20120319321 | METHOD FOR MANUFACTURING RETAINER RING OF CHEMICAL MECHANICAL POLISHING DEVICE - Disclosed herein is a method of manufacturing a retainer ring for a chemical mechanical polishing device. Insert pins are coupled to an insert ring member. The insert ring member is thereafter disposed in a mold such that a space is defined around the insert ring member in the mold. Subsequently, molten shell material is injected into the mold to form a shell member. Thereby, the retainer ring is manufactured, having a structure such that the insert ring member is completely covered with the shell member. | 12-20-2012 |