TESCAN, a.s. Patent applications |
Patent application number | Title | Published |
20130187055 | THE SCINTILLATION DETECTION UNIT FOR THE DETECTION OF BACK-SCATTERED ELECTRONS FOR ELECTRON OR ION MICROSCOPES - A scintillation detection unit for the detection of back-scattered electrons for electron and ion microscopes having a column with longitudinal axis, in which the scintillation detection unit consists of body and at least one system for processing the light signal comprising a photodetector or a photodetector preceded with additional optical members where the body is at least partly made of scintillation material and is at least partly situated in a column of an electron or ion microscope and is made up of at least one hollow part. The height of the body of scintillation detection unit measured in the direction of longitudinal axis is greater than one-and-a-half times the greatest width measured in the direction perpendicular to the longitudinal axis of the hollow part with the greatest width. | 07-25-2013 |
20130054153 | METHOD AND APPARATUS FOR MATERIAL ANALYSIS BY A FOCUSED ELECTRON BEAM USING CHARACTERISTIC X-RAYS AND BACK-SCATTERED ELECTRONS - A material analysis method by a focused electron beam and an equipment for performing such an analysis where an electron map B is created describing the intensity of emitted back-scattered electrons at various points on a sample, and a spectral map S is created describing the intensity of emitted X-rays at points on the sample depending on the radiation energy. For selected chemical elements, X-ray maps M | 02-28-2013 |