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The Secretary of State for Innovations Universities & Skills

The Secretary of State for Innovations Universities & Skills Patent applications
Patent application numberTitlePublished
20110047661MICROPROBE, MEASUREMENT SYSTEM AND METHOD - A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexin of the flexure.02-24-2011