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Youtec Co., Ltd.
| Youtec Co., Ltd. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100022097 | VAPORIZER, SEMICONDUCTOR PRODUCTION APPARATUS AND PROCESS OF SEMICONDUCTOR PRODUCTION - A vaporizer, a semiconductor production apparatus and process capable of improving the efficiency in the use of a raw material gas noticeably, enabling uniform deposition according to the raw material gas used, diminishing maintenance frequency to improve productivity. At the time of ALD operation, carrier gas continues to be supplied to a reaction chamber | 01-28-2010 |