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The Royal Institution for the Advancement of Learn ing/MoGill University
| The Royal Institution for the Advancement of Learn ing/MoGill University Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100279451 | DIRECT CONTACT HEAT CONTROL OF MICRO STRUCTURES - A method of providing thermal tuning of microelectromechanical structures (MEMS) that are compatible with silicon CMOS electronics is disclosed. A heater is provided integrated with the MEMS for controllably heating the MEMS to control performance characteristics thereof. | 11-04-2010 |