| VAT HOLDING AG Patent applications |
| Patent application number | Title | Published |
|---|
| 20110186762 | FLAP TRANSFER VALVE WITH PIVOTABLE VALVE CLOSURE BEAM - A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated valve closure beam, having a second sealing surface which corresponds to the first sealing surface, can be brought into gas-tight contact with it, and is located on a second sealing plane. A support is arranged on the rear face of the valve closure beam, which is arranged such that it can pivot through a limited pivoting angle about a tilting axis. The support together with the valve closure beam can pivot about a pivoting axis, which lies on the first sealing plane, and the tilting axis lies on the second sealing plane. | 08-04-2011 |
| 20110175011 | VACUUM VALVE - A vacuum valve including a wall ( | 07-21-2011 |
| 20110168937 | VACUUM VALVE WITH GAS-TIGHT SHAFT PENETRATION - The invention relates to a vacuum valve for interrupting, releasing or controlling a flowing medium in the interior ( | 07-14-2011 |
| 20110140019 | VACUUM VALVE - For a vacuum valve comprising a valve housing ( | 06-16-2011 |
| 20110108750 | MOUNTING OF A VALVE PLATE ON A VALVE ROD - A mounting of a valve plate ( | 05-12-2011 |
| 20110095220 | FLAP TRANSFER VALVE WITH PIVOTING BEARING - A flap transfer valve is disclosed. An elongated first opening can be closed by an elongated valve closure beam, which can be pivoted via a pivoting bearing between a closed and open position. A shaft can be rotated by a drive and is operatively connected to the valve closure beam such that rotation of the shaft causes the valve closure beam to pivot. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. First arms are arranged on the shaft to provide a force to the rear face of the valve closure beam to pivot the valve closure beam. According to one development of the invention, the valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing, wherein the shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing. | 04-28-2011 |
| 20110095219 | FLAP TRANSFER VALVE WITH VALVE COVER - A flap transfer valve is disclosed. An elongated first opening can be closed by an elongated valve closure beam between a closed position and an open position. A shaft can be rotated about a shaft axis by a drive and is operatively connected to the valve closure beam to cause the valve closure beam to pivot. The valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing. The shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. | 04-28-2011 |
| 20110095218 | CLOSING UNIT FOR A VACUUM VALVE - A closing unit for a vacuum valve includes a first valve plate ( | 04-28-2011 |
| 20110057136 | SLIDING VALVE - A sliding valve including a valve body ( | 03-10-2011 |
| 20100219362 | VACUUM VALVE - For a vacuum valve including a wall ( | 09-02-2010 |
| 20100116349 | METHOD FOR CONTROLLING OR REGULATING A VACUUM VALVE - A method for controlling or regulating a vacuum valve that includes a valve body ( | 05-13-2010 |
| 20100108151 | METHOD FOR CONTROLLING OR REGULATING A VACUUM VALVE - A method for controlling or regulating a vacuum valve that includes: a valve body ( | 05-06-2010 |
| 20100012878 | VACUUM VALVE AND CLOSURE PLATE FOR A VACUUM VALVE - The invention relates to a vacuum valve for gas-tight sealing of a flow path, comprising at least one thrust rod, which has a cylindrical connecting section, and a closure plate which is removably mounted on the thrust rod and has at least one concave, semicircular first rod recess corresponding to the connecting section. A clamping piece, which has a concave, semicircular second rod recess corresponding to the connecting section, is adjustably mounted by means of a mechanical fixing element on the closure plate in such a way that the semicircular first rod recess and the opposite semicircular second rod recess define a cylindrical holding region which is adjustable in width and in which the cylindrical connecting section is detachably held. | 01-21-2010 |
| 20080302989 | VACUUM GATE VALVE HAVING A LIMB ELEMENT - The invention relates to a vacuum gate valve comprising a closure disk for gas-tight closing of an opening by displacement over the opening and pressing of the closure disk onto the opening. A connecting rod with which the closure disk is coupled is linearly adjustable by means of a linear drive unit and the closure disk is thus displaceable between a position uncovering the opening and an intermediate position in which said disk is pushed over the opening. For pressing the closure disk with its closing side onto the valve seat into the closed position by means of an engagement element, at least two limbs are pivotably mounted at one limb end on the back of the closure disk via a first joint and at the other limb end on a support via a second joint. The limbs, the back and the support form an articulated parallelogram. Each of the limbs forms, with the respective first and second joints, a common integral part which consists of a resilient material, the first joint and the second joint being formed in each case by a thin-walled, flexible section on the limb. | 12-11-2008 |
