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ULTRA CLEAN TECHNOLOGY, INC.
| ULTRA CLEAN TECHNOLOGY, INC. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090078324 | GAS-PANEL SYSTEM - The invention involves the introduction of a gas-flow restrictor and reservoir upstream of a mass flow controller (MFC) in a gas-panel stick. The restrictor and reservoir components function to smooth out pressure spikes in the gas line, thus preventing gas-flow irregularities that can occur in an MFC or pressure-insensitive MFC. The restrictor and reservoir components can be integrated into the MFC. | 03-26-2009 |