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ULTRA CLEAN HOLDINGS, INC.

ULTRA CLEAN HOLDINGS, INC. Patent applications
Patent application numberTitlePublished
20090114295GAS-PANEL ASSEMBLY - A gas-panel manifold for use in a gas-panel assembly is disclosed. A manifold in the assembly provides a plurality of support surfaces, each designed for supporting a gas-component thereon, and internal passageways disposed within the manifold body for connecting gas components, with such carried on the manifold, for gas flow through the manifold in a generally downstream direction. The adjacent support surfaces in the manifold are in different planes, representing different heights above the support.05-07-2009