| 20110253794 | METHOD FOR MANUFACTURING A COMPONENT BY ETCHING - A method for manufacturing a component by etching, the component including a substrate and an electrically conductive line configuration supported by the substrate, the electrically conductive line configuration being formed by etching away locally an electrically conductive coating supported by the substrate. An etching mask is used to control locally removal and maintenance of the electrically conductive coating by using an etchant and it includes barrier material on at least one main area corresponding to the electrically conductive line configuration to be maintained during etching The etching mask further includes at least one sub-area comprising barrier material, the sub-area being arranged at a distance from the edge of the main area. Etchant is applied on the component until areas of electrically conductive coating not protected by the main area of the etching mask and until the area of the electrically conductive coating protected by the sub-area of the etching mask has been substantially removed by the etchant. | 10-20-2011 |
