UNITED MICROELETRONICS CORPORATION
UNITED MICROELETRONICS CORPORATION Patent applications | ||
Patent application number | Title | Published |
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20140335672 | PROCESS FOR MANUFACTURING SEMICONDUCTOR TRANSISTOR DEVICE - A process for manufacturing a semiconductor transistor device is provided. The process comprises steps of providing a substrate; forming a patterned hard mask on the substrate; forming a spacer on a sidewall of the patterned hard mask; forming a trench by removing a portion of the substrate not being covered by the patterned hard mask and the spacer; and filling a conductive material into the trench. | 11-13-2014 |