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TERA PROBER, INC.

YOKOHAMA-SHI, JP

TERA PROBER, INC. Patent applications
Patent application numberTitlePublished
20100013509PROBER AND SEMICONDUCTOR WAFER TESTING METHOD USING THE SAME - A prober for a semiconductor wafer test includes a stage, a probe card, and an adjuster The stage has a first region and a second region other than the first region The first region is covered by a wafer on which a plurality of electrode pads is provided. The probe card includes a plurality of probe pins to be in contact with the plurality of electrode pads. The adjuster is included in the stage and adjusts a temperature of the wafer and the second region.01-21-2010