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VISTEC LITHOGRAPHY INC.
| VISTEC LITHOGRAPHY INC. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100264335 | PATTERN WRITING ON A ROTATING SUBSTRATE - A method of producing an array of islands ( | 10-21-2010 |
| 20100102196 | APPARATUS SUPPORT - An apparatus support ( | 04-29-2010 |
| 20100096567 | REDUCTION IN STAGE MOVEMENT REACTION FORCE IN AN ELECTRON BEAM LITHOGRAPHY MACHINE - An electron beam lithography machine ( | 04-22-2010 |
| 20100044546 | APPARATUS SUPPORT STRUCTURE - An apparatus support structure ( | 02-25-2010 |
| 20090231594 | COMPONENT MOUNTING IN MOVEMENT-SENSITIVE EQUIPMENT - Movement-sensitive equipment ( | 09-17-2009 |