The Institute of Optics and Electronics, The Chinese Academy of Sciences Patent applications |
Patent application number | Title | Published |
20130027679 | FOCUS DETECTION APPARATUS FOR PROJECTION LITHOGRAPHY SYSTEM - Disclosed is a focus detection apparatus for a projection lithography system. The apparatus comprises: a laser; a focus optical unit configured to focusing the emitted laser beam; a force detection unit configured to reflect the focused laser beam at the backside; a position detection unit configured to detect variations in position of a light spot formed by the reflected laser beam, and output a strength signal indicating the strength of the interaction force between the force detection unit and the object; a differential amplifier configured to output a Z-direction differential signal based on the strength signal and a reference signal; a Z-direction feedback control unit configured to perform feedback control; and a scan signal generator configured to output a signal for controlling the movement of the stage in the XY plane. The focus detection apparatus has high precision, efficiency and process applicability. | 01-31-2013 |
20110149238 | HUMAN EYE ADAPTIVE OPTICAL VISUAL PERCEPTION TRAINING METHOD AND APPARATUS THEREOF - The present invention proposes a human eye adaptive optical visual perception training apparatus, comprising: a human eye wave aberration measurement sub-system for measuring the human eye wave aberration of a person to be tested; a human eye wave aberration correction sub-system for driving and controlling the wavefront corrector to correct the human eye wave aberration of the person to be tested based on the measured human eye wave aberration of the tested person; and a visual perception training sub-system for processing and to displaying sighting targets of different spatial frequencies and different contrasts, and presenting the sighting targets to the tested person, to conduct a human eye visual function measurement process and a visual perception training process. The apparatus according to the present invention is capable of several functions including eye aberration correction, visual function measurement, visual perception training. Finer visual stimulus is obtained by correcting human eye aberration, and then the human eye acuity limit can be measured, and the visual perception training effect and visual function of the human eye can be efficiently improved by performing visual perception training with such apparatus. | 06-23-2011 |
20110149237 | TWO-EYE ADAPTIVE OPTICAL VISUAL PERCEPTION TRAINING METHOD AND APPARATUS THEREOF - The present invention proposes a two-eye adaptive optical visual perception training apparatus, comprising: left and right eye wave aberration measurement sub-systems for measuring eye wave aberrations of the left and right eyes of a person to be tested; left and right eye wave aberration correction sub-systems for driving and controlling the wavefront corrector to correct the wave aberrations of the left and right eyes of the person to be tested based on the measured wave aberrations of the left and right eyes of the tested person; and a two-eye visual perception training sub-system for processing and displaying sighting targets of different spatial frequencies and different contrasts and presenting the sighting targets to the tested person, to conduct a two-eye visual function measurement process and a visual perception training process. By means of the apparatus according to the present invention, finer visual stimulus is obtained by correcting aberrations of two eyes, and then eye acuity limit of the two eyes can be measured, and the visual perception training effect and visual function of the two eyes can be efficiently improved by performing visual perception training on the two eyes with such apparatus. | 06-23-2011 |