| VTI TECHNOLOGIES OY Patent applications |
| Patent application number | Title | Published |
|---|
| 20120119312 | METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL COMPONENT; AND A MICROELECTROMECHANICAL COMPONENT - The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises a microelectromechanical chip part, sealed by means of a cover part, and an electronic circuit part, suitably bonded to each other. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions. | 05-17-2012 |
| 20120118062 | METHOD FOR THE PRECISE MEASURING OPERATION OF A MICROMECHANICAL ROTATION RATE SENSOR - A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (U | 05-17-2012 |
| 20120091854 | MICROMECHANICAL RESONATOR - The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions. | 04-19-2012 |
| 20120085168 | VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 04-12-2012 |
| 20120085167 | VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 04-12-2012 |
| 20110210800 | MICROMECHANICAL RESONATOR - The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element. | 09-01-2011 |
| 20110184693 | METHOD AND DEVICE FOR MEASURING THE PROGRESS OF A MOVING PERSON - Embodiments of the invention provide a method and a device for measuring the progress of a moving person. The method calculating at least one of the following quantities describing the progress of the moving person: speed, step rate, step count, step length, distance and way of progress, based on values of a vertical acceleration of a body of the moving person measured by an acceleration sensor over a measured time. | 07-28-2011 |
| 20100222998 | MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY - The invention presents a micro-mechanical resonator, comprising two masses coupled in the direction of a common axis by a spring structure such, that the spring structure comprises a spring that couples at least a first bar connected to the masses and a second bar extending in the motion axis direction, said spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis. The invention also relates to a micro-mechanical resonator matrix, a sensor and a navigation device. | 09-02-2010 |
| 20100218605 | VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures ( | 09-02-2010 |
