The Govt. of the United States of America, as represented by the Secretary of the Navy
The Govt. of the United States of America, as represented by the Secretary of the Navy Patent applications | ||
Patent application number | Title | Published |
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20090092934 | GRAY-TONE LITHOGRAPHY USING OPTICAL DIFFUSERS - A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist. | 04-09-2009 |