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Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor

Subclass of: 117 - Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor

Deeper subclasses:

117001000 - PROCESSES JOINING INDEPENDENT CRYSTALS (2)
117002000 - PROCESSES OF GROWTH WITH A SUBSEQUENT STEP ACTING ON THE CRYSTAL TO ADJUST THE IMPURITY AMOUNT (E.G., DIFFUSING, DOPING, GETTERING, IMPLANTING) (5)
117003000 - PROCESSES OF GROWTH WITH A SUBSEQUENT STEP OF HEAT TREATING OR DELIBERATE CONTROLLED COOLING OF THE SINGLE-CRYSTAL (12)
117004000 - PROCESSES OF GROWTH FROM SOLID OR GEL STATE (E.G., SOLID PHASE RECRYSTALLIZATION) (6)
117011000 - PROCESSES OF GROWTH FROM LIQUID OR SUPERCRITICAL STATE (77)
117084000 - FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) (38)
117200000 - APPARATUS (33)