| 20100070077 | Programmed calibration and mechanical impulse response application iin robotic automation systems - The present invention describes a system and method for monitoring robotic arm drift in an automatic real-time continuous fashion, having a controller, memory, servo motor with encoder, robotic arm manipulator linkages, position decoder and counter logic for each link, software instructions as logic stored in memory for enabling the robot, under control of the controller for receiving proximity sensor data from at least one set of marker and link mounted sensor pair, storing proximity sensor data from pair in the memory, comparing the pair position with previous samples, and raising an alert signal where the pair disparity exceeds a pre-set limit. The sensor set disparity over time plots the mechanical drift which is continuously monitored in real-time during normal work operation and addressed in real-time. Catching drift from impulse loads is done through measurement and analysis of impact loads through a 3D accelerometer on or near the arm end-effector, performing a component decoupling of the acceleration data into the three orthogonal dimensions, and determining forces from accelerometer data for each component dimension and response from or affect on wafer payload. | 03-18-2010 |
