-20-2012 |
20120324999 | METHOD AND DEVICE FOR ANGULAR MEASUREMENT WITH COMPENSATION OF NON-LINEARITIES - Method of angular measurement by a resonator associated with a vibration setting device and with a vibration detector, which are linked to a processing circuit through which there travel control signals and measurement signals, the method comprising the steps of digitizing the measurement signals and of deducing an angular measurement from the measurement signals. The method comprises the steps of performing a spectral analysis of the digitized measurement signals so as to detect harmonic distortions therein and correcting at least some of the signals travelling through the processing circuit so as to attenuate the non-linearities. | 12-27-2012 |
20130000404 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a vibrator, a support substrate, an anchor section, a connection beam section, a driving section, and a detection section. The vibrator includes an inner vibrator and an outer vibrator, which vibrate in opposite circumferential directions when driven by the driving section. The connection beam section couples the vibrator to the anchor section, and is elastic in a z-direction and a circumferential direction. The connection beam section includes first connection beams, each of which is coupled to the outer vibrator at one end and is coupled to the inner vibrator at the other end, and second connection beams, each of which is coupled to a vibration node of a corresponding first connection beam at one end and is coupled to the anchor section at the other end. | 01-03-2013 |
20130000405 | METHOD OF ANGULAR MEASUREMENT BY MEANS OF A VIBRATING SENSOR TO WHICH MODULATED CONTROLS ARE APPLIED - Method of angular measurement by means of a sensor comprising an axisymmetric resonator associated with means for setting the resonator into vibration and with means for detecting an orientation of the vibration with respect to a reference frame of the sensor, comprising the steps of applying a precession control so as to slave an orientation of the vibration to an angular setpoint value and of determining an angular measurement on the basis of the precession control. The method comprises a phase of modulating the angular setpoint value in such a way that the said setpoint value uniformly sweeps an angular span of π radians and that a temporal derivative of the setpoint is deducted from the precession control prior to the determination of the angular measurement. | 01-03-2013 |
20130008251 | MICROELECTROMECHANICAL GYROSCOPE WITH ENHANCED REJECTION OF ACCELERATION NOISES - An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration. | 01-10-2013 |
20130019678 | Limiting travel of proof mass within frame of MEMS device - A micro electromechanical systems (MEMS) device includes a proof mass and a frame. The proof mass is to movably travel within the frame. | 01-24-2013 |
20130019679 | INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME - Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other. | 01-24-2013 |
20130019680 | MEMS STRUCTURE FOR AN ANGULAR RATE SENSOR - A micro-electromechanical system (MEMS) structure for an angular rate sensor, the structure being positioned between first and second silicon-insulator composite wafers formed of a plurality of structured silicon parts, electrically isolated from each other by an insulator material, the structure comprising: a mono-crystalline silicon substrate structured to form a sensing system and a frame, the sensing system being completely de-coupled from and surrounded by the frame, which is positioned between engaging surfaces of the first and second composite wafers such that the sensing system is hermetically sealed within a cavity defined by the first and second composite wafers and the frame, the sensing system including: two seismic masses having front and back surfaces; two driving beams, each having a first end attached to a seismic mass and a second end attached to the first and second composite wafers by means of fixed pedestals provided on the silicon substrate; and a bending spring arranged to directly connect between, and synchronise a primary motion of, the two seismic masses, each of the seismic masses being arranged to have a first degree of rotational freedom about an axis that is substantially perpendicular to the plane of the silicon substrate, and the seismic masses and driving beams being arranged to have a second degree of rotational freedom about an axis substantially coincident with the longitudinal axis of the driving beams; means for generating and detecting the primary motion consisting of a primary oscillation of the two seismic masses, in opposing phases, in the first degree of rotational freedom; and means of detecting a secondary motion consisting of a secondary oscillation of the two seismic masses, in opposing phases, in the second degree of rotational freedom, the means of generating and detecting the primary motion and the means of detecting a secondary motion being provided on both the front and back surfaces of each of the first and second seismic masses, wherein the sensing system is arranged such that, when the device is subjected to an angular velocity around a third axis that is substantially in the plane of the silicon substrate and perpendicular to the longitudinal axis of the beams, a Coriolis force arises which causes the secondary oscillation of the seismic masses. | 01-24-2013 |
20130025368 | MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED READING STAGE AND METHOD - A gyroscope, including: a body; a driving mass, mobile along a driving axis; a driving device that keeps the driving mass in oscillation according to the driving axis at a driving frequency; a sensing mass, coupled to the driving mass to move according to the driving axis and is mobile with respect to the driving mass along a sensing axis; and a reading device, which receives a sensing signal associated with the movement of the sensing mass and supplies an output signal indicating a position of the sensing mass. The reading device includes an analog-to-digital converter, which receives a voltage signal associated with the sensing signal. The voltage signal includes a useful signal component and a spurious signal component, phase-shifted with respect to one another by approximately 90°, and the analog-to-digital converter is configured for sampling the voltage signal at maximum values assumed by the useful signal component. | 01-31-2013 |
20130031978 | GYROSCOPIC MEASUREMENT BY A GYROSCOPE VIBRATING IN PRECESSION - Gyroscopic measurements are provided, by a system comprising a vibrating gyroscope, in the form of an output signal. The vibrating gyroscope provides an original measurement signal. A periodic control signal (CP) is applied to it over a time period, which signal is suitable: for rotating the geometric position of vibration in a first direction, during a part of the time period; and for rotating the geometric position of vibration in a second direction opposite to the first direction, during the other part of the time period; said control signal having a zero mean over said time period and exhibiting portions of signal at high frequency relative to the output signal; said output signal being based on a corrected signal emanating from the original measurement signal; in which the corrected signal is based on an identification of errors made during the signal portions at high frequency. | 02-07-2013 |
20130036819 | PHYSICAL QUANTITY DETECTION ELEMENT, PHYSICAL QUANTITY DETECTION DEVICE, AND ELECTRONIC APPARATUS - A physical quantity detection element includes a base part, a first connection part and a second connection part respectively extending from the base part in opposite directions to each other along the X-axis, a pair of first drive vibrating arm and second drive vibrating arm and a pair of third drive vibrating arm and fourth drive vibrating arm respectively extending from the first connection part or the second connection part in opposite directions to each other along the Y-axis, a first drive detection vibrating arm and a second drive detection vibrating arm obliquely extending from the first connection part, a third drive detection vibrating arm and a fourth drive detection vibrating arm obliquely extending from the second connection part, and a first detection vibrating arm and a second detection vibrating arm respectively extending from the base part in opposite directions to each other along the Y-axis. | 02-14-2013 |
20130042682 | DEVICE AND METHOD FOR DETECTING MACHINE VIBRATIONS - A device for detecting vibrations on a machine ( | 02-21-2013 |
20130047727 | DRIVING CIRCUIT, SYSTEM, AND DRIVING METHOD FOR GYRO SENSOR - Provided is a driving circuit, system, and driving method for a gyro sensor. The gyro sensor driving circuit includes a charge/voltage conversion unit receiving a charge output from a vibration-type gyro sensor and converting the charge output into a voltage signal; a phase converting unit receiving a signal from the charge/voltage converting unit and converting a phase of the received signal; a pulse generating unit receiving an output signal of the phase converting unit and outputting the output signal as a pulse wave; a pulse converting unit converting the pulse wave output from the pulse generating unit into a pulse signal using a certain voltage level as reference so as to apply the pulse wave as a driving signal; and a control unit controlling the pulse converting unit to generate the pulse signal using the certain voltage level as reference. | 02-28-2013 |
20130055810 | DETECTION CIRCUIT, PHYSICAL QUANTITY DETECTION APPARATUS, ANGULAR VELOCITY DETECTION APPARATUS, INTEGRATED CIRCUIT DEVICE, AND ELECTRONIC INSTRUMENT - A detection circuit includes a synchronous detection circuit (synchronous detection section) that synchronously detects a signal that includes a detection signal of a vibrator (an output signal of an amplifier), a switched capacitor filter (SCF) circuit that filters a signal that has been synchronously detected by the synchronous detection circuit (an output signal of a programmable gain amplifier), and an output buffer that buffers and outputs a signal that has been filtered by the SCF circuit, the gain of the SCF circuit being larger than 1. | 03-07-2013 |
20130055811 | APPARATUS FOR DRIVING GYROSCOPE SENSOR AND METHOD THEREOF - Disclosed herein are an apparatus and a method for driving a gyroscope sensor. The apparatus for driving a gyroscope sensor includes: a detection module; a phase conversion module; an inversion module; a switch module selecting and outputting any one of the driving voltage and the inversion voltage for each axis; a driving module supplying driving voltage of a driving axis at the time of the driving and supplying inversion voltage at the time of stopping the driving; and a control unit passing the driving voltage of the driving axis by controlling the switch module according to a switching control signal at the time of the driving and passing the inversion voltage of each axis by controlling the switch module according to the switching control signal at the time of stopping the driving. | 03-07-2013 |
20130061673 | Three-Mass Coupled Oscillation Technique for Mechanically Robust Micromachined Gyroscopes - A micromachined gyroscope is disclosed comprising a substrate, three masses m | 03-14-2013 |
20130068018 | MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM - A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction. | 03-21-2013 |
20130068019 | PHYSICAL QUANTITY SENSOR - An object of the invention is to provide a physical quantity sensor capable of producing a highly accurate physical quantity detection signal. The physical quantity sensor has an oscillator for converting an externally applied physical quantity into an electrical signal, an oscillation circuit which makes the oscillator oscillate, and a detector circuit for detecting a to-be-detected signal output from the oscillator by using a detection signal output from the oscillation circuit, includes a delta-sigma modulator, preceding the detector circuit, for delta-sigma modulating either one of the detection signal output from the oscillation circuit and the to-be-detected signal output from the oscillator, and for outputting a modulated signal, a variable voltage source capable of varying an output voltage, and a control unit for controlling the output voltage of the variable voltage source, and wherein the delta-sigma modulator performs the delta-sigma modulation by using a feedback signal created based on the output voltage. | 03-21-2013 |
20130068020 | Combined Sensor and Method for Manufacturing the Same - An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors. | 03-21-2013 |
20130074596 | ELECTRONIC DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS - An electronic device includes a base body, a functional element that is placed on the base body, and a lid body, formed from silicon, that is placed over the base body so as to cover the functional element. A hole portion and a sealing member that closes the hole portion are disposed in the lid body, in the hole portion, the area of a second opening disposed on a side opposite to a first opening is larger than the area of the first opening disposed on the base body side, and the ratio of the volume of the sealing member to the volume of the hole portion is equal to or higher than 35% and is equal to or lower than 87%. | 03-28-2013 |
20130081464 | INERTIAL SENSOR - Disclosed herein is an inertial sensor. The inertial sensor includes a sensor part including a driving mass, a flexible substrate part displaceably supporting the driving mass, and a support part supporting the flexible substrate part so that the driving mass is freely movable in a state in which the driving mass is floated; a lower cap covering a lower portion of the driving mass and coupled with the support part and provided with a stopper part limiting a displacement of the driving mass; and a dry film resist coupling the sensor part with the cover and providing an interval between the driving mass and the stopper. | 04-04-2013 |
20130081465 | INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME - Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies supporting the driving masses so as to freely move in a state in which the driving masses float; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses. | 04-04-2013 |
20130081466 | MICROELECTROMECHANICAL SENSOR WITH NON-CONDUCTIVE SENSING MASS, AND METHOD OF SENSING THROUGH A MICROELECTROMECHANICAL SENSOR - A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials. | 04-04-2013 |
20130086985 | ROTARY DISK GYROSCOPE - A rotary disk gyroscope ( | 04-11-2013 |
20130098152 | Inertia Sensor - This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights ( | 04-25-2013 |
20130104651 | INERTIAL SENSOR WITH OFF-AXIS SPRING SYSTEM | 05-02-2013 |
20130104652 | DRIVING CIRCUIT FOR A MICROELECTROMECHANICAL GYROSCOPE AND RELATED MICROELECTROMECHANICAL GYROSCOPE | 05-02-2013 |
20130111990 | Oscillation Apparatus with Atomic-Layer Proximity Switch - An oscillation apparatus comprising: a frame; a first proof mass coupled to the frame via a spring; a driving circuit operatively coupled to the first proof mass and the frame, wherein the driving circuit is configured to induce oscillatory motion of the first proof mass relative to the frame at a resonant frequency in a first direction; a first electron-tunneling position switch operatively coupled to the first proof mass such that the first position switch is configured to pass through a closed state during each oscillation of the proof mass, wherein the position switch comprises first and second single-atom-thick tunneling electrodes; and a sensing circuit coupled to the position switch, the sensing circuit configured to output a signal whenever the position switch passes through the closed state. | 05-09-2013 |
20130111991 | GYRO SENSOR, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING GYRO SENSOR - A gyro sensor according to the invention includes a driving portion that includes a driving support portion connected to a driving spring portion and a detecting portion that includes a detecting support portion connected to the driving support portion with the detecting spring portion interposed. The driving support portion is configured to vibrate in a first axis (X-axis) direction, and the detecting support portion is configured to be displaced in a second axis (Y-axis) direction orthogonal to the first axis (x-axis). When the resonant frequency of the driving portion is f | 05-09-2013 |
20130111992 | PROOF MASS POSITIONING FEATURES HAVING TANGENTIAL CONTACT SURFACES - A micro electromechanical system (MEMS) includes a substrate, a first curved surface located at a position above a surface of the substrate, and a second curved surface generally opposite to the first curved surface along a first axis parallel to the surface of the substrate, wherein the first curved surface is movable along the first axis in a direction toward the second curved surface. | 05-09-2013 |
20130118256 | MICROELECTROMECHANICAL DEVICE WITH POSITION CONTROL DRIVING AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL DEVICE - A MEMS gyroscope includes: a microstructure having a fixed structure, a driving mass, movable with respect to the fixed structure according to a driving axis, and a sensing mass, mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass according to a sensing axis, in response to rotations of the microstructure; and a driving device, for keeping the driving mass in oscillation with a driving frequency. The driving device includes a discrete-time sensing interface, for detecting a position of the driving mass with respect to the driving axis and a control stage for controlling the driving frequency on the basis of the position of the driving mass. | 05-16-2013 |
20130139591 | MEMS MULTI-AXIS GYROSCOPE WITH CENTRAL SUSPENSION AND GIMBAL STRUCTURE - Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis. | 06-06-2013 |
20130139592 | MEMS MULTI-AXIS GYROSCOPE Z-AXIS ELECTRODE STRUCTURE - Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis. | 06-06-2013 |
20130152683 | INERTIAL SENSOR - Disclosed herein is an inertial sensor. The inertial sensor includes a sensing unit and a driving-mass-position initialization module. The sensing unit includes a driving mass, a flexible board unit which displaceably supports the driving mass, and a support which supports the flexible board unit to allow the driving mass to move in a suspended state. The flexible board unit has driving electrodes which move the driving mass, and sensing electrodes which sense the movement of the driving mass. The driving-mass-position initialization module includes a position initialization member which reciprocates to initialize the position of the driving mass, and a coil unit which surrounds the position initialization member. An initialization-member-receiving depression is formed in the driving mass. The shape of the initialization-member-receiving depression corresponds to that of the position initialization member. | 06-20-2013 |
20130152684 | SENSOR FOR DETECTING ACCELERATION AND ANGULAR VELOCITY - A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the movable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the acceleration detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction. | 06-20-2013 |
20130160543 | ERROR DETECTION FOR INERTIAL MEASUREMENT UNITS - A system for detecting an error in an inertial measurement unit (IMU) is disclosed. The system may have a first IMU including a first plurality of accelerometers and a first rotational rate measurer. The first plurality of accelerometers may be configured to measure acceleration along a plurality of first axes, a first axis of the plurality of first axes being substantially collinear with a collinear axis. The first rotational rate measurer may be configured to measure a first rotational rate about a second axis of the plurality of first axes that is substantially perpendicular to the collinear axis. The system may also have a second IMU and an IMU error detector. The IMU error detector may be configured to receive measurement data from the first IMU and the second IMU; and detect an error based on the measurement data. | 06-27-2013 |
20130160544 | READING CIRCUIT OF GYROSCOPE - A reading circuit of a gyroscope is provided. The reading circuit includes a driving unit, a high pass filter, a signal processing unit, and a low pass filter. The driving unit generates a resonance signal for a resonator of the gyroscope and generates a demodulation signal for the signal processing unit. The signal processing unit provides a modulation signal to a Coriolis accelerometer of the gyroscope. An input terminal of the high pass filter receives an output signal of the Coriolis accelerometer. The signal processing unit processes and demodulates an output of the high pass filter according to the demodulation signal and outputs a demodulation result to the low pass filter. | 06-27-2013 |
20130160545 | MICRO-GYROSCOPE AND METHOD FOR OPERATING A MICRO-GYROSCOPE - A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring. | 06-27-2013 |
20130160546 | GYRO SENSOR DRIVE CIRCUIT, GYRO SENSOR SYSTEM AND METHOD FOR DRIVING GYRO SENSOR - Disclosed herein are a gyro sensor drive circuit, a gyro sensor system, and a method for driving a gyro sensor. The gyro sensor drive circuit includes: a drive signal generating unit receiving a signal converted from an output signal of a gyro sensor to generate a drive signal to be applied to the gyro sensor; a resonance determining unit receiving the output signal of the gyro sensor, a demodulation signal for demodulating the output signal, or the drive signal to determine whether or not the gyro sensor resonates; and a start signal applying unit allowing the drive signal to be applied to the gyro sensor when it is determined that the gyro sensor resonates and allowing a start-up signal capable of generating resonance of the gyro sensor to be applied to the gyro sensor when it is determined that the gyro sensor does not resonate. | 06-27-2013 |
20130167633 | INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME - Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor | 07-04-2013 |
20130167634 | INERTIAL SENSOR - Disclosed herein is an inertial sensor. The inertial sensor | 07-04-2013 |
20130167635 | MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH OSCILLATING ASSEMBLY - A micro-electro-mechanical-system (MEMS) device comprising two proof masses disposed in the first frame, such that the MEMS device with oscillating assemblies senses the angular velocity in the two axes, respectively. The MEMS device with oscillating assemblies further comprises a lever structure and two oscillating assemblies connecting at two opposite ends of the lever structure, such that the oscillating assemblies move in opposite directions synchronously. The MEMS device with oscillating assemblies further comprises a spring assembly connected between the proof mass and a movable electrode, restricting the proof mass to drive the movable electrode to only move in a specific direction. | 07-04-2013 |
20130167636 | MICRO RATE OF ROTATION SENSOR AND METHOD FOR OPERATING A MICRO RATE OF ROTATION SENSOR - The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction. | 07-04-2013 |
20130167637 | MICROELECTROMECHANICAL SYSTEM - A microelectromechanical system for detecting accelerations about or along an X-axis, Y-axis, and/or Z-axis, having a substrate and having a driving mass and a detection mass ( | 07-04-2013 |
20130167638 | GYRO SENSOR DRIVING CIRCUIT AND METHOD FOR DRIVING GYRO SENSOR - Disclosed herein are a gyro sensor driving circuit and a method for driving a gyro sensor. The gyro sensor driving circuit includes: a driving unit applying a driving signal to a gyro sensor according to a control; a stabilization detection unit determining whether or not driving of the gyro sensor is stabilized and generating a driving stabilization signal; and a timing controller controlling termination of an active section of the driving unit upon receiving the driving stabilization signal from the stabilization detection unit. | 07-04-2013 |
20130174661 | ROTATION RATE SENSOR AND METHOD FOR OPERATING A ROTATION RATE SENSOR - A rotation rate sensor having a substrate including a main extension plane, force transmission elements that are movably fastened on the substrate using detection springs and a seismic mass are provided, the seismic mass being suspended over the force transmission elements, movably relative to the substrate, in such a way that the seismic mass is able to be excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and in response to the presence of a rotation rate that extends in parallel to the main extension plane and perpendicular to the drive axis, the seismic mass is excitable, as a result of Coriolis forces, to a detection vibration about a detection axis that is perpendicular to the main extension plane, the detection springs being connected to the force transmission elements in the region of the vibrational nodes. | 07-11-2013 |
20130180332 | Fully Decoupled Lateral Axis Gyroscope with Thickness-Insensitive Z-Axis Spring and Symmetric Teeter Totter Sensing Element - A micro-electromechanical systems (MEMS) transducer ( | 07-18-2013 |
20130180333 | Time Domain Switched Gyroscope - A gyroscope comprising: a support structure; a drive mass springedly coupled to the support structure such that movement of the drive mass with respect to the support structure is substantially restricted to movement in a first direction; a driver configured to cause the drive mass to oscillate with respect to the support structure in the first direction; a sense mass springedly coupled to the drive mass such that movement of the sense mass with respect to the drive mass is substantially restricted to movement in a second direction, which is orthogonal to the first direction; and a digital trigger comprising a proximity switch coupled between the drive mass and the sense mass, wherein the switch is configured to switch from an open state to a closed state each time the sense mass is in a reference position with respect to the drive mass. | 07-18-2013 |
20130180334 | MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES - An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis. | 07-18-2013 |
20130186200 | MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE - A micromechanical structure includes: a substrate which has a main plane of extension; and a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring. A first subregion of the movable mass is situated, at least partially, between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension. | 07-25-2013 |
20130192363 | Vibration Robust X-Axis Ring Gyro Transducer - A micro-electromechanical systems (MEMS) transducer ( | 08-01-2013 |
20130192364 | MEMS PROOF MASS WITH SPLIT Z-AXIS PORTIONS - This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion. | 08-01-2013 |
20130192365 | MONOLITHIC TRIAXIAL GYRO WITH IMPROVED MAIN MASSES AND COUPLING MASS COUPLED WITH THE EACH OTHER - A monolithic triaxial gyro includes a mass block, a number of electrode groups and a drive comb group. The mass block includes main masses and a coupling mass coupled with the main masses. The main masses are positioned on opposite sides of the coupling mass and are symmetrical with each other along a Y-axis. The electrode groups include a first electrode group within an orthographic projection of the mass block, a second electrode group within an orthographic projection of the coupling mass and a third electrode group including a group of immovable slender flat plates and a group of movable slender flat plates. The drive comb group is connected to the main masses for driving movement of the main masses when signals are inputted into the drive comb group. | 08-01-2013 |
20130192366 | OSCILLATION TYPE INERTIA FORCE SENSOR - An inertia force sensor that shortens a time from power activation until inertia force can be detected includes an oscillator, an oscillation circuit unit, and a detection circuit unit. The oscillation circuit unit functions as a closed loop self oscillation circuit with the oscillator as a resonant element, and includes a CV conversion circuit converting a monitor signal based on electrostatic capacitance according to an oscillating state of oscillator into a monitor signal based on a voltage corresponding to an amount in change of the electrostatic capacitance, and an automatic gain control circuit controlling gain based on the monitor signal converted at the CV conversion circuit to generate a driving signal, and supplying the driving signal to the oscillator. The CV conversion circuit includes an amplifier that amplifies a monitor signal with an amplification factor for a predetermined period after power activation. | 08-01-2013 |
20130192367 | VIBRATOR ELEMENT, VIBRATING DEVICE, PHYSICAL QUANTITY DETECTING DEVICE, AND ELECTRONIC APPARATUS - A first support portion, which is connected to a first beam extending from a vibrating body and supports the vibrating body, and a detection signal terminal and a detection ground terminal, which are provided in the first support portion and are arranged in parallel so as to be separated from each other along a direction crossing an extending direction of the first beam, are provided. The first beam and the first support portion are connected between the detection signal terminal and the detection ground terminal. A thin portion formed to have a small thickness in a top to bottom direction of the first support portion or a penetrating portion formed by removing the first support portion so as to be penetrated in the top to bottom direction is provided between the detection signal terminal and the detection ground terminal. | 08-01-2013 |
20130205897 | INERTIAL MICRO-SENSOR OF ANGULAR DISPLACEMENTS - The present invention relates to an inertial micro-sensor of angular displacements comprising at least one inertial mass ( | 08-15-2013 |
20130220015 | INERTIAL SENSOR - Disclosed herein is an inertial sensor including: a membrane; first and second driving units provided in a first axis direction (an X axis direction) so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the first axis direction; and third and fourth driving units provided in a second axis direction (a Y axis direction) perpendicular to the first axis direction so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the second axis direction, wherein the first and second driving units have different vibration frequencies so that they vibrate while being expanded and contracted in the opposite manner and then vibrate while being expanded and contracted in the same manner. | 08-29-2013 |
20130228012 | INERTIAL FORCE SENSOR - An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes. | 09-05-2013 |
20130233075 | Micromachined Gyroscopes with 2-DOF Sense Modes Allowing Interchangeable Robust and Precision Operation - A z-axis gyroscope design is presented with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. By decoupling the frame connecting the sense system to a central anchor, x-y symmetry is preserved while enabling a fully coupled 2-DOF sense mode providing control over both the bandwidth and the amount of coupling independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system. | 09-12-2013 |
20130233076 | Micromachined Gyroscopes with 2-DOF Sense Modes Allowing Interchangeable Robust and Precision Operation - A z-axis gyroscope design is presented with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. By decoupling the frame connecting the sense system to a central anchor, x-y symmetry is preserved while enabling a fully coupled 2-DOF sense mode providing control over both the bandwidth and the amount of coupling independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system. | 09-12-2013 |
20130239679 | THREE-AXIS GYROSCOPE - Apparatus related to measuring angular velocities in three-space are provided. Drive masses distributed in a plane are force-oscillated in two orthogonal directions such that gyration of the collective is performed. Sense masses coupled by flexures to the drive masses are each displaceable along a respective single degree of freedom in response to angular velocities about a vector orthogonal to that degree of freedom. Electronic circuitry measures the respective sense mass displacements and provides corresponding signaling. The drive masses and sense masses can be formed such that a microelectromechanical system (MEMS) device is defined. | 09-19-2013 |
20130239680 | MICROELECTROMECHANICAL GYROSCOPE WITH CALIBRATED SYNCHRONIZATION OF ACTUATION AND METHOD FOR ACTUATING A MICROELECTROMECHANICAL GYROSCOPE - A gyroscope includes a body, a driving mass, which is mobile according to a driving axis, and a sensing mass, which is driven by the driving mass and is mobile according to a sensing axis, in response to rotations of the body. A driving device forms a microelectromechanical control loop with the body and the driving mass and maintains the driving mass in oscillation with a driving frequency. The driving device comprises a frequency detector, which supplies a clock signal at the frequency of oscillation of the driving mass, and a synchronization stage, which applies a calibrated phase shift to the clock signal so as to compensate a phase shift caused by components of the loop that are set between the driving mass and the control node. | 09-19-2013 |
20130239681 | ANGULAR VELOCITY SENSOR - An angular velocity sensor includes a sensor element having a shape defined in an XYZ space, and can detect an angular velocity about a Z axis. The sensor element includes a support body extending in a direction of an X axis, an arm connected with the support body, and a weight connected with the arm. The arm has a first end connected with the support body and a second end connected with the weight. The arm has substantially a J-shape including a first arm portion extending in a direction of a Y axis from the first end to a first corner, a second arm portion extending in the direction of the X axis from the first corner to a second corner, and a third arm portion extending in the direction of the Y axis from the second corner to the second end. The length of the arm in the direction of the X axis is larger than the length of the weight in the direction of the X axis. This angular velocity sensor can improve the sensibility to angular velocity about the Z axis. | 09-19-2013 |
20130247663 | Multichannel Gyroscopic Sensor - An electronic device may have a gyroscopic sensor. The gyroscopic sensor may produce angular velocity data in response to movement of the electronic device. The gyroscopic sensor may have a first and second parallel branches of circuitry that are configured to produce angular velocity data from microelectromechanical systems output signals. When performing functions such as gaming or navigation functions, the electronic device may use the first branch of circuitry to produce angular velocity data with a large dynamic range. When performing functions such as image stabilization operations, the electronic device may use the second branch of circuitry to produce angular velocity data that is characterized by a relatively small amount of noise. | 09-26-2013 |
20130247664 | INERTIAL SENSOR CONTROL MODULE AND METHOD FOR CONTROLLING INERTIAL SENSOR CONTROL MODULE - Disclosed herein is an inertial sensor control module. The inertial sensor control module according to a preferred embodiment of the present invention includes: an inertial sensor including a driving mass, a driving unit driving the driving mass of the inertial sensor according to a control signal to the inertial sensor, a control unit connected to the driving unit and generating the control signal to transfer the generated control signal to the driving unit, and a sensing unit connected between the inertial sensor and the control unit and detecting information about whether the driving mass of the inertial sensor is in a stabilized state or information about an inertial force of the inertial sensor to transfer the detected information to the outside or the control unit. | 09-26-2013 |
20130247665 | FREQUENCY MODULATED MICRO GYRO - A sensing device comprises a rotationally oscillating proof mass resonator and a detector resonator. The detector resonator, actuated to produce an oscillating signal, is coupled to the proof mass resonator and the frequency of the oscillating signal is modulated by a change of motion of the proof mass resonator. | 09-26-2013 |
20130255376 | INERTIAL SENSOR AND MEASURING METHOD FOR MEASURING ANGULAR VELOCITY USING THE SAME - Disclosed herein is an inertial sensor. The inertial sensor according to a preferred embodiment of the present invention includes: a plate-shaped membrane; a mass body provided under the membrane; posts provided under an outside edge of the membrane and surrounding the mass body; a piezoelectric body formed on the membrane; sensing electrodes formed on the piezoelectric body; driving electrodes formed on an outer circumference of the sensing electrodes, wherein tri-axis angular velocity can be measured without time division by a driving control unit continuously applying first driving voltage and second driving voltage that are is AC driving voltage having a phase difference of 90°. | 10-03-2013 |
20130255377 | GYRO SENSOR AND ELECTRONIC DEVICE INCLUDING THE SAME - A gyro sensor includes: a driving mass; a detection mass connected with the driving mass; a driving connection one end and the other end of which are connected with the driving mass and an anchor, respectively; an island connected with the anchor, and disposed with a clearance left between the island and the driving mass in such a manner as to be electrically connected with the driving mass; and a projection provided at least either on the surface of the driving mass opposed to the island, or on the surface of the island opposed to the driving mass. The driving unit includes a movable electrode unit connected with the driving mass, and a fixed electrode unit. The minimum distance between the driving mass and the island is longer than the driving amplitude of the driving mass and shorter than the maximum amplitude of the movable electrode unit. | 10-03-2013 |
20130255378 | GYRO SENSOR AND ELECTRONIC APPARATUS - A gyro sensor includes: a vibrating body; a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body; a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body; a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body; a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction; a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side. | 10-03-2013 |
20130263661 | PHYSICAL QUANTITY DETECTION DEVICE, PHYSICAL QUANTITY DETECTOR, ELECTRONIC APPARATUS, AND MANUFACTURING METHOD OF PHYSICAL QUANTITY DETECTION DEVICE - A physical quantity detection device includes a base; a movable body that is supported by the base, and is displaced depending on a physical quantity; a physical quantity detection element that is laid between the base and the movable body; a support unit that is provided on at least one side of both main surfaces of the movable body; and a mass body that includes a first opening part, and is supported by the support unit in such a way that an inside of the first opening part is filled with the support unit. | 10-10-2013 |
20130263662 | PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS - A physical quantity sensor includes: a substrate; a movable body including, with a first axis as a boundary, a first movable electrode portion disposed in a first region, a second movable electrode portion disposed in a second region, and a damping adjusting portion disposed in at least one of the first region and the second region; beam portions supporting the movable body; a first fixed electrode portion; and a second fixed electrode portion. A first through-hole is disposed in the damping adjusting portion. Second through-holes are disposed in the movable electrode portions. The area of a region where the first movable electrode portion overlaps with the first fixed electrode portion is the same as the area of a region where the second movable electrode portion overlaps with the second fixed electrode portion. The width of the first through-hole is greater than the widths of the second through-holes. | 10-10-2013 |
20130263663 | Wide G Range Accelerometer - A MEMS device includes a substrate, a mass having a first and second set of elongated mass fingers extending from the mass, and a support structure supporting the mass on the substrate. The support structure may include at least one anchor and a plurality of springs that allow movement of the mass relative to the substrate. The MEMS device may also include a first set of sensing fingers for sensing movement of the first set of mass fingers relative to the first set of sensing fingers, and a second set of sensing figures for sensing movement of the second set of mass fingers relative to the second set of sensing fingers. The first and second sets of sensing fingers may have different size finger gaps between the sensing fingers and the respective mass fingers. | 10-10-2013 |
20130263664 | GYRO SENSOR AND ELECTRONIC APPARATUS - A gyro sensor includes a first detection mass unit provided with a drive mass unit, a drive unit, a first detection unit and a first vibrating body; and a second detection mass unit provided with a second detection unit and a second vibrating body, the first vibrating body extends in the direction of the first axis and one end thereof is connected to the first detection mass unit, the second vibrating body extends in a direction that is opposite to an extension direction of the first vibrating body, and one end thereof is connected to the second detection mass unit, and the vibrating bodies vibrate in the direction of a third axis, along with the vibration in the direction of the first axis. | 10-10-2013 |
20130263665 | MEMS DEVICE FRONT-END CHARGE AMPLIFIER - This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to the MEMS device and to provide sense information of a proof mass of the MEMS device, a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier, and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency. | 10-10-2013 |
20130269433 | VIBRATING GYROSCOPE AND CORRESPONDING MANUFACTURING PROCESS - The invention relates to a vibrating gyroscope ( | 10-17-2013 |
20130276536 | GYRO SENSOR AND ELECTRONIC APPARATUS - A gyro sensor includes: a base body; a vibrating body; a driving portion driving the vibrating body in a direction of a first axis; a movable electrode portion displaceable, according to angular velocity about a second axis perpendicular to the first axis, in a direction of a third axis perpendicular to the first axis and the second axis; a first spring portion connected to the vibrating body and a first side surface of the movable electrode portion, the first side surface intersecting the first axis or the second axis; a second spring portion connected to the vibrating body and a second side surface of the movable electrode portion, the second side surface being parallel to the first side surface. The first spring portion and the second spring portion have portions extending in the direction of the first axis and portions extending in a direction of the second axis. | 10-24-2013 |
20130276537 | Micromechanical sensor element and sensor device having this type of sensor element - A micromechanical sensor element for detecting lateral acceleration, having at least two boundaries situated essentially orthogonally with respect to one another, and also having at least one spring element, in which the spring element is oriented at an angle relative to at least one of the boundaries. | 10-24-2013 |
20130283908 | MEMS GYROSCOPES WITH REDUCED ERRORS - In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase and anti-phase drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration. | 10-31-2013 |
20130283909 | GYRO SENSOR, ELECTRONIC APPARATUS, AND MOBILE UNIT - A gyro sensor includes a vibrator, a spring part extending from a first fixing part to the vibrator in a direction along a first axis, a drive part that excites the vibrator, and a detection part provided on the vibrator, wherein the vibrator has, in a plan view, first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other, a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, and a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part. | 10-31-2013 |
20130283910 | VIBRATING REED, GYRO SENSOR, ELECTRONIC APPARATUS, AND MOBILE UNIT - A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece. | 10-31-2013 |
20130283911 | MODE-MATCHED SINGLE PROOF-MASS DUAL-AXIS GYROSCOPE AND METHOD OF FABRICATION - A single proof-mass, dual-axis gyroscope apparatus comprises a resonating body member and first and second electrodes each capacitively coupled to the resonating body member by a respective lateral capacitive air gap and a vertical capacitive air gap. The width of one of the lateral capacitive air gap of the first electrode is substantially smaller than the vertical capacitive air gap. The width of one of the vertical capacitive air gap of the second electrode is substantially smaller than the lateral capacitive air gap. The apparatus claimed can address the process variation such as vertical and lateral dimension variation by electrostatic tuning method. | 10-31-2013 |
20130291638 | VIBRATING ELEMENT, GYRO SENSOR, ELECTRONIC APPARATUS AND MOVING OBJECT - First vibrating arms extend along a first direction from a base portion. Second vibrating arms extend along a second direction from the base portion. First suspension arms extend from a fixed portion and are connected to first connecting parts of the base portion. Second suspension arms extend from the fixed portion and are connected to second connecting parts of the base portion. | 11-07-2013 |
20130291639 | VIBRATING PIECE AND MANUFACTURING METHOD FOR THE VIBRATING PIECE, GYRO SENSOR, AND ELECTRONIC APPARATUS AND MOBILE BODY - A vibrating piece includes a driving arm at least partially formed by a piezoelectric body, the driving arm including a first surface spreading along the direction of excited vibration, a second surface on the opposite side of the first surface, a first side surface configured to connect the first surface and the second surface, and a second side surface arranged on the opposite side of the first side surface and configured to connect the first surface and the second surface. The vibrating piece includes first electrodes arranged at least on one surface side of the first surface and the second surface and second electrodes arranged on at least one surface side of the first side surface and the second side surface. The first electrodes are provided asymmetrically with respect to an equally dividing plane of the driving arm orthogonal to the direction of the excited vibration of the driving arm. | 11-07-2013 |
20130298670 | VIBRATION GYRO HAVING BIAS CORRECTING FUNCTION - A vibration gyro having a structure for canceling a quadrature error generated by structural asymmetricity due to production tolerance and a means for correcting a bias value when an angular velocity is zero. In order to apply a counter torque to a sense mass for canceling the quadrature error, left correction comb electrodes are fixed to a substrate adjacent to a left drive mass, and comb electrodes opposed to the correction comb electrodes are arranged on an inner portion of a frame member which constitutes the left drive mass. By applying DC voltage to the correction electrodes, electrostatic force, for canceling the leakage rotational displacement of the sense mass generated when the input angular velocity is zero, is generated. | 11-14-2013 |
20130298671 | FLEXURE BEARING TO REDUCE QUADRATURE FOR RESONATING MICROMACHINED DEVICES - An example include microelectromechanical die for sensing motion that includes a fixed portion, an anchor coupled to the fixed portion, a first nonlinear suspension member coupled to anchor on a side of the anchor, a second nonlinear suspension member coupled to the anchor on the same side of the anchor, the second nonlinear suspension member having a shape and location mirroring the first nonlinear suspension member about an anchor bisecting plane and a proof-mass that is planar, the proof mass suspended at least in part by the first nonlinear suspension member and the second nonlinear suspension member such that the proof-mass is rotable about the anchor and is slideable in a plane parallel to the fixed portion. | 11-14-2013 |
20130298672 | YAW-RATE SENSOR - A yaw-rate sensor, having a substrate which has a main extension plane, for detecting a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane. The yaw-rate sensor has a drive device, a first Coriolis mass and a second Coriolis mass, the drive device being configured to drive at least one part of the first Coriolis mass and at least one part of the second Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction. | 11-14-2013 |
20130298673 | GYRO SENSOR AND ELECTRONIC APPARATUS - A gyro sensor includes a substrate, and a first function element, a second function element and a third function element which are arranged above the substrate. With respect to function elements next to each other of the first function element, the second function element and the third function element, the direction of vibration of a vibrating body of one function element is different from the direction of displacement of a movable body of the other function element, and the direction of displacement of a movable body of the one function element is different from the direction of vibration of a vibrating body of the other function element. | 11-14-2013 |
20130298674 | PIEZOELECTRIC FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT - The purpose of the present invention is to provide an angular velocity sensor capable of measuring an exact angular velocity, an ink jet head capable of producing an exact amount of ink, and a piezoelectric generating element capable of generating electric power due to positive piezoelectric effect. | 11-14-2013 |
20130305824 | VIBRATING ELEMENT AND MANUFACTURING METHOD FOR THE SAME, GYRO SENSOR, ELECTRONIC APPARATUS AND MOVING OBJECT - A vibrating element includes a vibrating arm for detection. An electrode is provided on the vibrating arm for detection. A wiring line is connected to the electrode. The wiring line is arranged on a piezoelectric body of a base portion. At least a part of the wiring line is an electrode for adjustment. The electrode for adjustment generates an electrical signal with an opposite phase to an output signal of leak vibration of the vibrating arm for detection. | 11-21-2013 |
20130312519 | VIBRATOR ELEMENT, METHOD OF MANUFACTURING VIBRATOR ELEMENT, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, AND MOVING BODY - A vibrator element including: a base portion; vibrating arms which extend from the base portion; a first drive section and a second drive section, and a first detecting section and a second detecting sensor which are respectively provided in the vibrating arms; adjusting arms which extend from the base portion in parallel to the vibrating arms; and a first adjusting section and a second adjusting section which are respectively provided on a principal surface of the adjusting arms, wherein, in the first adjusting section and the second adjusting section, a first electrode, piezoelectric layers, and adjustment electrodes are laminated on the first principal surface to be formed, and output signals of the first adjusting section and the second adjusting section are in antiphase to charges generated by the first detecting section and the second detecting section when no angular velocity is added to the vibrating arms. | 11-28-2013 |
20130312520 | SENSOR SYSTEM COMPOSED OF ROTATION-RATE SENSOR AND A SENSOR CONTROLLING IT - A rotational rate sensor is provided having a substrate and having a seismic mass that is movable relative to the substrate, the seismic mass being capable of being excited by a drive unit to a working oscillation relative to the substrate, and a Coriolis deflection of the seismic mass perpendicular to the working oscillation being capable of being detected, the rotational rate sensor having an interface for sending out a sensor signal as a function of the Coriolis deflection, the drive unit being configured for the modification of a frequency and/or of an amplitude of the working oscillation when a control signal is present at the interface. | 11-28-2013 |
20130319115 | SENSOR - Disclosed herein is a sensor. A sensor according to the present invention includes a mass body, a fixing part disposed so as to be spaced apart from the mass body, a first flexible part connecting the mass body with the fixing part in a Y-axis direction, a second flexible part connecting the mass body with the fixing part in an X-axis direction, and a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part. Here, a width of an X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof and a thickness in a Z-axis direction of the second flexible part is larger than a width in a Y-axis direction thereof. | 12-05-2013 |
20130333469 | METHOD FOR OPERATING AND/OR FOR MEASURING A MICROMECHANICAL DEVICE, AND MICROMECHANICAL DEVICE - A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal. | 12-19-2013 |
20130333470 | PLANAR CORIOLIS GYROSCOPE - A planar Coriolis gyroscope comprising at least two counter oscillating masses attached to a common rigid frame by means of a first plurality of elastic members and constituting an excitation axis, said frame is attached to a support region by means of a second plurality of elastic members which together with the masses constitute at least one Coriolis resonator. Said Coriolis resonator responds to inertial rotation of the gyroscope and in conjunction with a position pickoff provides a signal indicative on the gyroscope inertial rotation | 12-19-2013 |
20130340522 | YAM RATE SENSOR - A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction. | 12-26-2013 |
20140000365 | VIBRATORY GYROSCOPE | 01-02-2014 |
20140000366 | VIBRATORY GYROSCOPE | 01-02-2014 |
20140000367 | MEMS GYROS WITH QUADRATURE REDUCING SPRINGS | 01-02-2014 |
20140007682 | SENSOR DEVICE - A sensor device includes a sensor element; and a wiring substrate having a first joint surface electrically joined with the sensor element, a substrate body that contains an organic insulating material and in which an electronic component is embedded, and a regulation part that regulates the first joint surface from deforming. | 01-09-2014 |
20140013845 | CLASS II CORIOLIS VIBRATORY ROCKING MODE GYROSCOPE WITH CENTRAL FIXED POST - A resonator gyroscope includes a central post; a resonator coupled to the central post; and a diaphragm coupled to the resonator, wherein at least one of the diaphragm and the central post accommodates rotation of the resonator in an axis in a plane of the diaphragm. | 01-16-2014 |
20140026658 | MEMS DEVICE AND A METHOD OF USING THE SAME - A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured. | 01-30-2014 |
20140026659 | MEMS DEVICE AND A METHOD OF USING THE SAME - A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured. | 01-30-2014 |
20140026660 | MEMS DEVICE - A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication. | 01-30-2014 |
20140026661 | MEMS DEVICE - A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication. | 01-30-2014 |
20140026662 | MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM - A gyroscope comprises a substrate and a guided mass system. The guided mass system comprises proof masses and guiding arms disposed in a plane parallel to the substrate. The proof masses are coupled to the guiding arm by springs. The guiding arm is coupled to the substrate by springs. At least one of the proof-masses is directly coupled to the substrate by at least one anchor via a spring system. The gyroscope also comprises an actuator for vibrating one of the proof-masses in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes. | 01-30-2014 |
20140047918 | Inertial Sensor Using Sliding Plane Proximity Switches - A time-domain inertial sensor comprising: a support structure having an electrode plane parallel to an x-y plane of an x-y-z mutually orthogonal coordinate system, wherein the support structure's largest dimension lies within the x-y plane; a proof mass having a first surface parallel to the x-y plane; wherein the proof mass is springedly coupled to the support structure such that the first surface is separated from the electrode plane by a gap; a driver configured to drive the proof mass to oscillate with respect to the support structure in approximately only the x-direction such that, while oscillating, the gap does not vary significantly; and a first, time-domain, proximity switch disposed to switch from an open state to a closed state each time the proof mass is in a first reference position with respect to the support structure. | 02-20-2014 |
20140047919 | ANGULAR ACCELERATION DETECTION DEVICE - An angular acceleration detection device includes a rotating weight, a fixed portion, a support beam, and a detection portion. The rotating weight is rotatable about a Z-axis with respect to the fixed portion by action of an inertial force generated by an angular acceleration about the Z-axis. The fixed portion is disposed at a position spaced from the rotating weight. The support beam is disposed in an X-Y plane between the fixed portion and the rotating weight, the support beam elastically supporting the rotating weight with respect to the fixed portion. The detection portion outputs a detection signal corresponding to stress generated in the support beam. A gravity center position of the rotating weight is aligned with the support beam when viewed in a Z-axis direction. | 02-20-2014 |
20140047920 | ANALOG MULTIPLIER CIRCUIT, VARIABLE GAIN AMPLIFIER, DETECTOR CIRCUIT, AND PHYSICAL QUANTITY SENSOR - Provided is a technology capable of preventing arithmetic operation accuracy from deteriorating even when a bipolar transistor used to form a Gilbert multiplier core has poor characteristics. A correction current generating circuit ( | 02-20-2014 |
20140053648 | PHYSICAL QUANTITY SENSOR AND METHOD OF MAKING THE SAME - A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing. | 02-27-2014 |
20140060185 | Device for Measuring a Yaw Rate - A device for measuring yaw rate, having a mechanical yaw rate sensor, which has an inert mass that can be set into a primary vibration along a primary axis by means of an excitation device and can be deflected along a secondary axis extending transversely with respect to the primary axis so that when a yaw rate occurs about a sensitive axis extending transversely with respect to the primary and to the secondary axis, said device carries out a secondary vibration excited by the Coriolis force. A sensor element detects an amplitude-modulated signal for the secondary vibration. A sigma-delta modulator has a low pass filter connected to the sensor element, a quantizer and a secondary actuator disposed in a feedback path for applying a force which counteracts the Coriolis force. | 03-06-2014 |
20140083189 | Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain - The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections. | 03-27-2014 |
20140090469 | ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE - An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation. | 04-03-2014 |
20140090470 | VIBRATOR AND VIBRATING GYROSCOPE - A vibrator in a vibrating gyroscope includes a circular annular portion, a rectangular annular portion, and joining portions. The rectangular annular portion is disposed adjacent to an outer side of the circular annular portion. The joining portions join the circular annular portion and the rectangular annular portion. The rectangular annular portion includes linear beam portions. The joining portions join the circular annular portion and the center portions of the beam portions to each other. | 04-03-2014 |
20140102193 | Axially symmetrical Coriolis force gyroscope (variants) - The invention relates to gyroscope equipment. The axially symmetrical Coriolis vibratory gyroscope comprises a thin-walled resonator with a hemispherical or cylindrical or toroidal form, said resonator being fixed at the center to a support and being formed with openings in that wall of the resonator which is located around said support, the number of openings being determined on the basis of the formula 4nk, where k is an integer, n is the order of oscillation modes, and the angle between two neighboring openings is equal (I), wherein said support has a symmetrical form along the longitudinal axis thereof and is fixed to a base, solenoids and electrodes are positioned on the wall of the resonator or next to the resonator for exciting and measuring two oscillation modes, the constant amplitude of one of the modes thereof being intended for monitoring a secondary oscillation mode which is sensitive to Coriolis forces, and the base is provided with a seat for the support of the resonator and with electrically insulated hermetically sealed leads which pass outwards via the base and are passed through the openings in the wall of the resonator for connection to elements of an electronics board. | 04-17-2014 |
20140116134 | MICROMECHANICAL STRUCTURE - Micromechanical structure, in particular a yaw rate sensor having a substrate including a main plane of extent for detecting a first yaw rate about a first direction perpendicular to the main plane, a second yaw rate about a second direction parallel to the main plane, and a third yaw rate about a third direction parallel to the main plane and perpendicular to the second direction, includes a rotational oscillating element driven to rotational oscillation about a rotational axis parallel to the first direction. The micromechanical structure includes a yaw rate sensor configuration for detecting the first yaw rate that is completely surrounded by the rotational oscillating element in a plane parallel to the main plane. The micromechanical structure includes at least one first connection of the yaw rate sensor configuration on the rotational oscillating element, and at least one second connection of the yaw rate sensor configuration on the substrate. | 05-01-2014 |
20140116135 | INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE - An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement. | 05-01-2014 |
20140116136 | MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE - An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection. | 05-01-2014 |
20140130596 | ANGULAR VELOCITY DETECTION DEVICE - The purpose of the present invention is to achieve accurate angular velocity detection even when an angular velocity detection sensor is set in an environment in which oscillation and electromagnetic noise have significant influence. Provided is an angular velocity detection device which has an oscillating body displaceable in first and second directions that are perpendicular to each other, and which detects, as an angular velocity, a displacement of the oscillating body in the second direction while the oscillating body is being oscillated in the first direction, wherein in accordance with a frequency change in a drive signal for oscillating the oscillating body in the first direction, the frequency of a servo signal for detecting the angular velocity from the quantity of displacement in the second direction is changed (see | 05-15-2014 |
20140130597 | GYROSCOPE UTILIZING TORSIONAL SPRINGS AND OPTICAL SENSING - A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The structure further includes at least one first torsional spring extending generally along the drive axis and at least one second torsional spring extending generally along the sense axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis. | 05-15-2014 |
20140137648 | MICROELECTROMECHANICAL GYROSCOPES AND RELATED APPARATUS AND METHODS - In one embodiment, an apparatus comprises a micromechanical gyroscope and a circuit. The micromechanical gyroscope is configured to be excited in a first mode by a drive signal, and configured to be excited in a second mode by a gyroscopic effect. The circuit is coupled to the micromechanical gyroscope and configured to detect the gyroscopic effect when the micromechanical gyroscope is in the second mode. | 05-22-2014 |
20140144230 | MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED START-UP PHASE, SYSTEM INCLUDING THE MICROELECTROMECHANICAL GYROSCOPE, AND METHOD FOR SPEEDING-UP THE START UP PHASE - A driving device of a driving mass of a gyroscope comprises a differential read amplifier to supply first signals indicating a rate of oscillation of the driving mass; a variable-gain amplifier to supply second signals to drive the driving mass based on said first signals; a voltage elevator providing a power supply signal to the variable-gain amplifier; a controller generating a first control signal to control a gain of the variable-gain amplifier; and a first comparator, coupled to the variable-gain amplifier, generating a second control signal based on a comparison of the first control signal with a threshold, the second control signal controlling at least one among: (i) the variable-gain amplifier in such a way that the gain is increased only during the start-up phase of the gyroscope, and (ii) the voltage elevator in such a way that the power supply signal is increased only during the start-up phase. | 05-29-2014 |
20140144231 | INERTIAL SENSOR AND METHOD OF LEVITATION EFFECT COMPENSATION - An inertial sensor ( | 05-29-2014 |
20140144232 | SPRING FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE - A MEMS device ( | 05-29-2014 |
20140144233 | APPARATUS AND METHOD FOR AUTOMATIC GAIN CONTROL OF SENSOR, AND SENSOR APPARATUS - The present invention relates to an apparatus and a method for automatic gain control of a sensor, and a sensor apparatus. The apparatus for automatic gain control of a sensor including: a PID control unit for outputting a gain value applied compensated sensor signal by performing PID control while generating and changing a gain value to converge a peak value of a sensor signal to a target value; and a margin calculation unit for determining the degree of change of peaks of a previous gain value applied compensated sensor signal and a current gain value applied compensated sensor signal and performing calculation of a margin for stabilizing the compensated sensor signal according to the result of determination of the degree of change is provided. Further, a sensor apparatus and a method for automatic gain control of a sensor are provided. | 05-29-2014 |
20140150552 | Chip Level Sensor with Multiple Degrees of Freedom - A sensing assembly device includes a substrate, a chamber above the substrate, a first piezoelectric gyroscope sensor positioned within the chamber, and a first accelerometer positioned within the chamber. | 06-05-2014 |
20140157896 | METHOD AND APPARATUS FOR SELF-CALIBRATION OF GYROSCOPES - A gyroscope having a resonant body utilizes a self-calibration mechanism that does not require physical rotation of the resonant body. Instead, interface circuitry applies a rotating electrostatic field to first and second drive electrodes simultaneously to excite both the drive and sense resonance modes of the gyroscope. When drive electrodes associated with both the drive and sense resonance modes of the gyroscope are excited by forces of equal amplitude but 90° phase difference, respectively, the phase shift in the gyroscope response, as measured by the current output of the sense electrodes for each resonance mode, is proportional to an equivalent gyroscope rotation rate. | 06-12-2014 |
20140165723 | INDUCTIVE INERTIAL SENSOR ARCHITECTURE & FABRICATION IN PACKAGING BUILD-UP LAYERS - This invention relates to inductive inertial sensors employing a magnetic drive and/or sense architecture. In embodiments, translational gyroscopes utilize a conductive coil made to vibrate in a first dimension as a function of a time varying current driven through the coil in the presence of a magnetic field. Sense coils register an inductance that varies as a function of an angular velocity in a second dimension. In embodiments, the vibrating coil causes first and second mutual inductances in the sense coils to deviate from each other as a function of the angular velocity. In embodiments, self-inductances associated with a pair of meandering coils vary as a function of an angular velocity in a second dimension. In embodiments, package build-up layers are utilized to fabricate the inductive inertial sensors, enabling package-level integrated inertial sensing advantageous in small form factor computing platforms, such as mobile devices. | 06-19-2014 |
20140174180 | ANGULAR VELOCITY DETECTING DEVICE - A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained. | 06-26-2014 |
20140174181 | Micro Electro Mechanical System - In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions | 06-26-2014 |
20140182375 | ANGULAR VELOCITY SENSOR - Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame. | 07-03-2014 |
20140190256 | VIBRATORY GYRO SENSOR SYSTEM - Disclosed herein is a vibratory gyro sensor system, including: a driving unit shifting a signal output from a first sensing element of a gyro sensor by a preset shift phase, amplifying the phase shifted signal to a preset gain, and self-oscillates the amplified signal to generate and feedback a driving signal; an automatic gain control unit converting and amplifying capacitance output from a second sensing element of a gyro sensor into voltage; and a signal detection unit converting and amplifying the capacitance output from the first sensing element and the second sensing element into voltage. | 07-10-2014 |
20140190257 | MEMS DEVICE AND A METHOD OF USING THE SAME - A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured. | 07-10-2014 |
20140190258 | MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS - A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal. | 07-10-2014 |
20140196541 | SENSOR, SENSOR UNIT, AND METHOD FOR PRODUCING A SENSOR UNIT - A sensor includes a sensor element configured to measure a physical variable. At least one elastic damping element is configured to damp external interfering vibrations. The at least one elastic damping element is configured to electrically and/or mechanically contact the sensor element. | 07-17-2014 |
20140208848 | COMPLIANT STRUCTURES WITH TIME-VARYING MOMENT OF INERTIA - A rotation sensor system is presented. The system comprises a rotating frame configured to be mounted on a gimbal and adapted for controllable rocking motion about a predetermined axis of said frame, and a proof mass assembly mounted on said rotating frame. The proof mass assembly comprises one or more proof mass elements each mounted for controllable movement with respect to the predetermined axis along a certain path, a distance of each proof mass element from said axis corresponding to a direction of the rocking motion of said frame, thereby affecting a moment of inertia of said rotating frame. | 07-31-2014 |
20140230547 | Microelectromechanical Bulk Acoustic Wave Devices and Methods - Micromachined gyroscopes, such as those based upon microelectromechanical systems (MEMS) have the potential to dominate the rate-sensor market mainly due to their small size, low power and low cost. As MEMS gyroscopes are resonant devices requiring active excitation it would be beneficial to improve the resonator Q-factor reducing the electrical drive power requirements for the excitation circuitry. Further, many prior art MEMS gyroscope designs have multiple resonances arising from design and manufacturing considerations which require additional frequency tuning and control circuitry together with the excitation/sense circuitry. It would therefore be beneficial to enhance the bandwidth of the resonators to remove the requirement for such circuitry. Further, to address the relatively large dimensions of MEMS gyroscopes it would be beneficial for the MEMS gyroscopes to be fabricated directly above the CMOS electronics thereby reducing the die dimensions and lowering per die cost. | 08-21-2014 |
20140230548 | MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES - An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis. | 08-21-2014 |
20140238129 | ANGULAR VELOCITY SENSOR AND DETECTION ELEMENT USED IN SAME - A detection element for detecting an angular velocity around at least one of X-, Y- and Z-axes orthogonal to one another, has a support, first to fourth vibration arms connected to the support at each first end, first to fourth weights connected to each second end of the respective vibration arms, and weight adjusting parts. Each vibration arm extends in a X-Y plane. The first and second vibration arms are, and the first and second weights are line-symmetrical with respect to the X-axis passing through the support. The first and third vibration arms are, the first and third weights are, the second and fourth vibration arms are, and the second and fourth weights are line-symmetrical with respect to the Y-axis passing through the support. The weight adjusting parts are provided only on diagonally positioned two of the first to fourth weights or the first to fourth vibration arms. | 08-28-2014 |
20140245831 | GYRO SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A gyro sensor includes a vibrating body, a first spring structure portion that extends in a direction along a first axis and is connected to the vibrating body, first and second vibrating portions that are disposed in parallel to each other in the direction along the first axis and are excited and vibrated in an opposite phase to each other, and a second spring structure portion that extends in the direction along the first axis and is connected to the first and second vibrating portions, in which a first spring constant K | 09-04-2014 |
20140251009 | SYSTEM AND METHOD FOR REDUCING OFFSET VARIATION IN MULTIFUNCTION SENSOR DEVICES - Systems and methods are provided for improved multifunction sensing. In these embodiments a multifunction sensing device ( | 09-11-2014 |
20140260608 | ANGULAR RATE SENSOR HAVING MULTIPLE AXIS SENSING CAPABILITY - An angular rate sensor ( | 09-18-2014 |
20140260609 | MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE - A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition. | 09-18-2014 |
20140260610 | MULTIPLE AXIS RATE SENSOR - A microelectromechanical systems (MEMS) device includes at least two rate sensors ( | 09-18-2014 |
20140260611 | XY-Axis Gyroscopes with Electrode Configuration for Detecting Quadrature Errors and Out-of-Plane Sense Modes - Various embodiments include feedback circuits for tuning the drive modes of a shell-type gyroscope, while other embodiments include separate circuits for tuning the sense mode of a shell-type gyroscope to reduce or avoid quadrature errors. Still other embodiments include circuits to excite the sense modes (i.e., the out-of-plane modes) of a gyroscope without requiring the application of a rotation to the gyroscope, to ensure that the sense modes are aligned with the sense electrodes. | 09-18-2014 |
20140260612 | Composite Sensor and Method for Manufacturing The Same - The disclosure provides a composite sensor with high reliability and a method for manufacturing the same. A moving body of an acceleration sensor and an oscillator of an angular velocity sensor are provided on the same sensor wafer, while being partitioned by a wall, and a cap wafer is formed to have a gap that corresponds to each of the sensors. A through hole and a bump are formed in a sensor sealing portion, the acceleration sensor is sealed in an air atmosphere in a first sealing process, and in a second sealing process, the angular velocity sensor is sealed by bringing the sensors and the cap into contact with each other and joining the sensors and the cap in a vacuum atmosphere. Thereafter, a composite sensor wafer is cut, a circuit board and a wiring board are mounted thereon, and a composite sensor is formed. | 09-18-2014 |
20140283600 | GYRO SENSOR DRIVER AND PULSE TRANSLATION DEVICE USED THEREFOR - Disclosed herein are a gyro sensor driver and a pulse translation device used thereof. The gyro sensor driver, includes: a phase shifter that delays a signal output from an output terminal of a vibrating sensor to output a phase-shifted signal; a comparator that inverts a signal output from the phase shifter to output a clock signal; a reference voltage generator that generates and outputs reference voltage; and a pulse translator that receives the reference voltage output from the reference voltage generator and the clock signal output from the comparator to generate and output a signal of a predetermined pulse, thereby generating a desired driving signal with low current. | 09-25-2014 |
20140283601 | OPTOMECHANICAL SENSORS BASED ON COUPLING BETWEEN TWO OPTICAL CAVITIES - Methods, structures, devices and systems are disclosed for implementing optomechanical sensors in various configurations by using two optically coupled optical resonators or cavities that can be move or deform relative to each other. The optical coupling between first and second optical cavities to produce an optical resonance that varies with a spacing between the first and second optical cavities and provide the basis for the optomechanical sensing. Compact and integrated optomechanical sensors can be constructed to provide sensitive measurements for a range of applications, including motion sensing and other sensing applications. | 09-25-2014 |
20140283602 | ANGULAR VELOCITY SENSOR AND DETECTION ELEMENT USED THEREIN - A detection element has: first and second fixed parts; first and second vertical beams each connected at first and second ends to the first and second fixed parts, respectively; a horizontal beam connected at first and second ends to centers of the first and second vertical beams, respectively; and four arms each connected at a first end to the horizontal beam and having a weight formed on a second end. The first vertical beam has a first slit formed nearer the first fixed part with respect to its center, a second slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits. The second vertical beam has a third slit formed nearer the first fixed part with respect to its center, a fourth slit formed nearer the second fixed part with respect to its center, and a coupling portion between these slits. | 09-25-2014 |
20140290361 | APPARATUS FOR DRIVING GYROSCOPE SENSOR - Disclosed herein is an apparatus for driving a gyroscope sensor, including: multi-axis sensing means; detecting circuit means; switching means that is disposed between the axes of the multi-axis sensing means and the detecting circuit means so as to connect or disconnect between the axes of the multi-axis sensing means and the detecting circuit means according to a switching control signal; and control means that controls the switching means such that the axes of the multi-axis sensing means and the detecting circuit means are sequentially connected or disconnected. By providing Integrated detecting circuit means to detect gyro signals on axes from a gyroscope sensor, size can be reduced and power consumption (current) and cost can be saved. | 10-02-2014 |
20140298907 | METHOD FOR EVALUATING OUTPUT SIGNALS OF A ROTATIONAL RATE SENSOR UNIT AND ROTATIONAL RATE SENSOR UNIT - A method for evaluating output signals of a rotational rate sensor unit, including providing an n-tuple of angular speed values measured by at least one rotational rate sensor of the rotational rate sensor unit, in a first step; determining an intermediate value as a function of the n-tuple of angular speed values, in a second step; calculating a new change of orientation value as a function of the intermediate value and an earlier change of orientation value stored in a register of the rotational rate sensor unit, in a third step; and storing the new change of orientation value in the register, in a fourth step, repeating the first, second, third, and fourth step until, the new change of orientation value is read out by an external data processing unit connected to the rotational rate sensor unit, and/or, an exceeding of a threshold value is detected. | 10-09-2014 |
20140298908 | VIBRATION ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A vibration element includes a base section, a support arm extending from the base section, a driving vibration arm extending from the support arm in a direction intersecting with the extending direction of the support arm, a drive section provided to the driving vibration arm, and having a first electrode layer, a second electrode layer, and a first piezoelectric layer disposed between the first electrode layer and the second electrode layer, the first electrode layer being disposed on the driving vibration arm side, and a monitor section adapted to detect a vibration of the driving vibration arm, provided to the driving vibration arm, and having a third electrode layer, a fourth electrode layer, and a second piezoelectric layer disposed between the third electrode layer and the fourth electrode layer, the third electrode layer being disposed on the driving vibration arm side. | 10-09-2014 |
20140305205 | SELF-OSCILLATION CIRCUIT AND METHOD THEREOF - Disclosed herein are a self-oscillation circuit and a method thereof. | 10-16-2014 |
20140305206 | DETECTION DEVICE, SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A detection device includes a driving circuit that drives a vibrator, and a detection circuit that receives a detection signal from the vibrator and performs a detection process of detecting a physical quantity signal corresponding to a physical quantity from the detection signal. The driving circuit performs intermittent driving in which the vibrator is driven in a driving period, and is not driven in a non-driving period, and the detection circuit performs the detection process of the physical quantity signal in the non-driving period of the intermittent driving. | 10-16-2014 |
20140305207 | ELECTRONIC DRIVE CIRCUIT FOR A MEMS TYPE RESONATOR DEVICE AND METHOD FOR ACTUATING THE SAME - The electronic circuit ( | 10-16-2014 |
20140305208 | MEMS Inertial Sensor and Method of Inertial Sensing - The invention comprises an inertial sensor comprising a frame, a proof mass, a first resonant element, the first resonant element being fixed to the frame and electrostatically coupled to the proof mass, and a second resonant element, the second resonant element being fixed to the frame, adjacent to the first resonant element such that there is substantially no electrostatic coupling between the second resonant element and the proof mass. A coupling is provided between the first resonant element and the second resonant element. A drive means is coupled to the first and second resonant elements for vibrating the first and second resonant elements and a sensor assembly is provided for detecting the amplitude of vibration of at least one of the resonant elements. | 10-16-2014 |
20140311242 | MULTI-AXIS INTEGRATED MEMS INERTIAL SENSING DEVICE ON SINGLE PACKAGED CHIP - A multi-axis integrated MEMS inertial sensor device. The device can include an integrated 3-axis gyroscope and 3-axis accelerometer on a single chip, creating a 6-axis inertial sensor device. The structure is spatially with efficient use of the design area of the chip by adding the accelerometer device to the center of the gyroscope device. The design architecture can be a rectangular or square shape in geometry, which makes use of the whole chip area and maximizes the sensor size in a defined area. The MEMS is centered in the package, which is beneficial to the sensor's temperature performance. Furthermore, the electrical bonding pads of the integrated multi-axis inertial sensor device can be configured in the four corners of the rectangular chip layout. This configuration guarantees design symmetry and efficient use of the chip area. | 10-23-2014 |
20140318244 | PHYSICAL QUANTITY DETECTION CIRCUIT, PHYSICAL QUANTITY DETECTION DEVICE, ELECTRONIC APPARATUS AND MOVING OBJECT - A detection circuit (physical quantity detection circuit) includes a digital arithmetic operation circuit (arithmetic operation processing portion) that performs an arithmetic operation process of generating an arithmetic operation signal according to a magnitude of a physical quantity, on the basis of a detection signal corresponding to the physical quantity. The digital arithmetic operation circuit performs an arithmetic operation process including a power supply voltage fluctuation correction process of correcting at least one of the detection signal and a signal which is obtained by a portion of the arithmetic operation process with respect to the detection signal, on the basis of a correction expression using a power supply voltage to be supplied as a variable. | 10-30-2014 |
20140326070 | YAW-RATE SENSOR - A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis. | 11-06-2014 |
20140331769 | MEMS SENSORS - A MEMS sensor comprises a vibrating sensing structure formed from a semiconductor substrate layer ( | 11-13-2014 |
20140338449 | FAULT DETECTION USING SKEWED TRANSDUCERS - A vibratory gyroscope is provided comprising a plurality of secondary pickoff transducers which are each sensitive to the secondary response mode, wherein: at least two of the secondary pickoff transducers comprise skew transducers designed to be sensitive to the primary mode which produce an induced quadrature signal in response thereto. A method of using the gyroscope is provided comprising the steps of arranging electrical connections between the secondary pickoff transducers and a pickoff amplifier so that in use the induced quadrature signal is substantially rejected by the amplifier in the absence of a fault condition, and the amplifier outputs an induced quadrature signal when a fault condition disconnects one of the skew transducers from the amplifier, and a comparator compares the quadrature output from the pickoff amplifier with a predetermined threshold value and provides a fault indication when the predetermined threshold is exceeded. | 11-20-2014 |
20140345378 | METHOD FOR OPERATING A RATE-OF-ROTATION SENSOR - In a method for operating a rotation rate sensor including a substrate and a seismic mass, the seismic mass is driven in a drive direction in parallel to the main extension plane of the sensor to carry out a drive movement, and, during a rotation of the rotation rate sensor, the seismic mass is moved in a detection direction perpendicular to the drive direction and perpendicular to the rotation rate as a result of the action of force caused by the Coriolis force. The movement in the detection direction has a deflection amplitude, and the rotation rate sensor includes a deflection support element acting on the seismic mass in such a way that the deflection amplitude in the detection direction is increased. | 11-27-2014 |
20140345379 | Microgyroscope for Determining Rotational Movements About Three Spatial Axes which are Perpendicular to One Another - A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (I) on which a plurality of masses ( | 11-27-2014 |
20140352432 | ACCELEROMETERS - The invention provides for an accelerometer comprising a proof mass within a fixed substrate wherein the proof mass is connected to the substrate by one or more v-beams. Acceleration is determined by measuring the deflection of the v-beam or beams. | 12-04-2014 |
20140352433 | Micromechanical sensor - A micromechanical sensor comprising a substrate ( | 12-04-2014 |
20140360265 | VIBRATION ANGULAR VELOCITY SENSOR - A vibration angular velocity sensor includes a substrate and a vibrator. The vibrator includes support members, linear drive beams, and a plurality of weight portions connected by the drive beams. The vibrator vibrates the plurality of weight portions by bending of the drive beams. The vibrator is fixed to the substrate through the support members at fixed points of the drive beam. A spring property of the support members is smaller than a spring property of the drive beams. | 12-11-2014 |
20140366631 | MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM - A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction. | 12-18-2014 |
20140373627 | Rotation rate sensor and method for operating a rotation rate sensor - A rotation rate sensor for detecting a rotation rate about a rotational axis parallel to a main extension plane of a substrate of the sensor includes: a first oscillating mass; and a second oscillating mass mechanically coupled to the first oscillating mass. The first oscillating mass is (i) deflectable along a first oscillations plane parallel to the main extension plane, (ii) extends in a planar manner parallel to the first oscillations plane in a rest position, and (iii) deflectable out of the first oscillations plane into a first deflection position. The second oscillating mass is (i) deflectable along a second oscillations plane parallel to the first oscillations plane, (ii) extends in a planar manner parallel to the second oscillations plane in a rest position, and (iii) deflectable out of the second oscillations plane into a second deflection position. | 12-25-2014 |
20140373628 | YAW RATE SENSOR HAVING THREE SENSITIVE AXES AND METHOD FOR MANUFACTURING A YAW RATE SENSOR - A yaw rate sensor includes: a first sensor structure having a first oscillating mass and configured to detect a first yaw rate around a first axis of rotation; a second sensor structure having a second oscillating mass and configured to detect second and third yaw rates around second and third axes of rotation, respectively; and a drive structure coupled to the first and second oscillating masses. The first oscillating mass is drivable into a first drive oscillation along a first oscillation direction, and the second oscillating mass is drivable into a second drive oscillation along a second oscillation direction different from the first oscillation direction. The first axis of rotation is perpendicular to the first oscillation direction, and the second and third axes of rotation are perpendicular to the second oscillation direction. | 12-25-2014 |
20150020589 | APPARATUS FOR DRIVING GYRO SENSOR AND CONTROL METHOD THEREOF - Disclosed herein is an apparatus for driving a gym sensor including a driving displacement signal processing unit, a sensing signal processing unit and an automatic quadrature signal controller configured to control the variable resistor through digital correction when a quadrature signal exists, and minimize an amplitude of the quadrature signal. | 01-22-2015 |
20150033849 | MEMS DEVICE MECHANISM ENHANCEMENT FOR ROBUST OPERATION THROUGH SEVERE SHOCK AND ACCELERATION - A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event. | 02-05-2015 |
20150033850 | DETECTION MODULE FOR SENSOR AND ANGULAR VELOCITY SENSOR HAVING THE SAME - Disclosed herein is a detection module for a sensor, including: a mass body part including a first mass body including a first one side mass body and a first other side mass body connected to each other by a coupling elastic member, and a second mass body; a frame supporting the first mass body and the second mass body; first flexible parts each connecting the first mass body and the second mass body to the frame; and second flexible parts each connecting the first mass body and the second mass body to the frame, wherein the second flexible parts are connected to the first mass body so as to correspond to the center of gravity of the first mass body and the second mass body is connected to the frame so as to be eccentric by the second flexible parts. | 02-05-2015 |
20150033851 | APPARATUS FOR DRIVING GYRO SENSOR AND METHOD FOR CONTROLLONG THEREOF - Disclosed herein is an apparatus for driving a gyro sensor, the apparatus including: a driving unit, an automatic gain control unit, and a first signal converting unit, wherein the driving unit transmits data for a phase value or amplitude value so that an operation of a control gain for an amplitude or phase of a driving mass resonance of the automatic gain control unit may be performed depending on a preset ratio. | 02-05-2015 |
20150033852 | SENSING MODULE AND ANGULAR VELOCITY SENSOR HAVING THE SAME - An angular velocity sensor comprises a mass body part including a first mass body and a second mass body, an internal frame supporting the first mass body and the second mass body, one or more first flexible parts connecting the first mass body or the second mass body to the internal frame, one or more second flexible parts connecting the first mass body or the second mass body to the internal frame, an external frame supporting the internal frame, at least one third flexible part connecting the internal frame to the external frame, and at least one fourth flexible part connecting the internal frame to the external frame. At least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body. At least one other of the second flexible parts is connected to an eccentric portion of the second mass body. | 02-05-2015 |
20150033853 | MEMS GYROSCOPE - A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions. | 02-05-2015 |
20150033854 | MEMS GYROSCOPE - A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions. | 02-05-2015 |
20150033855 | MEMS DEVICE - A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication. | 02-05-2015 |
20150033856 | MEMS GYROSCOPE - A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a driving mechanism, a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass. The MEMS gyroscope is enclosed in a package that further comprises a magnet for providing bias magnetic field. | 02-05-2015 |
20150052998 | ANGULAR VELOCITY SENSOR - Disclosed herein is an angular velocity sensor including: a mass body part including a plurality of mass bodies; an internal frame supporting the mass body part; a flexible part for sensing connecting the mass body part to the internal frame so that the mass body part is rotatable and provided with a sensing unit; an external frame supporting the internal frame; and a flexible part for vibrating connecting the internal frame to the external frame so that the internal frame is rotatable and provided with a driving unit, wherein the flexible part for vibrating provided with the driving unit is disposed at an outer side of the internal frame in a displacement direction of the mass body part depending on rotation of the mass body part. | 02-26-2015 |
20150052999 | rotational rate sensor having preset quadrature offset - A rotational rate sensor includes a substrate and a seismic mass situated thereon, and configured for detecting a rate of rotation about a rotation axis, the seismic mass having a second mass element coupled to a first mass element, which is drivable to a drive movement along a drive direction perpendicular to the rotation axis, the first and second mass element being deflectable along a detection direction essentially perpendicular to the drive direction and to the rotation axis, the rotational rate sensor having at least one compensating arrangement to produce a compensating force acting on the second mass element, the compensating force being oriented in a compensation direction essentially parallel to the detection direction, the at least one compensating arrangement being the only compensating arrangement and being configured exclusively to produce the compensating force oriented in the compensation direction, the rotational rate sensor being configured such that a quadrature offset force acting on the second mass element is directed exclusively in a preferred direction opposite and parallel to the compensation direction. | 02-26-2015 |
20150053000 | MICROMECHANICAL SENSOR - A micromechanical sensor is provided having a substrate having a main plane of extension and having a movable element, the movable element being pivotable about an axis of rotation that is essentially parallel to the main plane of extension, from a rest position into a deflected position, the movable element having an asymmetrical mass distribution relative to the axis of rotation, so that, as a function of a force exerted on the movable element oriented essentially perpendicular to the main plane of extension, a deflection movement of the movable element is produced in the form of a pivot movement about the axis of rotation, the micromechanical sensor having a damping element, the damping element being pivotable about the axis of rotation,
| 02-26-2015 |
20150053001 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT - A micromechanical component is provided having a substrate having a main plane of extension, a first electrode extending mainly along a first plane in planar fashion, a second electrode extending mainly along a second plane in planar fashion, and a third electrode extending mainly along a third plane in planar fashion, the first, second, and third plane being oriented essentially parallel to the main plane of extension and being situated one over the other at a distance from one another along a normal direction that is essentially perpendicular to the main plane of extension, the micromechanical component having a deflectable mass element, the mass element being capable of being deflected both essentially parallel and also essentially perpendicular to the main plane of extension, the second electrode being connected immovably to the mass element, the second electrode having, in a rest position, a first region of overlap with the first electrode along a projection direction essentially parallel to the normal direction, and having a second region of overlap with the third electrode along a projection direction parallel to the projection direction, the mass element extending in planar fashion mainly along the third plane, the mass element having a recess that extends completely through the mass element, extending in planar fashion along the third plane and parallel to the normal direction, the third electrode being situated at least partly in the recess. | 02-26-2015 |
20150059473 | MULTIPLE SENSE AXIS MEMS GYROSCOPE HAVING A SINGLE DRIVE MODE - A gyroscope includes a first drive mass driven in a first drive motion along a first axis, the first drive motion generating a first sense motion of a first sense mass in response to rotation of the gyroscope. The gyroscope further includes a second drive mass driven in a second drive motion along a second axis that is transverse to the first axis. The second drive motion generates a second sense motion of a second sense mass in response to rotation of the gyroscope. A drive spring system interconnects the two drive masses to couple the first and second drive motions so that a single drive mode can be implemented. The sense motion of each sense mass is along a third axis, where the third axis is transverse to the other axes. The sense motion is translational motion such the sense masses remain parallel to the surface of the substrate. | 03-05-2015 |
20150068306 | MOVABLE DEVICE HAVING DROP RESISTIVE PROTECTION - A movable device including a base, a mass, a plurality of elastic portions and at least one block structure is provided. The mass has a plurality of side surfaces. The elastic portions are connected to the side surfaces respectively and connected to the base, where the mass is adapted to move such that the elastic portions are elastically deformed. The block structure is disposed at the base and aligned to at least one of the side surfaces, wherein the block structure is adapted to block the corresponding side surface to limit a moving range of the mass. | 03-12-2015 |
20150068307 | RESONANCE DEVICE HAVING DROP RESISTIVE PROTECTION - A resonance device includes a base, a mass, a plurality of elastic portions and at least one end surface. The mass has at least one end surface. The elastic portions are connected between the mass and the base, in which the mass is adapted to resonate in a first direction such that the elastic portions are elastically deformed. The block portion is disposed at the base and extends towards the end surface to be aligned to the end surface, in which the gap between the base and the end surface in the first direction is greater than the gap between the block portion and the end surface in the first direction, and the block portion is adapted to block the end surface to limit the moving range of the mass. | 03-12-2015 |
20150068308 | GYROSCOPE STRUCTURE AND GYROSCOPE - A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance. | 03-12-2015 |
20150082884 | PIEZOELECTRIC ACTUATOR MODULE, METHOD OF MANUFACTURING THE SAME, AND MEMS SENSOR HAVING THE SAME - An actuator includes a multi-layer part having a multilayered piezoelectric part comprising a plurality of piezoelectric bodies and an electrode part connected to the multilayered piezoelectric part, and a support part displaceably supporting the multi-layer part. The multilayered piezoelectric part is polled in the same direction. One of the piezoelectric bodies expands or contracts in an opposite direction to another piezoelectric body. | 03-26-2015 |
20150082885 | GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION - A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass. | 03-26-2015 |
20150090034 | METHOD OF REDUCING GYROSCOPE OSCILLATOR START-UP TIME AND DEVICE THEREFOR - A gyroscope device and method of operation therefor. The gyroscope device can include a power input, a charge pump portion coupled to the power input, a selection mechanism, a switching mechanism, an oscillator driving mechanism coupled to the switching mechanism, and an oscillator coupled to the charge pump portion and to the oscillator driving mechanism. The method of operation can include providing a first or second selection signal from a selection mechanism associated with the outputting of a DC input power or DC output power from a switching mechanism, respectively. These signals, along with an oscillator driving signal from an oscillator driving mechanism, can be used to initiate and maintain oscillation of an oscillator at a steady-state frequency within a predetermined range of frequencies. | 04-02-2015 |
20150096373 | ANGULAR VELOCITY SENSOR - Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency. | 04-09-2015 |
20150096374 | ANGULAR VELOCITY SENSOR AND MANUFACTURING METHOD OF THE SAME - Disclosed herein is an angular velocity sensor, including: a mass body part; an internal frame supporting the mass body part; a first flexible part each connecting the mass body part to the internal frame; a second flexible part each connecting the mass body part to the internal frame; an external frame supporting the internal frame; a third flexible part connecting the internal frame and the external frame to each other; and a fourth flexible part connecting the internal frame and the external frame to each other, wherein the internal frame, the second flexible part, and the fourth flexible part have an oxide layer formed thereon. | 04-09-2015 |
20150114112 | MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE ERROR DRIFT - A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis. | 04-30-2015 |
20150114113 | ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - In an angular velocity sensor, when a width of a detection frequency band is set to f | 04-30-2015 |
20150114114 | ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - An angular velocity sensor includes fixing units, a base portion, beam portions that support the base portion with respect to the fixing units, driving vibrating arms connected to the base portion, and detection vibrating arms connected to the base portion. When a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around a detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], the relation of f104-30-2015 | |
20150122021 | INERTIAL FORCE SENSOR - An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes. | 05-07-2015 |
20150128701 | Method and Apparatus for Detecting Linear and Rotational Movement - A method of detecting motion provides a resonator having a mass, moves the mass in a translational mode, and actuates the mass in a given bulk mode. The mass moves in the translational and given bulk modes at substantially the same time and, accordingly, the resonator is configured to detect linear and rotational movement when moving and actuating the mass in the translational and given bulk modes. The method produces one or more movement signals representing the detected linear and rotational movement. | 05-14-2015 |
20150128702 | APPARATUS FOR DRIVING GYROSCOPE SENSOR AND METHOD THEREOF - Disclosed herein are an apparatus and a method for driving a gyroscope sensor. The apparatus for driving a gyroscope sensor includes: a detection module; a phase conversion module; an inversion module; a switch module selecting and outputting any one of the driving voltage and the inversion voltage for each axis; a driving module supplying driving voltage of a driving axis at the time of the driving and supplying inversion voltage at the time of stopping the driving; and a control unit passing the driving voltage of the driving axis by controlling the switch module according to a switching control signal at the time of the driving and passing the inversion voltage of each axis by controlling the switch module according to the switching control signal at the time of stopping the driving. | 05-14-2015 |
20150135830 | ANGULAR VELOCITY SENSOR AND ANGULAR VELOCITY AND ACCELERATION DETECTING COMPOSITE SENSOR - A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped. | 05-21-2015 |
20150143903 | PACKAGE, ELECTRONIC COMPONENT MOUNTED PACKAGE, PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A physical quantity sensor includes a base on which an IC electrically connected to a gyro element is arranged and a wire group arranged on the base. The base includes a first outer edge and a second outer edge that crosses the first outer edge. The wire group includes a CLK wire arranged along the first outer edge and including an internal terminal connected to the IC and an S1 wire arranged along the second outer edge and including an internal terminal connected to the IC. A detection signal of the gyro element is input to the IC via the S1 wire. | 05-28-2015 |
20150143904 | FUNCTIONAL ELEMENT, ELECTRONIC DEVICE, AND MOVING OBJECT - A functional element includes a driving portion, a first mass portion which is vibrated along the first direction, a first connection portion which is connected to the first mass portion and can perform a first movement in which the first connection portion contracts and extends along the first direction, a second connection portion which is connected to the first connection portion, extends in a second direction intersecting the first direction, and can perform a second movement in which the second connection portion rotates with the second direction as the axis, and a second mass portion which is connected to the second connection portion. | 05-28-2015 |
20150143905 | RESONATOR - A micro-electro-mechanical device with a closed feed-back damping loop is provided. Displacement in the mechanical resonator is opposed with a damping force determined by the closed feed-back loop that comprises a filter with a peaked frequency response, and associated phase adjustment. An oscillation-free configuration that allows high signal amplification is achieved. | 05-28-2015 |
20150293141 | MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE - The present invention discloses a micro-electro-mechanical system (MEMS) device. The MEMS device includes: a substrate; a proof mass which defines an internal space inside and forms at least two capacitors with the substrate; at least two anchors connected to the substrate and respectively located in the capacitor areas of the capacitors from a cross-sectional view; at least one linkage truss located in the hollow structure, wherein the linkage truss is directly connected to the anchors or indirectly connected to the anchors through buffer springs; and multiple rotation springs located in the hollow structure, wherein the rotation springs are connected between the proof mass and the linkage truss, such that the proof mass can rotate along an axis formed by the rotation springs. There is no coupling mass which does not form a movable electrode in the connection between the proof mass and the substrate. | 10-15-2015 |
20150300821 | ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS, AND MOBILE OBJECT - An angular velocity sensor includes a substrate; a plurality of mass units which is disposed above the substrate; respective coupling units which couple the respective mass units (a first mass unit and a third mass unit, the third mass unit and a second mass unit, the second mass unit and a fourth mass unit, and a fourth mass unit and the first mass unit) adjacent to each other, among the plurality of mass units; and respective drive units which are disposed above the substrate and are connected to the respective coupling units, and the respective drive units drive the respective mass units (the first mass unit and the third mass unit, the third mass unit and the second mass unit, the second mass unit and the fourth mass unit, and the fourth mass unit and the first mass unit) adjacent to each other through the respective coupling units. | 10-22-2015 |
20150308828 | GYRO SENSOR AND COMPOSITE SENSOR COMPRISING GYRO SENSOR - In a gyro sensor, two detection weights are placed in an outer drive weight to be arranged in an x-axis direction and coupled to each other via a coupling spring. By thus coupling the two detection weights via the coupling spring, it is possible to separate an in-phase-mode resonant frequency fin and an anti-phase-mode resonant frequency fanti from each other. As a result, it is possible to provide the gyro sensor which can suppress an output error on receiving an impact and perform more precise angular velocity detection. | 10-29-2015 |
20150308829 | MICROELECTROMECHANICAL GYROSCOPE WITH OPEN LOOP READING DEVICE AND CONTROL METHOD - A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency. | 10-29-2015 |
20150316378 | MICROMECHANICAL Z-AXIS GYROSCOPE - A micromechanical sensor device for measuring angular z-axis motion comprises two vibratory structures each having at least one proof mass. A suspension structure maintains the two vibratory structures in a mobile suspended position above the substrate for movement parallel to the substrate plane in drive-mode (x-axis) direction and in sense-mode direction (y-axis). A coupling support structure connects the coupling structure to an anchor structure and enables a rotational swinging movement of the coupling structure, the rotational swinging movement having an axis of rotation that is perpendicular to the substrate plane. Each of the vibratory structures comprises at least one shuttle mass coupled to the at least one proof mass by sense-mode springs, which are more flexible in sense-mode direction than in drive-mode direction (x), for activating a vibration movement of each vibratory structure. A sensing electrode structure for each proof mass is designed for detecting sense-mode movements that are parallel to the substrate plane, The coupling support structure is designed to also enable a translational movement of the coupling structure in drive-mode direction (x). | 11-05-2015 |
20150323323 | GYROSCOPE STRUCTURE AND GYROSCOPE DEVICE - A microelectromechanical gyroscope structure for detecting angular motion about an axis of angular motion. A drive element is suspended for one-dimensional motion in a direction of a drive axis, and a sense body carries one or more sense rotor electrodes and is coupled to the drive element with a first directional spring structure that forces the sense body to move with the drive element and has a preferred direction of motion in a direction of a sense axis. The drive element includes an actuation body and a drive frame wherein the first spring structure couples the sense body directionally to the drive frame, and a second directional spring structure that couples the drive frame to the actuation body and has a preferred direction of motion in the direction of the sense axis. | 11-12-2015 |
20150330782 | MASS-LOADED CORIOLIS VIBRATORY GYROSCOPE - A mass-loaded resonator for use in a vibratory sensor is disclosed. In at least one embodiment, the mass-loaded resonator includes a common base having a top face, a bottom face and a plurality of sides. Furthermore, a plurality of flexures are attached to the common base and project substantially perpendicular from the normal of the top face of the common base when the mass-loaded resonator is at rest. Moreover, the plurality of flexures have a thickness that is substantially less than the thickness of the common base. | 11-19-2015 |
20150330783 | SYSTEMS AND METHODS FOR MEMS GYROSCOPE SHOCK ROBUSTNESS - Various embodiments of the invention allow for increased shock robustness in gyroscopes. In certain embodiments, immunity against undesired forces that corrupt signal output is provided by a chessboard-pattern architecture of proof masses that provides a second layer of differential signals not present in existing designs. Masses are aligned parallel to each other in a two-by-two configuration with two orthogonal symmetry axes. The masses are driven to oscillate in such a way that each mass moves anti-parallel to an adjacent proof mass. In some embodiments of the invention, a mechanical joint system interconnects proof masses to suppress displacements due to mechanical disturbances, while permitting displacements due to Coriolis forces to prevented erroneous sensor signals. | 11-19-2015 |
20150330784 | SHOCK-ROBUST INTEGRATED MULTI-AXIS MEMS GYROSCOPE - Various embodiments of the invention integrate multiple shock-robust single-axis MEMS gyroscopes into a single silicon substrate while avoiding the complexities typically associated with designing a multi-drive control system for shock immune gyroscopes. In certain embodiments of the invention, a shock immune tri-axial MEMS gyroscope is based on a driving scheme that employs rotary joints to distribute driving forces generated by two sets of driving masses to individual sensors, thereby, simplifying the control of the gyroscope. | 11-19-2015 |
20150330785 | ANGULAR VELOCITY SENSOR AND MANUFACTURING METHOD THEREFOR - One or more vibration plate layers of a diaphragm part are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part is defined as M milligrams, a circumference of the diaphragm part is defined as r meters, a stress applied to a piezoelectric layer is defined as σ | 11-19-2015 |
20150338217 | Stepped Sinusoidal Drive For Vibratory Gyroscopes - A gyroscopic sensor includes a vibratory gyroscopic sensor element, first and second drive electrodes positioned proximate to the vibratory gyroscopic sensor element, and a drive circuit operatively connected to the first and second drive electrodes. The drive circuit is configured to generate a stepped sinusoidal waveform having a plurality of steps, each step having a predetermined duration and each step having an output level in a plurality of predetermined output levels for the stepped sinusoidal waveform including at least three positive output levels and at least three negative output levels to generate oscillation of the vibratory gyroscopic sensor element at a predetermined frequency. | 11-26-2015 |
20150338432 | INERTIA SENSOR - An inertia sensor includes a sensor element including first and second sensing parts configured to output first and second sensing signals, an amplifier having an input port to which the first sensing signal or the second sensing signal is selectively input, a feedback circuit unit configured to be connected between the input port and the output port of the amplifier to be connected in parallel to the amplifier, a first switching element provided between the first sensing part and the amplifier, a second switching element provided between the first sensing part and the feedback circuit unit, a third switching element provided between the second sensing part and the amplifier, and a fourth switching element provided between the second sensing part and the feedback circuit unit. This inertia sensor, stabilizes output characteristics of the amplifier circuit, and suppresses generation of unwanted signals. | 11-26-2015 |
20150345946 | DRIVE CIRCUITRY AND METHOD FOR A VIBRATION GYROSCOPE - A drive circuitry for a vibration gyroscope is described. The drive circuitry comprises a digital phase shifter, a variable gain amplifier and a pulse signal generator arranged to generate a digital pulse signal having a frequency substantially equal to a drive frequency of the vibration gyroscope. A controller is arranged to connect drive actuation units of the vibration gyroscope to outputs of the pulse signal generator during a first start-up time period, to outputs of the digital phase shifter during a second start-up time period, and to outputs of the variable gain amplifier during a measurement time period. Furthermore, a vibration gyroscope device and a method of driving a vibration gyroscope are described. | 12-03-2015 |
20150345947 | ELECTRONIC DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS - An electronic device includes a base body, a functional element that is placed on the base body, and a lid body, formed from silicon, that is placed over the base body so as to cover the functional element. A hole portion and a sealing member that closes the hole portion are disposed in the lid body, in the hole portion, the area of a second opening disposed on a side opposite to a first opening is larger than the area of the first opening disposed on the base body side, and the ratio of the volume of the sealing member to the volume of the hole portion is equal to or higher than 35% and is equal to or lower than 87%. | 12-03-2015 |
20150345948 | SENSOR DETECTING A ROTATION OF AN OBJECT - A sensor for detecting a rotation rate of an object, including: a sensor element, which is designed to vibrate at an angle to the rotation axis of the rotation rate to be detected at an excitation frequency on a resetting element fastened in a spatially fixed manner to the object, such that the sensor element is deflected at a reaction frequency in a reaction direction at an angle to the rotation axis and at an angle to the vibration direction owing to the Coriolis force; and a measuring transducer, which is designed to detect the vibration in the reaction direction wherein the vibratable sensor element is formed in such a manner that a comparison of a temperature-dependent displacement of a frequency spacing between the excitation frequency and the reaction frequency and a temperature-dependent position of the sensor element on the object satisfies a predefined condition. | 12-03-2015 |
20150355218 | Inertial Sensor - An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. | 12-10-2015 |
20150355220 | INERTIAL SENSOR MODULE HAVING HERMETIC SEAL FORMED OF METAL AND MULTI-AXIS SENSOR EMPLOYING THE SAME - There are provided an inertial sensor module having a hermetic seal formed of metal and a multi-axis sensor employing the same. The inertial sensor module includes: a sensor main body including a plurality of wirings connected to any one of a driving electrode of a sensor and a sensing electrode of the sensor and formed on a substrate for a lower cap by a wafer level package (WLP) scheme to detect an inertial force; a substrate for an upper cap bonded on the sensor main body to protect the sensor main body; and a hermetic seal formed of metal isolated from the wiring and interposed into the sensor main body and the substrate for the upper cap by performing the bonding by metal bonding. | 12-10-2015 |
20150362317 | FUNCTIONAL ELEMENT, METHOD OF MANUFACTURING FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS, AND MOBILE OBJECT - A functional element includes a first base body; a coupling section which is coupled to the first base body; a support body which extends from the coupling section; a mass body which is coupled to the support body; a drive electrode which is provided on a surface side that faces the mass body; a detection working electrode which extends from the support body; and a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode. The mass body can be displaced in a direction which intersects a main surface of the mass body. When a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>d2 is satisfied. | 12-17-2015 |
20150369603 | INERTIAL FORCE DETECTION DEVICE - In order to provide an inertial force detection device with improved reliability, an inertial force detection device that has a vibrating body displaceable in a first direction and a second direction perpendicular to each other and detects, as angular velocity, the amount of displacement when the vibrating body is displaced in the second direction due to the occurrence of angular velocity in a state where the vibrating body is made to vibrate in the first direction includes, for example, digital signal processing means, means for detecting a failure in a register unit and a calculation unit of the digital signal processing means, and means for outputting a failure detection result to the outside. | 12-24-2015 |
20150377622 | Systems and Methods for Determining Rotation from Nonlinear Periodic Signals - Systems and methods are disclosed herein for determining rotation. A gyroscope includes a drive frame and a base, the drive frame springedly coupled to the base. The gyroscope includes a drive structure configured for causing a drive frame to oscillate along a first axis. The gyroscope includes a sense mass springedly coupled to the drive frame. The gyroscope includes a sense mass sense structure configured for measuring a displacement of the sense mass along a second axis orthogonal to the first axis. The gyroscope includes measurement circuitry configured for determining a velocity of the drive frame, extracting a Coriolis component from the measured displacement, and determining, based on the determined velocity and extracted Coriolis component, a rotation rate of the gyroscope. | 12-31-2015 |
20150377623 | Systems and Methods for Determining Rotation from Nonlinear Periodic Signals - Systems and methods are disclosed herein for determining rotation. A gyroscope includes a drive frame and a base, the drive frame springedly coupled to the base. The gyroscope includes a drive structure configured for causing a drive frame to oscillate along a first axis. The gyroscope includes a sense mass springedly coupled to the drive frame. The gyroscope includes a sense mass sense structure configured for measuring a displacement of the sense mass along a second axis orthogonal to the first axis. The gyroscope includes measurement circuitry configured for determining a velocity of the drive frame, extracting a Coriolis component from the measured displacement, and determining, based on the determined velocity and extracted Coriolis component, a rotation rate of the gyroscope. | 12-31-2015 |
20150377624 | MICRO-ELECTRO-MECHANICAL DEVICE WITH COMPENSATION OF ERRORS DUE TO DISTURBANCE FORCES, SUCH AS QUADRATURE COMPONENTS - MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass. | 12-31-2015 |
20150377625 | SELF-TEST IN A CLOSED-LOOP VIBRATORY GYROSCOPE - A closed-loop microelectromechanical gyroscope with a self-test function. At least one test input signal is generated from a signal of the vibrational primary motion and input during operation of the microelectromechanical gyroscope to the sense circuit. | 12-31-2015 |
20160003616 | ANGULAR VELOCITY SENSOR - An angular velocity sensor comprising: a drive circuit to generate a drive signal; a vibrating weight; a vibrating unit to vibrate the vibrating weight along a first axis and a second axis according to the drive signal; an output unit to output a signal based on Coriolis force that occurs corresponding to angular velocity and vibration of the vibrating weight; a detection circuit to detect the angular velocity from the signal based on the Coriolis force; a first vibration attenuating unit to electrically consume kinetic energy of the vibrating weight is provided. | 01-07-2016 |
20160003618 | FREQUENCY READOUT GYROSCOPE - A frequency readout gyroscope is provided, having 2 or 3 axes, in which the frequency of the carrier associated with the oscillation of the proof mass changes while the amplitude stays constant. The invention departs from conventional gyroscopes which rely on measuring transducer sense axis displacement (amplitude modulation) to determine angular input rate. The invention utilizes what could be termed a form of frequency modulation, such as evaluating frequency phase difference between the axes of modulation. Examples include gyroscopes having either a quadrature or Lissajous FM mode of operation, in which angle random walk contribution from the electronics is reduced by approximately two orders of magnitude. | 01-07-2016 |
20160010993 | MANAGEMENT METHODS AND SYSTEMS FOR MOVEMENT DETECTION | 01-14-2016 |
20160010994 | MEMS GYRO MOTOR LOOP FILTER | 01-14-2016 |
20160025493 | VIBRATING -MASS GYROSCOPE SYSTEMS AND METHOD - One embodiment of the invention includes a vibrating-mass gyroscope system. A sensor system includes a substantially planar vibrating-mass including opposite first and second surfaces and electrodes that extend longitudinally in a periodic pattern across the first and/or second surfaces. The electrodes include sets of drive and sense electrodes that are capacitively coupled to respective matching sets of drive and sense electrodes associated with a housing and which are separated from and facing the respective first and second surfaces. A gyroscope controller generates a drive signal provided to one of the array of drive electrodes and the substantially matching array of drive electrodes to provide for in-plane periodic oscillatory motion of the vibrating-mass, and generates a force-rebalance signal that is provided to one of the array of sense electrodes and the substantially matching array of sense electrodes to calculate rotation of the vibrating-mass gyroscope system about an input axis. | 01-28-2016 |
20160033273 | METHOD FOR MANUFACTURING PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOVING BODY - A method for manufacturing a physical quantity sensor of the invention includes preparing a supportive substrate and a seal substrate, the seal substrate including a first recessed portion and a second recessed portion, disposed therein and including a first through hole communicating with the first recessed portion and a second through hole communicating with the second recessed portion; bonding the seal substrate to the supportive substrate such that the gyrosensor element is accommodated in the first recessed portion and such that the acceleration sensor element is accommodated in the second recessed portion; and sealing the first and the second recessed portions by filling the first and the second through holes with first and second seal materials of which the melting points are lower than the melting points or the softening points of the supportive substrate and the seal substrate. | 02-04-2016 |
20160033274 | MICROMECHANICAL SENSOR AND METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR - A micromechanical sensor is provided as including a substrate having a main extension plane and a mass element movable relative to the substrate, the movable mass element being coupled to the substrate via a spring structure, the spring structure including a first and a second spring element, the first and second spring elements extending essentially in parallel to each other in sections and being coupled to each other in sections, the spring structure including a first and a second compensation element for quadrature compensation, the first compensation element being connected to the first spring element, the second compensation element being connected to the second spring element, the first spring element having a first spring structure width extending along a transverse direction, the second spring element having a second spring structure width extending along the transverse direction, the first compensation element in a first subarea extending in parallel to the transverse direction along a first width, the first spring structure width and the first width being different, the second compensation element in a second subarea extending in parallel to the transverse direction along a second width, the second spring structure width and the second width being different. | 02-04-2016 |
20160033275 | MICRO RATE OF ROTATION SENSOR AND METHOD FOR OPERATING A MICRO RATE OF ROTATION SENSOR - The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction. | 02-04-2016 |
20160040990 | Micro-Gyroscope and Method for Operating a Micro-Gyroscope - A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring. | 02-11-2016 |
20160046485 | SYSTEMS AND METHODS FOR IMPROVING MEMS GYROSCOPE START TIME - Systems and methods for improving MEMS gyroscope start time are provided. In one embodiment, a circuit board for a MEMS gyroscope system comprises: a proof mass assembly; a proof mass control loop coupled to the proof mass assembly by a first proof mass motion sensor pickup line and a second proof mass motion sensor pickup line, where the proof mass control loop generates a set of drive signals that operate the proof mass assembly using a first capacitive signal from the first proof mass motion sensor pickup line and a second capacitive signal from the second proof mass motion sensor pickup line; and a tunable capacitive coupler connected to at least one of the first or the second proof mass motion sensor pickup lines, where the tunable capacitive coupler varies at least one of the first and second charge signals as a function of the drive signals. | 02-18-2016 |
20160047652 | ANGULAR VELOCITY SENSOR - An angular velocity sensor is provided, the angular velocity sensor comprising: a housing an outer edge shape of which is a polygon in a planar view; a planar substrate fixed to the housing; a vibrating weight that is surrounded by the housing and is formed to extend in a perpendicular direction in relation to the planar substrate on the planar substrate; and a vibrating unit to vibrate the vibrating weight in a predetermined direction, wherein the vibrating unit vibrates the vibrating weight in a different direction from a direction of a straight line that connects the shortest distance between the outer edge of the housing and the center of gravity of the vibrating weight in a planar view. | 02-18-2016 |
20160047654 | ROTATION RATE SENSOR - A micromechanical rotation rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; a second Coriolis element; a drive device for deflecting the first and second Coriolis elements from a neutral position; | 02-18-2016 |
20160069682 | ROTATION RATE SENSOR HAVING A SUBSTRATE HAVING A MAIN EXTENSION PLANCE FOR DETECTING A ROTATION RATE - A rotation-rate sensor having a substrate with main extension plane, for detecting a rotation rate, extending in a direction parallel/orthogonal to the main plane; the sensor including a primary/secondary pair of seismic masses; the primary pair having first/second primary masses; the secondary pair having first/second secondary masses; the first/second primary masses being movable relative to the substrate along a primary deflection direction extending parallel to the main plane; the first/second secondary masses being movable relative to the substrate along a secondary deflection direction extending parallel to the main plane; the first/second primary masses and the first/second primary masses being movable antiparallel or parallel to one another corresponding to the deflection direction, essentially extending orthogonally to the secondary deflection direction; and the primary pair and/or secondary pair being drivable so that, based on sensor rotation, the Coriolis force leads to deflection of the first/second primary masses and/or the first/second secondary masses. | 03-10-2016 |
20160069683 | PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY - A physical quantity sensor element is formed into a plane-shape which extends along an XY plane, and is provided with a driving portion which vibrates in a Z-axis direction, a detecting portion which vibrates in an X-axis direction due to Coriolis effect acting on the driving portion, a beam portion which connects the driving portion and the detecting portion, a fixing portion, and a beam portion which connects the detecting portion and the fixing portion, in which a spring constant of the beam portion in the Z-axis direction is smaller than a spring constant of the beam portion in the Z-axis direction, and a spring constant of the beam portion in the Z-axis direction is greater than a spring constant of the beam portion in the X-axis direction. | 03-10-2016 |
20160069684 | PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY - A physical quantity sensor element of the invention is formed into a plane-shape along an XY plane, and is provided with two driving portions which vibrate in a Z-axis direction, two detecting portions, four beam portions which connect one driving portion and one detecting portion, four beam portions which connect the other detecting portion and the other driving portion, and a coupling portion of which one end is connected to a portion in one of the driving portion and the other end is connected to a portion in the other diving portion in which the each of the deriving portions includes a beam portion which is connected to the end portion of the coupling portion and is deformable so as to reduce a change of a posture of each of the driving portions with respect to an XY plane. | 03-10-2016 |
20160069685 | PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY - A physical quantity sensor element is provided with a detecting portion, a driving portion, a beam portion which connects a detecting portion and the driving portion to each other, and in which the beam portion includes a branched portion. The beam portion includes two mass portion side beam portions which extend from two position of the driving portion, which are different from each other, and two supporting portion side beam portions which extend from two positions of the detecting portion, which are different from each other, and in which both end portions on the detecting portion side of two mass portion side beam portions are connected to each other, and both end portions on the driving portion side of two supporting portion side beam portions are connected to each other. | 03-10-2016 |
20160084653 | ROTATION RATE SENSOR AND A METHOD FOR OPERATING A ROTATION RATE SENSOR - A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor include: a first rotational element, a second rotational element and a drive structure moveable in parallel to the drive plane, the first rotational element being drivable about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element being drivable about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure being (i) coupled to the first and second rotational elements, and (ii) configured to generate a drive mode in phase opposition of the first and second rotational vibrations. | 03-24-2016 |
20160097641 | Sensors Including Ionic Liquids and Methods of Making and Using the Same - A system and method for using a sensor includes a first anode and cathode pair having a first non-zero voltage therebetween and an ionic liquid contacting the first anode and cathode pair. An output is provided that communicates a motion sense signal corresponding to a motion or pressure of the sensor in at least one direction that causes a change in a first ionic concentration gradient between the first anode and cathode pair. | 04-07-2016 |
20160097642 | MEMS SENSOR MODULE, VIBRATION DRIVING MODULE, AND MEMS SENSOR - A MEMS sensor module of the present invention, in particular, a vibration driving module includes: a movable electrode supported such that the movable electrode is able to be vibrated, the movable electrode extending in a vibration direction; a fixed electrode provided substantially in parallel with the movable electrode and extending in the vibration direction; a plurality of projection portions provided side by side on a facing wall surface of the movable electrode in the vibration direction, the facing wall surface of the movable electrode facing the fixed electrode; and a plurality of projection portions provided on a facing wall surface of the fixed electrode, the facing wall surface of the fixed electrode facing the movable electrode, the plurality of projection portions of the fixed electrode facing the projection portions of the movable electrode. | 04-07-2016 |
20160102978 | ROTATION VELOCITY SENSOR AND METHOD FOR SENSING ROTATION VELOCITY - A rotation velocity sensor includes a driving unit, a proof mass, a rotation sensing element, a compensating unit, and a rotation sensing unit. The driving unit generates a vibration driving signal and a reference signal. The proof mass is driven by the vibration driving signal to vibrate in a first direction. The rotation sensing element senses a vibration of the proof mass to generate a charge signal which corresponds to a portion of the vibration of the proof mass in a second direction orthogonal to the first direction. The compensating unit generates a compensation signal according to the reference signal. The rotation sensing unit converts the charge signal to a voltage signal or a current signal, and compensates the voltage signal or the current signal according to the compensation signal to cancel a noise in the second direction. | 04-14-2016 |
20160102979 | SYSTEM COMPRISING A MECHANICAL RESONATOR AND METHOD THEREFOR - A system comprises a mechanical resonator; an analog circuit operably coupled to the mechanical resonator; the analog circuit arranged to receive a mechanical resonator measurement signal and to output a mechanical resonator actuation signal to the mechanical resonator; and a digital actuator operably coupled to the analog circuit and configured to provide a frequency sweep of signals to the analog circuit that induces movement of the mechanical resonator. | 04-14-2016 |
20160109236 | YAW-RATE SENSOR - A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis. | 04-21-2016 |
20160109237 | MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE - A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition. | 04-21-2016 |
20160109258 | CONTINUOUS MODE REVERSAL FOR REJECTING DRIFT IN GYROSCOPES - A vibratory gyroscope system is described which utilizes a mechanical resonator having a first mode of vibration and an associated first natural frequency, and a second mode of vibration having an associated second natural frequency. The angular rate of motion input couples energy between the first and second modes of vibration. The gyroscope has driver circuits, sensors and actuators for the first and second modes. The invention utilizes a bias error shifting method which provides for shifting the bias error away from DC to a higher frequency, where it can be removed by low pass filtering. As a result of the inventive method, gyroscope systems can be produced with significantly lower bias error. | 04-21-2016 |
20160116284 | Electronic Device, Electronic Apparatus, and Moving Object - An electronic device includes an vibration element including an vibration body provided with an adjustment section, an electrode disposed on the vibration body, and a connection electrode electrically connected to the electrode, an IC so disposed that the IC faces the vibration element, terminals disposed on the side facing the upper surface of the IC and electrically connected to the connection electrode via a fixing member, wiring sections electrically connected to the terminals and located below the terminals, and a protective layer located above the wiring sections and disposed in a portion where the adjustment section overlaps with the wiring sections in a plan view. | 04-28-2016 |
20160116285 | Physical Quantity Detecting Vibration Element, Physical Quantity Sensor, Electronic Apparatus, and Moving Object - A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion. | 04-28-2016 |
20160123736 | VIBRATION ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - An vibration element includes a drive vibration section and a detection vibration section, and the detection vibration section has a detection mode | 05-05-2016 |
20160130133 | MEMS-SENSOR - A sensor for measuring physical parameters such as acceleration, rotation, magnetic field, comprises a substrate ( | 05-12-2016 |
20160131481 | MEMS INERTIAL SENSING USING ACOUSTIC WAVES - A MEMS structure includes a generating diaphragm, one or more wave channels, and one or more sensing diaphragm. A method for inertial sensing comprises driving the generating diaphragm to generate an acoustic wave, passing the acoustic wave through a channel in the MEMS structure to the sensing diaphragm, and measuring a relative phase of the wave at the sensing diaphragm to determine acceleration or rotation of the MEMS structure. | 05-12-2016 |
20160131679 | MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE - The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass. | 05-12-2016 |
20160146605 | GYRO SENSOR, ELECTRONIC APPARATUS, AND MOVING BODY - A gyro sensor includes a substrate, a first vibrating body and a second vibrating body, first suspension springs that support the first vibrating body, second suspension springs that support the second vibrating body, and a connection spring that connects the first vibrating body and the second vibrating body. When a spring constant of the first suspension springs and the second suspension springs is K1 and a spring constant of the connection spring is K2, 2K2≦K1 is satisfied. | 05-26-2016 |
20160146606 | MEMS Balanced Inertial Angular Sensor And Method For Balancing Such A Sensor - The invention relates to a vibrating MEMS inertial angular sensor including a substrate for supporting at least two mass bodies mounted to bear mobile relative to the substrate and associated with at least one electrostatic actuator and at least one electrostatic detector. The sensor includes first means for suspending the mass bodies relative to the substrate and means for coupling the mass bodies together. The substrate is connected to a stationary rack by second suspension means. | 05-26-2016 |
20160153779 | Dual Use of a Ring Structure as Gyroscope and Accelerometer | 06-02-2016 |
20160153780 | MEMS GYROSCOPE | 06-02-2016 |
20160153781 | QUADRATURE COMPENSATION | 06-02-2016 |
20160154019 | MEMS GYROSCOPE | 06-02-2016 |
20160154020 | MEMS GYROSCOPE | 06-02-2016 |
20160154070 | WAFER BONDING METHOD FOR USE IN MAKING A MEMS GYROSCOPE | 06-02-2016 |
20160161256 | APPARATUS AND METHODS FOR PLL-BASED GYROSCOPE GAIN CONTROL, QUADRATURE CANCELLATION AND DEMODULATION - This application discusses, among other things, simplified interface circuits for a gyroscope. In an example, a interface can include an automatic gain control (AGC) circuit configured to couple to driver for a proof mass of a gyroscope sensor and to drive the proof-mass to oscillate at a predefined oscillation amplitude, and a phase-locked loop (PLL) configured to receive sensed oscillation information from the proof-mass and to provide at least a first phase signal synchronized with a sinusoidal waveform of the sensed oscillation information. | 06-09-2016 |
20160169676 | MICROMECHANICAL CORIOLIS RATE OF ROTATION SENSOR | 06-16-2016 |
20160169677 | ROTATION DETECTION SENSOR | 06-16-2016 |
20160178373 | ANGULAR VELOCITY SENSOR | 06-23-2016 |
20160187136 | PHYSICAL-QUANTITY DETECTION CIRCUIT, PHYSICAL-QUANTITY SENSOR, AND ELECTRONIC DEVICE - A physical-quantity sensor is configured to be used with a physical-quantity sensor element that outputs a sensor signal in response to a physical quantity. A physical-quantity detection circuit of the physical-quantity sensor includes a signal generating unit for generating a detecting signal and a multiplier that multiplies the sensor signal by the detecting signal. The signal generating unit converts a first phase of a predetermined signal having a frequency corresponding to a frequency of the sensor signal, into a second phase, and calculates an amplitude value corresponding to the second phase as to generate the detecting signal. This physical-quantity sensor improves accuracy of phase adjustment without increasing a sampling frequency. | 06-30-2016 |
20160187137 | MICROMECHANICAL GYROSCOPE STRUCTURE - A microelectromechanical gyroscope structure, and a method for manufacturing a microelectromechanical gyroscope structure, comprising a seismic mass and a spring structure suspending the seismic mass to a body element with a suspension structure. The spring structure allows a primary oscillation motion about a primary axis that is aligned with the plane of the seismic mass, and a secondary oscillation motion where at least part of the seismic mass moves in a second direction, perpendicular to the direction of the primary oscillation motion. The spring structure is attached to the seismic mass at both sides of the suspension structure and said spring structure is in torsional motion about the primary axis that is common with the primary oscillation motion. The structure of the gyroscope enables mechanical compensation of a quadrature error of the seismic mass by etching a compensation groove on the top face of the seismic mass. | 06-30-2016 |
20160195395 | SENSOR | 07-07-2016 |
20160195396 | MODULE AND ELECTRONIC APPARATUS | 07-07-2016 |
20160202059 | APPROACH FOR CONTROL REDISTRIBUTION OF CORIOLIS VIBRATORY GYROSCOPE (CVG) FOR PERFORMANCE IMPROVEMENT | 07-14-2016 |
20160202060 | HIGH BANDWIDTH CORIOLIS VIBRATORY GYROSCOPE (CVG) WITH IN-SITU BIAS SELF-CALIBRATION | 07-14-2016 |
20160202061 | Method and Circuit For The Time-Continuous Detection Of The Position Of The Sensor Mass With Simultaneous Feedback For Capacitive Sensors | 07-14-2016 |
20160377433 | Vibration-Type Angular Rate Sensor - This vibration-type angular rate sensor corrects a sensor output from a secondary-side control circuit by adding, to a closed control loop of the secondary-side control circuit, an offset value based on the output of a closed control loop of a primary-side control circuit dependent on temperature. | 12-29-2016 |
20160377434 | SYSTEMS AND METHODS FOR A TIME-BASED OPTICAL PICKOFF FOR MEMS SENSORS - Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component. | 12-29-2016 |
20160377435 | VIBRATOR DRIVE CIRCUIT - A vibrator drive circuit is configured to drive a vibrator mass | 12-29-2016 |
20170234684 | YAW RATE GYROSCOPE ROBUST TO LINEAR AND ANGULAR ACCELERATION | 08-17-2017 |
20180023952 | MEMS MASS-SPRING-DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME | 01-25-2018 |
20190145772 | MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY | 05-16-2019 |
20190145773 | A SECONDARY SENSE LOOP WITH FORCE FEEDBACK CAPABILITY | 05-16-2019 |