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UNIVERSITE PARIS SUD (PARIS XI)

ORSAY, FR

UNIVERSITE PARIS SUD (PARIS XI) Patent applications
Patent application numberTitlePublished
20100012949SUBSTRATE, IN PARTICULAR MADE OF SILICON CARBIDE, COATED WITH A THIN STOICHIOMETRIC FILM OF SILICON NITRIDE, FOR MAKING ELECTRONIC COMPONENTS, AND METHOD FOR OBTAINING SUCH A FILM - Substrate, in particular in silicon carbide, covered by a thin film of stoichiometric silicon nitride, for the manufacture of electronic components and method for obtaining said film.01-21-2010
20090294776Highly Oxygen-Sensitive Silicon Layer and Method for Obtaining Same - Silicon layer highly sensitive to oxygen and method for obtaining said layer.12-03-2009