Class / Patent application number | Description | Number of patent applications / Date published |
073504030 | Multisensor for both angular rate and linear acceleration | 47 |
20080289417 | Sensor for detecting acceleration and angular velocity - Static and dynamic acceleration as well as static and dynamic angular velocity are detected with a simple structure. An acceleration detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoresistive elements embedded in the upper surface of the bridge portions. An angular velocity detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoelectric elements fixed to the upper surface of the bridge portions. The pedestals are fixed to a device chassis. When the weight body is displaced by acceleration, the plate-like bridge portions are deflected, so that the acceleration is detected based on the change in the electrical resistances of the piezoresistive elements. When the weight body is displaced by a Coriolis force based on angular velocity while supplying alternating signals to the piezoelectric elements to oscillate the weight body, the plate-like bridge portions are deflected, so that the angular velocity is detected based on charge generation in the piezoelectric elements. | 11-27-2008 |
20090007661 | Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing And Embedded Digital Electronics - A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate. | 01-08-2009 |
20090013783 | SENSOR DEVICE - The present invention is related to sensor arrangements and particularly to sensor arrangements for symmetric response in a x-, y- and z-coordinate system. The arrangement comprises four gyroscopes with one axis arranged into different directions of sensitivity. | 01-15-2009 |
20090145223 | Method for determining linear acceleration and device for its implementation - The present technical solution for determining linear acceleration, the vector whereof is considered to be at a tangent to a trajectory of movement of a moving object, is based on determining new differences of accelerations. It is considered to be the basis for efficient, accurate, with the threshold of sensitivity equal to zero in small-size option solving the tasks of autonomous navigation, piloting, stabilization and etc. Said solution is irrespective of disturbance factors, in particular, cross-axis and centrifugal accelerations, vibrations, temperature and others, and can be used without any gyroscopes. | 06-11-2009 |
20090178481 | Fault tolerant multidimensional acceleration and/or rotation sensor arrays with minimum numbers of redundant single dimension sensors and associated signal computation means - An inertial system design approach that can sense and tolerate failures of individual single dimensional acceleration and/or rotation sensors with a minimal number of sensors. Sets of 4 single dimensional acceleration and/or rotation sensors can provide full 3 dimensional sensing in spite of a sensor malfunction or failure, and sets of 3 single dimensional acceleration and/or rotation sensors can provide full 2 dimensional sensing in spite of a sensor malfunction or failure. | 07-16-2009 |
20090288485 | High bandwidth inertial measurement unit - An inertial measurement unit is disclosed which includes a system of gyros for sensing angular rates, a system of accelerometers for sensing angular accelerations, an integrator for deriving gyro-less angular rates from the sensed angular accelerations, and a complimentary filter for blending the sensed angular rates and the gyro-less angular rates to produce a virtual angular rate output for the inertial measurement unit. | 11-26-2009 |
20100064804 | MULTIAXIAL ACCELERATION SENSOR AND ANGULAR VELOCITY SENSOR - In a angular rate sensor, a weight and a base are connected directly through piezoelectric bimorph detectors and piezoelectric bimorph exciters each having a bent portion. When acceleration is applied to the weight, the weight is displaced so as to deform the piezoelectric bimorph detectors. Due to this deformation, charges generated in the piezoelectric bimorph detectors are detected so as to detect acceleration. If an angular rate is applied to the weight when the weight is vibrated by the piezoelectric bimorph exciters, Coriolis force is generated in the weight so as to deform the piezoelectric bimorph detectors. Due to this deformation, charges generated in the piezoelectric bimorph detectors are detected so as to detect the angular rate. | 03-18-2010 |
20100154539 | SENSOR DEVICE - An sensor device with high detection accuracy. A time-point measurement unit is provided for measuring time-point information and adding the time-point information to an angular velocity sensing signal and an acceleration sensing signal. The angular velocity sensing signal and the acceleration sensing signal are linked by the time-point information. This structure enables output of the angular velocity sensing signal and the acceleration sensing signal linked by the time-point information. Accordingly, the angular velocity sensing signal can be accurately corrected using the acceleration sensing signal. The detection accuracy of the sensor device thus improves. | 06-24-2010 |
20120042727 | Wind Turbine and Method of Determining at Least One Rotation Parameter of a Wind Turbine Rotor - A method of determining at least one rotation parameter of a wind turbine rotor rotating with a rotation speed and a phase is provided. The method includes: measuring an effective centrifugal force acting in a first pre-determined direction, which is defined in a co-ordinate system rotating synchronously with the rotor, on at least one reference object located in or at the rotor, establishing a first angular frequency representing the rotation speed of the rotor on the basis of variations in the measured effective centrifugal force due to gravitational force, establishing a second angular frequency representing the rotation speed of the rotor by use of at least one yaw rate gyro, and establishing the value of the rotation speed as the rotational parameter by correcting the second angular frequency by comparing it to the first angular frequency. | 02-23-2012 |
20120279300 | INERTIAL UNIT WITH SEVERAL DETECTION AXES - Inertial unit for the measurement of accelerations and/or rotations comprising four sensors, spread out on two intersecting axes, each sensor comprising two inertial masses, each inertial mass comprising a moveable excitation part and a moveable detection part, the moveable excitation parts of a sensor being separate from those of the other sensors, said unit also comprising means for exciting the excitation parts of the sensors and means for detecting the movement of the detection parts, the two inertial masses of each sensor) being mechanically coupled, the four sensors being coupled by elastically deformable mechanical coupling means and able to transmit the excitation vibrations from one axis to the other. | 11-08-2012 |
20120304767 | METHOD, SYSTEM AND DEVICE FOR MONITORING PROTECTIVE HEADGEAR - A sensor module generates sensor data in response to an impact to protective headgear, wherein the sensor module includes an accelerometer and a gyroscope and wherein the sensor data includes linear acceleration data and rotational velocity data. A device processing module generates event data in response to the sensor data. A device interface sends the event data to a monitoring device when the device interface is coupled to the monitoring device. | 12-06-2012 |
20130042681 | METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE, AND MICROMECHANICAL STRUCTURE - A method for manufacturing a micromechanical structure, and a micromechanical structure. The micromechanical structure encompasses a first micromechanical functional layer, made of a first material, that comprises a buried conduit having a first end and a second end; a micromechanical sensor structure having a cap in a second micromechanical functional layer that is disposed above the first micromechanical functional layer; an edge region in the second micromechanical functional layer, such that the edge region surrounds the sensor structure and defines an inner side containing the sensor structure and an outer side facing away from the sensor structure; such that the first end is located on the outer side and the second end on the inner side. | 02-21-2013 |
20130133422 | Inertial Sensor - In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part ( | 05-30-2013 |
20130247662 | HIGH-PERFORMANCE BENDING ACCELEROMETER - An accelerometer comprises an elastic substrate beam having a first end and a second end and having upper and lower surfaces; supports to support the first and second ends of the substrate beam; sensing elements comprising piezoelectric material bonded onto the upper, lower or both the upper and lower surfaces of the substrate beam; and force applying elements for applying forces at two locations between the first and second ends. The substrate beam and the piezoelectric materials operate in a four-point bending configuration. Optionally the first and second ends of the substrate beam are formed by bending the substrate beam to reduce the physical dimensions of the device. | 09-26-2013 |
20140060184 | MICRO/NANO MULTIAXIAL INERTIAL SENSOR OF MOVEMENTS - The multiaxial inertial sensor of movements is a micro/nano sensor that makes it possible to couple at least one accelerometer with other structures, either accelerometers or gyroscopes, by an oscillating disk structure. The oscillating disk also forms an inertial sensor such as a gyrometer. This single-chip structure associating both gyroscopes and accelerometers makes it possible to achieve detections and measurements in up to 6 axes, in other words 3 accelerometer axes and 3 gyroscope axes, and to exert control by a single and unique electronic unit, thus permitting a single automatic control loop in excitation and a single electronic reading chip. | 03-06-2014 |
20140373626 | INERTIAL FORCE SENSOR - An inertial force sensor includes a detector element, a supporting body supporting the detector element, and a case holding the detector element via the first supporting body. The supporting body has flexibility and has a plate shape. The detector element includes a weight, a flexible coupling portion extending along a plane and supporting the weight, a fixing portion holding the weight via the coupling portion, and a detector detecting angular velocities about at least two axes non-parallel to each other. The supporting body extends in parallel with the plane from the detector element, and bends at a bending portion in a direction away from the plane. This inertial force sensor can detect the angular velocities while preventing erroneous detection caused by external impacts and vibrations. | 12-25-2014 |
073504040 | Vibratory mass | 31 |
20080202237 | Sensor And Method For Sensing The Linear Acceleration And An Angular Velocity - A sensor has a suspended mechanical resonator being responsive to one of a linear acceleration and an angular velocity of the sensor such that a first area and a second area are subjected to opposite elongation movements and responsive to the other such that the first area and the second area are subjected to a common elongation movement, a first mechanical-electrical interface interacting with the first area, a second mechanical-electrical interface interacting with the second area, a common mode signal generator coupled to the mechanical-electrical interfaces with a common mode signal output, a differential mode signal generator coupled to the mechanical-electrical interfaces with a differential mode signal output, a first processing circuit coupled to the differential mode output, with an output for a first processed signal, and a second processing circuit coupled to the common mode output with an output for a second processed signal. | 08-28-2008 |
20080276706 | Rotation Speed Sensor - Disclosed is a rotational rate sensor with a substrate, at least one basic element ( | 11-13-2008 |
20080276707 | MEMS TUNING FORK GYRO SENSITIVE TO RATE OF ROTATION ABOUT TWO AXES - A two-axes rate sensing MEMS system. The system includes two proof masses, two drive components, two drive sense components, two orthogonal sets of substrate electrodes, and a processing device. The processing device is in signal communication with the two proof masses, the two sense components, or the two sets of substrate electrodes. The processing device determines the rate of rotation about two orthogonal axes based on signals received from the two proof masses, the two sense components, or the two substrate electrodes. Rotation about one axis will induce proofmass motion in the plane of the substrate. Rotation about an orthogonal axis will induce proofmass motion out-of-plane of the proofmasses. The sensing scheme independently detects these proof mass motion, which can infer rate of rotation. | 11-13-2008 |
20090019933 | COMBINED ACCELEROMETER AND GYROSCOPE SYSTEM - An embodiment of the present invention relates to a combined accelerometer and gyroscope system. The combined accelerometer and gyroscope system includes a combined accelerometer and gyroscope for maintaining vibration of a mass body at a constant amplitude using an applied drive voltage, and detecting vibration signals in directions of an acceleration axis and an angular velocity axis. An acceleration axis vibration signal obtainment unit obtains the vibration signal in the direction of the acceleration axis. An amplitude maintenance control unit outputs an acceleration axis vibration maintenance control signal using the vibration signal. An acceleration axis driving input unit receives a voltage signal from the amplitude maintenance control unit and applies the voltage signal to the combined accelerometer and gyroscope. An angular velocity axis vibration signal obtainment unit obtains the vibration signal in the direction of the angular velocity axis. A force balance control unit outputs an angular velocity axis vibration maintenance control signal using the vibration signal received from the angular velocity axis vibration signal obtainment unit. An angular velocity axis driving input unit receives a voltage signal received from the force balance control unit and applies the voltage signal to the combined accelerometer and gyroscope. | 01-22-2009 |
20090100929 | COMPOSITE SENSOR - A composite sensor includes an external holding portion | 04-23-2009 |
20090165553 | Vibrating micromechanical sensor of angular velocity - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 07-02-2009 |
20090183568 | INERTIAL SENSOR - An angular rate sensor and an acceleration sensor are sealed at the same sealing pressure. The sealing pressure at this time is put into a reduced pressure state below the atmospheric pressure in view of improving a detection sensitivity of the angular rate sensor. Even in the reduced pressure atmosphere, to improve the detection sensitivity of the acceleration sensor, a shift suppressing portion (damper) for suppressing shifts of a movable body of the acceleration sensor is provided. This shift suppressing portion includes a plurality of protruding portions integrally formed with the movable body and a plurality of protruding portions integrally formed with a peripheral portion, and the protruding portions are alternately disposed separately at equal intervals. | 07-23-2009 |
20090308157 | INTEGRATED INERTIAL MEASUREMENT SYSTEM AND METHODS OF CONSTRUCTING THE SAME - An inertial measurement system having a triangular cupola shaped base structure with three mutually orthogonal sides and a bottom surface surrounding a hollow core. The bottom surface includes an aperture providing access to the hollow core. An inertial module is mounted on each of the sides and includes a gyroscopic rotational rate sensor and a linear accelerometer connected to a circuit board. The inertial measurement system also includes a motherboard and a plurality of metallization elements. The metallization elements extend from the bottom surface to the sides of the base structure and conductively connect the inertial module to the motherboard. The inertial measurement system may also include a non-conductive adhesive underfill positioned between the inertial module and the base structure. | 12-17-2009 |
20090314083 | INERTIAL MEASUREMENT UNIT WITH ENHANCED ACCELERATION WITHSTAND CAPABILITY - The present invention relates to an inertial measurement unit with enhanced resistance to acceleration, and it is characterized in that it comprises at least five accelerometers (Acc | 12-24-2009 |
20100037690 | Rotational Speed Sensor Having A Coupling Bar - A rotational speed sensor including at least one substrate, at least two base elements which each have a frame, a means for suspending the frame from the substrate, at least one seismic mass and one means for suspending the seismic mass from the frame. One or more drive means are provided for driving one or more base elements and one or more reading devices. The at least two base elements are coupled to one another by means of at least one coupling bar. | 02-18-2010 |
20100095768 | Micromachined torsional gyroscope with anti-phase linear sense transduction - Micromachined gyroscope having a pair of masses disposed generally in a plane and driven for out-of-plane torsional oscillation about a pair of drive axes in the plane for sensing rotation about an input axis perpendicular to the drive axes. The masses are mounted for in-plane torsional movement about sense axes perpendicular to the drive axes and the input axis in response to Coriolis forces produced by rotation of the masses about the input axis. A link connects the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes. The masses are connected to transducers having input electrodes constrained for linear in-plane movement relative to stationary electrodes, with that torsional movement of the masses about the sense axes producing changes in capacitance between the input electrodes and the stationary electrodes. | 04-22-2010 |
20100126269 | MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES - An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis. | 05-27-2010 |
20100257933 | MULTI-AXIAL LINEAR AND ROTATIONAL DISPLACEMENT SENSOR - A MEMS multiaxial inertial sensor of angular and linear displacements, velocities or accelerations has four comb drive capacitive sensing elements ( | 10-14-2010 |
20120204640 | ELECTRONIC WATCH - Provided is an electronic watch capable of, even if an indicating hand having a large moment of inertia is used, accurately determining success and failure of rotation. The electronic watch detects rotation by using a first detection mode determination circuit ( | 08-16-2012 |
20120312094 | ANGULAR SPEED SENSOR AND COMPOSITE SENSOR FOR DETECTING ANGULAR SPEED AND ACCELERATION - A placing member ( | 12-13-2012 |
20130031977 | MICRO-GYROSCOPE FOR DETECTING MOTIONS - The invention relates to a micro-gyroscope for detecting motions relative to an X and/or Y and Z axis, particularly as a 3D, 5D, or 6D sensor. Sample masses are disposed uniformly about an anchor and can be driven radially relative to the central anchor. Anchor springs are disposed to attach the sample masses to a substrate, and these sample masses can be deflected both radially within and out of the X-Y plane. A sensor mass is disposed on one of the sample masses by means of sensor springs, and the sensor springs allow deflection of the sensor mass within the plane of the sample mass, and orthogonal to the radial drive direction of the sample masses. Drive elements oscillate these sample masses in the X-Y plane, and sensor elements captures the defection of the sample masses due to the Coriolis forces generated when the substrate is rotated. | 02-07-2013 |
20130125649 | MICROELECTROMECHANICAL DEVICE INCORPORATING A GYROSCOPE AND AN ACCELEROMETER - A microelectromechanical device includes: a supporting structure; two sensing masses, movable with respect to the supporting structure according to a first axis and a respective second axis; a driving device for maintaining the sensing masses in oscillation along the first axis in phase opposition; sensing units for supplying sensing signals indicative of displacements respectively of the sensing masses according to the respective second axis; processing components for combining the sensing signals so as to: in a first sensing mode, amplify effects on the sensing signals of concordant displacements and attenuate effects of discordant displacements of the sensing masses; and in a second sensing mode, amplify effects on the sensing signals of discordant displacements and attenuate effects of concordant displacements of the sensing masses. | 05-23-2013 |
20130152682 | ANGULAR VELOCITY DETECTING DEVICE - A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained. | 06-20-2013 |
20130312517 | Combined Sensor - An object of the invention is to provide a combined sensor capable of suppressing the influence of electrostatic force generated by a potential difference and preventing a reduction in the S/N ratio or a variation in the sensitivity of a sensor. | 11-28-2013 |
20140026657 | INERTIAL FORCE SENSOR - An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes. | 01-30-2014 |
20140174179 | INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME - Disclosed herein is an inertial sensor, including: a structural part for an accelerator sensor disposed on one surface, centered on a common post; and a structural part for an angular velocity sensor disposed on the other surface, centered on the common post, wherein a piezoresistor of the structural part for the accelerator sensor and a piezoelectric material of the structural part for the angular velocity sensor are formed on different surfaces. | 06-26-2014 |
20140352431 | MULTIAXIAL MICRO-ELECTRONIC INERTIAL SENSOR - A resonator micro-electronic inertial sensor, preferably a micro-electromechanical system (MEMS) sensor (e.g. a gyro), for detecting linear accelerations and rotation rates in more than one axis comprises: a proof-mass system ( | 12-04-2014 |
20150027226 | REAL-TIME AIRCRAFT STATUS DETECTION SYSTEM AND METHOD - A low power method for determining whether a cargo destined for air transport is in a flying state having the steps of: providing a housing for attachment to a cargo the housing having: an accelerometer for detecting a linear acceleration, a gyroscope for detecting an angular rate, a controller measuring a linear acceleration with the accelerometer, measuring an angular rate with the gyroscope, providing the measured linear acceleration and angular rate to the controller, and generating a flight status output signal indicating whether the housing is in a flying state as a function of the linear acceleration signal and angular rate signal. | 01-29-2015 |
20150040663 | VIBRATORY RING STRUCTURE - A vibratory ring structure is described which comprises a ring body and at least one ring electrode secured thereto, the or each ring electrode extending over a first angular extent and: being attached to the ring body over second angular extent, wherein the first angular extent is greater than the second angular extent. | 02-12-2015 |
20150128700 | VIBRATION-RESISTANT ROTATION RATE SENSOR - A rotation rate sensor includes a substrate having a main extension plane and multiple seismic masses, in which for each seismic mass the following applies: the seismic mass is drivable at a drive oscillation, which occurs along a drive direction situated parallel to the main extension plane, the seismic mass is deflectable along two different deflection directions, each direction being perpendicular to the drive direction, the rotation rate sensor being configured to generate detection signals as a function of detected deflections of the seismic masses, one detection signal of the detection signals being associated with each deflection direction of the seismic masses, the rotation rate sensor being configured so that a linear, rotational and centrifugal acceleration of the rotation rate sensor are compensated with respect to at least one rotation axis of the rotation rate sensor through compensation in each case of two corresponding detection signals of the detection signals. | 05-14-2015 |
20160003617 | Method for Detecting Accelerations and Rotation Rates, and MEMS Sensor - The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor ( | 01-07-2016 |
20160091528 | MICROELECTROMECHANICAL DEVICE INCORPORATING A GYROSCOPE AND AN ACCELEROMETER - A microelectromechanical device includes: a supporting structure; two sensing masses, movable with respect to the supporting structure according to a first axis and a respective second axis; a driving device for maintaining the sensing masses in oscillation along the first axis in phase opposition; sensing units for supplying sensing signals indicative of displacements respectively of the sensing masses according to the respective second axis; processing components for combining the sensing signals so as to: in a first sensing mode, amplify effects on the sensing signals of concordant displacements and attenuate effects of discordant displacements of the sensing masses; and in a second sensing mode, amplify effects on the sensing signals of discordant displacements and attenuate effects of concordant displacements of the sensing masses. | 03-31-2016 |
20160131480 | Time Multiplexed Electrodes in MEMS Inertial Sensors - In certain exemplary embodiments of the present invention, rather than having two or more electrodes connected to separate bond pads for making electrical connections to separate electrical circuits to perform various electrode functions (e.g., a drive electrode for performing a drive function and a sense electrode for performing a sense function as in FIG. | 05-12-2016 |
20160169675 | Sensor Device, Electronic Apparatus, and Moving Object | 06-16-2016 |
20160178374 | MICRO-GYROSCOPE FOR DETECTING MOTIONS | 06-23-2016 |
20160195394 | PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS AND MOVING OBJECT | 07-07-2016 |