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The Govt. of the United States of America, as represented by the Secretary of the Navy
| The Govt. of the United States of America, as represented by the Secretary of the Navy Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090092934 | GRAY-TONE LITHOGRAPHY USING OPTICAL DIFFUSERS - A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist. | 04-09-2009 |