Texas Micropower, Inc. Patent applications |
Patent application number | Title | Published |
20140087509 | MEMS-BASED CANTILEVER ENERGY HARVESTER - The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process. | 03-27-2014 |
20130140950 | MEMS-BASED CANTILEVER ENERGY HARVESTER - The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process. | 06-06-2013 |