| XYCARB CERAMICS B.V, Patent applications |
| Patent application number | Title | Published |
|---|
| 20110056436 | A DEVICE FOR LAYERED DEPOSITION OF VARIOUS MATERIALS ON A SEMICONDUCTOR SUBSTRATE, AS WELL AS A LIFT PIN FOR USE IN SUCH A DEVICE - The invention relates to a deposition device for comprising a processing space with a substrate support disposed therein, as well as several lift pins ( | 03-10-2011 |
| 20100212595 | Support Assembly For Substrate Holder, As Well As A Device Provided With Such A Support Assembly For Layered Deposition Of Various Semiconductor Materials On A Semiconductor Substrate - The invention relates to a support assembly for a substrate holder on which a semiconductor substrate is to be placed for layered deposition of various semiconductor materials on the semiconductor substrate, said support assembly comprising: at least one vertically disposed, rotatably drivable support shaft, as well as a substrate holder support supporting the substrate holder, which is to be placed on the free end of said support shaft, as well as fixation means are arranged for fixing the support shaft and the substrate holder support in position relative to each other. | 08-26-2010 |
| 20090272318 | Device for supporting a substrate, as well as a method for manufacturing such a device - The invention to a device ( | 11-05-2009 |
