| THE BOC GROUP PLC Patent applications |
| Patent application number | Title | Published |
|---|
| 20110197759 | METHOD OF TREATING A GAS STREAM - A method is described for treating gas exhaust from a polysilicon etch process, which uses a plasma abatement device to treat the gas. The device comprises a stainless steel gas chamber having a gas inlet for receiving the gas and a gas outlet. As the gas may contain a halocompound and water vapour, the chamber is heated to a temperature that inhibits adsorption of water on the surface within the chamber, thereby inhibiting corrosion of the gas chamber. The gas is then conveyed to the gas chamber for treatment, and the temperature of the chamber is maintained above said temperature during treatment of the gas. | 08-18-2011 |
| 20100047080 | METHOD OF OPERATING A PUMPING SYSTEM - A pumping system for evacuating an enclosure comprises a pumping mechanism ( | 02-25-2010 |
| 20100043837 | METHOD OF CONTROLLING CONTAMINATION OF A SURFACE - A method is described of controlling contamination of a surface exposed to a carbonaceous material and ionising radiation, such as EUV radiation, DUV radiation or electrons. The method comprises cyclically supplying to the surface a first gas comprising an oxidising species, for example NO, for reacting with carbonaceous deposits formed on the surface from the carbonaceous material, followed by a second gas comprising a reducing species, for example CO, for reacting with oxidising species on the surface. | 02-25-2010 |
| 20100006227 | Microwave Plasma Reactor - A microwave plasma reactor ( | 01-14-2010 |
| 20090178293 | FREEZE DRYER SHELF - A freeze dryer shelf with opposed, parallel first and second plates is disclosed. The plates have at least one flow channel located therebetween for conveying a diathermic fluid between the plates. One of the plates has a surface treated to inhibit the sticking to the shelf of a rubber stopper pressed against that surface during the application of pressure to the stopper to push the stopper into a container. | 07-16-2009 |
| 20090071906 | REGENERATION OF WATER TREATMENT SUBSTRATES - In a method and apparatus for operating and regenerating ion exchange material a wash fluid or elution solution for rinsing the ion exchange material ( | 03-19-2009 |
| 20090056464 | PIRANI PRESSURE GAUGE - A Pirani pressure gauge comprises a heated, coiled sensing element formed from an alloy comprising platinum and iridium, for example, 90/10 Pt/Ir. This enables the gauge to be deployed in a corrosive environment and reliably measure pressures as low as 10 | 03-05-2009 |
