| THE UNIVERSITY OF TEXAS BOARD OF REGENTS Patent applications |
| Patent application number | Title | Published |
|---|
| 20090025246 | Remote Center Compliant Flexure Device - An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes. | 01-29-2009 |
| 20080199816 | Method of Automatic Fluid Dispensing for Imprint Lithography Processes - Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing method uses fluid dispenser and a substrate stage that may generate relative lateral motions between a fluid dispenser tip a substrate. Also described herein are methods and devices for creating a planar surface on a substrate using a substantially unpatterned planar template. | 08-21-2008 |
