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TOKYO ELECRON LIMITED
| TOKYO ELECRON LIMITED Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100323313 | STAGE STRUCTURE AND HEAT TREATMENT APPARATUS - There is provided a stage structure which can prevent the formation of a cool spot in the central portion of a stage, thereby preventing breakage of the stage, and can enhance the in-plane uniformity of heat treatment of a processing object. | 12-23-2010 |