| 20110048963 | METHOD OF MANUFACTURING ELECTROPOLISHING PAD - The present invention aim to provide a method of manufacturing an electropolishing pad, which is excellent in planarity, can reduce occurrence of scratches, and has a high polishing rate. The present invention relates to a method of manufacturing an electropolishing pad, including the steps of: laminating a tin sheet on and along a recessed structure surface of a resin layer to produce a laminated sheet having grooves in a tin sheet surface; and forming through holes penetrating the tin sheet and the resin layer in the laminated sheet. | 03-03-2011 |
