| 20100199746 | Cantilever Type Sensor - A cantilever type sensor includes a cantilever, an actuator that oscillates the cantilever, and a sensor provided at the cantilever so as to detect an oscillation condition of the cantilever. Further, the cantilever type sensor includes a control unit that controls the actuator so as to cause the cantilever to be subjected to pulse excitation, and a measurement unit that measures a physical quantity related to a measurement object, based on a change in pulse response detected in the sensor. | 08-12-2010 |
