| Toho Engineering Patent applications |
| Patent application number | Title | Published |
|---|
| 20120003903 | Method of Regenerating a Polishing Pad Using a Polishing Pad Sub Plate - A method for use of a polishing pad sub plate that is able, while maintaining the fixing strength of the polishing pad to the rotation table, to make possible the easy removal of the polishing pad from the rotation table, and in particular, by preventing injury to the polishing pad when peeling it from the rotation table is offered, makes possible the convenient, effective and practical regeneration of polishing pads using a reforming tool. | 01-05-2012 |
| 20110319000 | Polishing Pad Sub Plate - A construction of a polishing pad sub plate that is able, while maintaining the fixing strength of the polishing pad to the rotation table, to make possible the easy removal of the polishing pad from the rotation table, and in particular, by preventing injury to the polishing pad when peeling it from the rotation table is offered. | 12-29-2011 |
