| TOUCH MICRO-SYSTEM TECHNOLOGY CORP. Patent applications |
| Patent application number | Title | Published |
|---|
| 20120086537 | PLANAR COIL AND METHOD OF MAKING THE SAME - A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench. | 04-12-2012 |
| 20120086086 | MEMS DEVICE AND COMPOSITE SUBSTRATE FOR AN MEMS DEVICE - An MEMS device and a composite substrate for an MEMS device are provided. The MEMS device comprises a first silicon structure layer and a second silicon structure layer fixedly connecting to the first silicon structure layer. The first silicon structure layer has a twistable rod and a first plane. The first silicon structure layer has a first crystal direction with a miller index of <100> and a second crystal direction with a miller index of <110>. The first crystal direction and the second crystal direction are both parallel to the first plane. The rod has an axis direction, which is parallel to the first plane and intersected by the second crystal direction. In this manner, the torsional stiffness of the rod can be improved. | 04-12-2012 |
| 20110310452 | BIAXIAL SCANNING MIRROR FOR IMAGE FORMING APPARATUS - A biaxial scanning mirror for an image forming apparatus is disclosed in the present invention. The mirror includes a first wafer, a second wafer, and a spacer. The first wafer includes a mirror unit, a rectangular rotating unit, a permanent magnet, and a magnetically permeable layer. The second wafer has at least two cores each surrounded by a planar coil applied with an AC current for switching magnetic polarization of the cores such that the cores are attracted to or repelled from the rotating unit alternatively, thereby driving the rotating unit to rotate. | 12-22-2011 |
| 20110310451 | BIAXIAL SCANNING MIRROR FOR IMAGE FORMING APPARATUS AND METHOD FOR OPERATING THE SAME - A biaxial scanning minor is disclosed in the present invention. The minor includes: a first wafer having several cavities forming a first row and a second row, several permanent magnets each installed in one of the cavities, a spacer and a second wafer. The second wafer includes: a minor unit, rotating around a first axis, for reflecting light beams; and a rotating unit, formed around the minor unit, for rotating the minor unit around a second axis which is perpendicular to the first axis. At least one coil substrate having a planar coil is assembled in the rotating unit. | 12-22-2011 |
| 20110309057 | LASER HEATING APPARATUS FOR METAL EUTECTIC BONDING - A laser heating apparatus for metal eutectic bonding is disclosed in the present invention. The laser heating apparatus has a table for supporting a substrate having a first metal; a holding unit, located above the table and moving with respect to the table, for holding an object having a second metal above the table; and a laser generator, installed below the table and moving with respect to the table, for providing a laser beam which passes through the table and the substrate to melt the first metal, to facilitate the first metal to adhered to the second metal, thereby bonding the substrate with the object. The apparatus provides good heat conduction and stability. Furthermore, the holding unit used is not only for positioning, but also exerting a pressure on the bonding metals. It makes eutectic bonding process easier and more efficient. | 12-22-2011 |
