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TELECOMMUNICATIONS RESEARCH INSTITUTE

TELECOMMUNICATIONS RESEARCH INSTITUTE Patent applications
Patent application numberTitlePublished
20090123649METHOD OF MANUFACTURING SILICON NANOTUBES USING DOUGHNUT-SHAPED CATALYTIC METAL LAYER - Provided is a method of manufacturing silicon nanotubes including forming non-catalytic metal islands on a substrate; forming catalyst metal doughnuts to surround the non-catalytic metal islands; and growing silicon nanotubes on the catalyst metal doughnuts. The silicon nanotubes are efficiently grown using the catalyst metal doughnuts.05-14-2009