GLOUCESTER, MA, US - Patent application

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GLOUCESTER, MA US

1. 20110039367 MASKED ION IMPLANT WITH FAST-SLOW SCAN - improved method of producing solar cells utilizes a mask which is fixed relative to an ion beam in an ion 02-17-2011
2. 20110036990 PLATEN TO CONTROL CHARGE ACCUMULATION - embossed platen to control charge accumulation includes a dielectric layer a plurality of embossments on a 02-17-2011
3. 20110034014 COLD IMPLANT FOR OPTIMIZED SILICIDE FORMATION 02-10-2011
4. 20110034013 Low Temperature Ion Implantation - method of processing to a substrate while minimizing cost and manufacturing time is disclosed 02-10-2011
5. 20110033998 OPTIMIZED HALO OR POCKET COLD IMPLANTS - improved method of performing pocket or halo implants is disclosed 02-10-2011
6. 20110031408 MASK HEALTH MONITOR USING A FARADAY PROBE 02-10-2011
7. 20110027463 WORKPIECE HANDLING SYSTEM - includes a process chamber configured to support a workpiece for ion implantation 02-03-2011
8. 20110003024 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET 01-06-2011
9. 20110000896 SYSTEM AND METHOD FOR SELECTIVELY CONTROLLING ION COMPOSITION OF ION SOURCES 01-06-2011
10. 20100327159 Ion Source Cleaning End Point Detection - ion implanter, a Faraday cup is utilized to receive an ion beam generated during ion source cleaning 12-30-2010
11. 20100314559 IMPLANT MASK WITH MOVEABLE MASK SEGMENTS 12-16-2010
12. 20100308236 MASKING APPARATUS FOR AN ION IMPLANTER - masking apparatus includes a mask positioned upstream of a target positioned for treatment with ions 12-09-2010
13. 20100297782 TECHNIQUES FOR PROCESSING A SUBSTRATE - Herein, an improved technique for processing a substrate is disclosed 11-25-2010
14. 20100279479 Formation Of Raised Source/Drain On A Strained Thin Film Implanted With Cold And/Or Molecular Carbon 11-04-2010
15. 20100273322 METHOD OF PROCESSING A SUBSTRATE HAVING A NON-PLANAR SURFACE 10-28-2010
16. 20100260943 DUAL SIDED WORKPIECE HANDLING - method includes positioning at least one dual sided workpiece on an assembly in a process chamber to expose a first side 10-14-2010
17. 20100255683 PLASMA PROCESSING APPARATUS - includes a process chamber a platen positioned in the process chamber for supporting a workpiece 10-07-2010
18. 20100252746 END TERMINATIONS FOR ELECTRODES USED IN ION IMPLANTATION SYSTEMS 10-07-2010
19. 20100240201 IMPLANTATION OF MULTIPLE SPECIES TO ADDRESS COPPER RELIABILITY 09-23-2010
20. 20100221142 REMOVAL OF A SHEET FROM A PRODUCTION APPARATUS 09-02-2010
21. 20100197126 USE OF CHAINED IMPLANTS IN SOLAR CELL - The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, 08-05-2010
22. 20100197125 TECHNIQUE FOR PROCESSING A SUBSTRATE - improved technique for processing a substrate is disclosed 08-05-2010
23. 20100184243 MASK APPLIED TO A WORKPIECE - method of fabricating a workpiece is disclosed 07-22-2010
24. 20100159120 PLASMA ION PROCESS UNIFORMITY MONITOR - ion uniformity monitoring device is positioned within a plasma process chamber and includes a plurality of 06-24-2010
25. 20100155909 METHOD TO ENHANCE CHARGE TRAPPING - Methods of improving charge trapping are disclosed 06-24-2010
26. 20100155898 METHOD FOR ENHANCING TENSILE STRESS AND SOURCE/DRAIN ACTIVIATION USING Si:C 06-24-2010
27. 20100155619 DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY 06-24-2010
28. 20100155600 METHOD AND APPARATUS FOR PLASMA DOSE MEASUREMENT 06-24-2010
29. 20100155593 TIME-OF-FLIGHT SEGMENTED FARADAY - This measurement device is used to determine energy for charged particles 06-24-2010
30. 20100148088 TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE 06-17-2010
31. 20100140495 CATHODE HAVING ELECTRON PRODUCTION AND FOCUSING GROVES, ION SOURCE AND RELATED METHOD 06-10-2010
32. 20100124799 TECHNIQUE FOR MANUFACTURING A SOLAR CELL 05-20-2010
33. 20100090131 METHOD OF DETERMINING ANGLE MISALIGNMENT IN BEAM LINE ION IMPLANTERS 04-15-2010
34. 20100084582 METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN ION IMPLANTER 04-08-2010
35. 20100080905 SOLUTE STABILIZATION OF SHEETS FORMED FROM A MELT 04-01-2010
36. 20100050686 MELT PURIFICATION AND DELIVERY SYSTEM - apparatus to purify a melt is disclosed 03-04-2010
37. 20100041219 USJ TECHNIQUES WITH HELIUM-TREATED SUBSTRATES 02-18-2010
38. 20100041176 PATTERNED ASSEMBLY FOR MANUFACTURING A SOLAR CELL AND A METHOD THEREOF 02-18-2010
39. 20100038826 SHEET THICKNESS CONTROL - method and apparatus for forming a sheet are disclosed 02-18-2010
40. 20100025596 FASTENING APPARATUS - One embodiment of this fastening apparatus comprises a body with a passage through its length a threaded member 02-04-2010
41. 20100024841 Ion Source and a Method for In-Situ Cleaning Thereof 02-04-2010
42. 20100024726 FASTENING APPARATUS - One embodiment of this fastening apparatus comprises a cap with a passage through the length of the cap 02-04-2010
43. 20100019141 ENERGY CONTAMINATION MONITOR WITH NEUTRAL CURRENT DETECTION 01-28-2010
44. 20090324849 METHOD FOR SEALING PORES IN A POROUS SUBSTRATE 12-31-2009
45. 20090317964 PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A METHOD THEREOF 12-24-2009
46. 20090315220 MELT PURIFICATION AND DELIVERY SYSTEM - apparatus to pump a melt is disclosed 12-24-2009
47. 20090314962 METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN ION IMPLANTER 12-24-2009
48. 20090314951 ION SOURCE CLEANING METHOD AND APPARATUS 12-24-2009
49. 20090302281 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET 12-10-2009
50. 20090289197 GAS DELIVERY SYSTEM FOR AN ION SOURCE - ion source has an arc chamber with an electron-emitting element and a repeller 11-26-2009
51. 20090283670 Technique for Monitoring and Controlling A PLasma Process 11-19-2009
52. 20090233396 FLOATING SHEET PRODUCTION APPARATUS AND METHOD 09-17-2009
53. 20090232981 COOLED CLEAVING IMPLANT - substrate is implanted with a species to form a layer of microbubbles in the substrate 09-17-2009
54. 20090231597 FLOATING SHEET MEASUREMENT APPARATUS AND METHOD 09-17-2009
55. 20090211958 DOMESTIC AQUAPONIC RECREATION SYSTEM DARS2007 08-27-2009
56. 20090209084 CLEAVE INITIATION USING VARYING ION IMPLANT DOSE 08-20-2009
57. 20090206273 APPARATUS FOR MEASURING BEAM CHARACTERISTICS AND A METHOD THEREOF 08-20-2009
58. 20090181492 NANO-CLEAVE A THIN-FILM OF SILICON FOR SOLAR CELL FABRICATION 07-16-2009
59. 20090162970 MATERIAL MODIFICATION IN SOLAR CELL FABRICATION WITH ION DOPING 06-25-2009
60. 20090162953 PREDICTING DOSE REPEATABILITY IN AN ION IMPLANTATION 06-25-2009
61. 20090140166 TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION 06-04-2009
62. 20090137106 USING ION IMPLANTATION TO CONTROL TRENCH DEPTH AND ALTER OPTICAL PROPERTIES OF A SUBSTRATE 05-28-2009
63. 20090124066 PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS 05-14-2009
64. 20090124065 PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS 05-14-2009
65. 20090124064 PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS 05-14-2009
66. 20090122458 EMBOSSED ELECTROSTATIC CHUCK - electrostatic chuck includes a layer having a plurality of protrusions to support a workpiece 05-14-2009
67. 20090117735 IMPLANTATION OF MULTIPLE SPECIES TO ADDRESS COPPER RELIABILITY 05-07-2009
68. 20090101848 LOCAL PRESSURE SENSING IN A PLASMA PROCESSING SYSTEM 04-23-2009
69. 20090084988 SINGLE WAFER IMPLANTER FOR SILICON-ON-INSULATOR WAFER FABRICATION 04-02-2009
70. 20090084987 CHARGE NEUTRALIZATION IN A PLASMA PROCESSING APPARATUS 04-02-2009
71. 20090084757 UNIFORMITY CONTROL FOR ION BEAM ASSISTED ETCHING 04-02-2009
72. 20090081848 WAFER BONDING ACTIVATED BY ION IMPLANTATION 03-26-2009
73. 20090078871 OUTGASSING RATE DETECTION - workpiece processing system includes a platen configured to support a workpiece a source configured to provide an 03-26-2009
74. 20090061605 PROFILE ADJUSTMENT IN PLASMA ION IMPLANTER 03-05-2009
75. 20090050825 Sealing between vacuum chambers - sealing system is disclosed 02-26-2009
76. 20090050347 INSULATED CONDUCTING DEVICE WITH MULTIPLE INSULATION SEGMENTS 02-26-2009
77. 20090047801 INTERFACING TWO INSULATION PARTS IN HIGH VOLTAGE ENVIRONMENT 02-19-2009
78. 20090001890 Apparatus for Plasma Processing a Substrate and a Method Thereof 01-01-2009
79. 20090001281 CATHODE HAVING ELECTRON PRODUCTION AND FOCUSING GROOVES, ION SOURCE AND RELATED METHOD 01-01-2009
80. 20080318345 PLASMA ION IMPLANTATION PROCESS CONTROL USING REFLECTOMETRY 12-25-2008
81. 20080317968 TILTED PLASMA DOPING - plasma doping apparatus includes a chamber and a plasma source that generates ions in the chamber from a dopant gas 12-25-2008
82. 20080315114 HIGH VOLTAGE INSULATOR FOR PREVENTING INSTABILITY IN AN ION IMPLANTER DUE TO TRIPLE-JUNCTION BREAKDOWN 12-25-2008
83. 20080274249 Nutritious corn / nutritious popcorn, nutritious peas, nutritious beans, nutritious lentils, nutritious rice, nutritious barley, nutritious oats, nutritious wheat 11-06-2008
84. 20080245957 TUNING AN ION IMPLANTER FOR OPTIMAL PERFORMANCE 10-09-2008
85. 20080239614 ELECTROSTATIC CHUCK WITH SEPARATED ELECTRODES 10-02-2008
86. 20080238326 ION ACCELERATION COLUMN CONNECTION MECHANISM WITH INTEGRATED SHIELDING ELECTRODE AND RELATED METHODS 10-02-2008
87. 20080230724 Contamination reduction during ion implantation 09-25-2008
88. 20080218772 WAFER HOLDING ROBOT END EFFECTER VERTICAL POSITION DETERMINATION IN ION IMPLANTER SYSTEM 09-11-2008