20150309069 | MICRO-ELECTROMECHANICAL DEVICE COMPRISING A MOBILE MASS THAT CAN MOVE OUT-OF-PLANE - The invention relates to a micro-electromechanical device used as a force sensor, comprising a mobile mass connected to at least one securing zone by means of springs or deformable elements, and means for detecting the movement of the mobile mass, the mobile mass having an outer frame and an inner body, the outer frame and the inner body being connected by at least two flexible portions forming integral decoupling springs on two separate sides of the outer frame. | 10-29-2015 |