| 20100001445 | VIBRATION ISOLATOR - There is provided a vibration isolator capable of, (1) vibration isolation performance for ground motion disturbance: vibration isolation for floor vibration, and (2) vibration control performance for direct acting disturbance: suppression of swing due to driving reaction force caused by stage movement, significantly improving the above (2), i.e., the vibration control performance, with keeping the above (1), i.e., the vibration isolation performance, at a high level. | 01-07-2010 |
