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VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH
| VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100085582 | APPARATUS AND METHOD FOR THE DETERMINATION OF THE POSITION OF A DISK-SHAPED OBJECT - The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer ( | 04-08-2010 |
| 20090309285 | Device for holding disk-shaped objects - A device for holding disk-shaped objects, particularly semiconductor wafers, having at least three contact elements for depositing and/or fixing the disk-shaped object at its outer edge area. The contact elements are designed such that they have an incline facing the object and a supporting surface. | 12-17-2009 |
| 20080203636 | Apparatus for holding disk-like objects - An apparatus for holding disk-like objects, in particular semiconductor wafers ( | 08-28-2008 |
| 20080202201 | DEVICE AND METHOD FOR AUTOMATIC DETECTION OF INCORRECT MEASUREMENTS BY MEANS OF QUALITY FACTORS - What is disclosed is a device ( | 08-28-2008 |